• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.387-387
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• 2011

탄소 나노튜브(Carbon nanotubes, CNTs)는 육각형 모양의 구조로서 오직 탄소만으로 이루어진 소재이다. CNT는 열전도율이 다이아몬드보다 약 2배 우수하고, 전기 전도는 구리에 비해 1,000배 높으며, 강도는 강철보다 100배나 뛰어나다. CNT의 이러한 특성을 이용한 트랜지스터, 태양전지, 가스 검출을 위한 고감도 센서, 나노 섬유, 고분자-탄소나노튜브 고기능 복합체 등 많은 분야에서 연구가 활발히 진행되고 있다. 또한 수직으로 성장된 탄소 나노튜브는 일반적인 재료에서는 보기 드물게 힘들게 직경이 나노 크기인 반면 길이는 수 mm까지 합성 되기 때문에 앞서 언급한 분야로의 활용이 더욱 유리하며, 그 중에서도 나노 섬유, 나노 복합체로서의 활용에 극히 유용하다. 이러한 이유로 수직 배열된 CNT 합성에 많은 연구가 집중 되고 있다. 여러 합성 방법 중 성장 변수를 비교적 용이하게 조절 가능한 열 화학 기상 증착법(Thermal chemical vapor deposition, TCVD)을 이용하여 수직 배열된 수 mm의 CNT를 합성한 연구 결과들이 보고된 바 있다. 그러나 앞선 연구결과들은 CNT의 성장속도가 느릴 뿐만 아니라 합성 시간이 길어질수록 성장 속도가 감소하는 경향을 보였다. 반면, 마이크로웨이브 플라즈마 화학 기상 증착법(Microwave plasma CVD, MPCVD)은 기존의 다른 TCVD에 비해 낮은 온도에서 CNT를 합성할 수 있는 장점을 가지며, 고출력(~600 W 이상)의 플라즈마를 사용하기 때문에 성장률이 높고 고밀도의 CNT 합성이 가능하다. 본 연구에서는 철을 촉매금속으로 사용하고 MPCVD을 이용하여 얇은 다중벽 CNT를 합성하였다. 철은 직류 마그네트론 스퍼터(D.C magnetron sputter)를 사용하여 증착하였다. 합성시 가스는 탄소 공급원인 메탄($CH_4$)과 함께 플라즈마 공급원인 수소($H_2$)를 사용하였다. 또한 산소($O_2$)의 주입 여부에 따른 CNT의 성장 속도와 성장 길이를 비교하였다. 산소를 주입하였을 때, CNT의 성장 속도와 길이 모두 크게 향상됨을 확인 할 수 있었다. 이는 촉매금속 표면의 비정질 탄소의 흡착으로 인해 활성화된 촉매금속의 반응시간을 증가시키기 때문이다. 성장된 CNT는 주사전자 현미경(Scanning Electron Microscopy, SEM)과 라만 분광법(Raman spectroscopy)을 통해 표면형상과 결정성을 분석하였다.

• Korean Chemical Engineering Research
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• v.57 no.1
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• pp.133-141
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• 2019

High specific surface area zirconia with acid-basic property was synthesized by precipitation using reflux method or hydrothermal synthesis method using ammonium hydroxide solution as precipitant in the range of pH of Zr solution from 2 to 10. The prepared zirconia was characterized by the nitrogen adsorption, X-ray diffraction (XRD), isopropanol temperature programmed desorption (IPA-TPD), scanning electron microscopy and X-ray photoelectron spectroscopy, and the catalytic activity in the IPA decomposition reaction was correlated with the acid-basic properties. When using reflux method, high pH of Zr solution was required to obtain high fraction of tetragonal zirconia, and pure tetragonal zirconia was possible at pH 9 or higher. High pH was required to obtain high specific surface area zirconia, and the hydrous zirconia synthesized at pH 10 had high specific surface area zirconia of $260m^2g^{-1}$ even after calcination at $600^{\circ}C$. However, hydrothermal synthesis with high pressure under the same conditions resulted in very low specific surface area below $40m^2g^{-1}$ and monoclinic phase zirconia was synthesized. High pH of the solution was required to obtain high specific surface area tetragonal phase zirconia. In hydrothermal synthesis requiring high pressure, monoclinic zirconia was produced irrespective of the pH of the solution, and the specific surface area was relatively low. Zirconia with high specific surface area and tetragonal phase was predominantly acidic compared to basicity and only propylene, which was observed as selective dehydration reaction in IPA decomposition reaction, was produced.

• Applied Chemistry for Engineering
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• v.26 no.1
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• pp.40-46
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• 2015

Microcapsules containing the suspension of conducting materials such as carbon nanotube (CNT) or polyaniline (PANI) were prepared by in-situ polymerization of melamine and formaldehyde. Stable microcapsules were prepared and the mean diameter of the observed microcapsules was in the range of $10-20{\mu}m$. The surface morphology and chemical structure of microcapsules were investigated using optical microscope (OM), scanning electron microscope (SEM), and Fourier transform infrared spectroscopy (FT-IR). The thermal properties of samples were investigated by thermogravimetric analysis (TGA). The conductivity of ruptured microcapsule containing the suspension of CNTs or PANIs in tetrachloroethylene and Isopar-G was measured. As the amount of CNTs and PANIs in the core of microcapsules increased, the measured current increased. Conductivity measurement results suggest that poly (melamine-formaldehyde) based core-shell microcapsules could be applied to self-healing electronic materials systems, where CNTs or PANIs bridge a broken circuit upon release.

• Journal of the Korean Electrochemical Society
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• v.23 no.3
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• pp.66-72
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• 2020

In this study, the development of biosensors capable of bi-enzyme reactions by including Horseradish peroxidase and glucose oxidase was carried out for detection of glucose. The sensors were manufactured using electro deposition method to reduce production time, and screen printed electrodes (SPE) were used to produce economical sensors. To check the bienzyme effect, the sensor was compared and analyzed with single enzyme biosensor. The characteristics of the sensor were evaluated using scanning electron microscopy(SEM), cyclic voltammetry(CV), electrochemical impedance spectroscopy(EIS), chronoamperometry(CA), and flow injection analysis(FIA). Analysis results from SEM, CV and EIS confirmed that the enzymes are well fixed to the electrode surface. In addition, it was confirmed that bi-enzyme biosensors manufactured from the CA method improved signal performance by 200% compared to single enzyme biosensors. From this results, we were able to explain that HRP and GOD react catalyzed to each other. And the results of FIA showed that the intensity of each current signal was constant when the same concentration of glucose was injected four times. In addition, by analyzing the intensity of current signals for glucose concentrations, the biosensors manufactured in this study showed excellent trends in signal sensitivity, reproducibility and stability.

• Applied Chemistry for Engineering
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• v.9 no.5
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• pp.719-725
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• 1998

Tridentate Schiff base ligands were prepared by the reactions of salicylaldehyde and 2-hydroxy-1-naphthaldehyde with 2-aminophenol and 2-amino-p-cresol. And then Cu(II) complexes of those ligands were synthesized. The structures and properties of ligands and their complexes were studied by elemental analysis, $^1H$-NMR, IR, UV-visible spectra, and thermogravimetric analysis. The mole ratio of Schiff base to the metal of complexes was found to be 1:1. Cu(II) complexes were contemplated to be four-coordinated square planar configuration containing one water molecule. The redox process of ligands and complexes in DMSO solution containing 0.1 M TBAP as a supporting electrolyte was investigated by cyclic voltammetry and differential pulse voltammetry with glassy carbon electrode. The redox process of the tridentate Schiff base ligands was totally irreversible. The redox process of Cu(II) complexes was quasi-reversible and diffusion-controlled as one electron by one step process Cu(II)/Cu(I). The reduction potentials of the Cu(II) complexes shifted in the positive direction in the order of [Cu(II)(HNIPC)($H_2O$)]>[Cu(II)(HNIP)($H_2O$)]>[Cu(II)(SIP)($H_2O$)]>[Cu(II)(SIPC)($H_2O$)].

• Analytical Science and Technology
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• v.11 no.5
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• pp.332-340
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• 1998

Tridentate Schiff base ligands, $SIPH_2$, $SIPCH_2$, $HNIPH_2$, and $HNIPCH_2$ were prepared by the reactions of salicylaldehyde and 2-hydroxy-1-naphthaldehyde with 2-aminophenol and 2-amino-p-cresol. Ni(II) complexes of those ligands were synthesized. The structures and properties of ligands and their complexes were studied by elemental analysis, $^1H$-NMR, IR, UV-visible spectra, and thermogravimetric analysis. The mole ratio of Schiff base to the metal of complexes was found to be 1:1. Ni(II) complexes were contemplated to be hexa-coordinated octahedral configuration containing three water molecules. The redox process of ligands and complexes in DMSO solution containing 0.1 M TBAP as supporting electrolyte was investigated by cyclic voltammetry and differential pulse voltammetry with glassy carbon electrode. The redox process of the tridentate Schiff base ligands was totally irreversible. The redox process of Ni(II) complexes were quasi-reversible and diffusion-controlled as one electron by one step process Ni(II)/Ni(I). The reduction potentials of the Ni(II) complexes shifted in the positive direction in the order [$Ni(II)(HNIP)(H_2O)_3$]>[$Ni(II)(SIP)(H_2O)_3$]>[$Ni(II)(SIPC)(H_2O)_3$]>[$Ni(II)(HNIPC)(H_2O)_3$] and their dependence on ligands were not so high. Consequently the [$Ni(II)(HNIPC)(H_2O)_3$] complex among the synthesized Ni(II) complexes was found to be most stable in the DMSO solution.

• Proceedings of the Materials Research Society of Korea Conference
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• 2012.05a
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• pp.83-83
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• 2012

금속 실리사이드는 낮은 비저항, 실리콘과의 좋은 호환성 등으로 배선 contact 물질로 널리 연구되고 있다. 특히 $CoSi_2$는 선폭의 축소와 관계없이 일정하고 낮은 비저항과 열적 안정성이 우수한 특성 등으로 배선 contact 물질로 활발히 연구되고 있다. 금속 실리사이드를 실리콘 평면기판에 형성시키는 방법으로는 열처리를 통한 금속박막과 실리콘 기판 사이에 확산작용을 이용한 SALICIDE (self-algined silicide) 기술이 대표적이며 CoSi2도 이와 같은 방법으로 형성할 수 있다. Co 박막을 증착하는 방법에는 물리적 기상증착법 (PVD)과 유기금속 화학 증착법 등이 보고되어있지만 최근 급격하게 진행 중인 소자구조의 나노화 및 고 단차화에 따라 기존의 증착 기술은 낮은 단차 피복성으로 인하여 한계에 부딪힐 것으로 예상되고 있다. ALD(atomic layer deposition)는 뛰어난 단차 피복성을 가지고 원자단위 두께조절이 용이하여 나노 영역에서의 증착 방법으로 지대한 관심을 받고 있다. 앞선 연구에서 본 연구진은 CoCp2 전구체과 $NH_3$ plasma를 사용하여 Plasma enhanced ALD (PE-ALD)를 이용한 고 순도 저 저항 Co 박막 증착 공정을 개발 하고 이를 SALICIDE 공정에 적용하여 $CoSi_2$ 형성 연구를 보고한 바 있다. 하지만 이 연구에서 PE-ALD Co 박막은 플라즈마 고유의 성질로 인하여 단차 피복성의 한계를 보였다. 이번 연구에서 본 연구진은 Co(AMD)2 전구체와 $NH_3$, $H_2$, $NH_3$ plasma를 반응 기체로 사용하여 Thermal ALD(Th-ALD) Co 및 PE-ALD Co 박막을 증착 하였다. 고 단차 Co 박막의 증착을 위하여 Th-ALD 공정에 초점을 맞추어 Co 박막의 특성을 분석하였으며, Th-ALD 및 PE-ALD 공정으로 증착된 Co 박막의 단차를 비교하였다. 연구 결과 Th-ALD Co 박막은 95% 이상의 높은 단차 피복성을 가져 PE-ALD Co 박막의 단차 피복성에 비해 크게 향상되었음을 확인하였다. 추가적으로, Th-ALD Co 박막에 고 단차 박막의 증착이 가능한 Th-ALD Ru을 capping layer로 이용하여 CoSi2 형성을 확인하였고, 기존의 PVD Ti capping layer와 비교하였다. 이번 연구에서 Co 박막 및 $CoSi_2$ 의 특성 분석을 위하여 X선 반사율 분석법 (XRR), X선 광전자 분광법 (XPS), X선 회절 분석법 (XRD), 주사 전자 현미경 (SEM), 주사 투과 전자 현미경 (STEM) 등을 사용하였다.

• Journal of the Korean Electrochemical Society
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• v.18 no.2
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• pp.68-74
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• 2015

To compare the microstructure and electrochemical properties between two binary alloys (Cr-Si, Ni-Si), two composition of binary alloys with the same capacity were selected using phase-diagram and prepared by matrix-stabilization method to suppress the volume expansion of Si by inactive-matrix. Master alloys were made by Arc-melting followed by fine structured ribbon sample preparation by Rapid Solidification Process (RSP, Melt-spinning method) under the same conditions. Also powder samples were produced by wet grinding for X-Ray Diffraction (XRD) and electrochemical measurements. As predicted from the phase diagram, only active-Si and inactive-matrix ($CrSi_2$, $NiSi_2$) were detected. The results of Scanning Electron Microscope (SEM) and Transmission Electron Microscopy - Energy Dispersive X-ray Spectroscopy (TEM-EDS) show that Cr-Si alloy has finer microstructure than Ni-Si alloy, which was also predictable through phase diagram. The electrochemical properties related to microstructure were evaluated by coin type full- and half-cells. Separately, self-designed test-cells were used to measure the volume expansion of Si during reaction. Volume expansion of Cr-Si alloy electrode with finer microstructure was suppressed significantly and improved in cycle capability, in comparison Ni-Si alloy with coarse microstructure. From these, we could infer the correlation of microstructure, volume expansion and electrochemical degradation and these properties might be predicted by phase diagram.

• Applied Chemistry for Engineering
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• v.18 no.4
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• pp.320-325
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• 2007

Nickel powders were prepared from an aqueous nickel acetate solution and hydrazine hydrate using diethanolamine as the nonaqueous organic solvent in the conventional and microwave synthetic method. It was investigated that microwave non-thermal effect and synthetic condition affect the preparation of nickel powders by means of X-ray diffractometry, scanning electron microscopy, thermal gravymetry analysis, and X-ray photoelectron spectroscopy analysis. Compared with the conventional synthetic method, less of aggregation, smaller particle size, and more uniform distribution of particle size were obtained in the microwave synthetic method due to the non-thermal effect of microwaves.

• Journal of the Korean Chemical Society
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• v.33 no.5
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• pp.484-495
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• 1989

Reactions of $(Et_4N)_2[MoOCl_5]$ with multidentate ligands containing nitrogen or/and oxygen donor atom (EDTA, DTPA, IDA, CyDTA, OX) produce a series of binuclear molybdate (V) complexes. The prepared Mo (V) complexes has been identified by Elemental Analysis, Infrared Spectra, Proton Magnetic Resonance Spectra, and Electronic Spectra. The electrochemical reduction mechanism has been studied by Cyclic voltammetry, Controlled Potential Coulometry, and Spectrophotometry in pH 3.571-10.375 acetate, borate, phosphate/sodium hydroxide, phosphate, ammonium/ammonia buffers. The cyclic voltammogram of the Mo-EDTA, DTPA, IDA, CyDTA complexes at pH < ca. 6.00 have shown two reduction waves. The first reduction wave shows two electron process and the second reduction wave shows two electron process. The cyclic voltammogram of the Mo-EDTA, DTPA, IDA, CyDTA complexes at pH < ca. 8.00 has shown one reduction wave. This reduction wave show four electron process. The cyclic voltammogram of the Mo-OX complex at pH < ca. 7.2 has shown one reduction wave. This reduction wave show four electron process.