• 한국전기전자재료학회:학술대회논문집
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• 한국전기전자재료학회 2002년도 하계학술대회 논문집 Vol.3 No.2
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• pp.878-881
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• 2002

Energy distribution function for electrons in $SF_6+Ar$ mixtures gas used by MCS-BEq algorithm has been analysed over the E/N range 30 ~ 300[Td] by a two term Boltzmann equation and by a Monte Carlo Simulation using a set of electron cross sections determined by other authors, experimentally the electron swarm parameters for 0.2[%] and 0.5[%] $SF_6+Ar$ mixtures were measured by time-of-flight(TOF) method, The results show that the deduced electron drift velocities, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients and mean energy agree reasonably well with theoretical for a rang of E/N values. The results obtained from Boltzmann equation method and Monte Carlo simulation have been compared with present and previously obtained data and respective set of electron collision cross sections of the molecules.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2000년도 학술대회 논문집 전문대학교육위원
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• pp.17-21
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• 2000

A Study on the electron energy distribution function in $SF_6+Ar$ mixtures gas used by MCS-BE algorithm, the electron swam parameters in the 0.5% and 0.2% $SF_6+Ar$ mixtures are measured by time of flight method over the E/N(Td) range from 30 to 300(Td). A two-term approximation of the Boltzmann equation analysis and Monte Carlo simulation have been also used to study electron transport coefficients. The electron energy distribution function has been analysed in $SF_6$ gas and $SF_6+Ar$ mixtures at E/N : 200(Td) for a case of the equilibrium region in the mean electron energy. The measured results and the calculated results have been compared each other.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1996년도 하계학술대회 논문집 C
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• pp.1844-1847
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• 1996

In the paper, we have obtained electron energy distribution function (EEDF) in plasma by using two differentiators. In addition, we have investigated the comparision of the EEDFs by sawtooth and triangle waveform voltages. It is found that as pressure is decreased, electron density is decreased, and plasma potential is increased. And as the position of probe moves the outer of plasma, plasma potential is decreased, and electron temperature is decreased.

• 전기학회논문지P
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• 제63권1호
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• pp.19-23
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• 2014

This paper describes the electron transport characteristics in $SF_6$-He gas calculated E/N values 0.1~700[Td] by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters obtained by TOF method. This study gained the values of the electron swarm parameters such as the electron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients for $SF_6$-He gas at a range of E/N. A set of electron collision cross section has been assembled and used in Monte Carlo simulation to predict values of swarm parameters. The result of Boltzmann equation and Monte Carlo Simulation has been compared with experimental data by Ohmori, Lucas and Carter. The swarm parameter from the swarm study are expected to sever as a critical test of current theories of low energy scattering by atoms and molecules.

• 한국조명전기설비학회지:조명전기설비
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• 제13권2호
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• pp.227-227
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• 1999

The electron energy distributions function were analysed in sulphur hexaflouride at E/N : 500~800(Td) for a case of non-equilibrium region in the mean electron energy. This paper describes the electron transport characteristics in $SF_6$ gas calculated for range of E/N values from 150~800(Td) by the Monte Carlo simulation and Boltzmann equation method using a set of electron collision cross sections determined by the authors and the values of electron swarm parameters. The results gained that the value of ane1ctron swarm parameter such as the e1ectron drift velocity, the electron ionization or attachment coefficients, longitudinal and transverse diffusion coefficients agree with the experimental and theoretical for a range of E/N. The properties of electron avalanches in an electron energy non-equilibrium region.

• 대한전기학회논문지:전기물성ㆍ응용부문C
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• 제48권5호
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• pp.391-395
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• 1999

In this paper, we have obtained the Electron Energy Distribution Function(EEDF) in plasma by using two differentiators and investigated the EEDFs by sawtooth and triangle waveform voltages with the working pressures and the positions of single probe. It is found that as the working pressure is decreased, the EEDFs approach to theMaxwellian distribution independent of the waveforms of probe voltage. On the otherhand, as the position of probe is moved from the center of the plasma to its edge, the EEDF of sawtooth waveform probe voltage approaches to the Maxwellian distribution, but the EEDF of triangle waveform probe voltage deviates from the Maxwellian distribution.

• 대한전기학회:학술대회논문집
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• 대한전기학회 2002년도 학술대회 논문집 전문대학교육위원
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• pp.102-105
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• 2002

In this paper, the electron transport characteristics in $CF_4$ has been analysed over the E/N range 1${\sim}$300 [Td] by a two-term approximation Boltzmann equation method and by a Monte Carlo simulation. The motion has been calculated to give swarm parameters for the electron drift velocity, longitudinal diffusion coefficient, the ratio of the diffusion coefficient to the mobility, electron ionization and attachment coefficients, effective ionization coefficient, mean energy, collision frequency and the electron energy distribution function. The swarm parameter from the swarm study are expected to serve as a critical test of current theories of low energy electron scattering by atoms and molecules, in particular, as well as crucial information for quantitative simulations of weakly ionized plasmas.

• 대한전기학회:학술대회논문집
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• 대한전기학회 1999년도 하계학술대회 논문집 E
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• pp.2341-2344
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• 1999

In $SiH_4$ + Ar mixture gas contains 0.5% and 5% monosilane, this paper calculated electron swarm parameters in E/N has ratio 1$\sim$300(Td) and P : I (Torr) by MCS and Beq method. Electron swarm parameters showed a irregularity change in Ar mixed a little monosilane. It tends that the electron drift velocity is inversely proportional to E/N. It also represented characteristics that the transverse diffusion coefficient depends on E/N.

• 한국전기전자재료학회논문지
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• 제11권1호
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• pp.67-73
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• 1998

In this paper, the electron swarm parameters in the 0.5% and 0.2% SF\ulcorner+Ar mixtures are measured by time of flight method over the E/N(Td) range from 30 to 300(Td). The measurements have been carried out by the double shutter drift tube with variable drift distance from the cathod. A two-term approximation of the boltzmann equation analysis and Monte Carlo simulation have been also used to study electron transport coefficients. We have calculated W, $ND_L,\;ND_T,\;\alpha,\;\eta,\;\alpha-\eta$, and the limiting breakdown electric field to gas mixtures ratio in pure $SF_6$+Ar mixtures. The electron energy distribution function has been analysed in $SF_6$+Ar mixtures at E/N : 200(Td) for a case of the equilibrium region in the mean electron energy. The measured results and the calculated results have been compared each other.

• 한국의학물리학회지:의학물리
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• 제10권1호
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• pp.55-62
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• 1999

방사선치료에 이용되는 X-선의 특성을 고찰하기 위하여, 몬테칼로 방법을 이용하여 텅스텐 표적에 입사한 6, 10, 15 MeV 의 전자선에 의해 발생되는 X-선의 에너지분포와 평균에너지를 계산하였다. 빔의 반경의 함수로서 계산된 광자의 평균에너지는 6, 10, 15 MV에 대하여 각각, 1.4-1.6, 2.1-2.5, 2.8-3.3 MeV 범위로서 반경에 크게 의존하지 않고 거의 일정하였다. 표적과의 수직거리 100 cm에서 구해진 6, 10, 15 MV X-선의 에너지분포를 이용하여, 몬테칼로 계산으로 깊이선량율을 계산하였다. 이 중 10 MV에 대한 것을 측정값과 비교하였다. 계산된 10 MV X-선의 깊이선량율은 표면영역을 제외하고 깊이의 증가에 따라 측정값보다 낮게 나타났다. 그 이유는 실제 X-선의 에너지분포에는 편평화여과기에 의한 빔경화효과가 포함되어 있는 반면, 본 연구에서 수행한 몬테칼로 계산결과에는 이 효과가 포함되어 있지 않기 때문으로 생각된다.