• Korean Journal of Optics and Photonics
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• v.16 no.5
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• pp.428-432
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• 2005

Microlens precisely fabricated by MEMS process, is a key component of the Microcolumn, Since, miniaturization can reduces aberrations, microcolumn is expected to have better performance than conventional columns. Depending on the fabrication techniques, the sectional view of micro lens has different shape. In the paper, the effect of the sectional shape of extractor lens and limiting aperture on the focusing property of microcolumns have been studied.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2004.07b
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• pp.1203-1206
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• 2004

마이크로 컬럼은 차세대 리소그라피 기술의 하나로 마이크로 컬럼의 기능이 기존의 전자빔 컬럼을 능가하여 주목을 받는다. 초소형 전자빔 컬럼은 기존의 전자빔 컬럼과 비교하여 수차, 렌즈의 크기 및 원형에 성능이 보다 민감하게 반응하므로 정확한 정렬과 가공 기술은 초소형 전자빔 마이크로 컬럼의 성능에 매우 중요하다. 그러나, 기준치 piezoelectric transducer (PZT)나 scanning tunneling microscopy (STM)을 이용한 정렬 기술은 매우 복잡하고 어려운 단점이 있다. 본 연구에시는 레이저 회절 패턴방식과 레이저 정밀 가공으로 실리콘 렌즈와 파이렉스 spacer를 정확하게 교대로 조립하였으며, 이 방법으로 완성된 마이크로 컬럼의 STEM동작을 조사하였다.

• Journal of the Korea Academia-Industrial cooperation Society
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• v.9 no.1
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• pp.23-28
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• 2008

Due to the modem MEMS technologies, the electron lenses that are used in the microcolumn can have much smaller optical aberrations compared with conventional electron lenses for the bulky electron columns. Since the electron lens system have great effect on the performance of the microcolumn, it is important to study the dependence of image quality on the configuration of the electronic imaging system, among which the source-lens part is most sensitive. In this work, we investigated the electron beam characteristics according to the shapes of extractor and limiting aperture that are elements of the source-lens part. By analyzing the data obtained, we proposed the optimum configuration of the electron lens system.

• Journal of Korean Ophthalmic Optics Society
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• v.17 no.2
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• pp.135-141
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• 2012

Purpose: Polymerization of HEMA(2-hydroxyethyl methacrylate) which can be used in the soft contact lens has been performed by using electron beam(EB) irradiation, and examined the best condition for the polymerization. Comparing the physical properties of the contact lenses to the one fabricated by thermal polymerization method, we check the use possibility of the EB irradiation to the fabrication of the soft contact lens. Methods: We investigated the degree of polymerization of the HEMA according to the composition of the monomer, the additive ratio and the dose of electron beam (0~120 kGy). The degree of polymerization was measured depending on the EB dose to research the best synthetic condition under the EB irradiation. The physical properties of the contact lens such as water content(%), oxygen transmissibility(Dk/t) and optical transmittance were analysed by using the FT-IR results with comparing the two different polymerization method (thermal and electron beam polymerization) with same additive ratio. Results: When the dose of electron beam was above 100 kGy, the degree of polymerization of HEMA was above 99% with regardless using cross-linker and initiator. The water content of the lens fabricated by EB method showed 10% higher than the one by the thermal method which was 40%. The lens fabricated by EB method also showed higher oxygen transmissibility(Dk/t) as same with the water content, and showed twice higher value in the lens fabricated by pure HEMA. According to the FT-IR results, hydrophilic property of the lens fabricated by EB method was increased due to increasing the intermolecular hydrogen bonding. It showed above 90% optical transmittance in the visible range of wavelength on the contact lenses fabricated by the both of two different polymerization method. Conclusions: The polymerization of HEMA without cross-linker and initiator was successful above 100 kGy of EB irradiation. Moreover the lens fabricated from the polymer synthesized by pure HEMA with 100 kGy of EB showed the highest water content and oxygen transmissibility. Therefore EB irradiation is another possible method to synthesize the polymer which can be used for the soft contact lens.

• Korean Journal of Optics and Photonics
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• v.19 no.5
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• pp.365-369
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• 2008

The optimal condition for focusing an electron beam was investigated employing an electrostatic deflector in a low voltage micro-column. At fixed voltage of the electron emission tip, the focusing electron beam with source lens showed a larger scan field size and poorer visibility than those with an Einzel lens. Theoretical 3-D simulation indicated that a focusing electron beam with a source lens should have a larger spot size and deflection than those of a focusing Einzel lens.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.35D no.9
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• pp.42-47
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• 1998

We have fabricated electron-optical lens for micro E-beam system that can overcome the limitation of current E-beam lithography. Our electron-optical lens consists of multiple silicon electrodes which were fabricated by micromachining technology and assembled by anodic bonding. The assembled system was installed in UHV chamber to observe the emission characteristics of focused electrons by the electro-optical lens. We used STM(Scanning Tunneling Microscope) tip for electron source. By performing lithography with the focused electrons with PMMA(poly-methylmethacrylate) as E-beam resist. We could draw 0.13${\mu}{\textrm}{m}$ nano-scale lines.

• Journal of the Korean Society for Precision Engineering
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• v.25 no.3
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• pp.15-22
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• 2008

• Journal of the Institute of Electronics and Information Engineers
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• v.53 no.5
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• pp.37-46
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• 2016

In this paper, we propose the beam-steering system using Rotman lens antenna operating at 2.442GHz which is to replace an expensive phase shifter. The overall system consists of the transmission antennas, Rotman lens and switch box. Setting the initial design conditions, it was designed and fabricated satisfying the requirements. From the result tested in the anechoic chamber, it was found that the beam can be steered using Rotman lens in the anechoic chamber. We also visually checked the beam-steering by turning on the LED of the rectenna showing the real-time beam receiving.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.39 no.1
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• pp.1-9
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• 2015

This paper presents a design method for optimizing the focused beam characteristics, which are mainly determined by the condenser lenses in a scanning electron microscopy (SEM) design. Sharply reducing the probe diameter of electron beams by focusing the condenser lens (i.e., the rate of condensation) is important because a small probe diameter results in high-performance demagnification. This study explored design parameters that contribute to increasing the SEM resolution efficiently using lens analysis and the ray tracing method. A sensitivity analysis was conducted based on those results to compare the effects of these parameters on beam focusing. The results of this analysis on the design parameters for the beam characteristics can be employed as basic key information for designing a column in SEM.

• Transactions of the Korean Society of Mechanical Engineers A
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• v.34 no.11
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• pp.1637-1642
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• 2010

In this paper, we present the fabrication of a high-quality diffractive-lens mold having submicron patterns, which is suitable for an ultra-slim optical system. In order to fabricate high-quality diffractive lens with a variety of submicron patterns, the multi-alignment method was used; high-resolution electron-beam lithography and FAB plasma etching were carried out to obtain the patterns. The most important key technology in the multi-alignment method is to reduce alignment error, lithography error, and etching error. In this paper, these major fabrication errors were minimized, and a high-quality diffractive lens with a diameter of $267\;{\mu}m$ (NA = 0.25), minimum pattern width of 226 nm, and thickness of 819 nm was successfully fabricated.