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Study on Electron Optic Analysis for Electron-beam Processes  

Lee, Eung-Ki (공주대학교 기계자동차공학부 기계공학)
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Keywords
E-beam lithography; Electron optics; Magnetic lens; Magnetic field; pole;
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1 Legge, G. J. F., O'Brien, P. M., Sealock, R. M., Allan, G. L., Bench, G., Moloney, G., Jamieson, D. N. and Mazzolini, A. P., "The design of a versatile scanning proton microprobe of high resolution and efficiency," Nuclear Instruments and Methods in Physics Research B, Vol. 30, Issue 3, pp. 252-259, 1988   DOI   ScienceOn
2 Rebrow, V. A., Ponomarev, A. G., Palchik, V. K. and Melnik, N. G., "The new design of magnetic quadrupole lens doublet manufactured from a single piece," Nuclear Instruments and Methods in Physics Research B, Vol. 260, Issue 1, pp. 34-38, 2007   DOI   ScienceOn
3 Mottershead, T., Barlow, D., Blind, B., Hogan, G., Jason, A., Merrill, F., Morley, K., Morris, C., Saunders, A. and Valdiviez, R., "Design and operation of a proton microscope for radiography at 800 MeV," Proceeding of the Particel Acceleration Conference, pp. 702-704, 2003
4 Jerby, E., "Angular steering of the free-electron-laser far-field radiation beam," Physical review A, Vol. 41, No. 7, pp. 3804-3811, 1990   DOI   ScienceOn
5 Alamir, A. S. A., "Ultimate performance of objective magnetic lens," Ultramicroscopy, Vol. 101, Issue 2-4, pp. 241-246, 2004   DOI   ScienceOn
6 Edgcombe, C. J., Lupini, A. R. and Taylor, J. H., "Robust optimization for magnetic lens design," Nuclear Instruments and Methods in Physics Research A, Vol. 427, Issue 1-2, pp. 306-309, 1999   DOI   ScienceOn
7 Mankos, M., Adler, D., Veneklasen, L. and Munro, E., "Electron optics for high throughput low energy electron microscopy," Surface Science, Vol. 601, Issue 20, pp. 4733-4741, 2007   DOI   ScienceOn