• Title/Summary/Keyword: 전자방출

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Secondary electron emission characteristics of a thermally grown $SiO_2$ thin layer (건식 열산화로 성장시킨 $SiO_2$박막의 이차전자 방출 특성)

  • 정태원;유세기;이정희;진성환;허정나;이휘건;전동렬;김종민
    • Journal of the Korean Vacuum Society
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    • v.10 no.1
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    • pp.31-36
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    • 2001
  • The secondary election emission (SEE) yields for the thermally grown $SiO_2$ thin layers were measured by varying the thickness of the $SiO_2$ layer and the primary current. $SiO_2$ thin layers were thermally grown in a furnace at $930^{\circ}C$, whose thickness varied to be 5.8 nm, 19 nm, 43 nm, 79 nm, 95 nm, and 114 nm. When the $SiO_2$ layers were thinner than 43 nm, it was found that SEE curves followed the universal curve. However, for samples with a $SiO_2$ layer thicker than 79 nm, the SEE curves exhibited two maxima and the values of SEE yields were reduced. Additionally, as the current of primary electrons increased, the SEE yields were reduced. In this experiment, the maximum value of the SEE yield for $SiO_2$ layers was obtained to be 3.35 when the thickness of $SiO_2$ layer was 19 nm, with the primary electron energy 300 eV and the primary electron current 0.97 $\mu\textrm{A}$. The penetration and escape depth of an electron in the $SiO_2$ layers were calculated at the primary electron energy for the maximum value of the SEE yield and from these depths, it was calculated that the thickness of the $SiO_2$layer.

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Emission Stability of Semiconductor Nanowires (반도체 나노와이어에서 전자방출 안정성)

  • Yu, Se-Gi;Jeong, Tae-Won;Lee, Sang-Hyun;Heo, Jung-Na;Lee, Jeong-Hee;Lee, Cheol-Jin;Kim, Jin-Young;Lee, Hyung-Sook;Kuk, Yoon-Pil;Kim, J.M.
    • Journal of the Korean Vacuum Society
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    • v.15 no.5
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    • pp.499-505
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    • 2006
  • Field emission of GaN and GaP nanowires, synthesized by thermal chemical vapor deposition, and their emission stabilities under oxygen and argon environments were investigated. The field emission current of GaN nanowires was seriously deteriorated under oxygen environment, while that of GaP was not. Both wires did not show any noticeable change under argon environment. The existence of oxide outer shell layers in the GaP nanowires was proposed to be a main reason for this emission stability behavior. Field emission energy distributions of electrons from these nanowires revealed that field emission mechanism of the semiconductor nanowires were different from that of carbon nanotubes.

Fabrication and Characterization of Si-tip Field Emitter Array (실리콘 팁 전계 방출 소자의 제조 및 동작 특성 평가)

  • 주병권;이상조;박재석;이윤희;전동렬;오명환
    • Journal of the Microelectronics and Packaging Society
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    • v.6 no.1
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    • pp.65-73
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    • 1999
  • Si-tip FEAs were fabricated by a lift-off based process and their operating properties were evaluated. The dependence of emission current on applied gate and anode voltages, maximum emission current, hysteresis phenomena, MOSFET-type curves, current fluctuation, light emission from the emitted electrons, and failure mechanism of the device were widely discussed based on the experimental results.

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Energy Distribution of Ion and Electron by Field Emission and Proppagation in a Diod Device) (전계에 의한 이온 및 전자의 방출과 전파에 따른 에너지 분포)

  • 조광섭;최은하;강승언
    • Proceedings of the Korean Vacuum Society Conference
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    • 1998.02a
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    • pp.164-164
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    • 1998
  • 전채 방출에 의한 이온 몇 전자는 현마갱 몇 마이크로 천자소짜 ( (micro-electronic device)둥에 용용봐 어 왔다. 또한 이 온 몇 천짜의 C Cathod- Anode의 Diode구조에셔의 운동역학이 주요한 환심사이다. 현미 청과 같이 접속율 요하는 장쳐들에셔는 이들의 에녀지 분포가 접속도에 칙첩영향을 주는 Chromatic Abberation을 컬갱하게된다. 그라고 Diode 에셔의 이온 몇 천짜의 운동 또한 에너져훈포에 대한 이혜률 근거로 한 다. 본 연구에셔는 전계에 의한 이온 및 전자의 방출구조(mechanism)률 소채한다. 또한 방출극 표면에셔의 이온 몇 전짜가 갖는 에너져 환포와 양극구조에셔 뱀이 천봐하는 과청에셔의 에너져 환포의 특생용 환석한다.

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Characteristics of secondary electron emission coefficient of MgO protective layer by annealing effect

  • 정진만
    • Proceedings of the Korean Vacuum Society Conference
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    • 1999.07a
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    • pp.236-236
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    • 1999
  • AC-PDP(Plasma display Panel)는 기체 방전을 이용한 디스플레이로서 기체에 직접 노출되는 MgO 보호막의 이차전자 방출계수(${\gamma}$)는 AC-PDP의 방전특성을 결정짓는 중요한 요소이다. MgO 보호막의 이차전자 방출계수는 AC-PDP에 주입하는 기체의 종류, 결정 방향성과 표면오염상태등에 영향을 받는다. 본 연구에서는 MgO 보호막을 열처리한 상태와 열처리 하지 않은 상태를 ${\gamma}$-FIB 장치를 이용하여 2차전자방출 계수를 측정하여 비교하였다. 또한 24시간 MgO 보호막을 대기중에 방치하여 두었을 때 MgO 보호막의 표면오염상태에 대한 2차전자방출계수값을 측정하여 MgO 보호막의 표면오염에 대한 방전 전압특성저하가 어느정도인지를 알아보았다. 실험에 사용한 혼합기체는 Ne+Xe, He+Ne+Xe 혼합기체를 사용하였고, MgO 보호막은 21inch 규격의 실제 PDP Panel의 MgO 보호막을 사용하였다.

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Electron Beam Bunching Effect in Smith-Purcell Radiation as a FIR Light Source (Smith-Purcell 효과를 이용한 원적외선 광원에서 전자빔 군집의 효과)

  • 임영경;이희제;김선국;이병철;정영욱;조성오;차병헌;이종민
    • Proceedings of the Optical Society of Korea Conference
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    • 2000.02a
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    • pp.50-51
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    • 2000
  • 가속된 전자빔을 금속회절격자의 위로 통과시킬 때 결맞은 복사광(coherent radiation)이 발생하는데 이를 Smith- Purcell 효과라고 한다. 이때 발생하는 전자기파의 파장은 회절격자의 주기, 전자빔의 속도 및 복사광의 방출각도에 관계된다$^{(1)}$ . 그리고 방출된 복사광의 출력세기는 전자빔의 군집을 고려하지 않는 경우, 회절이론(diffraction theory)에 의해 얻을 수 있는데, 그 세기는 입사시킨 전자빔의 전류세기에 선형적으로 비례한다$^{(2)}$ . (중략)

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Fabrication of triode type Ti-silicided field emission tip array (3극 티타늄 실리사이드 전계방출 팁 어레이의 제작)

  • Ohm, Woo-Yong
    • 전자공학회논문지 IE
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    • v.44 no.3
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    • pp.1-5
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    • 2007
  • A new field emission tip array was realized by Ti silicidation of Ti coated Si tip, which has long term durability, chemical stability, and high emission current density. The fabricated Ti silicided FE tip array under high vacuum condition of about $10^{-8}Torr$ shows that the turn-on voltage is about 40V and the emission current is about $69{\mu}A$ when the bias of 150V is applied between anode and cathode of $100{\mu}m$ distance.

Characterization of field emission behavior from vitreous carbon (유리화 비정형 탄소의 전계방출 거동)

  • 안상혁;이광렬;은광용
    • Journal of the Korean Vacuum Society
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    • v.9 no.2
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    • pp.122-129
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    • 2000
  • Field emission behavior from vitreous carbon powders deposited on Mo coated glass by electro-phoretic method was investigated. Although the vitreous carbon has only $sp^2$ hybridized carbon bond, we could observe an excellent field emission behavior. Reproducible electron emission was observed without initiation process which is known to be needed in most carbon cathode materials. Critical electric field for electron emission was in the range from 3 to 4 MV/m. The effective work function was estimated to be about 0.06 eV, as obtained from the slope of Fowler-Nordheim plot. The stability of the emission behavior characterized by repeated I-V measurements, was much superior to the Si tips. We observed the possibility of full area light emission in vitreous carbon materials. This results showed that the field emission is not intimately related to the $sp^3$ hybridization of carbon, but the electrical properties of cathod/electrode interface or the conductivity of the cathode materials which required for the electron transport to the cathode surface.

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Field emission properties of boron-doped diamond film (보론-도핑된 다이아몬드 박막의 전계방출 특성)

  • 강은아;최병구;노승정
    • Journal of the Korean Vacuum Society
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    • v.9 no.2
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    • pp.110-115
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    • 2000
  • Deposition conditions of diamond thin films were optimized using hot-filament chemical vapor deposition (HFCVD). Boron-doped diamond thin films with varying boron densities were then fabricated using B4C solid pellets. Current-voltage responses and field emission currents were measured to test the characteristics of field emission display (FED). With the increase of boron doping, the crystal size of diamond decreased slightly, but its quality was not changed significantly in case of small doping. The I-V characterization was performed for Al/diamond/p-Si, and the current of doped diamond film was increased $10^4\sim10^5$ times as compared with that of undoped film. In the field emission properties, the electrons were emitted with low electric field with the increase of doping, while the emission current increased. The onset-field of electron emission was 15.5 V/$\mu\textrm{m}$ for 2 pellets, 13.6 V/$\mu\textrm{m}$ for 3 pellets and 11.1 V/$\mu\textrm{m}$ for 4 pellets. With the incorporation of boron, the slope of Fowler-Nordheim graph was decreased, revealing that the electron emission behavior was improved with the decrease of the effective barrier energy.

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Technical Trend of Carbon Nanotube Based Back Light Unit (탄소나노튜브 기반 백 라이트 유닛 기술 동향)

  • Song, Y.H.;Jeong, J.W.
    • Electronics and Telecommunications Trends
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    • v.24 no.6
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    • pp.32-40
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    • 2009
  • 탄소나노튜브(CNT)는 나노 기술의 대표적인 물질로, 나노 크기의 팁 반경과 100:1 이상의 높은 종횡비, 그리고 물리 화학적 안정성 등으로 인해 이상적인 전자 방출원 재료로 여겨져 많은 연구기관들이 CNT를 이용한 응용 소자를 개발하고 있다. 나노 기술을 바탕으로 한 CNT 백 라이트 유닛(BLU)은 CNT에 인가된 전기장에 의해 전자가 방출되고 방출된 전자가 고전압으로 가속되어 형광체를 때려서 발광하는 원리로 작동되며, 면광윈으로서 고정세의 로컬 디밍, 고속 순간 발광에 의한 잔상 제거 등의 장점으로 고품질의 LCD TV에 적용될 수 있으며, 냉음극형광램프와 발광다이오드를 대체할 만한 차세대 BLU로서 뛰어난 특성을 가지고 있다.