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Fabrication of triode type Ti-silicided field emission tip array  

Ohm, Woo-Yong (Department of Digital Electronics & Information, Inha Technical College)
Publication Information
전자공학회논문지 IE / v.44, no.3, 2007 , pp. 1-5 More about this Journal
Abstract
A new field emission tip array was realized by Ti silicidation of Ti coated Si tip, which has long term durability, chemical stability, and high emission current density. The fabricated Ti silicided FE tip array under high vacuum condition of about $10^{-8}Torr$ shows that the turn-on voltage is about 40V and the emission current is about $69{\mu}A$ when the bias of 150V is applied between anode and cathode of $100{\mu}m$ distance.
Keywords
Ti-silicide; field emission device; emission current; anode;
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