• Title/Summary/Keyword: 저항변화

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트렌치 게이트 Power MOSFET의 고신뢰성 게이트 산화막 형성 연구

  • Kim, Sang-Gi;Yu, Seong-Uk;Gu, Jin-Geun;Na, Gyeong-Il;Park, Jong-Mun;Yang, Il-Seok;Kim, Jong-Dae;Lee, Jin-Ho
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.108-108
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    • 2011
  • 최근 에너지 위기와 환경 규제 강화 및 친환경, 녹색성장 등의 이슈가 대두되면서 에너지 절감과 환경보호 분야에 그린 전력반도체 수요가 날로 증가되고 있다. 이러한 그린 전력반도체는 휴대용컴퓨터, 이동통신기기, 휴대폰, 조명, 자동차, 전동자전거, LED조명 등 다양한 종류의 전력소자들이 사용되고 있으며, 전력소자의 수요증가는 IT, NT, BT 등의 융복합기술의 발달로 새로운 분야에 전력소자의 수요로 창출되고 있다. 특히 환경오염을 줄이기 위한 고전압 대전류 전력소자의 에너지 효율을 높이는 연구 개발이 활발히 진행되고 있다. 종래의 전력소자는 평면형의 LDMOS나 VDMOS 기술을 이용한 소전류 주로 제작되어 수십 암페어의 필요한 대전류용으로 사용이 불가능하다. 반면 수직형 전력소자인 트렌치를 이용한 power 소자는 집적도를 증가 시킬 수 있을 뿐만 아니라 대전류 고전압 소자 제작에 유리하다. 특히 평면형 소자에 비해 약 30%이상 칩 면적을 줄일 수 있을 뿐만 아니라 평면형에 비해 on-저항을 낮출 수 있기 때문에 수요가 날로 증가하고 있다. 트렌치 게이트 power MOS의 중요한 게이트 산화막 형성 기술은 트렌치 내부에 균일한 두께의 산화막 형성과 높은 신뢰성을 갖는 게이트 산화막 형성이 매우 중요하다. 본 연구에서는 전력소자를 제조하기 위해 트렌치 기술을 이용하여 수직형 전력소자를 제작하였다. 트렌치형 전력소자는 게이트 산화막을 균일하게 형성하는 것이 매우 중요한 기술이다. 종래의 수평형 소자 제조시 게이트 산화막 형성 후 산화막 두께가 매우 균일하게 성장되지만, 수직형 트렌치 게이트 산화막은 트렌치 내부벽의 결정구조가 다르기 때문에 $1000^{\circ}C$에서 열산화막 성장시 결정구조와 결정면에 따라 약 35% 이상 열산화막 두께가 차이가 난다. 본 연구는 이러한 문제점을 해결하기 위해 트렌치를 형성한 후 트렌치 내부의 결정구조를 변화 및 산화막의 종류와 산화막 형성 방법을 다르게 하여 균일한 게이트 산화막을 성장시켜 산화막의 두께 균일도를 향상시켰다. 그 결과 고밀도의 트렌치 게이트 셀을 제작하여 제작된 트렌치 내부에 동일한 두께의 게이트 산화막을 여러 종류로 산화막을 성장시킨 후 성장된 트렌치 내벽의 산화막의 두께 균일도와 게이트 산화막의 항복전압을 측정한 결과 약 25% 이상 높은 신뢰성을 갖는 게이트 산화막을 형성 할 수 있었다.

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Treatment of High Organic Wastewater Using Ecological Water Treatment System (생태학적 수처리 시스템을 이용한 고농도 유기성 폐수처리)

  • 조재훈;김중곤;김준휘;윤성명;이정섭;김시욱
    • Korean Journal of Microbiology
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    • v.37 no.4
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    • pp.317-324
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    • 2001
  • We have previously developed three stage methane fermentation system capable of digesting food wastes effectively and then releasing high organic wastewater as a final product. In this study, we tried to devise an ecological water treatment system, which can efficiently remove the nitrogen and phosphorus contained in the organic wastewater. The system was made of microbiological filters, algae, and waterfleas. Of two species of alga tested, Selenastrum capricornutum showed higher growth rate and more efficiently removed the nitrogen from the wastewater than by Chlorella sp. In addition, the highest growth rate and the nitrogen removal efficiency could be obtained when high concentrations of $Mg^{2+}\; and\; Ca^{2+}$ were added to the diluted wastewater and the molar ratio of nitrogen to phosphorus was adjusted to 10 : 1. In this study the population relationship between alga and water flea was also examined in a test tube. The initial number of algal cells decreased as the waterflea population increased. However, the number of algal cells gradually increased again when waterflea population decreased partly due to the environmental resistance. From these results, it was believed that the ecological water treatment system could be used for removing the nitrogen and phosphorus from organic wastewater very effectively. Moreover, the waterflea cultured by this system as a final predator could be used as a good foodstuff for fishes.

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Ammonia gas sensing characteristics of LaFeO3 thick-films With Al2O3 additives (Al2O3를 첨가한 LaFeO3 후막의 암모니아 가스 감지특성)

  • Kim, Jun-Gon;Ahn, Byeong-Yeol;Ma, Tae-Young;Park, Ki-Cheol;Kim, Jeong-Gyoo
    • Journal of Sensor Science and Technology
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    • v.11 no.1
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    • pp.18-27
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    • 2002
  • $LaFeO_3$-based thick films with 2wt.%, 5wt.% and 10wt.% $Al_2O_3$ additives were fabricated by screen printing method on $Al_2O_3$ substrates. Structural, electrical and ammonia gas sensing characteristics of the thick films with different heat treatment temperatures were examined. From XRD results, the compound of $LaFeO_3$ and $Al_2O_3$ was not found until the heat treatment at $1200^{\circ}C$. SEM microphotograph showed similar grain growth despite the amount of $Al_2O_3$ additives with the heat treatment. Thick films with high activation energy and low resistance in the electrical properties showed high sensitivity for gases. Thick films with 2wt % $Al_2O_3$ additives heat-treated at $1200^{\circ}C$ showed the sensitivities of 210% for 100 ppm $NH_3$ gas at the working temperature of $350^{\circ}C$. The thick films showed food selectivity to $NH_3$ gas.

Electrical properties of n-type $WO_{3}$ based gas sensors (N-형 $WO_{3}$계 가스센서의 전기적 특성)

  • Yang, Jong-In;Kim, Il-Jin;Lim, Han-Jo;Han, Sang-Do;Chung, Kwan-Soo
    • Journal of Sensor Science and Technology
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    • v.7 no.3
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    • pp.188-196
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    • 1998
  • The sensing and electrical characteristics of $WO_{3}$-based n-type semiconductor gas sensors are investigated. In normal air condition, $TiO_{2}$(4 wt. %)-doped $WO_{3}$-based sensor fabricated without any binder shows the grain boundary ( GB ) potential barrier height of 0.26 V. Sensors fabricated with alumina, PVA and silica sol binders show 0.17, 0.22 and 0.26 V of GB potential barrier height, respectively. In the ambience of 120 ppm $NO_{x}$ concentration, the GB potential barrier height of the sensor fablicated without binder is increased to 0.59 V. The sensors were fabricated with alumina, PVA, silica sol binders show 0.43, 0.66 and 0.52 V of potential barrier, respectively. Thus the variation of the potential barrier at GB is largest in the sensor fabricated with the PVA binder. This is found to be the main reason why the sensor fabricated with the PVA binder shows the best sensitivity. It is also found that the decrease of sensitivity at a temperature higher than the optimum operation temperature is due to the temperature dependence of the sensor resistance in normal air condition rather than the desorption of the adsorbed $NO_{x}$ gas particles. In the ambience of 250 ppm CO concentration, the GB potential barrier heights of the sensors fabricated without binder and with PVA binder are about 0.2 V showing negligible change compared to the case of normal air ambience. This fact indicates that these sensors are good candidates for the selective detection of $NO_{x}$ gas in the mixture of CO and $NO_{x}$ gases.

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Sensitivity Analysis for Unit Module Development of Hybrid tube Structural System (복합 튜브 구조시스템의 단위 모듈 개발에 대한 민감도 해석)

  • Lee, Yeon-Jong;Park, Sung-Soo
    • Journal of the Korea institute for structural maintenance and inspection
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    • v.22 no.1
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    • pp.167-175
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    • 2018
  • This research deals, The characteristics of mechanics and behavior of the tube structural systems, It has been investigated and considered conventional theory and case models, It has shown the suitability, The best location, And optimal shape of the unit module system, Considered variables materials of stiffness increase and decrease in hybrid tube structural systems this study carried out adapting analysis of statistical concepts. In a concrete way, This study exams the effect of reducing horizontal displacement and the shear lag phenomenon, Also, The purpose of this study is to utilize the basic data on the design and study of future high-rise hybrid structural system using this research. As a result, The framed- tube structural system does not effectively cope with horizontal behavior of high-rise buildings, The results of using varying material tested resistance factors and lateral loads in hybrid tube structural system, When each material is compared Bracing material is identified as a key factor in lateral behavior. In a ratio of material quantity framed-tube structural system, The level of sensitivity affecting the horizontal displacement is greater then the beam's column, In case of braced tube structural system, Braced appeared to be most sensitive in comparison of material quantity ratio in columns and beams.

Effects of Leaf and Pod Removal on Photosynthesis and Assimilate Partition in Soybean (적엽ㆍ제협처리가 콩의 광합성과 동화물질 배분에 미치는 영향)

  • Woong Tae, Kim;Rak Chun, Seong;Harry C, Minor
    • KOREAN JOURNAL OF CROP SCIENCE
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    • v.38 no.2
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    • pp.159-165
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    • 1993
  • To clarify the effects of sink demand for assimilate on leaf photosynthetic rate, tissue composition, and leaf senescence of soybean [Glycine max (L.) Merr.] J plants, pod and leaf tissues were removed at growth stage $R^3$. Plant responses were measured every 10days from 2 through 42days following treatment. Leaves of depodded plants exhibited increased starch and chlorophyll contents and specific leaf weight. Stomatal resistance was also increased and leaf photosynthetic rate was reduced. Dry weight of vegetative tissues except leaves was increased by pod removal. Leaf removal resulted in a decreased starch content of leaves from 22 to 42days after treatment and that of roots at all sampling times. Specific leaf weight was decreased while leaf photosynthetic rate was increased. Stomatal resistance and chlorophyll content were little affected. Weight per seed was decreased 3.0% by leaf removal. Except for the seed, tissue protein contents were increased by pod removal but decreased by leaf removal, however, seed protein content was not affected by either. Apparent senescence was delayed by depodding. Both apparent and functional senescence were accelerated by leaf removal.

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Numerical Analysis of Three-Dimensional Magnetic Resonance Current Density Imaging (MRCDI) (3차원 자기공명 전류밀도 영상법의 수치적 해석)

  • B.I. Lee;S.H. Oh;E.J. Woo;G. Khang;S.Y. Lee;M.H. Cho;O. Kwon;J.R. Yoon;J.K. Seo
    • Journal of Biomedical Engineering Research
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    • v.23 no.4
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    • pp.269-279
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    • 2002
  • When we inject a current into an electrically conducting subject such as a human body, voltage and current density distributions are formed inside the subject. The current density within the subject and injection current in the lead wires generate a magnetic field. This magnetic flux density within the subject distorts phase of spin-echo magnetic resonance images. In Magnetic Resonance Current Density Imaging (MRCDI) technique, we obtain internal magnetic flux density images and produce current density images from $\bigtriangledown{\times}B/\mu_\theta$. This internal information is used in Magnetic Resonance Electrical Impedance Tomography (MREIT) where we try to reconstruct a cross-sectional resistivity image of a subject. This paper describes numerical techniques of computing voltage. current density, and magnetic flux density within a subject due to an injection current. We use the Finite Element Method (FEM) and Biot-Savart law to calculate these variables from three-dimensional models with different internal resistivity distributions. The numerical analysis techniques described in this paper are used in the design of MRCDI experiments and also image reconstruction a1gorithms for MREIT.

Preparation and Heating Characteristics of N-doped Graphite Fiber as a Heating Element (질소가 도핑 된 흑연섬유 발열체의 제조 및 발열특성)

  • Kim, Min-Ji;Lee, Kyeong Min;Lee, Sangmin;Yeo, Sang Young;Choi, Suk Soon;Lee, Young-Seak
    • Applied Chemistry for Engineering
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    • v.28 no.1
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    • pp.80-86
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    • 2017
  • In this study, nitrogen functional groups were introduced on graphite fiber (GF) to modify their electrical properties, and heating properties were investigated according to the treatment conditions. GF was prepared by a thermal solid-state reaction at $200^{\circ}C$ for 2 h. Surface properties of the nitrogen doped GF were examined by XPS, and its resistance and heating temperature were measured using a programmable electrometer and thermo-graphic camera, respectively. The XPS result showed that the nitrogen functional groups on the GF surface were increased with increasing of urea contents, and the heating property of the GF was also improved as nitrogen functional groups were introduced. The maximum heating temperature of GF treated by urea was $53.8^{\circ}C$ at 60 V, which showed 55% improved heating characteristics compared to that of non-treated GF. We ascribe this effect to introduced nitrogen functional groups on the GF surface by thermal solid-state reaction, which significantly affects the heating characteristics of GF.

Effect of Diallyl Disulfide on Heme Oxygenase-1 Expression in Human Hepatoma Cell Line HepG2 (인간 간암세포주 HepG2에서 heme oxygenase-1 발현에 대한 diallyl disulfide의 효과)

  • Kim, Kang-Mi;Lee, Sang-Kwon;Park, Young-Chul
    • Journal of Life Science
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    • v.21 no.7
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    • pp.1046-1051
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    • 2011
  • Diallyl disulfide (DADS), the most prevalent oil-soluble organosulfur compound in garlic, is known to have diverse biological activities, including anticarcinogenic, antiatherosclerotic, antiinflammatory, and antioxidant actions. In this study, we investigated the effect of DADS on the expression of heme oxygenase-1 (HO-1) in human liver hepatoma cell line HepG2. Treatment of HepG2 cells by DADS evoked a dose-dependent growth inhibition without significant toxicity to the cells, and also induced the expression of transcription factor Nrf2. However, DADS did not have any enhancing effect on transcription and translation of HO-1 expression in HepG2 cells. In addition, DADS efficiently blocked protein synthesis of HO-1 in HepG2 cells stimulated by CoPP or hemin. But, DADS did not decrease the content of transcripts of HO-1 gene stimulated by CoPP, with accumulation of Nrf2 and small Maf in the nucleus. Based on these results, we conclude that DADS inhibits HO-1 expression by modulation of translational level of CoPP or hemin-induced HO-1 expression in HepG2 cells.

Effect of Gums on the Characteristics of the Dough in Making Frozen Dough (냉동생지 제조시 검류의 첨가가 반죽특성에 미치는 영향)

  • Lee, Jong-Min;Lee, Myung-Ku;Lee, Si-Kyung;Cho, Nam-Ji;Cha, Wook-Jin;Park, Jung-Kil
    • Korean Journal of Food Science and Technology
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    • v.32 no.3
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    • pp.604-609
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    • 2000
  • This study was carried out to investigate the possibilities of adopting xanthangum, guargum and ${\kappa}-carrageenan$ as cryprotectant by examining the rheological and structural properties of dough. Results of farinography showed that water absorption, development time and mechanical tolerance index in dough with the gums increased more than those of the control. It was also found that resistance in dough with the gums increased greatly, but extensibilities were similar to that of the control, resulting in increasing R/E values in the dough with the gums through extensograph. According to amylogram, gelatinization temperature of dough was $59.5^{circ}C$ and those of the dough with the gums were $58^{circ}C$. Even though maximum viscosity of the dough was 550 B.U in the control, those were 690 B.U, 780 B.U and 760 B.U in the dough with xanthangum, guargum, and ${\kappa}-carrageenan$, respectively. The control deeply increased the pH during frozen storage but the addition of ${\kappa}-carrageenan$ and xanthangum increased the pH slightly. The dough with the gums had more stable spaces than control in the microstructure through SEM.

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