• Title/Summary/Keyword: 자기조립막

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Fabrication of Multi-functional Self-Assembled Monolayers by Microcontact Printing and Their Application for Electronic and Biological Devices (미세접촉인쇄기법을 이용한 다기능성 자기조립막 제작과 전자.생물소자로의 응용)

  • Choi, Dae-Geun;Yu, Hyung-Kyun;Yang, Seung-Man;Jo, Jeong-Dai;Lee, Eung-Sug
    • Proceedings of the KSME Conference
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    • 2003.04a
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    • pp.1021-1024
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    • 2003
  • In this work, we fabricated various 2D metallic and polymeric nanopatterns with the feature resolution of sub-micrometer scale by using the method of microcontact printing ($\mu$ P) based on soft lithography. Silicon masters for the micromolding were made by e-beam lithography. Composite poly(dimethylsiloxane) (PDMS) molds were composed of a thin, hard layer supported by soft PDMS layer. Finally, monodisperse metal or polymer particles could be obtained in the prepared pattern for the application of electronic devices.

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Current-Voltage Properties measuring of Dipyridinium Molecule Using Scanning Tunneling Microscopy (STM에 의한 Dipyridinium 분자의 전압-전류 특성 측정)

  • Lee, Nam-Suk;Shin, Hoon-Kyu;Chang, Jeong-Soo;Kwon, Young-Soo
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2004.11a
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    • pp.485-488
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    • 2004
  • 본 연구에서는 dipyridinium dithioacetate 분자를 Au(111) 표면에 자기조립하여 STM 탐침-유기 단분자막-Au(111)기판의 수직구조로 STM 측정시스템을 이용하여, 전기적 특성을 관찰하였다. 먼저 Au(111)기판을 Piranha용액$(H_2SO_4:H_2O_2=3:1)$으로 Au 표면을 전처리 하였다. 전처리한 Au(111) 기판을 dipyridinium dithioacetate 1mol/ml 농도로 자기조립 하였으며, 자기조립막의 표면 구조를 STM으로 관찰하였다. dipyridinium dithioacetate의 전기적 특성은 STM 탐침-유기단분자막-Au(111) 기판의 수직구조로 STS를 이용하여 조사하였다. 전압과 전류 측정에서 전압이 증가함에 따라 전류가 감소하는 부성 미분저항(NDR)의 특성이 관찰 되었다. NDR 수치가 $-545\;[m\Omega/cm^2]$였고, PVCR은 1.64:1 이었다.

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Tribological Characteristics of FDTS & OTS SAM according to Annealing Temperature (FDTS와 OTS SAM의 어닐링 온도에 따른 트라이볼로지 특성)

  • 양지철;김대은
    • Journal of the Korean Society for Precision Engineering
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    • v.20 no.1
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    • pp.240-247
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    • 2003
  • The tribological characteristics of FDTS (1H, 1H, 2H, 2H-Perflurodecyltrichlorosilane) SAM (self-assembled monolayer) and OTS (octadecyltrichlorosilane) SAM treated by high temperature annealing have been investigated from the viewpoint of stiction, adhesion and friction in micro/nano scale. From the experimental results, it was found that OTS SAM gets destroyed at 20$0^{\circ}C$ and stiction, adhesion and friction coefficient increased, but FDTS SAM was stable up to 40$0^{\circ}C$. Also, it was found that the friction coefficient of normal OTS SAM below 20$0^{\circ}C$ is lower than that of FDTS SAM in micro/nano scale, but stiction and adhesion is vice versa. This work shows the importance of surface group of self-assembled monolayer in dictating the tribological characteristics and thermal stability.

Anodic Oxidation Lithography via Atomic Force Microscope on Organic Resist Layers (유기 저항막을 이용한 원자힘 현미경 양극산화 패터닝 기술)

  • Kim, Sung-Kyoung;Lee, Hai-Won
    • Polymer(Korea)
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    • v.30 no.3
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    • pp.187-195
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    • 2006
  • Atomic force microscope (AFM)-based anodic oxidation lithography has gained great in forests in fabricating nanometer scale features on semiconductor or metal substrates beyond the limitation of optical lithography. In this article AFM anodic oxidation lithography and its organic resist layers are introduced based on our previous works. Organic resist layers of self-assembled monolayers, Langmuir-Blodgett films and polymer films aye suggested to play a key role in enhancing the aspect ratio of producing features, the lithographic speed, and spatial precision in AFM anodic oxidation lithography.

The Surface Treatment Effect for Nanoimprint Lithography using Vapor Deposition of Silane Coupling Agent (나노임프린트 공정에서 실란커플링제 기상증착을 이용한 표면처리 효과)

  • Lee, Dong-Il;kim, Ki-Don;Jeong, Jun-Ho;Lee, Eung-Sug;Choi, Dae-Geun
    • Korean Chemical Engineering Research
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    • v.45 no.2
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    • pp.149-154
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    • 2007
  • Nanoimprint lithography (NIL) is useful technique because of its low cost and high throughput capability for the fabrication of sub-micrometer patterns which has potential applications in micro-optics, magnetic memory devices, bio sensors, and photonic crystals. Usually, a chemical surface treatment of the stamp is needed to ensure a clean release after imprinting and to protect the expensive original master against contamination. Meanwhile, adhesion promoter between resin and substrate is also important in the nanoscale pattern. In this work, we have investigated the effect of surface treatment using silane coupling agent as release layer and adhesion promoter for UV-Nanoimprint lithography. Uniform SAM (self-assembled monolayer) could be fabricated by vapor deposition method. Vapor phase process eliminates the use of organic solvents and greatly simplifies the handling of the sample. It was also proven that 3-acryloxypropyl methyl dichlorosilane (APMDS) could strongly improve the adhesion force between resin and substrate compared with common planarization layer such as DUV-30J or oxygen plasma treatment.