• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.328-328
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• 2011

전기장 E와 자기장 B가 서로 수직으로 인가된 플라즈마에서 전자와 이온의 이동 현상은 이미 널리 알려져 있다. 그런데 최근 플라즈마 응용 산업의 발달에 따라 음이온을 포함한 플라즈마에서 나노미립자의 운동에 대한 해석이 필요하다. 특히 실리콘 박막의 에칭, 스퍼터링, PECVD 등의 공정에 사용되는 실란 플라즈마에서 음이온의 발생에 따른 오염은 주요한 문제가 된다. 따라서 본 연구에서는 이러한 음이온을 제거하기 위해 E${\times}$B 드리프트 운동을 이론적으로 계산 하였다. 결과적으로 음으로 대전된 나노미립자는 E${\times}$B 드리프트 운동의 반대 방향으로 이동 하였고, 드리프트 속도는 자속밀도가 증가함에 따라 함께 증가됨을 보였다. 따라서 서로 수직으로 인가된 전자기장에 의한 E${\times}$B 드리프트 운동을 통해 음이온을 방전 공간에서 제거할 수 있음을 알 수 있었다.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.10a
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• pp.285-290
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• 2005

Micro On-Off valves are currently recognized as the core technology in the fields of the micro fluid chip fur medical applications and production lines of semi-conduct chip. Micro valves that operate by compressed air need the high-speed responsibility, repeatability, the absorbability and the uniform pressure by the poppet. In this study, Micro On-Off valves that posses the high-speed responsibility and the high rate of flow have designed and analyzed through the law of equivalent magnetic circuit and Finite Element Method (FEM) respectively. In case of poppet, Flow field characteristic was analyzed by the variation of poppet and it was able to display flow field by changing the location of the poppet. Also, we verified possibility of the design through the static and dynamic pressure and the 3D distribution curve of the force by working the front poppet.

• Journal of the Korean Magnetics Society
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• v.19 no.3
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• pp.113-119
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• 2009

$^{57}Fe_xCu_{1-x}O$(x = 0.0, 0.02) powders were prepared by sol-gel method and their crystallographic and magnetic hyperfine properties have been studied using X-ray diffraction and $M{\ddot{o}}ssbauer$ spectroscopy (MS). The crystal structure of the samples is found to be monoclinic without any secondary phases and their lattice parameters increase with increasing annealing temperature ($T_A$), which is attributed to an increase in oxygen-vacancy content. MS measurements at room temperature indicate that $Fe^{3+}$ ions substitute $Cu^{2+}$ sites and ferromagnetic phase grow with increasing $T_A$. Magnetic hyperfine and quadrupole interactions of $^{57}Fe_{0.02}Cu_{0.98}O$ ($T_A=500^{\circ}C$) in the antiferromagnetic state at 17 K have been studied, yielding the following results: $H_{hf}=426.94\;kOe$, ${\Delta}E_Q=-3.67\;mm/s$, I.S.=0.32 mm/s, ${\theta}=65^{\circ}$, ${\phi}=0^{\circ}$, and ${\eta}=0.6$.

• Journal of the Korean Magnetics Society
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• v.6 no.5
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• pp.281-286
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• 1996

For the accurate analysis of motional characteristics of electrical machines, it is needed to solve the motion equations together with the electromagnetic field equations. In this paper the sequential coupling of systems, the spring mass system and the electromagnetic system, is adopted. The induced current and the magnetic fields are calculated by finite element method(FEM) with given speed. And then, with the computed elec-tromagnetic force, the mechanical equations are solved by the Runge-Kutta method. The above two processes are repeated sequentially to obtain the time domain solutions. The resultant values are applied to the energy conservation law to prove the usefulness of the proposed sequential method.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.42 no.2 s.302
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• pp.33-38
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• 2005

In this paper, the sensing unit of a non-invasive blood glucose sensor for home users, using a magneto-resonance absorption method, have been designed and manufactured. The sensor is capable of non-invasively determining blood glucose levels through measuring the 1H spin-lattice relaxation time in human body, The comparison of initial models, with different dimensions and shapes, for the sensing unit has led us to select the materials of the final model, which has adequate size and weight for home use. Through the design optimization using the FEM model, the dimension of final model has been determined to satisfy the required strength and uniformity of the magnetic field in the detecting area.

• Journal of the Korean Magnetics Society
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• v.25 no.3
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• pp.79-82
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• 2015

The design parameter study about the magnetic pulse forming is performed using finite element analysis with MAXWELL. The first case of design parameters is about the initial charging voltage and the capacitance and the second case of design parameters are about the winding turns and the spacing of electromagnetic coil. The 3D finite element model of electromagnetic forming system is created and the magnetic force is calculated. The effects of design parameters on the magnetic forming force are investigated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.401-404
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• 2004

The electron beam machining provides very high resolution up to nanometer scale, hence the E-beam writing technology is rapidly growing in MEMS and nano-engineering areas. In the optical column of the e-beam writer, there are several lenses condensing and focusing electron beams from electron gun with fringing magnetic fields. To achieve small spot size as 1-2 nm for higher power of electron beam, magnetic lenses should be designed considering their magnetic field distribution. In this paper, the magnetic field at two condenser lenses and object lens are calculated with finite element method and discussed its performances.

• Journal of the Korean Magnetics Society
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• v.19 no.6
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• pp.222-226
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• 2009

This paper presents the new design of flat electromagnetic actuator. Novel shorted turn and copper center pole are placed into existent design in order to reduce the inductance of coil and accelerate the initial response. Finite element analysis using commercial electromagnetic solver “MAXWELL” is performed to simulate the improvement of dynamic characteristics such as fast initial response and so on.

• Proceedings of the Korean Vacuum Society Conference
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• 2016.02a
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• pp.182.2-182.2
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• 2016

Hollow cathode discharge(중공 음극)는 음극 표면에서 발생되는 2차 전자를 이용하여 높은 밀도의 플라즈마를 만들 수 있는 장점이 있다. 전원으로 microwave, RF, DC, pulsed dc등을 사용할 수 있으며 박막의 증착, 식각 등에 응용 가능하다. 물리적 현상으로는 중공 음극 재료 표면 물질의 가열 및 이온 스퍼터링, 2차 전자의 가열, 자기장 인가 구조의 경우 전자 거동이 있다. PIC(particle-in-cell)방식의 모델링과 fluid model을 이용한 방법이 있는데 본 연구에서는 상용 fluid model software인 ESI사의 CFD-ACE+를 사용하여 모델링 하였다. 구동 주파수는 13.56 MHz의 상용 고주파 전원과 보다 낮은 1 MHz, 100 kHz의 수치 모델을 이용하여 HF, MF, LF 영역에서의 동작 특성을 해석하였다. 1차적으로는 가스 유동의 특성을 2D, 3D로 조사하였고 플라즈마 거동은 2차원을 주로 진행하였으며 계산 시간이 오래 거리는 3차원 모델을 하나 만들어 그 특성을 조사하였다.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2002.11b
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• pp.222-227
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• 2002

MR(Magneto-rheological) fluid is smart fluid that can change its characteristics then magnetic fields are applied. Recently, many researches have been performed on this MR fluid for the application in a vareity of areas including automobile shock absorbers. This paper describes the design procedure of a MR damper and the analysis results of its dynamic characteristics. MR fluid in the magnetic field shows initial yield shear stress and increasing resistive viscosity with final saturation thereafter. Herschel-Bulkley model is used to simulate the flow characteristics of MR fluid and magnetic analysis is used to identify the magnetic property of the MR fluid in the orifice of the damper. The dynamic characteristics of the damper was predicted and compared with the experimental results for typical sinusoidal excitations.