• Journal of the Institute of Electronics Engineers of Korea TC
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• v.46 no.5
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• pp.154-161
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• 2009

Recently, as many functional blocks are integrated on a small area the high speed integrated circuits emerge as a critical electromagnetic interferer which causes mal-function of adjacent circuitries and lowers the sensitivity of the wireless receivers. Therefore, it is necessary to devise an precise analyzing tool to pinpoint the major electromagnetic noise contributor among the internal circuit blocks of high speed IC's. This paper presents the design, fabrication, and measurement results of the high resolution magnetic field probe which can measure the current density on the IC surface. In order to achieve the high resolution, the magnetic field probe is fabricated using 3-metal semiconductor process so that its thickness is reduced by 10% than that of conventional works. Through the magnetostatic analysis and EM simulation, spatial resolution and sensitivity to the nonmagnetic field components are analyzed. Experimentally, it is found that the fabricated probe can measure the current density on the IC surface with $210{\mu}m$-spatial-resolution.

• The Proceeding of the Korean Institute of Electromagnetic Engineering and Science
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• v.15 no.4
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• pp.79-85
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• 2004

• Proceedings of the Korean Magnestics Society Conference
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• 2012.11a
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• pp.159-160
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• 2012

• Proceedings of the Optical Society of Korea Conference
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• 2008.02a
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• pp.269-270
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• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.369-372
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• 2004

Photo-induced surface alignment is charming as a non-contact photo-patternable alignment technology which can be used in the next generation of displays, such as large area, multi-domain. For decades, many polymer film have been investigated and developed to be used in the photo alignment. Among these photoreactive materials, recently developed polyimide, Chloromethylated Polyimide(CMPI) now became the focus of interests in this area because of its high photosensitivity and superior thermal stability. In this report, we present micro patterning method to form the nanoscale structure by Mask-Less laser patterning using this CMPI film and NSOM probe.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.23 no.2
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• pp.177-186
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• 2012

In this paper, we propose a design method that the crosstalk of probe connector pins satisfy the limitation of -30 dB. The parameters(inductance and capacitance) were extracted in the grid-structured probe connector pin system, and it is shown that the new parameters are easily calculated with increasing ground pin numbers using the previously calculated parameters. In addition, the crosstalk reduction algorithm by employing more grounds around the signal pin has been suggested, and it is confirmed that the suggested method is quite effective especially for the reduction of inductive couplings. Finally, we suggested the correlation between the pitch and the length of the pins to satisfy the crosstalk limitation of -30 dB with the given number of ground pins, which will be quite useful when design a probe connector pin system.

• Proceedings of the Korean Vacuum Society Conference
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• 2014.02a
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• pp.149.1-149.1
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• 2014

전자총의 방출전류량과 소스크기, 그리고 방출 각전류밀도(angular current density)를 측정함으로서 얻어지는 전자총의 휘도(brightness)는 대물렌즈의 수차와 더불어 전자현미경의 성능을 좌우한다. 국내업체의 전자현미경은 대부분 상대적으로 휘도가 낮지만 작동압력이 10-5 Torr의 이하여서 제작과 사용이 용이한 텅스텐 필라멘트 열전자총을 채용하고 있다. 주사전자현미경의 성능을 좌우하는 프로브 크기와 전류량은 광학계의 배율과 전자총의 휘도에 의해서 결정되며, 설계시 전자현미경의 사양을 결정하기 위해서는 전자총의 휘도 측정이 필수이다. 한국표준과학연구원에서는 국내에서 생산되는 전자현미경용 열전자총의 휘도를 측정하기 위해, 전자총의 방출 각전류밀도와 소스 크기를 측정할 수 있는 전자총 휘도 측정 시스템을 개발하고 있다. 본 발표에서는 개발중인 시스템의 측정 원리를 기술한다. 또한 외부 자기장에 의한 교란을 방지하기 위해 연자성 재료인 연강으로 제작한 진공챔버의 진공특성을 보고한다.

• Journal of the Korean Society for Nondestructive Testing
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• v.28 no.5
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• pp.395-400
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• 2008

Alternating magnetic field was used for detection of surface flaws on nonmagnetic and magnetic metallic specimens. The nondestructive sensor probe was composed of the planar coil with inductive magnetic thin film yoke as a sensing component and a single straight typed exciting coil. The planar inductive coil sensor with magnetic yoke was fabricated by sputtering, electroplating, dry etching and photolithography process. The alternative currents with the range of 0.1A to 1.0A (0.7 MHz to 1.8 MHz) were applied to the exciting coil. The specimens were prepared with the slit shaped artificial surface flaws (minimum depth and width; 0.5 mm) on metallic plate (Al; nonmagnetic metal and FeC; magnetic metal). The detected signal for the positions and shapes of surface flaws on specimens were obtained with high sensitivity and high signal to ratio. The measured output signals by the non-contacted scanning on surface of FeC specimen with micron-sized crack were converted to the images of the flaws. And these results were compared with the optical images, respectively.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.14 no.5
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• pp.1209-1216
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• 2010

It has increased that peripheral disturbance(blood flow, nerve, Raynaud's phenomenon) and finger rheumatoid arthritis which is caused by the diabetic complications. To improve these pain issues, we proposed new method for the Finger Disease Therapy(FDT). In this paper, we manufactured solenoid cylindrical coil which was only for the FDT using a variable micro-electromagnetic. Also, we designed the Finger Disease Therapy System(FDTS) which could select three stimulation modes(N_pulse, S_pulse, N/S_pulse) and frequency(0.25hz, 0.5hz, 1hz). We used a Teslameter to measure magnetic flux inner solenoid, and measured magnetic flux as distance(0 ~ 3cm) inner solenoid with stimulation modes and frequency. In the results, magnetic flux was the highest in center of solenoid(0cm) for all stimulation modes. Also, the highest magnetic flux was measured as N_pulse(294.3mT), S_pulse(293.8mT) in 1Hz and N/S_pulse (275.4mT) in 0.25Hz, respectively. Therefore, we developed the FDTS using various pattern and intensity for finger diseases therapy, and checked therapy clinic application possibility of the FDTS as measuring magnetic flux inner solenoid.

• Journal of the Korean Society for Nondestructive Testing
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• v.30 no.5
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• pp.464-470
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• 2010

The integrity of the industrial equipment in use under high temperature and high pressure must be assessed by regularly measuring the degraded mechanical properties during service time. In order to nondestructively monitor the degraded mechanical properties of industrial equipment, a measuring method of the reversible permeability(RP) using surface type probe is presented. The method for measuring the RP is based on that RP is the differential value of hysteresis loop. The RP is exactly the foundation hatmonics induced in a detecting coil measured by lock-in amplifier tuned to a frequency of the alternating perturbing magnetic field. The peak of RP is measured around the coercive force. Steel material used in this work was 12Cr ferritic heat resisting steel. The eleven kinds of samples aged during different times under same temperature ($700^{\circ}C$) were prepared. Peak interval of reversible permeability(PIRP), Vickers hardness, and tensile strength measured for the aged samples decreased abruptly for short aging time (below 500 h), but the change became small at a long aging time. Vickers hardness and tensile strength linearly decreased as RIRP decreased, so the degraded mechanical properties of 12Cr ferritic heat resisting steel could be nondestructively evaluated by measuring RIRP.