• Title/Summary/Keyword: 자기상관 공정 관리

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A Study on UBM Method Detecting Mean Shift in Autocorrelated Process Control

  • Jun, Sang-Pyo
    • Journal of the Korea Society of Computer and Information
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    • v.25 no.12
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    • pp.187-194
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    • 2020
  • In today's process-oriented industries, such as semiconductor and petrochemical processes, autocorrelation exists between observed data. As a management method for the process where autocorrelation exists, a method of using the observations is to construct a batch so that the batch mean approaches to independence, or to apply the EWMA (Exponentially Weighted Moving Average) statistic of the observed value to the EWMA control chart. In this paper, we propose a method to determine the batch size of UBM (Unweighted Batch Mean), which is commonly used as a management method for observations, and a method to determine the optimal batch size based on ARL (Average Run Length) We propose a method to estimate the standard deviation of the process. We propose an improved control chart for processes in which autocorrelation exists.

Effects of Parameter Estimation in Phase I on Phase II Control Limits for Monitoring Autocorrelated Data (자기상관 데이터 모니터링에서 일단계 모수 추정이 이단계 관리한계선에 미치는 영향 연구)

  • Lee, Sungim
    • The Korean Journal of Applied Statistics
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    • v.28 no.5
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    • pp.1025-1034
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    • 2015
  • Traditional Shewhart control charts assume that the observations are independent over time. Current progress in measurement and data collection technology lead to the presence of autocorrelated process data that may affect poor performance in statistical process control. One of the most popular charts for autocorrelated data is to model a correlative structure with an appropriate time series model and apply control chart to the sequence of residuals. Model parameters are estimated by an in-control Phase I reference sample since they are usually unknown in practice. This paper deals with the effects of parameter estimation on Phase II control limits to monitor autocorrelated data.

Procedure for monitoring autocorrelated processes using LSTM Autoencoder (LSTM Autoencoder를 이용한 자기상관 공정의 모니터링 절차)

  • Pyoungjin Ji;Jaeheon Lee
    • The Korean Journal of Applied Statistics
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    • v.37 no.2
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    • pp.191-207
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    • 2024
  • Many studies have been conducted to quickly detect out-of-control situations in autocorrelated processes. The most traditionally used method is a residual control chart, which uses residuals calculated from a fitted time series model. However, many procedures for monitoring autocorrelated processes using statistical learning methods have recently been proposed. In this paper, we propose a monitoring procedure using the latent vector of LSTM Autoencoder, a deep learning-based unsupervised learning method. We compare the performance of this procedure with the LSTM Autoencoder procedure based on the reconstruction error, the RNN classification procedure, and the residual charting procedure through simulation studies. Simulation results show that the performance of the proposed procedure and the RNN classification procedure are similar, but the proposed procedure has the advantage of being useful in processes where sufficient out-of-control data cannot be obtained, because it does not require out-of-control data for training.

A Study of The reference value of the CUSUM control chart that can detect small average changes in the process

  • Jun, Sang-Pyo
    • Journal of the Korea Society of Computer and Information
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    • v.25 no.12
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    • pp.73-82
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    • 2020
  • Most process date such as semiconductor and petrochemical processes, autocorrelation often exists between observed data, but when the existing SPC(Statistical process control) is applied to these processes, it is not possible to effectively detect the average change of the process. In this paper, when the average change of a certain size occurs in the process data following a specific time series model, the average of the residuals changes according to the passage of time, and the change pattern of the average is introduced around the ARMA(1,1) process. Based on this result, the reference value required in the design process of the CUSUM (Cumulative sum) control chart is appropriately considered by considering the type of the time series model of the process data of the CUSUM control chart that can detect small mean changes in the process and the width of the process mean change of interest. It was confirmed through simulation that it should be selected and used.

A CUSUM Chart for Detecting Mean Shifts of Oscillating Pattern (진동 패턴의 평균 변화 탐지를 위한 누적합 관리도)

  • Lee, Jae-June;Kim, Duk-Rae;Lee, Jong-Seon
    • The Korean Journal of Applied Statistics
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    • v.22 no.6
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    • pp.1191-1201
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    • 2009
  • The cumulative sum(CUSUM) control charts are typically used for detecting small level shifts in process control. To control an auto-correlated process, the model-based control methods can be employed, in which the residuals from fitting a time series model are applied to the CUSUM chart. However, the persistent level shifts in the original process may lead to varying mean shifts in residuals, which may deteriorate detection performance significantly. Therefore, in this paper, focussing on ARMA(1,1), we propose a new CUSUM type control method which can detect the dynamic mean shifts in residuals especially with oscillating pattern effectively and, through the simulation study, evaluate its performance by comparing with other various CUSUM type control methods introduced so far.

반도체 공정 신호의 이상탐지 및 분류를 위한 자기구상지도 기반 기법에 관한 연구

  • Yun, Jae-Jun;Park, Jeong-Sul;Baek, Jun-Geol
    • Proceedings of the Korean Vacuum Society Conference
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    • 2011.02a
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    • pp.36-36
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    • 2011
  • 반도체 공정 신호는 주기 신호와 비주기 신호로 구분된다. 특정 패턴을 가지는 주기 신호는 해당 파라미터(parameter)에 대해서 패턴 매칭을 수행하여 관리하는 연구가 진행되고 있다. 반면 비주기 신호 데이터의 경우에는 패턴 매칭 방법을 수행할 수 없다. 또한 반도체 공정에서 얻을 수 있는 두 개 타입의 데이터는 그 파라미터가 방대하기 때문에 현재 실제 공정에 적용되고 있는 방식인 각각 하나의 파라미터에 대해 관리도(control chart)를 구성해 관리하는 것은 많은 비용과 시간의 낭비를 초래한다. 따라서 두 타입 데이터의 여러 개의 파라미터를 동시에 관측할 수 있고 파라미터간의 내재된 상관관계를 고려할 수 있는 장점을 가진 분석 기법에 대한 연구가 필요하다. 주기 신호의 이상탐지를 위한 기존 연구는 신호를 구간으로 나누어 구간별로 SPC 차트적용 시키는 방법, 각 시점 마다 측정되는 값을 하나의 변수로 고려하여 Hotelling's T square, PCA, PLS 등과 같은 다변량 통계 분석을 적용 시키는 방법들이 제시되어 왔다. 이러한 방법들은 다양한 특성을 가지는 주기신호를 분석하고 이상을 탐지 하는데 많은 한계점을 가진다. 이에 본 논문은 다양한 형태를 가지는 신호의 특성을 반영하여 자기구상지도를 기반으로 신호의 분류와 공정의 이상을 탐지하는 기법을 제안한다. 제안하는 기법은 자기구상지도를 이용하여 복잡한(고차원, 시계열) 신호를 2차원 상의 노드로 맵핑시킴으로써 신호의 특질(feature)을 추출하고 새로 표현된 신호의 특질을 기반으로 Logistic regression을 적용시켜 이상을 탐지 한다. 다양한 이상 상황을 가진 반도체 공정 신호를 사용하여 제안한 이상탐지 성능을 평가하였다.

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Model Parameter Based Fault Detection for Time-series Data (시계열을 따르는 공정데이터의 모델 모수기반 이상탐지)

  • Park, Si-Jeo;Park, Cheong-Sool;Kim, Sung-Shick;Baek, Jun-Geol
    • Journal of the Korea Society for Simulation
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    • v.20 no.4
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    • pp.67-79
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    • 2011
  • The statistical process control (SPC) assumes that observations follow the particular statistical distribution and they are independent to each other. However, the time-series data do not always follow the particular distribution, and most of cases are autocorrelated, therefore, it has limit to adopt the general SPC in tim series process. In this study, we propose a MPBC (Model Parameter Based Control-chart) method for fault detection in time-series processes. The MPBC builds up the process as a time-series model, and it can determine the faults by detecting changes parameters in the model. The process we analyze in the study assumes that the data follow the ARMA (p,q) model. The MPBC estimates model parameters using RLS (Recursive Least Square), and $K^2$-control chart is used for detecting out-of control process. The results of simulations support the idea that our proposed method performs better in time-series process.

Change point estimators in monitoring the parameters of an IMA(1,1) model (누적이동평균(1,1) 모형에서 공정 변화시점의 추정)

  • Lee, Ho-Yun;Lee, Jae-Heon
    • Journal of the Korean Data and Information Science Society
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    • v.20 no.2
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    • pp.435-443
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    • 2009
  • Knowing the time of the process change could lead to quicker identification of the responsible special cause and less process down time, and it could help to reduce the probability of incorrectly identifying the special cause. In this paper, we propose the maximum likelihood estimator (MLE) for the process change point when a control chart is used in monitoring the parameters of a process in which the observations can be modeled as a IMA(1,1).

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Analysis of Convergent Influence of Organizational Justice, Self Esteem and Self Efficacy on Occupational Stress among Some Regional General Hospital Administrative Staff (일부지역 종합병원 행정직원의 조직공정성, 자아존중감 및 자기효능감이 직무스트레스에 미치는 융복합적 영향 분석)

  • Bae, Sang-Yun;Kim, Seung-Hee
    • Journal of Digital Convergence
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    • v.16 no.5
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    • pp.309-315
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    • 2018
  • The study analyzed convergent influence on occupational stress(KOSS-SF: Korean Occupational Stress Scale-Short Form) and its association with Organizational Justice(OJ), Self Esteem(RSE :Rosenberg Self-Esreem) and Self Efficacy(GSE: Generalized Self-Efficacy) among some regional General Hospital Administrative Staff(GHAS). The survey was administered to 221 staff from 11 general hospitals located in J city from Nov. 1st, 2016 to Jan. 31st, 2017, by structured self-administered questionaries. Occupational stress was negatively correlated with two sub-domains of OJ, RES and GSE. With the analysis of covariance structure, we identified the causal relationship of OJ, RES, GSE and occupational stress among GHAS. The study found the higher OJ, RES and GSE tend to decrease occupational stress. The results indicate that the efforts, to increase OJ, RSE and GSE, are required to decrease the occupational stress of GHAS. The results are expected to be useful for organization & HR management to decrease the occupational stress of GHAS. In the following study, the analysis about convergent additional factors of influence on occupational stress of GHAS will be needed.

Change Point Estimators in Monitoring the Parameters of an AR(1) plus an Additional Random Error Model

  • Lee, Jae-Heon;Lee, Ho-Yun
    • Journal of the Korean Data and Information Science Society
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    • v.18 no.4
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    • pp.963-972
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    • 2007
  • When a control chart signals that a special cause is present, process engineers must initiate a search for and an identification of the special cause. Knowing the time of the process change could lead to identify the special cause more quickly, and to take the appropriate actions immediately to improve quality. In this paper, we propose the maximum likelihood estimator (MLE) for the process change point when a control chart is used in monitoring the parameters of a process in which the observations can be modeled as a first-order autoregressive(AR(1)) process plus an additional random error.

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