• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.102-102
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• 2012

본 연구는 산업계 및 학계에서 많은 연구와 응용이 이루어지고 있는 스퍼터링 기술에 관한 것으로, 타겟의 사용효율 및 스퍼터링된 입자의 이온화, 에너지 증대의 관점에서 새로운 방식으로 접근한 스퍼터링 기술에 관한 것이다. 본 공정 연구는 기존의 마그네트론 스퍼터링과는 달리, 독립적인 플라즈마를 생성하고 이를 (-)전압이 인가된 스퍼터링 타겟으로 유도하여 2차 방전을 일으킴과 동시에 생성 입자의 이온화 및 에너지 가능하도록 한 것이다. 플라즈마 발생부에서는 $10^{13}cm^{-3}$ 이상의 고밀도 Ar 플라즈마를 생성하고, 이를 자장을 통하여 스퍼터링 타겟으로 균일하게 수송하며, 스퍼터링 전극에 인가된 (-)전압에 의하여 이온들이 스퍼터링을 발생시킨다. 스퍼터링 전류는 생성된 플라즈마 발생부의 방전전류에만 비례하며, 스퍼터링에 인가되는 전압과는 독립적으로 작용 가능하다. 그리고 기판의 박막 증착률은 스퍼터링 전류에 보다는, 스퍼터링 타겟에 인가한 전압에 따라 변화하며, 기판에 도달하는 이온의 전류 및 입자의 량은 플라즈마 발생부의 플라즈마 전류량과 인가 스퍼터링 전압에 관계하여 변한다. 이 방식으로 이용할 경우, 스퍼터링된 입자의 양과 이온화률을 독립적으로 제어할 수 있어, 기존의 마그네트론 스퍼터링 공정 대비하여 더 넓은 공정 윈도우를 확보하는 것이 가능하며, 또한 기존 마그네트론 스퍼터링에서 문제가 되고 있는 타겟 사용 효율을 높일 수 있는 가능성을 볼 수 있었다.

• Proceedings of the Korea Air Pollution Research Association Conference
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• 2003.05b
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• pp.203-204
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• 2003

광화학 스모그 현상은 전 세계를 비롯하여 서울에서도 새로운 사회 현안으로 부각되고 있다 (Ghim and Chang, 2000). 광화학 반응에 의해 오존 농도가 증가할 수 있고, 광화학 반응으로 생성된 이차 에어로졸은 시정을 악화시킨다. 광화학 반응에 의해 생성된 이차 에어로졸은 대부분이 미세입자이다. 이차 에어로졸과 오존은 NOx와 VOCs (volatile organic compounds)같은 전구물질 사이의 복잡한 반응으로부터 생성된다. 그러므로 서울의 광화학 스모그 발생을 제어하기 위해서는 오존과 미세입자의 특성을 이해하는 것이 필수적이다. (중략)

• Korean Chemical Engineering Research
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• v.53 no.1
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• pp.78-82
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• 2015

Hollow silica particles were prepared using sodium silicate and organic templates. Polystyrene latex (PSL) particles produced by dispersion polymerization were used as organic templates. PSL particles ranged from $1{\mu}m$ to $3{\mu}m$ in diameter were synthesized by adjusting the amount of 2,2'-azobisisobutyronitrile (AIBN). The PSL/$SiO_2$ core-shell particles were prepared by coating of silica nanoparticles originated from sodium silicate using sol-gel method. The organic templates were removed by the organic solvent, tetrahydrofuran (THF). Morphology of hollow silica particles was investigated with respect to types of the reaction medium and pH during the process. By changing the solvent from ethanol to water, hollow silica particles were successfully formed. Hollow silica particles with the uniform shell thickness were produced at low pH as well. The reflectivity of the as-prepared silica particles was measured in the range of the wavelength of UV and visible light. Hollow silica particles showed much better reflective properties than the commercial light reflector, Insuladd.

• Journal of the korean Society of Automotive Engineers
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• v.8 no.2
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• pp.1-12
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• 1986

입자상물질을 저감시키는 방법은 크게 두 가지로 나누어진다. 하나는 기관내에서 연소조건을 개 선하여 연소방응시 입자상물질이 가능한한 적게 생성되도록 하는 기관개량(Engine Modification) 방법 즉, 실린더 내에서의 저감기술(In Cylinder Control Techniques)이며, 다른 하나는 기관내에 서 생성된 입자상물질이 대기중에 배출되기 전에 배기관으로부터 직접 제거하는 기술이다. 보통 실린더 내에서의 저감기술이 가장 바람직한 방법으로 지금까지는 이 분야의 기술이 많이 개발 되어 왔으나 디이젤자동차에서 배출되는 입자상물질의 허용기준이 강화됨에 따라 기관 내에서의 저감기술만으로는 목표달성이 어렵기 때문에 그 후처리기술이 필요하게 되었다. 여기서는 최근 까지 연구된 저감장치에 관하여 간단히 소개하고 선진국에서 실제 자동차에 부착사용되고 있거나 가장 효율적이며 사용가능성이 높아 연구되고 있는 입자상물질 필터 및 트랩과 그 재생장치에 대하여 상세히 기술하고자 한다.

• Journal of the Korean Vacuum Society
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• v.10 no.2
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• pp.275-281
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• 2001

We used the discrete-sectional model to analyze the particle growth by coagulation of particles in silane plasma reactor, considering the Gaussian distribution function for particle charges. The effects of process conditions such as monomer size and mass generation rate of monomers on particle growth in plasma reactor were analyzed theoretically/ Based on the Gaussian distribution function of particle charges, the large particles of more than 40 nm in size are almost found to be charged negatively, but some fractions of small, tiny particles are in neutral state or even charged positively. As the particle size and surface area increase with time by particle coagulation, the number of charges per particle increases with time. As the large particles are generated by particle coagulation, the particle size distribution become bimodal. The results of discrete-sectional model for the particle growth in silane plasma reactor were in close agreement with the experimental results by Shiratani et al. [3] for the same plasma conditions. We believe the model equations for the particle charge distribution and coagulation between particles can be applied to understand the nano-sized particle growth in plasma reactor.

• Journal of Energy Engineering
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• v.6 no.1
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• pp.77-86
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• 1997

In this study, numerical computations were performed to scrutinize the effect of the size of coal particles on reactive flow fields and concentration distribution of product gases for five cases with four different particle sizes (40 $\mu\textrm{m}$, 60 $\mu\textrm{m}$, 100 $\mu\textrm{m}$, 120 $\mu\textrm{m}$, 140 $\mu\textrm{m}$) in an axisymmetric cylindrical coal gasifier in which Alaska Usibelli subbituminous coals were gasified. Predictions showed that coal particle size affected the concentration distribution of product gases. When coals of 100 $\mu\textrm{m}$ were gasified, the maximum average concentrations of major products, H$_2$and CO, were predicted at the exit of the gasifier. The average mole fractions of CO and H, were shown to be 0.62, and 0.16 (dry basis, inert free), respectively. The cold gas efficiency of 83% was also predicted for the same particle size of 100 $\mu\textrm{m}$.

• Fire Science and Engineering
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• v.30 no.1
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• pp.43-48
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• 2016

In this study, the experiment to confirm the risks of particulate material was carried out as a precedent study for developing the toxicity evaluation method of combustion products including the toxicity of particulate material. In the experiment, the test result of filtering and exposing particulate material among combustion products and that of exposing combustion products including particulate material were compared and analyzed by analyzing changes in average movement stop time according to the installation of Membrane filter between the stirring box and test box through the gas toxicity test of the same specimen to filter particulate material among combustion products. As the test result, in case of installing a filter, the average movement stop time of an experimental rat increased by up to 264% in case of lumber specimen and up to 179% in case of urethane specimen. Through such result, the necessity of identifying the toxicity of particulate material and carrying out quantitative toxicity test for particulate material was confirmed.

• The Journal of the Convergence on Culture Technology
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• v.9 no.3
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• pp.593-599
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• 2023

Nickel oxide (NiO) nanoparticles were successfully synthesized by a simple liquid phase process for producing ceramics powder using a precursor impregnated with a nickel(II) nitrate hexahydrate aqueous solution in an industrial pulp. The microfibrile structure of the precursor impregnated with nickel nitrate hexahydrate aqueous solution was confirmed by scanning electron microscope (SEM), and the crystal structure and particle size of nickel oxide (NiO) particles produced as the heat treatment temperature of the precursor were analyzed by X-ray diffraction (XRD) and SEM. As a result, it was confirmed through XRD and SEM analysis that the temperature at which the organic material of the precursor is completely thermally decomposed was 495-500℃, and the size and crystallinity of the nickel oxide particles produced increased as the heat treatment temperature increased. The size of the nickel oxide particles obtained by heat treatment at 500-800℃ for 1 hour was 50-200 nm. It was confirmed by XRD and SEM analysis that a NiO crystal phase was formed at a heat treatment temperature of 380℃, only a single NiO phase existed until 800℃.

• The Journal of the Convergence on Culture Technology
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• v.9 no.6
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• pp.855-859
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• 2023

Copper oxide (CuO) nanoparticles were successfully synthesized using a precursor in which industrial starch was impregnated with an aqueous solution of copper (II) nitrate trihydrate. The microstructure of the precursor impregnated with an aqueous solution of copper nitrate trihydrate was confirmed with a scanning electron microscope (SEM), and the particle size and the crystal structure of the copper oxide particles produced as the temperature of the heat treatment of the precursor increased was analyzed by X-ray diffraction (XRD) and the scanning electron microscope (SEM). As a result of the analysis, it was confirmed that the temperature at which the organic matter of the precursor is completely thermally decomposed is 450-490℃, and that the size and crystallinity of the copper oxide particles increased as the heat treatment temperature increased. The size of the copper oxide particles obtained through heat treatment at 500-800℃ during 1 hour was 100nm~2㎛. It was confirmed that the copper oxide crystalline phase is formed at a heat treatment temperature of 400℃, and only the copper oxide single phase existed up to 800℃. And it was also confirmed that the size of particles produced increased as the calcination temperature increased.

• Journal of the Korean Society for Precision Engineering
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• v.1 no.2
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• pp.10-14
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• 1984

연삭가공은 숫돌을 구성하는 하나 하나의 입자가 공작물을 절삭하는 과정이므로 연삭현상을 이해하기 위해서는 먼저 개개 절돈의 절삭현상을 알지 않으면 안된다. 연삭입자의 절삭현상을 해명함에 있어서 기초가 되는 것은 입자와 공작물과의 간섭형상이다. 종래의 연삭 이론은 이와같은 기하학적 간섭형상이 모두 chip이 되어 제거된다(연소입자와 공작물과의 간섭 과정에서는 절삭현상만이 존재한다.)는 가정하에 연삭기구를 해석하려 하였으나 최근에 이르러 상호간섭 조건을 경계조건으로 하여 많은 사람들에 의해 연소입자의 절삭현상을 연구한 결과 연삭입자의 절삭과정은 과도적 절삭임이 밝혀졌다. 이와같은 연삭현상은 새로운 연삭이론에 기초가 될 뿐만아니라 Chip 과 표면생성기구의 관점에서도 극히 중요한 것이 된다.