• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2009.06a
• /
• pp.873-874
• /
• 2009

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2008.06a
• /
• pp.121-122
• /
• 2008

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2008.06a
• /
• pp.125-126
• /
• 2008

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2006.05a
• /
• pp.39.1-39.1
• /
• 2006

• Proceedings of the Korean Society for Technology of Plasticity Conference
• /
• 2007.10a
• /
• pp.100-103
• /
• 2007

A microlens array has been required to improve light conversion efficiency in image sensors. A microlens array can be usually fabricated by photoresist reflow, hot-embossing, micro injection molding, and UV-imprinting. Among these processes, a UV-imprinting, which is operated at room temperature with relatively low applied pressure, can be a desirable process to integrate microlens array on image sensors, because this process provides the components with low thermal expansion, enhanced stability, and low birefringence, furthermore, it is more suitable for mass production of high quality microlens array. In this study, to analyze the optical properties of the wafer scale microlens array integrated image sensor, another wafer scale simulated image sensor chip array was designed and fabricated. An aspherical square microlens was designed and integrated on a simulated image sensor chip array using a UV-imprinting process. Finally, the optical performances were measured and analyzed.

• Proceedings of the Materials Research Society of Korea Conference
• /
• 2009.05a
• /
• pp.58.1-58.1
• /
• 2009

나노 임프린트 리소그래피 기술은 기존의 노광 장비를 이용하는 기존의 리소그래피 공정에 비해 저렴한 공정으로 대면적 패터닝이 가능한 차세대 리소그래피 기술이다. 나노 임프린트 리소그래피는 기존의 나노 리소그래피 기술과는 다르게 기능성 무기물 물질을 직접 패터닝 할 수 있는 기술이다. 본 연구에서는 $TiO_2$ 나노 패턴을 를 기존의 증착, 리소그래피, 식각 등의 공정을 거치지 않고, sol-gel법과 나노 임프린트 리소그래피를 이용하여 직접 전사하는 기술에 대해 연구 하였다. 본 연구에서는 Tetrabutylorthotitanate를 precusor로 하는 ethanol 기반의 $TiO_2$ sol을 제작하여 이용하였다. PDMS mold를 임프린팅용 몰드로 사용하였으며, 이러한 PDMS mold는 노광 기술과 반응성 이온 식각을 이용하여 제작된 master mold로 부터 복제되었다. 제작된 sol을 Si wafer에 spin coating하여 넓게 도포한 후, wafer위에 PDMS mold를 밀착 시킨다. 이후, 5 bar의 압력과 $200^{\circ}C$의 온도에서 나노 임프린트 리소그래피 공정을 진행하여 $TiO_2$ gel 패턴을 형성한다. gel 상태의 $TiO_2$ 패턴을 anealing 공정을 통해 다결정질 TiO2 나노 패턴으로 제작하였다. 제작된 패턴을 scanning electron microscope(SEM)를 이용하여 확인하고, XRD 및 EDX를 이용하여 분석하였다.

• Journal of the Korean Vacuum Society
• /
• v.13 no.1
• /
• pp.39-45
• /
• 2004

Ultraviolet-nanoimprint lithography (UV-NIL) is a promising method for cost-effectively defining nanoscale structures at room temperature and low pressure. A 5${\times}$5${\times}$0.09 in. quartz stamp is fabricated using the etch process in which a Cr film was employed as a hard mask for transferring nanostructures onto the quartz plate. FAS(Fluoroalkanesilane) is used as a material for anti-adhesion surface treatment on the stamp and a thin organic film to improve adhesion on a wafer is formed by spin-coating. The low viscosity resin droplets with a nanometer scale volume are dispensed on the whole area of the coated wafer. The UV-NIL experiments have been performed using the EVG620-NIL. 370 nm - 1 m features on the stamp have been transferred to the thin resin layer on the wafer using the multi-dispensing method and UV-NIL process. We have measured the imprinted patterns and residual layer using SEM and AFM to evaluate the potential of the process.

• KSBB Journal
• /
• v.22 no.6
• /
• pp.433-437
• /
• 2007

A constant desire has been to fabricate nanopatterns for biochip and the Ultraviolet-nano imprint lithography (UV-NIL) is promising technology especially compared with thermal type in view of cost effectiveness. By using this method, nano-scale to micro-scale structures also called nanopore structures can be fabricated on large scale gold plate at normal conditions such as room temperature or low pressure which is not possible in thermal type lithography. One of the most important methods in fabricating biochips, immobilizing, was processed successfully by using this technology. That means immobilizing proteins only on the nanopore structures based on gold, not on hardened resin by UV is now possible by utilizing this method. So this selective nano-patterning process of protein can be useful method fabricating nanoscale protein chip.

• The Journal of the Korea Contents Association
• /
• v.17 no.11
• /
• pp.221-228
• /
• 2017

This paper aimed to find out the eco-friendly approach enabling to directly print patterns and dye colors on fabrics using leaves of plants. In the research process, I found out the 'eco-printing' which could effectively express unique colors and patterns of plants. While eco-printing can design the patterns and colors of plants in nature using the leaves of plant(Eucalyptus), it is difficult to implement because it is not systematically and academically investigated including the dictionary definition in Korea until now. Thus, I tried to define the eco-printing and natural dyeing using leaves or flowers of plants enabling to get natural patterns and colors and do the experimental research and production using the leaves of Eucalyptus. The leaves of Eucalyptus were arranged on a wool scarf and a silk scarf, tied and applied pressure to them and made pigments penetrate into fabrics by heating or steaming them. This approach is to directly print the patterns using the shapes of plants on fabrics unlike the existing approaches dyeing by extracting dyeing solution from natural materials. Furthermore, the change of colors was attempted by using the color fixers. In accordance with the results of this experimental research, the scarf design differentiated from the existing products could be acquired. It was identified that eco-printing could induce the color variables depending on the conditions of each material and environment. For improving the color variables, various kinds of fabrics and divers kinds of materials which can be easily acquired in a daily life will be investigated and compared. Furthermore, it is expected that the experimental research and production techniques on eco-printing be utilized when starting natural dyeing and the scope of natural dyeing be more expanded.

• Proceedings of the Korean Society of Precision Engineering Conference
• /
• 2012.10a
• /
• pp.273-274
• /
• 2012