• Journal of Sensor Science and Technology
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• v.11 no.6
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• pp.342-349
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• 2002

New formation technique of metal oxide sensing film was proposed m this paper. Silicon wafer with Pt electrodes was used as a substrate for depositing metal Sn film. Metal Sn was deposited in the state of not continuous film but only island state. The samples were prepared to obtain the optimal condition of metal Sn deposition. The resistances of deposited Sn onto Pt electrodes amounted to $1\;k{\Omega}$, $5\;k{\Omega}$, $10\;k{\Omega}$ and $50\;k{\Omega}$, respectively. Also The sample with $1,500\;{\AA}$ thickness of Sn was prepared m order to compare sensing properties between conventional type and proposing type. After deposition of metal Sn, $SnO_2$ was formed by thermal oxidation method for 3 hrs. in $O_2$ ambient at $700^{\circ}C$. Surface morphology, crystal structure and surface roughness of oxidized-sensing film were examined by SEM, XRD, and AFM, respectively. From the results of these analyses, the optimal deposition condition of Sn was that the Pt electrode resistance became $10\;k{\Omega}(300\;{\AA})$. Also, the sensing characteristics of fabricated sensing film for various concentrations of butane, propane and carbon monoxide gases were measured at he operating temperatures of $250^{\circ}C$, $300^{\circ}C$ and $350^{\circ}C$, respectively. Although catalyst as not added to the sensing film, it has exhibited the high sensitivity to all the test gases.

• Journal of Sensor Science and Technology
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• v.10 no.2
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• pp.108-117
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• 2001

A sensor array with 10 discrete sensors integrated on a substrate w3s developed for discriminating the kinds and quantities of inflammable gases, like butane, propane, methane, LPG, carbon monoxide. The sensor array consisted of 10 metal oxide semiconductor gas sensors using the nano-sized $SnO_2$ as base material and had differentiated sensitivity patterns to specific gas. The sensor array was designed with uniform thermal distribution and had also high sensitivity and good reproductivity to low gas concentration through nano-sized sensing materials with different additives. By using the sensing patterns of the sensor array at $400^{\circ}C$, we could reliably discriminate the kinds and quantities of the tested inflammable gases under the lower explosion limit through the principal component analysis(PCA).

• Transactions of the Korean Society of Automotive Engineers
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• v.23 no.5
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• pp.515-523
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• 2015

In this paper, we fabricated and evaluated the gas sensor for the detection of CO gas and $NO_X$ gas among the vehicle exhaust emission gasses. The $SnO_2$ (tin dioxide) layer is used as the detection material, and the thin-film type and the nano-fiber type layers are deposited with various thicknesses using sputtering method and electro spinning method, respectively. The experiments are performed in the chamber where the gas concentration is controlled with mass flow controller. The fabricated devices are applied to the CO and $NO_X$ gas, where the device with the thinner $SnO_2$ layer shows better sensitivity. The nano-fiber has the larger surface area, and the shorter response time and recovery time are obtained. From the experimental results, both types of gas sensors successfully detect CO and $NO_X$ gases, which can be applied to measure those gases from the vehicle emissions.

• Journal of the Korean Institute of Gas
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• v.15 no.4
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• pp.27-32
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• 2011

Management of gas safety is becoming important with increasing use of gas facilities. U-safety system is being promoted as part of national management of gas, and thus real-time and in-situ gas sensor should be developed. Detection method for When the gas sensor is installed in gas conduit, explosion may be likely, because hydrocarbon gases is usually used the difference of thermal resistance between reference and working electrode. Therefore, it is required to detect the hydrocarbons, such as $CH_4$ and CO, at room temperature via electrochemically catalytic reaction. In this study, Pt nanoparticle was doped on the porous gold powder by electrolytic plating method, and then it was used as catalytic electrode for CO oxidation. For Pt/PAu electrode, approximately 21% of CO conversion was obtained. It is noted that Pt/PAu electrode could be used to react the oxidation of hydrocarbon gases at room temperature via applying of external voltage.

• Korean Journal of Materials Research
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• v.20 no.5
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• pp.235-240
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• 2010

We investigated the carbon monoxide (CO) gas-sensing properties of nanostructured Al-doped zinc oxide thin films deposited on self-assembled Au nanodots (ZnO/Au thin films). The Al-doped ZnO thin film was deposited onto the structure by rf sputtering, resulting in a gas-sensing element comprising a ZnO-based active layer with an embedded Pt/Ti electrode covered by the self-assembled Au nanodots. Prior to the growth of the active ZnO layer, the Au nanodots were formed via annealing a thin Au layer with a thickness of 2 nm at a moderate temperature of $500^{\circ}C$. It was found that the ZnO/Au nanostructured thin film gas sensors showed a high maximum sensitivity to CO gas at $250^{\circ}C$ and a low CO detection limit of 5 ppm in dry air. Furthermore, the ZnO/Au thin film CO gas sensors exhibited fast response and recovery behaviors. The observed excellent CO gas-sensing properties of the nanostructured ZnO/Au thin films can be ascribed to the Au nanodots, acting as both a nucleation layer for the formation of the ZnO nanostructure and a catalyst in the CO surface reaction. These results suggest that the ZnO thin films deposited on self-assembled Au nanodots are promising for practical high-performance CO gas sensors.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.40 no.1
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• pp.11-19
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• 2003

A micro sensor array with 4 discrete sensors integrated on a microhotplate was developed for identifying the kinds and quantities of explosive gases. The sensor array consisited of four tin oxide-based thin films with the high and broad sensitivity to the tested explosive gases and uniform thermal distribution on the plate. The microhotplate, using silicon substrate with N/O/N membrane, dangling in air by Al bonding wires, and controlling the thickness by chemical mechanical process (CMP), has been designed and fabricated. By employing the sensitivity signal of the sensor array at 40$0^{\circ}C$, we could reliably classily the kinds and quantities of the explosive gases like butan, propane, LPG, and carbon monoxide within the range of threshold limit values (TLVs), employing principal component analysis (PCA).

• Journal of the Korean Vacuum Society
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• v.18 no.4
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• pp.259-265
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• 2009

We fabricated the field effect transistor using single crystalline ZnO nanowires synthesized by a conventional thermal evaporation method and investigated their basic properties under the various conditions such as ultraviolet irradiation, reducing gas and electrolyte. The typical carrier concentration and mobility of the single crystalline ZnO nanowire with a diameter of 100 nm and length of 5 um were $1.30{\times}10^{18}cm^{-3}$ and $15.6cm^2V^{-1}s^{-1}$, respectively. The current of ZnO nanowire under ultraviolet irradiation significantly increased about 400 times higher as compared to in the darkness. In addition, the ZnO nanowire showed typical sensing characteristics for $H_2$ and CO due to well-known surface reactions and typical current-voltage characteristics under the 0.1 M NaCl electrolyte.

• Journal of the Korean Institute of Gas
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• v.16 no.6
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• pp.128-135
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• 2012

In this paper, we proposed a system and a scenario to raise efficiency of gas safety management by developing wireless ZigBee communication modules, smart-home gas safety appliances and the system suitable for gas safety. Our designed system consists of a micom gas meter, an automatic extinguisher, sensors, and a wall-pad. A micom-gas-meter monitors gas flow, gas pressure, and earthquake. An automatic fire extinguisher checks combustible gas leaks and temperature of $100^{\circ}C$(cut off) and $130^{\circ}C$(fire). Sensors measure smoke and CO gas. In our novel system, a micom-gas meter cut off inner valve with warnings, an automatic fire extinguisher cut off middle valve and spray extinguishing materials, and sensors generate signals when detecting smoke and CO and then take a next action. Gas safety appliances and sensors automatically takes measures, and transmit those information to a wall-pad. The wall-pad again transmits real time information to server. Users can check and manage gas safety situations by connecting BcN server through web or mobile application. We hereby devised scenarios for gas safety and risk management based on the smart, and demonstrated their efficiency through test applied to filed.

• Journal of the Institute of Electronics Engineers of Korea SC
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• v.48 no.3
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• pp.13-20
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• 2011

In this paper, we proposed a system to raise gas safety management by using the wireless communication module and intelligent gas safety appliances. Our designed systems configure a micom-gas meter, an automatic extinguisher, sensors, and a wallpad. A micom-gas-meter monitors gas flow, gas pressure, and earthquake. An automatic fire extinguisher checks gas(combustible) leaks and temperature of $100^{\circ}C$ and $130^{\circ}C$. Sensors measure smoke and CO gas. In our novel system, a micom-gas meter cut off inner valve with warnings, an automatic fire extinguisher cut off middle valve and spray extinguishing materials, and sensors generate signals for smoke and CO when occurring gas risk. Gas safety appliances and sensors takes safety measures, and transmit those signal to a wallpad. The wallpad again transmit signal like events to a control server. Users can connect web pages for gas safety through B-ISDN and control and manage them. We hereby devised scenarios for gas safety and risk management, and demonstrated their effectiveness through experiments.

• Korean Journal of Materials Research
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• v.18 no.12
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• pp.655-659
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• 2008

The NO gas sensing properties of ZnO-carbon nanotube (ZnO-CNT) composites fabricated by the coaxial coating of single-walled CNTs with ZnO were investigated using pulsed laser deposition. Upon examination, the morphology and crystallinity of the ZnO-CNT composites showed that CNTs were uniformly coated with polycrystalline ZnO with a grain size as small as 5-10 nm. Gas sensing measurements clearly indicated a remarkable enhancement of the sensitivity of ZnO-CNT composites for NO gas compared to that of ZnO films while maintaining the strong sensing stability of the composites, properties that CNT-based sensing materials do not have. The enhanced gas sensing properties of the ZnO-CNT composites are attributed to an increase in the surface adsorption area of the ZnO layer via the coating by CNTs of a high surface-to-volume ratio structure. These results suggest that the ZnO-CNT composite is a promising template for novel solid-state semiconducting gas sensors.