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Micro Sensor Away and its Application to Recognizing Explosive Gases  

이대식 (경북대학교 전자전기공학부)
이덕동 (경북대학교 전자전기공학부)
Publication Information
Journal of the Institute of Electronics Engineers of Korea SD / v.40, no.1, 2003 , pp. 11-19 More about this Journal
Abstract
A micro sensor array with 4 discrete sensors integrated on a microhotplate was developed for identifying the kinds and quantities of explosive gases. The sensor array consisited of four tin oxide-based thin films with the high and broad sensitivity to the tested explosive gases and uniform thermal distribution on the plate. The microhotplate, using silicon substrate with N/O/N membrane, dangling in air by Al bonding wires, and controlling the thickness by chemical mechanical process (CMP), has been designed and fabricated. By employing the sensitivity signal of the sensor array at 40$0^{\circ}C$, we could reliably classily the kinds and quantities of the explosive gases like butan, propane, LPG, and carbon monoxide within the range of threshold limit values (TLVs), employing principal component analysis (PCA).
Keywords
Micro sensor array; microhotplate; explosive gases classification; SnO$_2$ thin films;
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Times Cited By KSCI : 1  (Citation Analysis)
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