• Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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• 2018.10a
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• pp.355-356
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• 2018

An interferometer is antenna system composed fo two or more elements that can be used to determine the diretion of arrival (DOA) of a received signal by measuring the relative phase between receiving elements. In order to minimize the error of the direction-finding accuracy in interferometer direction-finding system (DFS), the phase correction is accomplished. In this paper, the several methods for the phase correction are classified and the advantage and disadvantage of those methods are compared.

• Journal of the Korea Institute of Information and Communication Engineering
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• v.22 no.8
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• pp.1076-1082
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• 2018

This paper describes interferometer direction finder which measures the angle of arrival based on calculation of the phase difference of received radio signal from different antennas. Modern Electronic Warfare direction finder uses digital phase difference measuring techniques which have less effect on temperature variation and better performance under low Signal to Noise Ratio environment. In this paper, we analyze acceptable phase difference error for requirement of system's direction finding accuracy and introduce digital phase difference calculation techniques. We have investigated quantitative analysis on phase difference calculation according to sample number, SNR, interference injection. Through the simulation, frequency domain measurement technique is better performance than the time domain one at the environment of low SNR and interference injection. Proposed method can be used to determine the performance of interferometer direction finder.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.21 no.4
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• pp.433-442
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• 2010

In this paper, self-calibration algorithm based on covariance matrix is proposed for compensating amplitude/phase mismatch in multi-baseline interferometer direction finding system. The proposed method is a solution to nonlinear constrained minimization problem which dramatically calibrate mismatch error using space sector concept with cost function as defined in this paper. This method, however, has a drawback that requires an estimated initial angle to determine the proper space sector. It is well known that this type of drawback is common in nonlinear optimization problem. Superior calibration capabilities achieved with this approach are illustrated by simulation experiments in comparison with interferometer algorithm for a varitiety of amplitude/phase mismatch error. Furthermore, this approach has been found to provide an exceptional calibration capabilities even in case amplitude and phase mismatch are more than 30 dB and over $5^{\circ}$, respectively, with sector spacing of less than $50^{\circ}$.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1995.10a
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• pp.437-441
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• 1995

In this paper, the ultra precision positioning system for servo motor and piezo actuator using dual servo loop control has been developed. For positioning system having long distance with ultra precision, the combination of global stage and micro stage is required. Servo moter and ball screw are used as a master stage and piezo acuator as a fine stage. By using this system, an positional precision witin .+-. 30nm has been achieved at dual servo loop control. When using micro stage, an positional precision within .+-. 10nm has been achieved. This result can be applied to develop semiconductor equipment such as wafer stepper.

• Journal of the Korean Society for Precision Engineering
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• v.27 no.3
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• pp.50-57
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• 2010

A high precision air bearing stage has been developed and calibrated. This linear-motor driven stage was designed to transport a glass or wafer with the X and Y following errors in nanometer regime. To achieve this level of precision, bar type mirrors were adopted for real time ${\Delta}X$ and ${\Delta}Y$ laser measurement and feedback control. With the laser wavelength variation and instability being kept minimized through strict environment control, the orthogonality of this type of control system becomes purely dependent upon the surface flatness, distortion, and assembly of the bar mirrors. Compensations for the bar mirror distortions and assembly have been performed using the self-calibration method. As a result, the orthogonality error of the stage was successfully decreased from $0.04^{\circ}$ to 2.48 arcsec.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.25 no.9
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• pp.912-918
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• 2014

In this paper, a VHF band multi channel phase discriminator for direction finding equipment using tripple baseline interferometer technique is proposed. In order to measure simultaneously phase difference between IF(Intermediate Frequency) signals of the direction finding equipment, phase discriminator was designed to have parallel structure with multi channel, the phase correlator of phase discriminator was designed with I, Q mixer for reducing number of components. And digital LUT(Look Up Table) was applied for compensating error of phase discriminator due to phase unbalance of RF components. The measured phase accuracy of fabricated phase discriminator was 2 degree RMS(Root Mean Square) at 30 dB SNR condition, which is superior to the phase accuracy of conventional product.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.45 no.8
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• pp.11-16
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• 2008

In this paper, firstly we made of the rapid thermal processor equipment with the specifically useful structure to measure wafer stress. Secondly we made of the laser interferometry to inspect the wafer surface curvature based on the large deformation theory. And then the wafer surface fringe image was obtained by experiment, and the full field stress distribution of wafer surface comes into view by signal processing with thining and pitch mapping. After wafer was ground by 1mm and polished from the back side to get easily deformation, and it was heated by three to four times thermal treatments at about 1000 degree temperature. Finally the severe deformation between wafer before and after the heat treatment was shown.

• Journal of the Korea Institute of Military Science and Technology
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• v.17 no.4
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• pp.544-550
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• 2014

In this paper, we have proposed a novel method which can analysis the direction finding ambiguity analysis for array geometry in 3 channel and 4 channel multiple baseline direction finding system. Generally, the direction finding ambiguity in the 3 element and 4 element phase interferometer direction finding system is calculated by the simulation for the array spacing or by the probability with the selected antenna array spacing. There are some restrictions to obtain the ambiguity of direction finding system in these methods. The former performs a simulation with every antenna array spacing and the latter calculates the ambiguity with the selected antenna array spacing. To overcome those restrictions, This paper proposed the novel method to calculate the ambiguity using the imaginary antenna array spacing and the phase difference prior to the modular operation in direction finder. Using the proposed method, we obtain the ambiguity probability for each of array geometry composed of multiple baseline. After performing the simulation with the selected antenna array spacing to verify the proposed method, we compared the calculated result data with the simulation data.