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Orthogonality Calibration of a High Precision Stage using Self-calibration Method  

Kim, Ki-Hyun (Mechatronics and Manufacturing Technology Center, Samsung Electronics)
Park, Sang-Hyun (Mechatronics and Manufacturing Technology Center, Samsung Electronics)
Kim, Dong-Min (Mechatronics and Manufacturing Technology Center, Samsung Electronics)
Jang, Sang-Don (Mechatronics and Manufacturing Technology Center, Samsung Electronics)
Publication Information
Journal of the Korean Society for Precision Engineering / v.27, no.3, 2010 , pp. 50-57 More about this Journal
Abstract
A high precision air bearing stage has been developed and calibrated. This linear-motor driven stage was designed to transport a glass or wafer with the X and Y following errors in nanometer regime. To achieve this level of precision, bar type mirrors were adopted for real time ${\Delta}X$ and ${\Delta}Y$ laser measurement and feedback control. With the laser wavelength variation and instability being kept minimized through strict environment control, the orthogonality of this type of control system becomes purely dependent upon the surface flatness, distortion, and assembly of the bar mirrors. Compensations for the bar mirror distortions and assembly have been performed using the self-calibration method. As a result, the orthogonality error of the stage was successfully decreased from $0.04^{\circ}$ to 2.48 arcsec.
Keywords
Orthogonality; Precision Stage; Calibration; Interferometer;
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