• Journal of the Korean Society for Precision Engineering
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• v.23 no.2 s.179
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• pp.43-50
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• 2006

Recently, with rapid development of semiconductor and flat panel display, the manufacturing equipments are required to have large travel range, high productivity, and high accuracy. In this paper, an ultra precision decoupled dual servo (DDS) system is proposed to meet these requirements. And a control scheme for the DDS is studied. The proposed DDS consists of a $XY{\Theta}$ fine stage for handling work-pieces precisely and a XY coarse stage for large travel range. The fine stage consists of four voice coil motors (VCM) and air bearing guides. The coarse stage consists of linear motors and air bearing guides. The DDS is mechanically decoupled between coarse stage and fine stage. Therefore, both stages must be controlled independently and the performance of the DDS is mainly determined by the fine stage. For high performance tracking, the controller of fine stage consists of time delay control (TDC) and perturbation observer while the controller of coarse stage is TDC alone. With these individual controllers, two kinds of dual-servo control strategies are suggested: master-slave type and parallel type. By simulations and experiments, the performances of two dual-servo control strategies are compared.

• Journal of the Institute of Convergence Signal Processing
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• v.8 no.3
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• pp.222-226
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• 2007

In this paper we composed the dual fuzzy rules using each region of specific points and $e-{\Delta}e$ phase plane In order to make dual fuzzy rule base. We composed the fuzzy control rules which can decrease rise time, delay time, maximum overshoot than basic fuzzy control rules. proposed method is alternately use at specific points of $e-{\Delta}e$ phase plane with two fuzzy control rules that is one control rule occruing the steady state error in transient region and another fuzzy control rule use to decrease the steady state error and rapidly converge at the convergence region. Also, two fuzzy control rules in the $e-{\Delta}e$ phase plane decide the change time according to response characteristics of plants. In order to confirm thef proposed algorithm. As the results of experiments through the hydraulic servo motor control system with a DSP processor, We verified that proposed dual fuzzy control rules get the good response compare with the basic fuzzy control rule.

• Proceedings of the KIEE Conference
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• 2002.11c
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• pp.249-252
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• 2002

For a precise position control with the resolution of a micrometer, a dual servo system is constructed using a linear motor and a piezoelectric actuator. The switching mode dual servo algorithm is implemented on a DSP board in which A/D and D/A converters are also mounted. It is shown by the experimental results that the precise position control is performed within a few micrometer of position error by using the dual servo system.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.13 no.12
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• pp.965-971
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• 2003

To reach high areal density, less track pitch is expected and more servo bandwidth is required. One approach to overcoming the problem is by using dual stage servo system. For this system. we have suggested new milliactuator based on the shear mode of piezoelectric elements to drive the head suspension assembly. In this paper, we introduce milliactuator and controller design method, PQ method. PQ method reduces the controller design problem for DISO (dual-input/single-output) systems to two standard controller design problems for SISO ( single-input/single-output) problems. The first part of PQ method directly addresses the issue of actuator output contribution, and the second part allows the use of traditional loop shaping to achieve the overall system performance. This paper shows how to employ the PQ method to meet aggressive close-loop performance specifications for a disk drive system with a VCM and piezoelectric milliactuator.

• Korean Journal of Food Science and Technology
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• v.44 no.3
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• pp.287-292
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• 2012

Light effects on temperature dependence of safflower oil oxidation and tocopherol degradation were studied. Safflower oil was oxidized at 20, 40, 60, or $80^{\circ}C$ for 30, 30, 15, and 6 days, respectively, in the dark or under light. Oil oxidation was evaluated with peroxide value (POV) and conjugated dienoic acid (CDA) value, and tocopherols were monitored by HPLC. Safflower oil consisted of palmitic, stearic, oleic, and linoleic acids at 7.3, 2.0, 14.2, and 76.6%, respectively, with tocopherols at 1157.1 mg/kg. Peroxide and CDA values of safflower oil increased while tocopherol contents decreased with the oxidation time and temperature. Light increased and accelerated the oil oxidation and tocopherol degradation. Temperature dependence of the oil oxidation and tocopherol degradation was higher in the dark rather than under light. The results suggest that temperature control could be more essential in the dark rather than under light with regard to the oxidative stability of safflower oil.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 1993.10a
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• pp.249-254
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• 1993

In order to respond to the increasing demands of ultraprecision positioning mechanism in the field of precision engineering, more accurate stages are needed whose positioning uncertainty should be in the unprecedented level of nanometers, while maintaining a long travek range. For this application, most conventional stage mechanisms are found not suitable, so the concept of dual servo, which uses two different servos, is one of the new design and control strategies being extensively investigated these days, This paper presents a fine motion mechanism as a part of research on the dual servo control. The stage is made of a single structure of elastic flexure, whose xy .theta. motions are induced in the form of elastic deformation activated by three piezoelectric actuators. Experimental results show that the translational and rotational motions of the stage can be controlled with resolutions of 5 nm and 0.1 arcsec, respectively.

• Proceedings of the KSME Conference
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• 2007.05a
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• pp.1115-1119
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• 2007

Five control methods (Speed Control, PID Gain Scheduling, Loop Time Control, Simple PID, Switching Control) have been applied to the control of an Inline Co-axial valve by the simulation of AMESim. The simulation results have shown that the speed control method is the most stable and the fastest way to reach to the set point in the simulation of the flow control. Moreover, It has been found that the five control methods have the almost same characteristics in the power consumption, the counter electromotive force, and the motor angular velocity. According to the analysis results, the fast and stable control characteristics of the speed control method is the most suitable for the flow control using a inline co-axial valve with a DC(BLCD) motor.

• The Transactions of the Korean Institute of Power Electronics
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• v.7 no.6
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• pp.524-530
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• 2002

A control of the body posture and movement is maintained by the vestibular system, vision, and proprioceptors. Afferent signals from those receptors are transmitted to the vestibular nuclear complex, and the efferent signals from the vestibular nuclear complex control the eye movement and skeletal muscle contract. The postural disturbance caused by loss of the vestibular function results in nausea, vomiting, vertigo and loss of craving for life. The purpose of this study is to develop a off-vertical rotatory system for evaluating the function of semicircular canals and otolith organs, selectively, and visual stimulation system for- stimulation with horizontal, vortical and 3D patterns. The Off-vortical axis rotator is composed of a comportable chair, a DC servo-motor with reducer and a tilting table controlled by PMSM. And a double feedback loop system containing a velocity feedback loop and a position feedback loop is applied to the servo controlled rotatory chair system. Horizontal, vertical, and 3D patterns of the visual stimulation for applying head mounted display are developed. And wireless portable systems for optokinetic stimulation and recording system of the eye movement is also constructed. The gain, phase, and symmetry is obtained from analysis of the eye movement induced by vestibular and visual stimulation. Detailed data were described.

• Journal of the Korean Society of Fisheries and Ocean Technology
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• v.31 no.2
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• pp.190-198
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• 1995

Many industrial servo amplifiers employ power transister as output device. Thyristor converters are not adopted to drive servo motor, although thyristor is superior to power TR in power rating, noise immunity, price, and size. The reason is, thyristor has no ability of self turn - off. Here in this paper line commutation, in which thyristor is turned off naturally since cathode voltage is higher than anode as time goes by, is employed to turn on thyristor with a delicate sequence. We developed thyristor servo amplifier which does not cause any damage on thyristor because it is designed to prevent triggering the two SCRs in the same arm simultaneously. And it was made clearly how to trigger SCR without any power line shorting and also harmonic analysis is carried out with the aid of FFT analyzer and proved that it can be used even severe reactive load. The designed circuit operated as a good DC amplifier in conventinal servomotor and the results can be use as a position control system application.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.12
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• pp.163-170
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• 2002

The quality of a precision product, in general, relies on the accuracy and precision of its manufacturing and inspection process. In many cases, the level of precision in the manufacturing and inspection system is also dependent on the positioning capability of tool with respect to the work piece in the process. Recently the positioning accuracy level has reached to the level of submicron and long range of motion is required. For example, for 1 GDARM lithography, 20nm accuracy and 300mm stroke needs. This paper refers to the lithography stage especially to fine stage. In this study, for long stroke and high accuracy, the dual servo system is proposed. For the coarse actuator, LDM (Linear DC Motor) is used and for fine one VCM is used. In this study, we propose the new structure of VCM for the fine actuator. It is 3 axis precision positioning stage for an aligner system. After we perform the optimal design of the stage to obtain the maximum force, which is related to the acceleration of the stage to accomplish throughput of product. And we controlled this fine stage with TDC. So we obtained 50nm resolution. So later more works will be done to obtain better accuracy.