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Yttrium 도핑 IGZO 채널층을 적용한 TFT 소자의 전기적, 안정성 특성 개선

  • Kim, Do-Yeong;Song, Pung-Geun
    • Proceedings of the Korean Vacuum Society Conference
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    • 2015.08a
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    • pp.214.1-214.1
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    • 2015
  • Thin-film transistors (TFTs)의 채널층으로 널리 쓰이는 indium-gallium-zinc oxide (IGZO)는 높은 전자 이동도(약 10 cm2/Vs)를 나타내며 유기 발광 다이오드디스플레이(OLED)와 대면적 액정 디스플레이(LCD)에 필수적으로 사용되고 있다. 하지만, 이러한 재료는 우수한 TFT의 채널층의 특성을 가지는 반면, ZnO 기반 재료이기 때문에 소자 구동에서의 안정성은 가장 큰 문제로 남아있다. 따라서 최근, IGZO layer의 특성을 향상시키기 위한 연구가 다양한 방법으로 시도되고 있다. IGZO의 조성비를 조절하여 전기적 특성을 최적화거나 IGZO layer의 조성 중 Ga을 다른 금속 메탈로 대체하는 연구도 이루어지고 있다. 그러나 IGZO에 미량의 도펀트를 첨가하여 박막 특성 변화를 관찰한 연구는 거의 진행되지 않고 있다. 산화물 TFTs의 전기적 특성과 안정성은 산소 함량에 영향을 많이 받는 것으로 알려져 있으며, 더욱이 TFT 채널층으로 쓰이는 IGZO 박막의 고유한 산소 공공은 디바이스 작동 중 열적으로 활성화 되어 이온화 상태가 될 때 소자의 안정성을 저하시키는 것이 문제점으로 지적되고 있다. 그러므로 본 연구에서는 낮은 전기 음성도(1.22)와 표준전극전위(-2.372 V)를 가지며 산소와의 높은 본드 엔탈피 값(719.6 kJ/mol)을 가짐으로써 산소 공공생성을 억제할 것으로 기대되는 yttrium을 IGZO의 도펀트로 도입하였다. 따라서 본 연구에서는 Y-IGZO의 박막 특성 변화를 관찰하고자 한다. 본 연구에서는 magnetron co-sputtering법으로 IGZO 타깃(DC)과 Y2O3 타깃(RF)를 이용하여 기판 가열 없이 동시 방전을 이용해 non-alkali glass 기판 위에 증착 하였다. IGZO 타깃은 DC power 110 W으로 고정하였으며 Y2O3 타깃에는 RF Power를 50 W에서 110 W까지 증가시키면서 Y 도핑량을 조절하였다. Working pressure는 고 순도 Ar을 20 sccm 주입하여 0.7 Pa로 고정하였다. 모든 실험은 $50{\times}50mm$ 기판 위에 총 두께 $50nm{\pm}2$ 박막을 증착 하였으며, 그 함량에 따른 전기적 특성 및 광학적 특성을 살펴보았다. 또한, IGZO 박막 제조 시 박막의 안정화를 위해 열처리과정은 필수적이다. 하지만 본 연구에서는 열처리를 진행하지 않고 Y-IGZO의 안정성 개선 여부를 보기 위하여 20일 동안 상온에서 방치하여 그 전기적 특성변화를 관찰하였다. 나아가 Y-IGZO 채널 층을 갖는 TFT 소자를 제조하여 소자 구동 특성을 관찰 하였다. Y2O3 타깃에 가해지는 RF Power가 70 W 일 때 Y-IGZO박막은 IGZO박막과 비교하여 상대적으로 캐리어 밀도는 낮은 반면 이동도는 높은 최적 특성을 얻을 수 있었다. 상온방치 결과 Y-IGZO박막은 IGZO박막에 비해 전기적 특성 변화 폭이 적었으며 이것은 Y 도펀트에 의한 안정성 개선의 결과로 예상된다. 투과도는 Y 도핑에 의하여 약 1.6 % 정도 상승하였으며 밴드 갭 내에서 결함 준위로 작용하는 산소공공의 억제로 인한 결과로 판단된다.

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The Use of Galvanostatic Pulse Transient Techniques for Assessing of Corrosion Rate of Reinforcing steel in Concrete (정전류 펄스법을 이용한 콘크리트 내 보강철근의 부식 연구)

  • So, Hyoung-Seok
    • Journal of the Korea Concrete Institute
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    • v.19 no.6
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    • pp.785-793
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    • 2007
  • An electrochemical transient response technique was used to study the corrosion of reinforcing steel bar in the concrete. Analysis of the transient electrochemical potential response in a corrosion interface to an applied current has enabled the separate components that make up the measured transient response to be isolated. These components display a range of resistances and capacitances, dependent on the corrosion conditions of the reinforcing steel, which may be attributed to the corrosion process, to effects within the concrete cover or to film effects on the surface of the concrete. In this technique, the corrosion rate was evaluated by summing all of the resistances in the separate components to obtain an aggregated corrosion resistance. However, it is possible that not all resistances identified are associated with the corrosion process. The results obtained show that the corrosion rates are significant dependent on the assignment of the separate components to either corrosion or to other processes. The assignment of resistive components associated with the corrosion rate can be clearly identified by taking a series of the transient measurement at different lateral distances from the corroding reinforcing steel. An inappropriate selection of measurement time however may result in an additional resistance, which is not associated with corrosion, being included or part of the resistance associated with corrosion being left out.

Fabrication of Hydrogel and Gas Permeable Membranes for FET Type Dissolved $CO_{2}$ Sensor by Photolithographic Method (사진식각법을 이용한 FET형 용존 $CO_{2}$ 센서의 수화젤막 및 가스 투과막 제작)

  • Park, Lee-Soon;Kim, Sang-Tae;Koh, Kwang-Nak
    • Journal of Sensor Science and Technology
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    • v.6 no.3
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    • pp.207-213
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    • 1997
  • A field effect transistor(FET) type dissolved carbon dioxide($pCO_{2}$) sensor with a double layer structure of hydrogel membrane and $CO_{2}$ gas permeable membrane was fabricated by utilizing a $H^{+}$ ion selective field effect transistor(pH-ISFET) with Ag/AgCl reference electrode as a base chip. Formation of hydrogel membrane with photo-crosslinkable PVA-SbQ or PVP-PVAc/photosensitizer system was not suitable with the photolithographic process. Furthermore, hydrogel membrane on pH-ISFET base chip could be fabricated by photolithographic method with the aid of N,N,N',N'-tetramethyl othylenediarnine(TED) as $O_{2}$ quencher without using polyester film as a $O_{2}$ blanket during UV irradiation process. Photosensitive urethane acrylate type oligomer was used as gas permeable membrane on top of hydrogel layer. The FET type $pCO_{2}$ sensor fabricated by photolithographic method showed good linearity (linear calibration curve) in the range of $10^{-3}{\sim}10^{0}\;mol/{\ell}$ of dissolved $CO_{2}$ in aqueous solution with high sensitivity.

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Removal of Phenanthrene by Electrokinetic-Fenton Process in a 2-dimensional Soil System (동전기-펜턴 공정을 이용한 2차원 토양 정화장치에서의 phenanthrene 제거)

  • Park Ji-Yeon;Kim Sang-Joon;Lee You-Jin;Yang Ji-Won
    • Journal of Soil and Groundwater Environment
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    • v.10 no.5
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    • pp.11-17
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    • 2005
  • Characteristics of phenanthrene removal in the Electrokinetic (EK)-Fenton process were investigated in a 2-dimensional test cell in a viewpoint of the effect of gravity and electrosmotic flow (EOF). When the constant voltage of 100 V was applied to this system, the current decreased from 1,000 to 290 mA after 28 days, because soil resistance increased due to the exhaustion of ions in soil by electroosmosis and electromigration. Accumulated EOF in two cathode reservoirs was 10.3 L and the EOF rate was kept constant for 28 days. At the end of operation, the concentration of phenanthrene was observed to be very low near the anode and increased in the cathode region because hydrogen peroxide was supplied from anode to cathode region following the direction of EOP. Additionally, the concentration of phenanthrene decreased at the bottom of the test cell because the electrolyte solution containing hydrogen peroxide was largely transported toward the bottom due to a low capillary action in the soil with high porosity. Average removal efficiency of phenanthrene by EK-Fenton process was 81.4% for 28 days. In-situ EK-Fenton process would overcome the limitations of conventional remediation technologies and effectively remediate the contaminated sites.

CHANGES IN ELECTROPHYSIOLOGICAL PROPERTIES OF NEUROBIOTIN-LABELED PYRAMIDAL CELLS OF HIPPOCAMPUS RECORDED IN VIVO (마취된 흰쥐 해마신경세포에서 Neurobiotin 이온주입으로 인한 신경세포의 생리적 특성의 변화)

  • Lee, Hye-Sook;Lee, Maan-Gee-G.;Kim, Young-Jin;Choi, Byung-Ju
    • Journal of the korean academy of Pediatric Dentistry
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    • v.26 no.2
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    • pp.218-231
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    • 1999
  • Pyramidal cells in the hippocampal CA area were recorded from and filled with neurobiotin in anesthetized rats. The extent of their dendrites and the electropharmacological properties of membrane as well as the effect before and after neurobiotin injection were examined. Pyramidal cells had a high resting membrane potential, a low input resistance, and a large amplitude action potential. A afterhyperpolarization was followed a single action potential. Most pyramidal cells did not display a spontaneous firing. Pyramidal cell displayed weak inward rectification and anodal break excitation in response to negative current injection into the cell. Membrane properties of recorded neurons before and after neurobiotin injection with consecutive current injection were compared. Some properties were significantly increased after labelling(P>0.05); the duration and amplitude of sustained AHP, input resistance, and the number of action potentials for simultaneous intra- and extracellular stimulations. Neurobiotin-filled neurons showed pyramidal morphology. Cells were generally bipolar dendrite processes ramifying in stratum lacunosum-moleculare, radiatum, and oriens.

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Electrocatalytic alcohol oxidation on Pt/ATO nanoparticle (ATO nanoparticle에 담지된 백금 촉매의 전기화학적 알콜 산화 반응에 관한 연구)

  • Lee, Kug-Seung;Park, In-Su;Jung, Dae-Sik;Park, Hee-Young;Sung, Yung-Eun
    • 한국신재생에너지학회:학술대회논문집
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    • 2006.11a
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    • pp.463-466
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    • 2006
  • 직접 알콜 연료전지는 액체인 알콜을 직접 연료전지에 공급하여 연소시킴으로써 높은 효율을 갖는 휴대용전원으로 주목받는 장치이다. 직접 알콜 연료전지에 담지체로 사용되는 탄소 소재는 넓은 표면적과 우수한 전기전도도를 가지고 있다는 장점 있으나 금속 촉매와의 상호작용이 약하여 촉매 활성에 영향을 주지 못한다. 산화물을 담지체로 사용할 경우 이러한 금속-담지체 간의 상호작용으로 인한 촉매활성 증가 및 입자성장 억제의 효과를 기대할 수 있다. 본 연구에서는, 안티몬 도핑된 주석산화물 (Sb-doped SnO2 : ATO nanoparticle)을 직접 메탄올 연료전지용 담지체어 적용하였으며 합성 과정은 다음과 같다. SnC14 5H2O SbC13, NaOH, HCl 수용액 혼합물을 삼구 플라스크에 넣고 $100^{\circ}C$ 온도에서 환류(reflux) 시킨 후 세척 및 건조하여 Air 분위기에서 열처리하였다. 합성된 산화물 수용액에 폴리올 방법으로 합성된 백금 콜로이드를 담지하였으며, 세척과 건조를 통하여 산화물에 담지된 백금 촉매를 촉매를 합성하였다. 촉매의 구조분석을 위해 XRD, TEM을 사용하였으며, 전극촉매로서의 활성을 평가하기 위해 cyclic voltammetry을 평가하였다. 본 연구에서는 백금의 담지량에 따른 Costripping voltammetry특성과 메탄올 및 에탄올 산화 반응 특성에 대하여, 탄소를 담지체로 사용한 Pt/C 촉매와 비교 평가하였다. 알콜 산화반응 평가결과, 주석산화물에 담지한 촉매가 탄소를 담지체로 사용한 촉매보다 우수한 활성을 나타내었으며 활성증가는 메탄올에 비해 에탄올 산화 반응의 경우 크게 증가하였다. 막과 비교해 보았다. $ZrO_2$ 입자는 전도성이며 동시에 친수성을 나타내기 때문에 상용 막에 비하여 함수율 및 수소이온 전도도가 우수하게 나타났다. 복합막의 이러한 물성은 $100^{\circ}C$이상의 고온에서 전해질 막 내의 물 관리를 용이하게 한다. 단위 전지 운전 온도 $130^{\circ}C$, 상대습도 37%의 운전 조건에서도 상당히 우수한 전지 성능을 보임에 따라 고온/저가습 조건에서 상용 Nafion 112 막보다 우수한 막 특성을 나타냄을 확인하였다.소/배후방사능비는 각각 $2.18{\pm}0.03,\;2.56{\pm}0.11,\;3.08{\pm}0.18,\;3.77{\pm}0.17,\;4.70{\pm}0.45$ 그리고 $5.59{\pm}0.40$이었고, $^{67}Ga$-citrate의 경우 2시간, 24시간, 48시간에 $3.06{\pm}0.84,\;4.12{\pm}0.54\;4.55{\pm}0.74 $이었다. 결론 : Transferrin에 $^{99m}Tc$을 이용한 방사성표지가 성공적으로 이루어졌고, $^{99m}Tc$-transferrin의 표지효율은 8시간까지 95% 이상의 안정된 방사성표지효율을 보였다. $^{99m}Tc$-transferrin을 이용한 감염영상을 성공적으로 얻을 수 있었으며, $^{67}Ga$-citrate 영상과 비교하여 더 빠른 시간 안에 우수한 영상을 얻을 수 있었다. 그러므로 $^{99m}Tc$<

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Modeling of the dynamic behavior of a 12-V automotive lead-acid battery (12V 차량용 납축전지의 동적 거동 모델링)

  • Kim, Sung Tae;Lee, Jeong Bin;Kim, Ui Seong;Shin, Chee Burm
    • Journal of Energy Engineering
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    • v.22 no.2
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    • pp.175-183
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    • 2013
  • For the optimal design of the vehicle electric system, it is important to have a reliable modeling tool to predict the dynamic behavior of the automotive battery. In this work, a one-dimensional modeling was carried-out to predict the dynamic behaviors of a 12-V automotive lead-acid battery. The model accounted for electrochemical kinetics and ionic mass transfer in a battery cell. In order to validate the modeling, modeling results were compared with the experiment data of the dynamic behaviors of the lead-acid batteries of two different capacities that were mounted on the automobiles manufactured by Hyundai Motor Company. The discharge behaviors were measured with various discharge rates of C/3, C/5, C/10, C/20 and combination. And dynamic behaviors of charge and discharge were measured. The voltage curves from the experiment and simulation were in good agreement. Based on the modeling, the distributions of the electrical potentials of the solid and solution phases, and the current density within the electrodes could be predicted as a function of charge and discharge time.

The Influence of Oxygen Gas Flow Rate on Growth of Tin Dioxide Nanostructures (이산화주석 나노구조물의 성장에서 산소가스 유량이 미치는 영향)

  • Kim, Jong-Il;Kim, Ki-Chul
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.19 no.10
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    • pp.1-7
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    • 2018
  • Tin dioxide, $SnO_2$, is applied as an anode material in Li-ion batteries and a gas sensing materials, which shows changes in resistance in the presence of gas molecules, such as $H_2$, NO, $NO_2$ etc. Considerable research has been done on the synthesis of $SnO_2$ nanostructures. Nanomaterials exhibit a high surface to volume ratio, which means it has an advantage in sensing gas molecules and improving the specific capacity of Li-ion batteries. In this study, $SnO_2$ nanostructures were grown on a Si substrate using a thermal CVD process with the vapor transport method. The carrier gas was mixed with high purity Ar gas and oxygen gas. The crystalline phase of the as-grown tin oxide nanostructures was affected by the oxygen gas flow rate. The crystallographic property of the as-grown tin oxide nanostructures were investigated by Raman spectroscopy and XRD. The morphology of the as-grown tin oxide nanostructures was confirmed by scanning electron microscopy. As a result, the $SnO_2$ nanostructures were grown directly on Si wafers with moderate thickness and a nanodot surface morphology for a carrier gas mixture ratio of Ar gas 1000 SCCM : $O_2$ gas 10 SCCM.

Growth of Metal Nano-Particles on Polarity Patterned Ferroelectrics by Photochemical Reaction (광화학적 반응을 이용한 편극 패턴된 강유전체 표면에 금속 나노입자의 증착에 관한 연구)

  • Park, Young-Sik;Kim, Jung-Hoon;Yang, Woo-Chul
    • Journal of the Korean Vacuum Society
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    • v.20 no.4
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    • pp.300-306
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    • 2011
  • We report the surface distribution of metal (Ag, Au) nanoparticles grown on polarity-patterned ferroelectric substrates by photochemical reaction. Single crystal periodically polarity-patterned $LiNbO_3$(PPLN) was used as a ferroelectric substrate. The nanoparticles were grown by ultra-violet (UV) light exposure of the PPLN in the aqueous solutions including metas. The surface distribution of the grown nanoparticles were measured by atomic force microscopy and identification of the orientation of the polarity of the ferroelectric surface was performed by piezoelectric force microscopy. The Ag- and Au-nanoparticles grown on +z polarity regions are larger and denser than that on -z polarity regions. In particlur, the largest and denser Ag-nanoparticles were grwon on the polarity boundary regions of the PPLN while Au-nanoparticles were not specifically grown on the boundary regions. Thus, we found that the size and position of metal nanoparticles grown on ferroelectric surfaces can be controlled by UV-exposure time and polarity pattern structures. Also, we discuss the difference of the surface distribution of the metal nano-particles depending on the polarity of the ferroelectric surfaces in terms of surface band structures, reduced work fucntion, and inhomogeneous electric field distribution.

A CHANGE OF THE SALIVARY FLUORIDE CONCENTRATION AFTER FLUORIDE-CONTAINING TAPE APPLICATION (불소 테잎 적용 후 시간변화에 따른 타액 내 불소농도)

  • Park, Seung-Hyo;Lee, Sang-Ho;Lee, Nan-Young
    • Journal of the korean academy of Pediatric Dentistry
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    • v.36 no.3
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    • pp.377-384
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    • 2009
  • The purpose of this study is to investigate the residual fluoride concentration of fluoride tape in oral cavity which made by spraying NaF on carboxymethylcellulose base. After 1, 3, 5, 7 hours and 1, 2, 3 days of applicating APF gel(60seconds $taste^{(R)}$, 1.23% APF gel, Group I), Fluoride varnish($CavityShield^{TM}$, 5% NaF, Group II) and Fluoride tape(SCMC-T-5, 5% NaF, Trial product, Group III) in oral cavity of 27 healthy adults in their twenties, the result of fluoride concentration in unstimulated whole saliva which measured by using fluoride sensitive electrode made up to following conclusion. 1. Until 7 hours after application in every group, it showed significantly higher fluoride concentration in saliva than baseline value but at 1, 2, 3 days after application, there were no significant differences between measurements and baseline value(p>0.05). 2. Until 7 hours after application at every time, mean fluoride concentration in saliva was higher in the order of Group II, I and III. 3. 1 hour and 3 hours after application, Group II revealed significantly higher fluoride concentration than Group III(p<0.05), but there were no significant differences between Group Ⅰ and Group III in every time.

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