• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.70-70
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• 1999

현재 TFT-LCD에서 주류를 이루고 있는 a-Si 으로는 SXGA급 이상의 LCD를 구현하는 데 그 자체 이동도(0.4~1.0cm2/Vs)의 한계 때문에 poly-Si(100~300cm2/Vs)을 사용하지 않을 수 없다. Poly-Si을 성장시키는 방법으로는 PECVD 방법, SPC 방법, Laser Annealing 방법등이 있으나 아직 이 모든 방법으로는 성장박막의 질, 즉 이동도, 균일성 등이 만족스럽지 못하다. 그 중에서 Laser Annealing 방법으로 저온에서 가장 좋은 막질을 얻고 있으나 균일성 및 생산성 향상면에서 여려움이 제기되고 있다. 따라서 차세대 TFT-LCD의 핵심소재인 poly-Si을 저온에서 유리기판위에 양질의 박막으로 성장시킬 수 있는 박막성장법이 절실하다. 본 연구에서 사용된 실리콘 이온 증착법은 Sidl 이온 상태로 직접 증착되므로 이온 에너지가 직접 결합에 기여하게 되고 동시에 이온 에너지는 전기적으로 제어되므로 박막 형성에 필요한 정정 에너지를 공급할 수 있다. 따라서 종래의 열에너지만을 이용한 방법보다 훨씬 낮은 온도에서 박막을 성장시킬 수 있었다. 3kV의 Cs+에 의해 sputter 된 Si beam- 에너지를 20~100eV, Si- flux를 약 4$\mu$A.cm2로 조절하며, 기판온도 300~45$0^{\circ}C$에서 각각 제조하였다. 30$0^{\circ}C$, 20~50eV에서 poly-Si임을 XRD 분석으로 확인 할 수 있었다.

• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2016.11a
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• pp.155-155
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• 2016

DLC (Diamond like Carbon)는 Diamond와 유사한 물리화학적 특성을 보유한 막으로 고경도 및 우수한 내마모성, 화학적 안정성의 특성을 가지고 있다. DLC는 크게 카본의 막 형성 공정에서 카본 소스에 따라 수소가 포함된 DLC와 무수소 DLC 로 구분된다. Tetrahedral amorphous carbon (ta-C) 박막은 DLC 박막 중에서 가장 다이아몬드와 유사한 특성을 가지는 박막으로, a:C-H에 비해 고온안정성, 높은 경도 (30~80 GPa) 및 내마모 특성이 우수하여, 현재 다양한 응용분야에 적용되고 있으며, 최근에는 고내구성을 보유하면서 전기적 특성을 가지는 기능성 DLC막의 요구가 증대하고 있다. 본 연구에서는 무수소 DLC 형성을 위해 자장필터가 장착된 Filtered Vacuum Arc Source (FVAS)를 자체적으로 개발하여 연구를 수행하였다. FVAS 장비는 카본 이온 발생부와 Plasma Duct 부위, 전자석부위 구성되어 있으며, 본 연구에서는 Plasma Duct 부위의 Bias 제어를 통한 음극에서 기판으로 이동하는 카본이온의 에너지 및 flux 변화를 통해 ta-C 막의 전기적, 기계적 물성 연구를 진행하였다. Plasma Duct Bias 변화는 각 0 ~ 20 V 조건으로 진행하였으며, 물성 평가는 경도 (Hardness), 마찰계수, 전기적 특성에 대한 분석을 진행하였다. 박막의 증착 거동에서는 Plasma Duct bias 변화에 따라 10 V에서 가장 높은 증착 거동을 가지다 감소하는 경향을 확인 하였으며, 박막의 물성 특성 평가 시에도 이와 유사하게 특성의 차이를 관찰하였다. 이는 음극부위에서 형성된 카본이온이 기판에 도달 시에 Plasma Duct Bias 변화에 따라 이온의 Flux 및 에너지 변화로 인한 박막의 밀도 및 ta-C 막의 물성 변화로 예상되며, 이를 분석하기 위해 라만 분석법을 통해 증명하였다.

• Journal of Surface Science and Engineering
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• v.43 no.3
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• pp.159-164
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• 2010

Surface roughness of deposited or etched film strongly depends on ion bombardment. Relationships between ion bombardment variables and surface roughness are too complicated to model analytically. To overcome this, an empirical neural network model was constructed and applied to a deposition process of silicon nitride (SiN) films. The films were deposited by using a pulsed plasma enhanced chemical vapor deposition system in $SiH_4$-$NH_4$ plasma. Radio frequency source power and duty ratio were varied in the range of 200-800 W and 40-100%. A total of 20 experiments were conducted. A non-invasive ion energy analyzer was used to collect ion energy distribution. The diagnostic variables examined include high (or) low ion energy and high (or low) ion energy flux. Mean surface roughness was measured by using atomic force microscopy. A neural network model relating the diagnostic variables to the surface roughness was constructed and its prediction performance was optimized by using a genetic algorithm. The optimized model yielded an improved performance of about 58% over statistical regression model. The model revealed very interesting features useful for optimization of surface roughness. This includes a reduction in surface roughness either by an increase in ion energy flux at lower ion energy or by an increase in higher ion energy at lower ion energy flux.

• Journal of Hydrogen and New Energy
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• v.31 no.5
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• pp.489-497
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• 2020

The Li-ion battery is considered to be one of the potential power sources for electric vehicles. In fact, the efficiency, reliability, and cycle life of Li-ion batteries are highly influenced by their thermal conditions. Therefore, a novel thermal management system is highly required to simultaneously achieve high performance and long life of the battery pack. Basically, thermal modeling is a key issue for the novel thermal management of Li-ion battery systems. In this paper, as a basic study for battery thermal modeling, temperature distributions inside the simple Li-ion battery pack (comprises of nine 18650 Li-ion batteries) under a 1C discharging condition were investigated using measurement and computational fluid dynamics (CFD) simulation approaches. The heat flux boundary conditions of battery cells for the CFD thermal analysis of battery pack were provided by the measurement of single battery cell temperature. The temperature distribution inside the battery pack were compared at six monitoring locations. Results show that the accurate estimation of heat flux at the surface of single cylindrical battery is paramount to the prediction of temperature distributions inside the Li-ion battery under various discharging conditions (C-rates). It is considered that the research approach for the estimation of temperature distribution used in this study can be used as a basic tool to understand the thermal behavior of Li-ion battery pack for the construction of effective battery thermal management systems.

• Proceedings of the Korean Vacuum Society Conference
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• 2000.02a
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• pp.117-117
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• 2000

높은 광학적 투과성과 전기전도성을 갖는 ITO film은 solar cell같은 optoelectronic device나 휴대용 소형 TV, flat panel display 등의 투명전극으로 그 응용 분야가 광범위하여 많은 연구가 수행되어져 왔다. 기판으로서 유리를 사용할 때 생기는 활용범위 제한을 극복하고자 최근 유기물 위에 증착이 가능한 저온 증착방법에 대한 연구가 활발히 이루어지고 있다. 그 가운데 이온빔과 같은 energetic한 beam을 이용한 박막의 제조는 기판을 플라즈마 발생지역으로부터 분리시켜 이온빔의 flux 및 에너지, 입사각 등의 자유로운 조절을 통해 상온에서도 우수한 성질의 박막형성 가능성이 제시되어 지고 있다. ITO박막을 형성하는 방법 중 스프레이법이나 CVD법과 같은 화학적 증착방법은 증착시 350-50$0^{\circ}C$의 고온이 필요하고 현재 가장 많이 응용되어 지고 있는 sputter법은 15$0^{\circ}C$정도의 가열이 필요하므로 앞으로 응용가능성이 매우 커서 많은 연구가 진행중인 플라스틱과 아크릴 같은 flexible 한 기판위 증착에 적용이 불가능하다. 본 실험에서는 IBAD(Ion Beam Assisted Deposition)법을 이용하여 저온 ITO film을 유리와 유기막위에 증착하는 연구를 수행하였다. 유기막위에 증착된 ITO는 보다 가볍고 충격에 강하고 유리에 못지 않은 투과성을 가지고 있으나 현재 film의 quality 향상에 대한 요구가 증대되어 지고 있는 실정이다. 따라서, 본 실험에서는 dual oxygen ion gun의 조건변화에 따른 ITO film의 특성변화를 관찰하였다. 고정된 증？율에 한 개 ion gun에 ion flux를 고정시킨 후 또 다른 ion gun에서 발생하는 oxygen radical의 영향을 조사하였으며 oxygen radical의 rf power에 따른 변화는 OES(Optical emission spectroscopy)를 사용하였다. 너무 적은 oxygen ion beam flux나 oxygen radical은 film의 전도도 및 투과도를 저하시켰고 반면 너무 과도한 flux의 증가 시는 전도도는 감소하였고 투과도는 증가하는 경향을 보였다. 기판에 도달하는 oxygen ion flux는 faraday cup을 이용하여 측정하였으며 증착된 ITO film은 XPS, UV-spectrometer, 4-point probe를 이용하여 분석하였다.

• Journal of the Korean Vacuum Society
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• v.18 no.3
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• pp.186-196
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• 2009

Since it is difficult to extract a high flux ion beam directly at an energy of hyperthermal range ($1{\sim}100\;eV$), especially, lower than 50 eV, the ions should be neutralized into neutral particles and extracted as a neutral beam. A plasma source required to generate and efficiently transport high flux hyperthermal neutral beams should be easily scaled up and produce a high ion density (${\ge}10^{11}\;cm^{-3}$) even at a low working pressure (${\le}$ 0.3 mTorr). It is suggested that the required plasma source can be realized by Electron Cyclotron Resonance (ECR) plasmas with diverse magnetic field configurations of permanent magnets such as a planar ECR plasma source with magnetron field configuration and cylindrical one with axial magnetic fields produced by permanent magnet arrays around chamber wall. In both case of the ECR sources, the electron confinement is based on the simple mirror field structure and efficiently enhanced by electron drifts for producing the high density plasma even at the low pressure.

• Journal of the Korean Society of Radiology
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• v.11 no.2
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• pp.157-165
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• 2017

The active transport characteristics of $K^+$ and $Na^+$ pumping system of cell membrane model which irradiated by high energy x-ray(linac 6MeV) was investigated. The cell membrane model used in this experiment was a $Na^+$ type sulfonated copolymerized membrane of styrene and divinylbenezene. The initial flux of the ion was increased with increase of both $H^+$ ion concentration. In this experiment range(pH 1.5-5, temperature $36.5^{\circ}C$), the initial flux of $K^+$ which was not irradiated by radiation was found to be from $2.09{\times}10^{-4}$ to $1.32{\times}10^{-3}mole/cm^2{\cdot}h$ and that of $Na^+$ from $7.09{\times}10^{-4}$ to $1.09{\times}10^{-3}mole/cm^2{\cdot}h$. the initial flux of $K^+$ which was irradiated by radiation was found to be from $21.0{\times}10^{-4}$ to $16.7{\times}10^{-3}mole/cm^2{\cdot}h$ and that of $Na^+$ from $62.0{\times}10^{-4}$ to $20.6{\times}10^{-3}mole/cm^2{\cdot}h$. The ratio $K^+$/$Na^+$ of membrane was about 1.10. And the driving force of pH of irradiated membrane was significantly increased about 9-20 times than membrane which was not irradiated. As active transport of $K^+$ and $Na^+$ of cell membrane model were abnormal, cell damages were appeared at cell.

• Membrane Journal
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• v.32 no.4
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• pp.209-217
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• 2022

Ion exchange membrane (IEM) is an important class of membrane applied in batteries, fuel cells, chloride-alkali processes, etc to separate various mono and multivalent ions. The membrane process is based on the electrically driven force, green separation method, which is an emerging area in desalination of seawater and water treatment. Electrodialysis (ED) is a technique in which cations and anions move selectively along the IEM. Anion exchange membrane (AEM) is one of the important components of the ED process which is critical to enhancing the process efficiency. The introduction of cross-linking in the IEM improves the ion-selective separation performance due to the reduction of free volume. During the desalination of seawater by reverse osmosis (RO) process, there is a lot of dissolved salt present in the concentrate of RO. So, the ED process consisting of a monovalent cation-selective membrane reduces fouling and improves membrane flux. This review is divided into three sections such as electrodialysis (ED), anion exchange membrane (AEM), and cation exchange membrane (CEM).

• Korean Chemical Engineering Research
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• v.57 no.3
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• pp.338-343
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• 2019

The water transport and water content of the electrolyte membrane greatly affect the performance of the membrane in PEMFC(Proton Exchange Membrane Fuel Cell). In this study, the parameters (electroosmotic coefficient, water diffusion coefficient) of polymer membranes for water transport were measured by a simple method, and water flux and ion conductivity were simulated by using a model equation. One dimensional steady state model equation was constructed by using only the electro-osmosis and diffusion as the driving force of water transport. The governing equations were simulated with MATLAB. The electro-osmotic coefficient of $144{\mu}m$ thick polymer membranes was measured in hydrogen pumping cell, the value was 1.11. The water diffusion coefficient was expressed as a function of relative humidity and the activation energy for water diffusion was $2,889kJ/mol{\cdot}K$. The water flux and ion conductivity results simulated by applying these coefficients showed good agreement with the experimental data.

• Journal of the Korean Society of Radiology
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• v.15 no.2
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• pp.229-238
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• 2021

The selective permeate transport characteristics of iodine ion at follicle cell membrane model in thyroid which irradiated by high energy x-ray(linac 6 MV) was investigated. The follicle cell membrane model used in this experiment was a polysulfonated copolymerized membrane of poly(4-vinylpyridine-co-acrylonitrile:VP-AN). The difference of membrane thickness [2 mole AN%(w/w)], fixed carrier concentration[VP-AN%(w/w)], OH- concentration were occurred at difference of I- concentration and quantity of thyroid hormone, respectively. The tensile strength in fixed carrier concentration[VP-AN% (w/w): 0-62 %] of irradiated membrane was found to be decreased about 1.2-1.8 times than non-irradiated membrane. The I- selective permeate initial flux with increase of membrane thickness [2mole AN%(w/w)], fixed carrier concentration[VP-AN%(w/ w)], OH- concentration in irradiated membrane were found to be decreased about 2.1-4.5 times, about 2.2-2.5 times, about 2.1-2.67 times than non-irradiated membrane, respectively. As a result, the quantity of thyroid hormone was decreased at irradiated membrane than non-irradiated membrane. The decrease of thyroid hormone was occurred at hypothyroidism and hyperthyroidism, thyroid cancer, and so on. As the thyroid hormone in cell membrane model were abnormal, cell damages were appeared at cell.