• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.7 s.100
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• pp.878-884
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• 2005

This paper presents an algorithm for the precision motion control based on the dynamic characteristics of piezoelectric actuators in the inchworm. The dynamic characteristics are identified by the frequency domain modeling technique using the experimental data. For the motion control, the hysteresis behavior is compensated by the inverse hysteresis model. The dynamic stiffness of an inchworm is generally low compared to its driving condition, so mechanical vibration may degenerate the motion accuracy of the inchworm. The Sliding mode controller and the Kalman filter are designed for motion control of the inch-worm.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.15 no.7 s.100
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• pp.871-877
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• 2005

This paper proposes a new modeling scheme to describe the hysteresis between input voltage and displacement of piezoelectric actuators in the inchworm. From the experimental analysis of Piezoelectric actuator behaviors. the hysteresis characteristics including residual displacement can be modeled by second order functions of a maximum Input voltage and preload. Various experiments are performed to demonstrate the effectiveness and validation of the proposed modeling scheme.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.18 no.7
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• pp.756-763
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• 2008

This paper presents an inchworm with three piezoelectric actuators. The dynamic stiffness of the inchworm is generally low compared to its driving condition, so mechanical vibration may degenerate the motion accuracy of the inchworm. The dynamic model of inchworm is identified by curve fitting technique based on the experimental frequency response function. For the precision motion control and low residual vibration of inchworm, driving input signal is designed by using cycloid step input and LQG control technique. Experimental result shows that proposed input shaping method is applicable effectively to the inchworm.

• Journal of the Korean Society for Precision Engineering
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• v.19 no.9
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• pp.179-185
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• 2002

Solid state deformation of PZT is effective for the micron scale displacement. Inch-worm gets large linear displacement by incrementally summing displacements of PZT actuators. Dynamic stiffness of inch-worm is generally low compared to its driving condition due to the small size and light weight of inch-worm. Mechanical vibration induced by low stiffness may degenerate the motion accuracy of the inch-worm. In this paper, dynamic characteristics of the inch-worm are modeled by using the frequency domain curve fitting based on the experimental frequency response function. SMC (sliding mode control) is examined for motion control of the inch-worm. Simulation and experimental results show that the inch-worm with SMC scheme is feasible for the precise displacement device.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2008.11a
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• pp.195-200
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• 2008

This paper presents motion control of the Inchworm composed of the piezoelectric actuators and mechanical elements. Piezoelectric actuator shows nonlinear response characteristics including hysteresis due to the ferroelectric characteristics. This paper proposes feedback control scheme to improve the ability of tracking response to complex input signal and suppress the phenomenon of hysteresis using the sliding mode control technique with the integrator. The sliding mode control system has the limit to minimize both the settle time and overshoot. For making up this limit, this paper also suggests input shaping technique suitable to the inchworm control system.

• Journal of the Korean Society for Precision Engineering
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• v.18 no.8
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• pp.157-163
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• 2001

This paper presents the new linear notion device so called \"inch-werm\" which gets large displacement by incrementally summing small displacements of PZT actuators. Dynamic stiffness of inch-worm is generally low compared to its driving condition due to the requirement of inch-worm like small size and light weight. This low stiffness may degenerate the positional precision of inch-worm. An inch-worm is realized using three PZT actuators, a monolithic moving device and a guide way frame. Finite element method and experimental approach are used to analyse the static and dynamic motion of the designed inch-worm. Command reference input is shaped to reduce the residual vibration of inch-worm. The practical feasibility of inch-worm is also examined by running tests.ing tests.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2001.04a
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• pp.877-880
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• 2001

This paper presents the new linear motion device so called "inch-worm" which gets large displacement by incrementally summing small displacements of PZT actuators. Dynamics stiffness of inch-worm is generally low compared to its driving condition due to the requirement of inch-worm like small size and light weight. This low stiffness may degenerate the positional precision of inch-worm. An inch-worm is realized using three PZT actuators, a monolithic moving device and a guide way frame. Driving input signal is shaped to reduce the residual vibration of inch-worm by LQG controller and cycloid step input. The practical feasibility of inch-worm is also examined by running test.ning test.

• Transactions of the Korean Society for Noise and Vibration Engineering
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• v.19 no.2
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• pp.169-175
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• 2009

This paper presents motion control of the Inchworm composed of the piezoelectric actuators and mechanical elements. Piezoelectric actuator shows nonlinear response characteristics including hysteresis due to the ferroelectric characteristics. This paper proposes feedback control scheme to improve the ability of tracking response to complex input signal and suppress the phenomenon of hysteresis using the sliding mode control technique with the integrator. The sliding mode control system has the limit to minimize both the settle time and overshoot. For making up this limit, this paper also suggests input shaping technique suitable to the inchworm control system.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2003.11a
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• pp.630-637
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• 2003

This paper proposes a new modeling scheme to describe the hysteresis and the dynamic characteristics of piezoelectric actuators in the inchworm and develops a control algorithm for the precision motion control. From the analysis of piezoelectric actuator behaviors, the hysteresis can be described by the functions of a maximum input voltage. The dynamic characteristics are also identified by the frequency domain modeling technique based on the experimental data. For the motion control, the hysteresis behavior is compensated by the inverse hysteresis model. The dynamic stiffness of an inchworm is generally low compared to its driving condition, so mechanical vibration may degenerate the motion accuracy of the inchworm. Therefore, the sliding mode control and the Kalman filter are developed for the precision motion control of the inch-warm. To demonstrate the effectiveness of the proposed modeling schemes and control algorithm, experiment validations are performed.

• Journal of the Korean Society of Manufacturing Technology Engineers
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• v.24 no.4
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• pp.414-420
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• 2015

In this study, the linear quadratic Guassian loop transfer recovery (LQG/LTR) control technique was combined with an integrator and applied to an inchworm having piezoelectric actuators for precise motion tracking. The piezoelectric actuator showed nonlinear response characteristics, including hysteresis, due to its ferroelectric characteristics and the residual displacement phenomenon. This paper proposes a feedback control scheme using the LQG/LTR controller with an integrator to improve the ability to track the response to complex input signals and to suppress the phenomenon of hysteresis and residual vibration. Experimental results show that the developed feedback control system for an inchworm can track the various motion contours quickly without residual vibration or overshoot.