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Motion Control of Inch-worm  

Yun, Jae-Heon (Graduate School of Kumoh National Institute of Technology)
Kim, Yeong-Sik (Dept.of Machanical Engineering, Kumoh National Institute of Technology)
Kim, In-Su (Dept.of Machanical Engineering, Kumoh National Institute of Technology)
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Abstract
Solid state deformation of PZT is effective for the micron scale displacement. Inch-worm gets large linear displacement by incrementally summing displacements of PZT actuators. Dynamic stiffness of inch-worm is generally low compared to its driving condition due to the small size and light weight of inch-worm. Mechanical vibration induced by low stiffness may degenerate the motion accuracy of the inch-worm. In this paper, dynamic characteristics of the inch-worm are modeled by using the frequency domain curve fitting based on the experimental frequency response function. SMC (sliding mode control) is examined for motion control of the inch-worm. Simulation and experimental results show that the inch-worm with SMC scheme is feasible for the precise displacement device.
Keywords
Sliding Mode Control; PZT; Inch-worm; Variable Structure Control;
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