• Korean Journal of Optics and Photonics
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• v.21 no.1
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• pp.33-37
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• 2010

We performed time-domain terahertz (THz) spectroscopy to determine optical constants of highly conductive carbon nanotube (CNT) films. The CNT films have been fabricated on a flexible plastic substrate by using spin-coating or vacuum filtration. We found that the transmission of THz waves can be controlled by manipulating the thickness of the films and by post-treatments. From amplitude and phase information of the transmitted THz waves, we obtain optical constants such as refractive indices and dielectric constants of the CNT films. The frequency dependent dielectric constants show good metallic behaviors, relevant to the Drude free electron models with high plasma frequencies. It is also found that the dielectric constants are higher for the acid-treated films. Finally, the frequency dependent dielectric constants which are free from substrate effects have been demonstrated by using CNT films deposited on cellulose membranes.

• The Journal of Korean Institute of Electromagnetic Engineering and Science
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• v.29 no.3
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• pp.225-232
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• 2018

This paper proposed the optimization method of the extremely low numerical-dispersion finite-difference time-domain (ELND-FDTD) method based on the H(2,4) scheme for wideband and extremely accurate electromagnetic properties of lossy material, which has a constant conductivity and relative permittivity. The optimized values of three variables are calculated for the minimum numerical dispersion errors of the proposed FDTD method. The excellent accuracy of the proposed method is verified by comparing the calculated results of three different FDTD methods and the analytical results of the two-dimensional dielectric cylinder scattering problem.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2003.07b
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• pp.991-994
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• 2003

Electronic Paper용 무기소재로 $TiO_2$ 나노입자를 적용하기 위해서는 분산시 침전문제, 입자의 전기영동 속도향상을 위한 충분한 $\xi-potential$확보, 분산제 첨가시 안정적 결합을 위한 acidic site의 확보등의 문제가 해결되어야 한다. 이를 위해 저온균일침전법으로 $TiO_2$ 나노입자를 제조하였고, 폴리머 체인을 통하여 encapsulation하여 최적의 분산과 전기영동조건 확보를 위한 공정조건에 대해 연구하였다. 실험결과 다양한 분산매에 계면활성제를 1.0wt% 첨가시 유전율상수가 2.5인 분산매에서 가장 좋은 $\xi-potential$을 얻을 수 있었으며 이를 바탕으로 acidic site에 따른 폴리머 체인의 흡착실험 결과 pH $1{\sim}2$의 조건에서 제조된 $TiO_2$ 나노입자의 경우가 체인과의 흡착정도가 가장 좋아 분산특성을 향상시킬 수 있었다.

• Proceedings of the Korean Vacuum Society Conference
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• 1999.07a
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• pp.105-105
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• 1999

차세대 기억소자에서는 집접도의 증가, 고속화, 그리고 미세화에 따라 배선간으 최소선폭이 작아지고, 새로운 다층 배선기술이 요구되는 가운데 층간절연막의 재료와 형성기술은 소자의 특성을 향상시켜주는 중요한 요소로서 열적안정성, 저유전율, 평탄화특성 등에 핵심을 두고 연구되고 있다. 본 연구에서는 5인치 p-Si(100) 위에 FTES와 O2를 precursor로 하고 carrier gas를 Ar gas하여 ICP CVD 방법으로 저유전율의 Fluorocarbonated-SiO2 박막을 형성하였다. 0.1-1kW, 13.56MHz인 rf power를 사용하였으며, 증착은 RT에서 5~10분으로 하였다. 형성된 박막은 FTIR(fourier transform infrared), XPS(x-ray photoelectron spectroscopy), 그리고 ellipsopsometer 등을 이용하여 결합모드와 F농도, 균일도 등을 측정하고, I-V와 C-V 측정장치, 그리고 SERM(scanning electrion microscopy) 등을 이용하여 유전상수, 누설전류, dielectric breakdown voltage, 그리고 박막의 stepcoverage를 측정하였다. 제작된 박막의 신뢰성은 열처리에 따른 전기적 특성으로부터 조사하였다. 형성된 fluorocarbonated 박막 결합모드는 Si-F, Si-O, O-C, C-C와 C-F였고 O2:FTES:Ar 유량을 1sccm:10sccm:6sccm으로 하여 증착한 시료에서 유전율은 2.8이었으며, 누설전류밀도는 8$\times$10-9A/cm2, Breakdown voltage는 10MV/cm 이상, 그리고 stepcoverage는 91%로 측정되었다.

• Korean Journal of Materials Research
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• v.3 no.5
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• pp.476-481
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• 1993

Microwave dielectric properties of $(Na_{1/2}{\;}La_{1/2})TiO_3$ (NLT) ceramics which is an A site complex perovskite structure are investigated. Dense sintered bodies are obtained when calcined at $1000^{\circ}C$ for 4h and then sintered in the temperature range between $1350^{\circ}{\;}and{\;}1450^{\circ}C$. NLT shows the bulk density of $4.95g/\textrm{cm}^3$, relative density of 96.4%, and a simple cubic structure with lattice constant(a) of 3.873$\AA$. Dielectric Constant(${\varepsilon}_r$) and quality factor Q increase as bulk density and average grain size increase respectively. NLT has the dielectric ${\varepsilon}_r=125$, Q=2842(fo=3 GHz), ${\tau}_f=465{\;}ppm/^{\circ}C$ when sintered at $1400^{\circ}C$ for 4h.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.38-38
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• 2008

무선 통신에 사용되는 기판에서 passive device는 대부분 기판 위에 개별적으로 표면 실장 되고 있으며 전체 기판면적에 80% 정도를 차지하고 있다. 따라서 기판의 소형화, 경량화를 위하여 많은 면적을 차지하는 수동소자들을 다층인쇄회로기판(multi-layer circuit board)에 내장하는 내장형 수동소자(embedded passive device) 기술이 연구되고 있다. 본 연구원에서 개발한 복합재료는 무기물 충전제 $SrTiO_3$를 사용하였으며, 열가소성 수지로는 cyclo-olefin-polymer계열의 수지를 바탕으로 제작 하였고, 유전율7~7.5이고 유전손실은 0.0045이다. 또한 $SrTiO_3$/유기물 복합재료는 공정온도가 낮고 경제적인 유기물에 높은 유전상수를 갖는 무기물이 분산되어 있는 형태이며, 우수한 유전 특성, 화학적 안정성, 저온 제조공정, 제조단가의 감소, 패키징 크기의 감소 등의 장점을 갖는다. 개발된 재료를 기반으로 Multi-layer 구조를 이용한 다양한 용량대의 capacitor를 구현 하였으며, spiral inductor 와 내장형 spiral inductor를 구현하여 다양한 용량대의 inductor를 구현 하였다. 그리고 각각의 구조에 따른 inductance와 Q factor를 분석 하였으며, Q factor가 100이상인 high Q inductor도 구현하였다. 이렇게 구현된 내장형 수동소자는 기판의 크기의 감소와 제조 단가의 절감, 최소 크기의 기판을 구현하는데 응용이 가능 할 것으로 예상 된다.

• Journal of the Korean Vacuum Society
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• v.7 no.3
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• pp.267-267
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• 1998

The fluorine doped silicon oxide (SiOF) intermetal dielectric (IMD) films have been of interest due to their lower dielectric constant and compatibility with existing process tools. However instability issues related to bond and increasing dielectric constant to water absorption when the SiOF films was exposured to atmospheric ambient. Therefore, the purpose of this research is to study the effect of post oxygen plasma treatment on the resistance of moisture absorption and reliability of SiOF film. Improvement of moisture absorption resistance of SiOF film is due to the forming of thin SiO₂layer at the SiOF film surface. It is thought that the main effect of the improvement of moisture absorption resistance was densification of the top layer and reduction in the number of Si-F bonds that tend to associate with OH bonds. However, the dielectric constant was increased when plasma treatment time is above 5 min. In this study, therefore, it is thought that the proper plasma treatment time is 3 min when plasma treatment condition is 700 W of microwave power, 3 mTorr of process pressure and 300℃ of substrate temperature.

• Journal of Korea Water Resources Association
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• v.30 no.6
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• pp.587-595
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• 1997

Experimental study on unsaturated flow in the soil is important to understand the characteristics of the water flow. Measurement of unsteady-state water movement using the traditional equipment (e.g. tensiometer) has a problem that requires relatively a long response time. In this study a quick measurement method of soil water flow using TDR is introduced. TDR consists of an electronic function generator which generates a squared wave, and an oscilloscope which catches the reflected wave. The wave is reflected where both the impedance of the transmission line and the propagation velocity are changed. The water content can be obtained from the travel time measured by means of TDR because the dielectric constant is affected by the change of soil water content. From the result of TDR calibration. TDR measurement error for the oven dried soil was found to be less than 3.5%. This supports that TDR is a viable technique to measure the unsteady-state water movement.

• Korean Journal of Optics and Photonics
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• v.15 no.2
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• pp.89-99
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• 2004

At the interface of two materials with frequency-dependent material-parameters of permittivity and permeability, there may exist two kinds of surface polaritons: surface electric-polaritons(SEPs) and surface magnetic-polaritons(SMPs). Possible combinations of the material-parameters to support propagation of the two surface polaritons are suggested at the interface between metals and metamaterials such as a left-handed material. Dispersion relations are also derived in order to characterize frequency dependence of propagation of the SEP and SMP. It is found that only one propagation mode of SEP or SMP is allowed at a given set of four material parameters, and that counter-propagation of the phase and group velocities of the propagation mode can be observed even in the case when there are no double negative(or, negative-index) materials. Physical origin of the counter-propagation of the group velocity is proposed by evaluating the ratio of two electromagnetic-energy densities of a surface polariton propagating along within the two interface media, and it is confirmed by the dispersion relations.

• The Journal of Korean Institute of Communications and Information Sciences
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• v.25 no.3A
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• pp.424-429
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• 2000

In this paper, the characteristics of the asymmetric coupled microstrip(ACM) lines with finite metalization thickness are investigated using the quasi-static analysis in the multilayered structure. By mode-matching method as the quasi-static analysis. the characteristic impedances and effective dielectric constants in ACM lines are obtained as a function of metalization thickness. The numerical results show that the propagation characteristics of ACM lines in the single and multilayered structure will be changed by the variation of metalization thickness.