• Title/Summary/Keyword: 유리 박막

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A High Yield Rate MEMS Gyroscope with a Packaged SiOG Process (SiOG 공정을 이용한 고 신뢰성 MEMS 자이로스코프)

  • Lee Moon Chul;Kang Seok Jin;Jung Kyu Dong;Choa Sung-Hoon;Cho Yang Chul
    • Journal of the Microelectronics and Packaging Society
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    • v.12 no.3 s.36
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    • pp.187-196
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    • 2005
  • MEMS devices such as a vibratory gyroscope often suffer from a lower yield rate due to fabrication errors and the external stress. In the decoupled vibratory gyroscope, the main factor that determines the yield rate is the frequency difference between the sensing and driving modes. The gyroscope, fabricated with SOI (Silicon-On-Insulator) wafer and packaged using the anodic bonding, has a large wafer bowing caused by thermal expansion mismatch as well as non-uniform surfaces of the structures caused by the notching effect. These effects result in large distribution in the frequency difference, and thereby a lower yield rate. To improve the yield rate we propose a packaged SiOG (Silicon On Glass) technology. It uses a silicon wafer and two glass wafers to minimize the wafer bowing and a metallic membrane to avoid the notching. In the packaged SiOG gyroscope, the notching effect is eliminated and the warpage of the wafer is greatly reduced. Consequently the frequency difference is more uniformly distributed and its variation is greatly improved. Therefore we can achieve a more robust vibratory MEMS gyroscope with a higher yield rate.

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Threshold Voltage Variation of ZnS:Mn/ZnS:Tb Thin- film Electroluminescent(TFEL) Devices (ZnS:Mn/ZnS:Tb 박막 전계발광소자의 문턱전압 변화)

  • 이순석;윤선진;임성규
    • Journal of the Korean Institute of Telematics and Electronics D
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    • v.35D no.6
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    • pp.21-27
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    • 1998
  • Electrical and optical characteristics of ZnS:Mn/ZnS:Tb multilayer TFEL devices were investigated for multi-color electroluminescent display applications. Emission spectra of M $n^{2+}$ and T $b^{3+}$ ions were observed from ZnS:Mn/ZnS:Tb multi-layer TFEL devices, and were very broad from 540 nm to 640 nm. Saturation luminance measured at 155 V was 1025 Cd/$m^2$. C-V, $Q_{t}$ - $V_{p}$ curves showed that the phosphor capacitance ( $C_{p}$ ) and the insulator capacitance ( $C_{i}$ ) were 13.5nF/$\textrm{cm}^2$ and 60 nF/$\textrm{cm}^2$, respectively. Threshold voltage( $V_{thl}$) was shown to decrease from 126 V to 93 V due to the increase of the applied voltage from 155 V to 185 V, which was attributed to the increase of the polarization charge. The equation for the calculation of the threshold voltage as a function of the applied voltage was proposed for the first time. The calculated threshold voltage agreed well with the data obtained from the measurement.t.t.t.

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Variation of Soil Properties by Permeating Injection of Chemical Grouts (약액(藥液)의 침투주입(浸透注入)에 의한 토질성상변화(土質性狀變化))

  • Chun, Byung Sik
    • KSCE Journal of Civil and Environmental Engineering Research
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    • v.2 no.4
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    • pp.1-9
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    • 1982
  • Variation of soil properties is studied by permeating injection of chemical grouts, such as cement type, water-glass type and acrylamide type, to the same soil samples with different densities. Moreover, injection tests using specially prepared equipments of 1.0 shot system and 1. 5 shot system are attempted to investigate permeating injection effects in highly compacted soil and in the presence of ground water. The main factor which causes the improvement of cut-off effect and shearing strength is the cohesion of soil. The strength in the loose state is fundamentally governed by the membrane cohesion, meanwhile, in the loose state is governed by the structural cohesion. Injection effects under the ground water flow is considerably decreased, and effective gelling ratio of approximate 45~80% is observed by variation of velocity and gel time, besides grading of injection materials has high relation with permeation and traveling length but has little relation with effective gelling ratio. Permeating injection effects, such as gelling scope, gelling strength in highly compaoted soil conditions can be confirmed by penetration resistance diagram and iso-strength curve.

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Effects of the Composition on the Consolidation Temperature and Refractive Index of the Glass Thin Film Fabricated by Aerosol Flame Deposition Method in $\textrm{SiO}_2$-$\textrm{B}_2\textrm{O}_3$-CaO-$\textrm{P}_2\textrm{O}_5$ System ($\textrm{SiO}_2$-$\textrm{B}_2\textrm{O}_3$-CaO-$\textrm{P}_2\textrm{O}_5$계에서 조성이 Aerosol Flame Deposition법에 의해 제조된 유리박막의 열처리 온도와 굴절률에 미치는 영향)

  • Lee, Jeong-U;Jeong, Hyeong-Gon;Jeong, Seok-Jong;Lee, Hyeong-Jong;Mun, Jong-Ha
    • Korean Journal of Materials Research
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    • v.9 no.5
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    • pp.478-483
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    • 1999
  • The effects of the composition on the consolidation temperature and refractive index of the glass thin film fabricated by aerosol flame deposition method in SiO$_2$-B$_2$O$_3$-CaO-P$_2$O\ulcorner system were investigated. When the amount of CaO was constant in SiO$_2$-B$_2$O$_3$-CaO system the consolidation temperature of glass thin film decreased with increasing the amount of B$_2$O$_3$. Also, when the amount of SiO$_2$ and B$_2$O$_3$ was constant the consolidation temperature of glass thin film increased with increasing the amount of CaO. P$_2$O\ulcorner was added to 72.5SiO$_2$-25B$_2$O$_3$-2.5CaO in order to decrease its consolidation temperature. As the amount of P$_2$O\ulcorner increased its consolidation temperature decreased and the refractive index linearly increased from 1.4649 to 1.4684. When the amount of CaO and P$_2$O\ulcorner was constant in SiO$_2$-B$_2$O$_3$-CaO-P$_2$O\ulcorner system the consolidation temperature of glass thin film decreased with increasing the ratio of SiO$_2$/B$_2$O$_3$.

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Fabrication and Temperature Compensation of Silicon Piezoresistive Absolute Pressure Sensor for Gas Leakage Alarm System (가스누출 감지용 실리콘 압저항형 절대압센서의 제조 및 온도보상)

  • Son, Seung-Hyun;Kim, Woo-Jeong;Choi, Sie-Young
    • Journal of Sensor Science and Technology
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    • v.7 no.3
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    • pp.171-178
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    • 1998
  • Silicon piezoresistive absolute pressure sensor for gas leakage alarm system was developed. This sensor must operate normally in the range of $0{\sim}600\;mmH_{2}O$ pressure, and $0{\sim}100^{\circ}C$ temperature. To make the most of this sensor for gas leakage alarm system, gas must not leak from the sensor itself when the diaphragm of the sensor fractures. Thus, the sealed diaphragm cavity was anodically bonded to pyrex 7740 glass under the condition of $10^{-4}$ torr, at $400^{\circ}C$. The sensitivity of developed sensor was $4.06{\mu}V/VmmH_{2}O$ for $600\;mmH_{2}O$ full-scale pressure range. And temperature compensation method of this sensor is to change bridge-in put-voltage linearly in proportion to the temperature variation by using diode(PXIN4001) or Al thin film resistor. By these methods the temperature effect in the range of $0{\sim}100^{\circ}C$ was compensated over 80 % for offset drift, 95 % for sensitivity.

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Characteristics of the Flux-lock Type Superconducting Fault Current Limiter According to the Iron Core Conditions (자속구속형 초전도 전류제한기의 철심조건에 따른 특성)

  • Nam, Gueng-Hyun;Lee, Na-Young;Choi, Hyo-Sang;Cho, Guem-Bae
    • Journal of the Korean Institute of Illuminating and Electrical Installation Engineers
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    • v.20 no.7
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    • pp.38-45
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    • 2006
  • The superconducting fault current limiters(SFCLs) provide the effect such as enhancement in power system reliability due to limiting the fault current within a few miliseconds. Among various SFCLs we have developed a flux-lock type SFCL and exploited a special design to effectively reduce the fault current according to properly adjustable magnetic field after the short-circuit test. This SFCL consists of two copper coils wound in parallel on the same iron core and a component using the YBCO thin film connected in series to the secondary copper coil. Meanwhile, operating characteristics can be controlled by adjusting the inductances and the winding directions of the coils. To analyze the operational characteristics, we compared closed-loop with open-loop iron core. When the applied voltage was 200[Vrms] in the additive polarity winding, the peak values of the line current the increased up to 30.71[A] in the closed-loop and 32.01[A] in the open-loop iron core, respectively. On the other hand, in the voltages generated at current limiting elements were 220.14[V] in the closed-loop and 142.73[V] in the opal-loop iron core during first-half cycle after fault instant under the same conditions. We confirmed that the open-loop iron core had lower power burden than in the closed-loop iron core. Consequently, we found that the structure of iron core enabled the flux-lock type SFCL at power system to have the flexibility.

Development of U-shaped Arterialvenous Shunt Using Porous Polyurethane (다공성 폴리우레탄을 이용한 동정맥 누관의 개발)

  • 정재승;김희찬;박광석;최진욱;민병구
    • Journal of Biomedical Engineering Research
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    • v.20 no.2
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    • pp.221-230
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    • 1999
  • A new technique for the preparation of porous polyurethane vascular prostheses was investigated. Synthetic vascular grafts with porous wall have been widely proposed, claiming that strength, suture retention, kink resistance, and other handling properties are improved over those with nonporous solid wall. Related to these facts, the control of pores and compliance match have been very important and interesting issues. Two kinds of polymer sheets were compared. One was the porous PU-sheet made at room temerature by the solvent/non-solvent exchange. And the other was the porous PU-sheet fabricated by thermal phase transition and solvent/non-solvent exchange in the thermal controlled bath. According to the result of the above experiments, polyurethane solution was injected into a mold designed for U-type graft. After freezing at low temperature, solvent was dissolved out with alcohol at < $0^{\circ}C$ and water at room temperature to form porous vessels. The average pore size and pore occupation were easily changed by changing polyurethane concentration and freezing rate. This technique can give a proper pore size for tissue ingrowth, and suitable compliances for matching with arteries and veins. In addition, the fabrication of more complicated shaped vessels such as the U-type vascular grafts is easily controlled by using a mold. This method might give a desired compliact graft for artificial implantaion with the commercially available medical polymers.

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THE FLUORIDE RELEASING EFFECT OF PVA FLUORIDE-POLYMER ADHESIVE TAPE (불소를 함유한 PVA 고분자 접착 테잎의 불소 유리 효과)

  • Im, Sung-Ok;Lee, Sang-Ho;Lee, Nan-Young;Park, Seung-Hyo
    • Journal of the korean academy of Pediatric Dentistry
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    • v.38 no.4
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    • pp.327-336
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    • 2011
  • The purpose of this study is to investigate the residual fluoride concentration of polymer adhesive tape in oral cavity which is made by spraying NaF on PVA base and to compare with Fluoride varnish(Cavityshiled$^{TM}$). Experimental groups were divided into two according to application methods; Group 1(NaF-PVA tape) and Group 2(Cavityshiled$^{TM}$). Topical fluoride was applied to 20 healthy adults aged from 25 to 30. Fluoride concentration in unstimulated whole saliva was measured by fluoride-sensitive electrode for 72 hours. 1. Until 72 hours after application in every group, significantly higher fluoride concentration was shown in saliva than baseline value(p<0.05). 2. At 2, 3 and 4 hours after application, Group 2 revealed significantly higher fluoride concentration than Group 1(p<0.05). 3. At 24, 48 and 72 hours after application, there was no significance(p>0.05). Although the residual fluoride concentration of saliva and the amount of fluoride of NaF-PVA tape are lower than those of Cavityshield$^{TM}$, NaF-PVA tape is considered to be more effective since it showed almost the same result as Cavityshield$^{TM}$. Therefore, NaF-PVA tape is expected to be a great fluoride application material.

Measurement and Analysis of the Dynamics of Peptide-Antibody Interactions Using an Ellipsometric Biosensor Based on a Silicon Substrate (실리콘 기판을 사용한 바이오센서와 회전 타원분광계를 이용한 펩타이드-항체 접합의 동특성 측정과 분석)

  • Lee, Geun-Jae;Cho, Hyun Mo;Jo, Jae Heung
    • Korean Journal of Optics and Photonics
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    • v.28 no.1
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    • pp.9-15
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    • 2017
  • We precisely measured and analyzed the dynamics of peptide-antibody interactions, using an ellipsometric biosensor based on a silicon substrate. To reduce the signal error due to the imperfect flatness of the substrate for extremely low concentrations of peptide, we fabricated the biosensor with a silicon substrate coated with Dextran SAM, instead of a glass prism coated with a thin metallic thin film. At an injection speed of $100{\mu}l/min$ of buffer liquid, we detected the dynamics of antibody-Dextran SAM or peptide-antibody fixed on biosensor, respectively. We detected the dynamics of antibody-Dextran SAM interactions down to a low concentration of 5 ng per liter, and we precisely measured the dynamics of association and dissociation of peptide and antibody down to 100 nM of peptide. We obtained the rate constants for association and dissociation from fitting the data by using deduced dynamical equation. As a result, we obtained an equilibrium constant for dissociation of 97 nM of peptide-antibody complex, which belongs to Class I.

Research on the Architectural Applications of High-Performance Vacuum Insulation Panel (고성능 진공단열재의 건축적인 적용에 관한 연구)

  • Kwon, Young Cheol;Kim, Suk
    • Land and Housing Review
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    • v.10 no.3
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    • pp.23-32
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    • 2019
  • Vacuum Insulation Panel(VIP) has the lowest thermal conductivity among present insulations. It is composed of envelope, core material and getter. Aluminum film is usually used as the envelope of VIP, and it is important component to decide the useful life of VIP. In this research, the thermophysical properties of incombustible fiber glass core VIP were investigated with the possibility of its architectural applications. The results of this research can be summarized as follows: 1) The thermal conductivity of 20mm-thick fiber glass core VIP is resulted as 0.00177W/m·K, which means that 20mm-thick VIP can meet all the reinforced insulation guideline and it can be used in any envelope of any region in Korea. 2) As a result of the test of incombustion and gas toxicity, fiber glass core VIP was suitable for incombustible material. 3) As the test result for the long term thermal conductivity, fiber glass core VIP was found out that it would keep above 10 times insulating performance than polystyrene foam and glass fiber. 4) To meet the thermal transmittance of 0.12W/㎡K, limited-combustible insulation of expanded polystyrene foam and phenolic foam should be used respectively as thick as above 280mm and 170mm, incombustible VIP can meet the same insulation level with 20mm thickness. 5) The price competitiveness of incombustible VIP to meet the thermal transmittance of 0.12W/㎡·K was about 1,500won/㎡ higher than that of phenolic foam.