• Korean Journal of Optics and Photonics
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• v.4 no.4
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• pp.397-402
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• 1993

This paper presents a new computational algorithm of phase-shifting interferometry which can effectively eliminate the uncertainty errors of the reference phases encountered in obtaining multiple interferograms. The algorithm treats the reference phases as additional unknowns and determines their exact values by analyzing interferograms using numerical least square technique. A series of simulations prove that this algorithm can improve measuring accuracy being unaffected by the nonlinear and random errors of phase-shifters.

• Journal of the Korean Institute of Telematics and Electronics D
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• v.36D no.11
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• pp.33-44
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• 1999

The boundary element method was newly implemented into an optical lithography simulator so that it could evaluate rigorously the topological effects of 2dimensional phase-shifting masks. Both transparent and periodic boundary conditions were applied for the method, and the continuity conditions were used for treating interface nodes. The accuracy of the module developed for simulating aerial images was verified by comparison with analytic solutions and published results. In addition, it was found that our simulator would be more efficient than the conventional method based on the rigorous coupled wave analysis in views of the convergence and the calculation speed. Finally, the optimal design of two phase-shifting masks was performed.

• Transactions of the Korean Society of Mechanical Engineers
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• v.16 no.9
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• pp.1728-1735
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• 1992

Holographic interferometry technique has been used for the measurement of whole-field deformation with high sensitivity. However there are some difficulties in quantitatively analyzing the holographic fringes. Recently, quantitative and automatic fringe analysis by using phase shifting method in interferometry has been studied in many fields. In this paper, a real time holographic interferometry system and a phase shifting method combined with digital image processing technique are employed to record and quantitatively analyze holographic fringe patterns. To evaluate our system and analyze errors, comparison of measured deformation with theoretical deformation of cantilever beam was carried out. The accuracy of 4.5% in our system was verified We have tried to apply this method to quantitatively measure the deformation of turbine blade under the bending force.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.05a
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• pp.174-174
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• 2004

본 논문에서는 4변이 고정된 정사각형 알루미늄 평판의 진동 진폭을 측정하기 위하여, 기존의 위상 이동 ESP떼 스트로보스코프식 조사를 적용한 스트로보스코픽 ESPI 기법을 이용하였다. 일반적으로 시간평균 ESPI를 이용하면 진동하고 있는 대상체의 정성적인 진동 패턴을 측정할 수 있다. 그러나 시간평균 ESPI로는 진동하고 있는 대상체의 두께방향으로의 진폭량을 측정하기는 어렵다. 또한 일반적인 위상이동법을 적용시킬 경우, 대상체가 진동을 하게 됨으로써 정확한 진동 진폭을 측정하기 어렵다.(중략)

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.37 no.8
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• pp.48-56
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• 2000

Effects of the correlated random fluctuation in each grating half-period have been studied by an effective index transfer matrix method in quarter wavelength shifted DFB lasers. As the correlation coefficient changes from 0 to -1, single mode stability and wavelength accuracy are less degraded by the reduced error in the grating period. This fact shows that holographic grating fabrication is better than electron-beam lithography in discrete device fabrication provided that the magnitude of the random fluctuation is the same.

• Journal of the Korean Society for Nondestructive Testing
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• v.35 no.3
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• pp.200-205
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• 2015

An ultra-precise infrared microscope consisting of a high-resolution infrared objective lens and infrared sensors is utilized successfully to obtain location information on the plane and depth of local heat sources causing defects in a semiconductor device. In this study, multi-layer semiconductor chips are analyzed for the positional information of heat sources by using a lock-in infrared microscope. Optimal conditions such as focal position, integration time, current and lock-in frequency for measuring the accurate depth of the heat sources are studied by lock-in thermography. The location indicated by the results of the depth estimate, according to the change in distance between the infrared objective lens and the specimen is analyzed under these optimal conditions.

• Korean Journal of Optics and Photonics
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• v.8 no.4
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• pp.345-352
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• 1997

Recently, in designing optical mask such as 4GDRAM, the scattering effect of electromagnetic wave must be considered. For this reason we claculated directly the mask function using the finite difference time domain(FDTD) method. The modification of image theory with this new mask function could explain clearly the scattering effect at the etched side wall of the submicron optical mask. The characteristics of the various type of alternating PSM were investigated. According to the simulation, the dual wet etch process was the most useful fabrication technique to overcoe the light scattering off at the shifted opening.

• Korean Journal of Optics and Photonics
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• v.5 no.2
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• pp.298-303
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• 1994

Microlens arrays are fabricated by melting "islands" of thick photoresist on a glass substrate. Microlenses with diameters $25\mu\textrm{m}$, $50\mu\textrm{m}$, $100\mu\textrm{m}$are made. Their surface profiles are obtained by a scanning electron microscope and a mechanical surface profilometer. The wavefront of the microlenses is measured by phase-shifting techniques using a Mach-Zehnder-like configuration. Thereby wavefront errors, focal lengths. point spread functions are obtained. The microlens with the diameter of $100\mu\textrm{m}$ has focal length of $164\mu\textrm{m}$ and spot diameter is less than $5\mu\textrm{m}$..

• Journal of the Institute of Electronics Engineers of Korea CI
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• v.39 no.6
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• pp.24-35
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• 2002

The wavelet transform is combined with the boundary element method (BEM), to solve efficiently the Maxwell's equation and the proposed method is applied to the electromagnetic problem for the analysis of topological effects of phase-shifting masks. The accuracy of the module developed was verified by comparison with both analytic solutions and published results. In addition, it was found that the boundary element method in combination with the wavelet matrix transform would be more efficient than the conventional methods based on the BEM in views of the calculation speed and the usage of computer memory.

• Journal of the Korean Society of Propulsion Engineers
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• v.11 no.3
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• pp.50-57
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• 2007

Spray characteristics of an injector in a small liquid rocket engine (LRE) is characterized by Particle Image Velocimetry (PIV) and Dual-mode Phase Doppler Anemometry (DPDA). Instantaneous plane images captured by PIV are examined for the qualitative prediction of spray breakup with the setup of evaluation technique for effect of spray angles on injector performance. DPDA is also applied in order to quantify the average velocity, turbulent intensity, SMD, and number density of spray droplets along the spray stream distance leading to precise observation of spray atomization behavior. An objective of the study is the derivation of design parameters of new injectors and the establishment of performance criteria through the clear understanding of spray characteristics.