Browse > Article

the Combination of Wavelet with Boundary Element Method for the Efficient Solution of Maxwell's Equations  

Kim, Hyun-Jun (School of Information and Communication Engineering, Inha University)
Lee, Seung-Gol (School of Information and Communication Engineering, Inha University)
O, Beom-Hoan (School of Information and Communication Engineering, Inha University)
Lee, El-Hang (School of Information and Communication Engineering, Inha University)
Publication Information
Journal of the Institute of Electronics Engineers of Korea CI / v.39, no.6, 2002 , pp. 24-35 More about this Journal
Abstract
The wavelet transform is combined with the boundary element method (BEM), to solve efficiently the Maxwell's equation and the proposed method is applied to the electromagnetic problem for the analysis of topological effects of phase-shifting masks. The accuracy of the module developed was verified by comparison with both analytic solutions and published results. In addition, it was found that the boundary element method in combination with the wavelet matrix transform would be more efficient than the conventional methods based on the BEM in views of the calculation speed and the usage of computer memory.
Keywords
Mawell's equation; BEM; Wavelet; PSM; optical lithography simulation;
Citations & Related Records
Times Cited By KSCI : 1  (Citation Analysis)
연도 인용수 순위
1 K. D. Lucas, A. J. Strojwas, K. K. Low, and Chi-Min Yuan, 'Intensity optimization for phase-shifting Masks', SPIE, vol. 1927, pp. 438-449, 1993   DOI
2 C. Pierrat, A. Wong, and S. Vaidya, 'Phaseshifting mask topography effects on lithographic image quality', SPIE vol. 1927, pp. 28-41, 1993   DOI
3 Z. Xiang and Y. Lu, 'A Study of the Fast Wavelet Transform Method in Computational Electromagnetics', IEEE Trans. Magnetics, vol. 34, no. 5, pp. 3323-3326, September 1998   DOI   ScienceOn
4 R. L. Wagner and W. C. Chew, 'A Study of Wavelets for the Solution of Electromagnetic Integral Equations', IEEE Trans. Antennas Propaga, vol. 43, no. 8, pp. 802-810, Aug. 1995   DOI   ScienceOn
5 이동훈, 김현준, 이승걸, 이종웅, '경계요소법을 이용한 위상 변이 마스크의 단차 효과 분석', 대한전자공학회 논문지, 제36권 D편, 제11호, pp. 931-942, Nov. 1999   과학기술학회마을
6 A.A. Becker, 'The Boundary element method in Engineering-A complete cource', McGRAW-HILL international editions, pp 6-90, 161-294, 1992
7 B. Z. Steinberg and Y. Leviatan, 'On the Use of Wavelet Expansion in the Method of Moments', IEEE Trans. Antennas Propagat., vol. 41, no. 5, pp. 610-619, May, 1993   DOI   ScienceOn
8 Xiang and Y. Lu, 'An Effective Wavelet Matrix Transform Approach for Efficient Solutions of Electromagnetic Integral Equations', IEEE Trans. Antennas Propagat., vol. 45, no. 8, pp. 1205-1213, August, 1997   DOI   ScienceOn
9 A. K. Wong and A. R. Neureuther, 'Polarization effects in mask transmission', SPlE vol. 1674 pp. 193-200, 1992   DOI
10 Shin Kagani & Ichiro Fukai, 'Application of Boundary-Element Method to Electromagnetic Field Problems', IEEE, vol.32, No.4, pp 455-461 1984
11 J. Trevelyan, 'Boundary Elements for Engineering-Theory and Applications', Computational Mechanics Publications, pp 4-25, 49-175, 96-97, 1994
12 E. B. Becker, G. F. Carey, and J. T. Oden, Finite Elements An Introduction: Volume 1, Prentice Hall, pp. 175-221, 1981
13 M. J. Fagan, Finite Element Analysis : Theory and Practice, Longman, pp. 39-84, 1992
14 G. Wang, 'A Hybrid Wavelet Expansion and Boundary Element Analysis of Electromagnetic Scattering from Conducting Objects', IEEE Trans. Antennas Propaga, vol. 43, no. 2, pp. 170-178, February 1995   DOI   ScienceOn
15 I. Daubechies, 'Orthogonal bases of compactly supported wavelets', Comm. Pure Applied Math., 41, 1991, pp 909-996, 1984   DOI
16 W. H. Press, S. A. Teukolsky, W. T. Vetterling, and B. P. Flannery, Numerical Recipes in C : The Art of Scientific Computing, 2nd ed. New York: Cambridge Univ. Press, 1992
17 T. A. Brunner and R. A. Ferguson, 'Approximate models for resist processing effects', SPIE vol. Z726, pp. 198-206, 1996   DOI
18 M. G. Moharam and T. K. Gaylord, 'Rigorous coupled-wave analysis of planar grating diffraction', J. Opt. Soc. Am, vol. 71, no. 7, pp. 811-818, 1981   DOI   ScienceOn