Characterization of Etching profile for $LiNbO_3$ Optical Waveguide by Using Neutral Loop Discharge Plasma Dry Etching
(NLD Plasma 식각 공정을 이용한 $LiNbO_3$ 광 도파로의 식각 Profile의 특성)
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- Proceedings of the Materials Research Society of Korea Conference
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- 2003.03a
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- pp.138-138
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- 2003