• Title/Summary/Keyword: 원자힘 현미경

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Anti-Reflection Coating Technology Based High Refractive Index Lens with Ultra-Violet Rays Blocking Function (반사방지 코팅기술 기반 자외선 차단 기능의 고굴절률 안경렌즈)

  • Kim, Ki-Chul
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.17 no.12
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    • pp.482-487
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    • 2016
  • Ultra-violet rays are very harmful to eye health care. The blocking of ultra-violet rays and a reduction of optical reflection in the visible light range, which is to increase the share of transmitted light, and avoid the formation of ghost images in imaging, are important for the applications of polymer eyeglasses lenses. In this study, the high-refractive index polymer lenses, n=1.67, were fabricated by injection-molded method with the xylene diisocyanate monomer, 2,3-bis-1-propanethiol monomer, and benzotriazol UV absorber (SEESORB 709) mixture. To reduce the reflection of the polymer lens surfaces, multi-layer anti-reflection (AR) coatings were coated for both sides of the polymer lens using an E-beam evaporation system. The optical properties of the UV blocking polymer lens were characterized using a UV-visible spectrometer. The material properties of the thin films, which were composed AR coating layers, refractive index, and surface roughness, were analyzed by ellipsometry and atomic force microscopy. As a result, the fabricated polymer lens perfectly blocked ultra-violet rays below 395 nm with a blocking rate greater than 99%.

하이브리드 SEM 시스템

  • Kim, Yong-Ju
    • Proceedings of the Korean Vacuum Society Conference
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    • 2014.02a
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    • pp.109-110
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    • 2014
  • 주사전자현미경(Scanning Electron Microscopy: SEM)은 고체상태에서 미세조직과 형상을 관찰하는 데에 가장 다양하게 쓰이는 분석기기로서 최근에 판매되고 있는 고분해능 SEM은 수 나노미터의 분해능을 가지고 있다. 그리고 SEM의 초점심도가 크기 때문에 3차원적인 영상의 관찰이 용이해서 곡면 혹은 울퉁불퉁한 표면의 영상을 육안으로 관찰하는 것처럼 보여준다. 활용도도 매우 다양해서 금속파면, 광물과 화석, 반도체 소자와 회로망의 품질검사, 고분자 및 유기물, 생체시료 nnnnnnnnn와 유가공 제품 등 모든 산업영역에 걸쳐 있다(Fig. 1). 입사된 전자빔이 시료의 원자와 탄성, 비탄성 충돌을 할 때 2차 전자(secondary electron)외에 후방산란전자(back scattered electron), X선, 음극형광 등이 발생하게 되는 이것을 통하여 topography (시료의 표면 형상), morphology(시료의 구성입자의 형상), composition(시료의 구성원소), crystallography (시료의 원자배열상태)등의 정보를 얻을 수 있다. SEM은 2차 전자를 이용하여 시료의 표면형상을 측정하고 그 외에는 SEM을 플랫폼으로 하여 EDS (Energy Dispersive X-ray Spectroscopy), WDS (Wave Dispersive X-ray Spectroscope), EPMA (Electron Probe X-ray Micro Analyzer), FIB (Focus Ion Beam), EBIC (Electron Beam Induced Current), EBSD (Electron Backscatter Diffraction), PBMS (Particle Beam Mass Spectrometer) 등의 많은 분석장치들이 SEM에 부가적으로 장착되어 다양한 시료의 측정이 이루어진다. 이 중 결정구조, 조성분석을 쉽고 효과적으로 할 수 있게 하는 X선 분석장치인 EDS를 SEM에 일체화시킨 장비와 EDS 및 PBMS를 SEM에 장착하여 반도체 공정 중 발생하는 나노입자의 형상, 성분, 크기분포를 측정하는 PCDS(Particle Characteristic Diagnosis System)에 대해 소개하고자 한다. - EDS와 통합된 SEM 시스템 기본적으로 SEM과 EDS는 상호보완적인 기능을 통하여 매우 밀접하게 사용되고 있으나 제조사와 기술적 근간의 차이로 인해 전혀 다른 방식으로 운영되고 있다. 일반적으로 SEM과 EDS는 별개의 시스템으로 스캔회로와 이미지 프로세싱 회로가 개별적으로 구현되어 있지만 로렌츠힘에 의해 발생하는 전자빔의 왜곡을 보정을 위해 EDS 시스템은 SEM 시스템과 연동되어 운영될 수 밖에 없다. 따라서, 각각의 시스템에서는 필요하지만 전체 시스템에서 보면 중복된 기능을 가지는 전자회로들이 존재하게 되고 이로 인해 SEM과 EDS에서 보는 시료의 이미지의 차이로 인한 측정오차가 발생한다(Fig. 2). EDS와 통합된 SEM 시스템은 중복된 기능인 스캔을 담당하는 scanning generation circuit과 이미지 프로세싱을 담당하는 FPGA circuit 및 응용프로그램을 SEM의 회로와 프로그램을 사용하게 함으로 SEM과 EDS가 보는 시료의 이미지가 정확히 일치함으로 이미지 캘리브레이션이 필요없고 측정오차가 제거된 EDS 측정이 가능하다. - PCDS 공정 중 발생하는 입자는 반도체 생산 수율에 가장 큰 영향을 끼치는 원인으로 파악되고 있으며, 생산수율을 저하시키는 원인 중 70% 가량이 이와 관련된 것으로 알려져 있다. 현재 반도체 공정 중이나 반도체 공정 장비에서 발생하는 입자는 제어가 되고 있지 않은 실정이며 대부분의 반도체 공정은 저압환경에서 이루어지기에 이 때 발생하는 입자를 제어하기 위해서는 저압환경에서 측정할 수 있는 측정시스템이 필요하다. 최근 국내에서는 CVD (Chemical Vapor Deposition) 시스템 내 파이프내벽에서의 오염입자 침착은 심각한 문제점으로 인식되고 있다(Fig. 3). PCDS (Particle Characteristic Diagnosis System)는 오염입자의 형상을 측정할 수 있는 SEM, 오염입자의 성분을 측정할 수 있는 EDS, 저압환경에서 기체에 포함된 입자를 빔 형태로 집속, 가속, 포화상태에 이르게 대전시켜 오염입자의 크기분포를 측정할 수 있는 PBMS가 일체화 되어 반도체 공정 중 발생하는 나노입자 대해 실시간으로 대처와 조치가 가능하게 한다.

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Effect of Substrate Temperature on the Emission Characteristics of ZnO Films Grown by Pulsed Laser Deposition (기판 온도의 영향에 따른 펄스레이저 증착법으로 성장된 ZnO 박막의 발광 특성)

  • Kim, Y.H.;Kim, S.I.
    • Journal of the Korean Vacuum Society
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    • v.18 no.5
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    • pp.358-364
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    • 2009
  • We investigated the growth of ZnO thin films with prominent emission characteristics through minimizing the formation of defects by using pulsed laser deposition (PLD). To do so, the ZnO films were deposited on sapphire(0001) substrates at the substrate temperature of $400-850^{\circ}C$ and then the variation of their structural and optical properties were analyzed by x-ray diffraction, atomic force microscope and photoluminescence. As a result, all ZnO films were grown with c-axis preferential orientation irrespective of the substrate temperature. However, the crystallinity and stress state were dependent on the substrate temperature and the ZnO film deposited at $600^{\circ}C$ showed the best surface morphology and crystallinity with nearly no strain. And also this film exhibited outstanding emission characteristics from the viewpoint of full width half maximum of UV emission peak as well as visible emission due to defects. These results indicate that the emission characteristics of the ZnO films are strongly related to their structural characteristics influenced by substrate temperature. Consequently, ZnO films with strong UV emission and nearly no visible emission, which are applicable to UV emission devices, could be grown at the substrate temperature of $600^{\circ}C$ by PLD.

Understanding Interfacial Charge Transfer Nonlinearly Boosted by Localized States Coupling in Organic Transistors (Carbon Nano Tube 및 산화그래핀을 첨가한 폴리우레아 복합재 제조 및 그 화학적 특성 분석)

  • Kim, Hyeongtae;Lee, Jihyun;An, Woo-Jin;Park, Jun Hong
    • Journal of Adhesion and Interface
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    • v.22 no.4
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    • pp.136-143
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    • 2021
  • Polyurea has been investigated as a polymer matrix for composite materials because of its high mechanical strength. Although polyurea has a similar chemical structure to polyurethane, it has much higher strength and durability. In this study, the fabrication of polyurea composites reinforced with carbon nanotube (CNT) and graphene oxide (GO) is demonstrated to enhance the tensile strength of the glass fibers composite. Using FTIR and Raman spectroscopies, the chemical structures of polyurea, CNT, and GO are investigated. As a result, spectroscopy analysis reveals that the chemical structure of CNT, GO, and polyurea is maintained during the fabrication of the composite structure. Scanning electron microscopy reveals the uniform distribution of CNT and GO across the polyurea matrix. The reinforcement of 1 wt% CNT in polyurea enhances the tensile strength of CNT/polyurea composites. In contrast, the reinforcement of GO in polyurea induces the degradation of the tensile strength of GO/polyurea composites.

The effect of copper alloy scaler tip on the surface roughness of dental implant and restorative materials (구리 합금 초음파 스케일러 팁이 치과 임플란트 및 수복 재료 표면에 미치는 영향)

  • Lee, Ah-Reum;Chung, Chung-Hoon;Jung, Gyu-Un;Pang, Eun-Kyoung
    • The Journal of Korean Academy of Prosthodontics
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    • v.52 no.3
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    • pp.177-185
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    • 2014
  • Purpose: This study is designed to investigate the various impacts of different types of scaler tips such as cooper alloy base tip and the others on the surface roughness of teeth and implant by the method which is currently in clinical use. Materials and methods: Four different types of disc shaped porcelain, titanium, zirconia, and Type III gold alloy dental materials sized 15 mm diameter, 1.5 mm thickness were used for the experiment. Plastic hand curette (Group PS), cooper alloy new tip (Group IS), and stainless steel tip (Group SS) were used as testing appliances. A total of 64 specimens were used for this study; Four specimens for each material and appliance group. Surface roughness was formed with 15 degree angle in ultrasonic scaler tip and with 45 degree angle in hand curette of instrument tip and the specimen surface with 5 mm long, one horizontal-reciprocating motion per second for 30 seconds by 40 g force. To survey the surface roughness of each specimen, a field emission scanning electron microscope, an atomic force microscope, and a surface profiler were used. (Ra, ${\mu}m$). Results: According to SEM, most increased surface roughness was observed in SS group while IS groups had minimal roughness change. Measurement by atomic force microscope presented that the surface roughness of SS group was significantly greater than those of PS, IS and control groups in the type III gold alloy group (P<.05). IS group showed lesser surface roughness changes compared to SS group in porcelain and gold alloy group (P<.05). According to surface profiler, surface roughness of SS group showed greater than those of PS, IS and control groups and IS group showed lesser than those of SS group in all specimen groups. Type III gold alloy group had large changes on surface roughness than those of porcelain, titanium, zirconia (P<.05). Conclusion: The result of this study showed that newly developed copper alloy scaler tip can cause minimal roughness impacts on the surface of implant and dental materials; therefore this may be a useful alternative for prophylaxis of implant and restored teeth.

Synthesis of P3HT-b-P4VP via Anionic Polymerization and its Physical Properties in Various Solvents (음이온 중합법 기반 P3HT-b-P4VP 블록공중합체 정밀 합성 및 이의 용매에 따른 물리적 특성 변화 연구)

  • Hwang, Sung Yeon;Park, Jeyoung;Oh, Dongyeop X.
    • Applied Chemistry for Engineering
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    • v.29 no.3
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    • pp.336-341
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    • 2018
  • In general, the synthesis of poly(3-hexylthiophene)(P3HT)-based block copolymers requires at least a 4-5 step process. To control the molecular weight, molecular weight distribution, and block ratio, the reaction conversion and time should be monitored. In addition, the reaction scale usually limited to several mg to g was difficult to increase due to the limitations of living radical polymerizations. In this study, we synthesized P3HT-b-poly(4-vinylprydine) (P3HT-b-P4VP) with a final product quantity of > 19 g via a 2-step synthetic method with an anionic polymerization. In this method, the molecular weight and molecular weight distribution of P3HT-b-P4VP can be well controlled without monitoring the reaction conversion. We also studied physical properties of P3HT-b-P4VP depending on different solvent systems, which were investigated by UV-vis spectroscopy, atomic force microscopy, and ultraviolet photoelectron spectroscopy.

Dependence of Surface Morphology of Transparent Hydrophobic Anti-Reflective Coating (투명 발수 반사방지 코팅의 표면 형상 의존성)

  • Kim, Ki-Chul
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.10
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    • pp.771-776
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    • 2017
  • The cover glass of mobile displays and photovoltaic cells needs a functional coating, such as an anti-reflection and self-cleaning coating. Numerous studies have been conducted on the engineering application of biomimetic functional surfaces, such as moth eye and lotus leaf Anti-reflection coantings of silica nanoparticles could enhance the light transmittance. $TiO_2$ photocatalyst coatings have been applied to self-cleaning functional films. In this study, transparent hydrophobic anti-reflective coatings consisting of thin layers of $SiO_2/TiO_2$ nanoparticles were fabricated on a slide glass substrate by the sol-gel process and dip-coating process. The dependence of the surface morphology of the functional coatings was investigated by the atomic force microscopy (AFM), contact angle measurement, and UV-visible spectroscopy. It was found that the coating of $TiO_2$ nanoparticles exhibited a high average transmittance comparable to that of the bare slide glass substrate in the visible light range. The bi-layered functional coating of 7 nm $SiO_2$/7nm $TiO_2$ nanoparticles exhibits a transparent hydrophobic surface with a contact angle of $110^{\circ}$ and an improvement of the average transmittance of 2.3% compared to the bare slide glass substrate in the visible light range.

Study on the Morphologies and Electrical Properties in Polymer Blend Thin-Films Based on Two Poly(3-hexylthiophene) Conjugated Polymers with Different Regio-regularities (서로 다른 위치 규칙성을 가지는 두 개의 Poly(3-hexylthiophene) 공액 고분자를 기반으로 한 고분자 복합 박막의 구조와 전기적 특성에 대한 연구)

  • Ganghoon Jeong;Nann Aye Mya Mya Phu;Rae-Su Park;Jeong Woo Yun;Yeongun Ko;Mincheol Chang
    • Composites Research
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    • v.36 no.5
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    • pp.349-354
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    • 2023
  • Poly(3-hexylthiophene) (P3HT) is a conjugated polymer that is highly soluble in organic solvents and is readily available. However, its electrical properties as an active channel in electronic devices are not enough for practical applications, necessitating further improvement in the properties. In this study, we demonstrate that the blending of two P3HT polymers (i.e., regio-regular (RR) P3HT and regio-random (RRa) P3HT) with different regioregularities can significantly improve charge transport characteristics of the blend films. The morphological and electrical properties of the blend films were systematically investigated by varying the ratio between two P3HT polymers. Atomic force microscopy (AFM), X-ray diffraction (XRD), and UV-visible absorption spectroscopy (UV-vis) were employed to evaluate the morphological and optoelectronic properties of the blend films. The crystallinity of the blend films increased with increasing the content of RRa-P3HT to 20 wt% and gradually decreased as the content increased to 80%. Consistently, the highest charge carrier mobility was obtained from the blend films containing 20 wt% RRa-P3HT, which value was measured to be 0.029 cm2/V·s. The values gradually decreased to 0.0007 cm2/V·s with increasing the content of RRa-P3HT to 80 wt%.

Formation of Al0.3Ga0.7As/GaAs Multiple Quantum Wells on Silicon Substrate with AlAsxSb1-x Step-graded Buffer (AlAsxSb1-x 단계 성분 변화 완충층을 이용한 Si (100) 기판 상 Al0.3Ga0.7As/GaAs 다중 양자 우물 형성)

  • Lee, Eun Hye;Song, Jin Dong;Yoen, Kyu Hyoek;Bae, Min Hwan;Oh, Hyun Ji;Han, Il Ki;Choi, Won Jun;Chang, Soo Kyung
    • Journal of the Korean Vacuum Society
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    • v.22 no.6
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    • pp.313-320
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    • 2013
  • The $AlAs_xSb_{1-x}$ step-graded buffer (SGB) layer was grown on the Silicon (Si) substrate to overcome lattice mismatch between Si substrate and $Al_{0.3}Ga_{0.7}As$/GaAs multiple quantum wells (MQWs). The value of root-mean-square (RMS) surface roughness for 5 nm-thick GaAs grown on $AlAs_xSb_{1-x}$ step-graded buffer layer was ~1.7 nm. $Al_{0.3}Ga_{0.7}As$/GaAs MQWs with AlAs/GaAs short period superlattice (SPS) were formed on the $AlAs_xSb_{1-x}$/Si substrate. Photoluminescence (PL) peak at 10 K for the $Al_{0.3}Ga_{0.7}As$/GaAs MQW structure showed relatively low intensity at ~813 nm. The RMS surface roughness of the $Al_{0.3}Ga_{0.7}As$/GaAs MQW structure was ~42.9 nm. The crystal defects were observed on the cross-sectional transmission electron microscope (TEM) images of the $Al_{0.3}Ga_{0.7}As$/GaAs MQW structure. The decrease of PL intensity and increase of RMS surface roughness would be due to the formation of the crystal defects.

Surface Roughness and Cariogenic Microbial Adhesion after Polishing of Smart Chromatic Technology-based Composite Resin (Smart Chromatic Technology 기반 복합 레진의 폴리싱 이후 표면 거칠기 및 우식원성 미생물 부착 )

  • Haesong Kim;Juhyun Lee;Haeni Kim;Howon Park
    • Journal of the korean academy of Pediatric Dentistry
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    • v.50 no.1
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    • pp.65-74
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    • 2023
  • This study compared the surface roughness and microbial adhesion characteristics of Omnichroma, a novel composite resin developed using "smart chromatic technology", with those of two other conventional composite resins with different filler compositions. A total of 144 specimens were fabricated using 3 types of composite resins: Omnichroma (nano-spherical), Filtek Z350XT (nanofill), and Tetric N-Ceram (nanohybrid) and, divided into 3 groups of 48. Finishing was performed using tungsten carbide burs. Specimens were then divided into 3 subgroups using different polishing methods: Control, SofLex, and PoGo. Surface roughness was analyzed quantitatively and qualitatively using an atomic force microscope and a scanning electron microscope. Microbial adhesion was assessed by culturing Streptococcus mutans on the specimens for 24 hours and then measuring colony-forming units attached to the upper surface. The surface roughness (Ra) of Omnichroma was 0.123 ㎛ after finishing, and it exhibited a smooth surface compared to the other resins. However, after polishing, there were no significant differences in the surface roughness between the three composite groups, regardless of the polishing methods. The surfaces of the Control subgroups were significantly rougher than those of the SofLex subgroups in all 3 composite groups. However, except for Tetric N-Ceram, there were no significant differences between the Control and PoGo subgroups in the other composite groups. Microbial adhesion assessment showed no significant differences between any of the 3 composite resin subgroups; however, Omnichroma exhibited higher microbial adhesion than the other two composites. No significant correlation was observed between surface roughness and microbial adhesion.