• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 1996년도 추계학술대회 논문집
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• pp.662-667
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• 1996

For compensating the error motion of hydrostatic guideways, the structure and the theoretical design method of ACC(Active Controlled Capillary) are proposed. The maximum controllable range, micro step response and dynamic characteristics of ACC are analyzed experimentally for verifing the availability. The experimental results showed that by the use of ACC, the error motion within 2.7${\mu}{\textrm}{m}$ of a hydrostatic guideway can be compensated with the resolution of 27nm, 1/100 of uncontolled error, and the frequency band of 5.5Hz. From these results, it Is confirmed that the ACC is very effect to improve the moving accuracy of high or ultra precision hydrostatic guideways.

• 한국정밀공학회지
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• 제14권8호
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• pp.130-136
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• 1997

For compensating the error motion of hydrostatic guideways, we introduce a way that the clearance of table is actively controlled corresponding to the amount of error with the variable capillary. The structure and the theoretical design method of active controlled capillary using piezo actuator, named ACC, are proposed in this paper. Basic characteristics such as the maximum controllable range, micro step response and available dynamic bandwidth are tested for confirmation of structural suitability of ACC, and these characteristics are also tested on the table mounted with ACC for verifying the availability. The experimental result showed that by the use of ACC, the error motion within 2.7 .mu. m of a hydrostatic guideway can be compensated with the resolution of 2.7nm, 1/100 contollable range, and the frequency bandwidth of 5.5 Hz. From these results, it is confirmed that the ACC is very effective to improve the motion accuracy of high or ultra precision hydrostatic guideways.

• 한국정밀공학회지
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• 제26권2호
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• pp.109-117
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• 2009

This paper presents a linear air bearing stage with compensated motion errors by active control of preloads generated by magnetic actuators with combination of permanent and electromagnets. A 1-axis linear stage motorized with a linear motor with 240mm of travel range is built for verifying this design concept and tested its performances. The three motions of the table are controlled with four magnetic actuators driven by current amplifiers and a DSP based digital controller. Three motion errors were measured combined method with laser interferometer and two-probe method with $0.085{\mu}m$ of repeatability for straightness error. The measured motion errors were modeled as functions of the stage position, and compensation were carried out with feedforward control because the characteristics of the motion control with magnetic actuators are linear and independent for each degree-of-freedoms. As the results, the errors were reduced from $1.09{\mu}m$ to $0.11{\mu}m$ for the vertical motion, from 9.42 sec to 0.18 sec for the pitch motion and from 2.42 sec to 0.18 sec for roll motion.

• 한국정밀공학회지
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• 제14권12호
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• pp.114-120
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• 1997

For compensating the error motion of hydrostatic tables, we have introduced a way that the clearance of table is controlled corresponding to the amount of eror with the actively controlled variable capillary, named as ACC. In previous paper, through the basic test, it was confirmed that by the use of ACC, the error motion within 2.7$\mu$ m of a hydrostatic table could be compensated with the resolution of 27nm, 1/100 contollable range, and with the frequency bandwidth of 5.5Hz, structurally. In this paper, we performed practical compensation of the linear and angular motion error of hydrostatic table using ACC. For improving the compensated motion accuracy, iterative control method is put into the control system. The experimental results show that by the simultaneous compensation of error, the linear and angular motion error are improved upto 0.25$\mu$ m and 0.4arcsec, which are about 1/10 and 1/3 of the non-compensated motion errors respectively.

• 한국정밀공학회:학술대회논문집
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• 한국정밀공학회 2005년도 춘계학술대회 논문집
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• pp.769-772
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• 2005

Five DOF motion errors of a hydrostatic bearing table driven by the coreless type linear motor were compensated utilizing the active controlled capillaries in this study. Horizontal linear motion and yaw error were simultaneously compensated using two active controlled capillaries and vertical linear motion, pitch and yaw error were also simultaneously compensated using three active controlled capillaries. By the compensation, horizontal linear motion accuracy and yaw were improved from 0.16 ${\mu}m$ and 1.96 arcsec to 0.02 ${\mu}m$ and 0.03 arcsec. Vertical linear motion accuracy, pitch and roll were also largely improved from 0.18 ${\mu}m$, 2.26 arcsec and 0.14 arcsec upto 0.03 ${\mu}m$, 0.07 arcsec and 0.02 arcsec. The compensated motion errors were within the range of measuring repeatability which was ${\pm}0.02\;{\mu}m$ in the linear motion and ${\pm}0.05$ arcsec in the angular motion. From these results, it is found that the motion error compensation method utilizing the active controlled capillaries are very effective to improve the five motion accuracies of the hydrostatic bearing tables.