Basic Characteristics of an Active Controlled Capillary for Compensating the Error Motion of Hydrostatic Guideways

유정압안내면 운동오차보정용 능동제어모세관의 기본특성

For compensating the error motion of hydrostatic guideways, the structure and the theoretical design method of ACC(Active Controlled Capillary) are proposed. The maximum controllable range, micro step response and dynamic characteristics of ACC are analyzed experimentally for verifing the availability. The experimental results showed that by the use of ACC, the error motion within 2.7${\mu}{\textrm}{m}$ of a hydrostatic guideway can be compensated with the resolution of 27nm, 1/100 of uncontolled error, and the frequency band of 5.5Hz. From these results, it Is confirmed that the ACC is very effect to improve the moving accuracy of high or ultra precision hydrostatic guideways.