• Title/Summary/Keyword: 요구주기길이

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Thickness Determination of Ultrathin Gate Oxide Grown by Wet Oxidation

  • 장효식;황현상;이확주;조현모;김현경;문대원
    • Proceedings of the Korean Vacuum Society Conference
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    • 2000.02a
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    • pp.107-107
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    • 2000
  • 최근 반도체 소자의 고집적화 및 대용량화의 경향에 다라 MOSFET 소자 제작에 이동되는 게이트 산화막의 두께가 수 nm 정도까지 점점 얇아지는 추세이고 Giga-DRAM급 차세대 UNSI소자를 제작하기 위해 5nm이하의 게이트 절연막이 요구된다. 이런 절연막의 두께감소는 게이트 정전용량을 증가시켜 트랜지스터의 속도를 빠르게 하며, 동시에 저전압동작을 가능하게 하기 때문에 게이트 산화막의 두께는 MOS공정세대가 진행되어감에 따라 계속 감소할 것이다. 따라서 절연막 두께는 소자의 동작 특성을 결정하는 중요한 요소이므로 이에 대한 정확한 평가 방법의 확보는 공정 control 측면에서 필수적이다. 그러나, 절연막의 두께가 작아지면서 게이트 산화막과 crystalline siliconrksm이 계면효과가 박막의 두께에 심각한 영향을 주기 때문에 정확한 두께 계측이 어렵고 계측방법에 따라서 두께 계측의 차이가 난다. 따라서 차세대 반도체 소자의 개발 및 양산 체계를 확립하기 위해서는 산화막의 두께가 10nm보다 작은 1nm-5nm 수준의 박막 시료에 대한 두께 계측 방법이 확립이 되어야 한다. 따라서, 본 연구에서는 습식 산화 공정으로 제작된 3nm-7nm 의 게이트 절연막을 현재까지 알려진 다양한 두께 평가방법을 비교 연구하였다. 절연막을 MEIS (Medim Energy Ion Scattering), 0.015nm의 고감도를 가지는 SE (Spectroscopic Ellipsometry), XPS, 고분해능 전자현미경 (TEM)을 이용하여 측정 비교하였다. 또한 polysilicon gate를 가지는 MOS capacitor를 제작하여 소자의 Capacitance-Voltage 및 Current-Voltage를 측정하여 절연막 두께를 계산하여 가장 좋은 두께 계측 방법을 찾고자 한다.다. 마이크로스트립 링 공진기는 링의 원주길이가 전자기파 파장길이의 정수배가 되면 공진이 일어나는 구조이다. Fused quartz를 기판으로 하여 증착압력을 변수로 하여 TiO2 박막을 증착하였다. 그리고 그 위에 은 (silver)을 사용하여 링 패턴을 형성하였다. 이와 같이 공진기를 제작하여 network analyzer (HP 8510C)로 마이크로파 대역에서의 공진특서을 측정하였다. 공진특성으로부터 전체 품질계수와 유효유전율, 그리고 TiO2 박막의 품질계수를 얻어내었다. 측정결과 rutile에서 anatase로 박막의 상이 변할수록 유전율은 감소하고 유전손실은 증가하는 결과를 나타내었다.의 성장률이 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 둔화됨을 볼 수 있다. 또한 Silane 가스량이 적어지는 영역에서는 가스량의 감소에 의해 성장속도가 줄어들어 성장률이 Silane가스량에 의해 지배됨을 볼 수 있다. UV-VIS spectrophotometer에 의한 비정질 SiC 박막의 투과도와 파장과의 관계에 있어 유리를 기판으로 사용했으므로 유리의투과도를 감안했으며, 유리에 대한 상대적인 비율 관계로 투과도를 나타냈었다. 또한 비저질 SiC 박막의 흡수계수는 Ellipsometry에 의해 측정된 Δ과 Ψ값을 이용하여 시뮬레이션한 결과로 비정질 SiC 박막의 두께를 이용하여 구하였다. 또한 Tauc Plot을 통해 박막의 optical band gap을 2.6~3.7eV로 조절할 수 있었다. 20$0^{\circ}C$이상으로 증가시켜도 광투과율은 큰 변화를 나타내지 않았다.부터 전분-지질복합제의 형성 촉진이 시사되었다.이것으로 인하여 호화억제에 의한 노화 방지효과가 기대되었지만 실제로 빵의 노화는 현저히 진행되었다

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Effect of Soil Heating on Lateral Shooting in White Spined Cucumber. (지중가온이 백침계 오이의 측지 발생에 미치는 영향)

  • 이상규;성기철;김광용;고관달
    • Proceedings of the Korean Society for Bio-Environment Control Conference
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    • 2001.04b
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    • pp.71-72
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    • 2001
  • 최근 수출오이의 재배 면적이 계속증가 추세에 있어 '99년 현재 143ha에 달하고 있다. 그러나 수출오이는 국내 오이와 재배방법이 상당히 달라 국내 오이는 주지착과형이지만 수출오이는 측지착과형으로 측지의 발생여부에 따라 수확량의 차이가 심하다. 따라서 수출오이의 성공여부는 측지발생을 어느정도 시키느냐에 달려 있다고 해도 과언이 아니다. 그런데 수출오이의 재배시기는 우리나라에서 재배환경이 가장 불량한 겨울철(10-2월)로, 저온 및 투광량 부족 등으로 인하여 측지발생율이 매우 저조하다. 따라서 본 시험은 수출오이의 측지 발생율을 높이고자 지중가온기 설치 여부에 따른 효과를 구명하고자 실시하였다. 그 결과, 생육(Table 1)은 접수의 줄기 직경이 지중가온 처리시 10.22mm로, 무가온의 8.64mm보다 굵었고, 엽장과 엽폭에 있어서도 지중가온 처리가 무가온 처리보다 좋았다. 곡과 발생수에 있어서도 지중가온 처리는 주당 0.73개가 발생하였으나, 무가온은 1.26개가 발생되어 지중가온 처리시 무가온에 비해서 생육이 좋아지고, 곡과 발생이 적었다. 주당 측지발생수(Table 2)는 지중가온구가 13.7개였고, 무가온구는 11.7개로 지중가온을 하면 측지발생수가 증가함을 알수 있었다. 또한 상품수확과수에 있어서도 지중가온구는 주당 45개인데 반해 지중무가온구는 38개였으며 따라서 전체적인 수량이 10a당 8,100kg으로, 무가온구의 6,840kg보다 18%의 증수효과가 있었다. 따라서 수출오이재배시 지중가온을 하면, 측지발생수가 증가하고 특히 장측지(Fig. 1)가 다수 발생하여 측지 수확과수가 증가하며, 곡과 등 기형과 발생이 감소하여 상품수량이 증가되므로써 기존 지중 무가온 재배에 비해 14% 소득향상 효과를 기대할 수 있다.시 생장이 둔화되었다. 밀폐시킨 삼각플라스크에서 자라는 Cell은 상태도 좋지 않고 전반적인 증식량도 적었다. Cell은 환기정도에 민감한 것으로 판단되며 삼각플라스크에서 약 35일 정도의 생장 주기를 가지는 것으로 사료된다. 배양 3주까지는 플라스틱 뚜껑으로 밀폐시킨 bottle에서 가장 많은 체세포배를 얻었다. Air filter를 달아 2일 마다 신선한 공기를 넣어 주었을 때는 배의 발달이 많이 늦어져 배양 3주째에 다른 처리보다 배의 수가 훨씬 적었다. 체세포배가 발달하는 동안에는 산소를 많이 요구하지 않으나 성숙하는 동안에는 산소를 많이 요구하는 것으로 생각된다.적인 것으로 나타났다. 다만, 곡선형은 물론 직선형에서도 열교환 튜브의 배치밀도, 튜브 길이 및 두께 등의 변화에 따른 최적화 연구가 수반되어야 할 것으로 판단된다.에서 제공된 API는 객체기반 제작/편집 도구에 응용되어 다양한 멀티미디어 컨텐츠 제작에 사용되었다.x factorization (NMF), generative topographic mapping (GTM)의 구조와 학습 및 추론알고리즘을소개하고 이를 DNA칩 데이터 분석 평가 대회인 CAMDA-2000과 CAMDA-2001에서 사용된cancer diagnosis 문제와 gene-drug dependency analysis 문제에 적용한 결과를 살펴본다.0$\mu$M이 적당하며, 초기배발달을 유기할 때의 효과적인 cysteamine의 농도는 25~50$\mu$M인 것으로 판단된다.N)A(N)/N을 제시하였다(A(N)=N에 대한 A값). 위의 실험식을 사용하여 헝가리산 Zempleni 시료(15%$S_{XRD}$)의 기본입자분포로부터 %$S_{XRD}

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Propagation of Structural Waves along Waveguides with Non-Uniformities Using Wavenumber Domain Finite Elements (국부적 불연속을 갖는 도파관을 따라 전파되는 파동에 대한 파수 영역 유한 요소 해석)

  • Ryue, Jungsoo
    • The Journal of the Acoustical Society of Korea
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    • v.33 no.3
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    • pp.191-199
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    • 2014
  • Wave reflection and transmission characteristics in waveguides are an important issue in many engineering applications. A combined spectral element and finite element (SE/FE) method is used to investigate the effects of local non-uniformities but limited at relatively low frequencies because the SE is formulated by using a beam theory. For higher frequency applications, a method named a combined spectral super element and finite element (SSE/FE) method was presented recently, replacing spectral elements with spectral super elements. This SSE/FE approach requires a long computing time due to the coupling of SSE and FE matrices. If a local non-uniformity has a uniform cross-section along its short length, the FE part could be further replaced by SSE, which improves performance of the combined SSE/FE method in terms of the modeling effort and computing time. In this paper SSEs are combined to investigate the characteristics of waves propagating along waveguides possessing geometric non-uniformities. Two models are regarded: a rail with a local defect and a periodically ribbed plate. In the case of the rail example, firstly, the results predicted by a combined SSE/FE method are compared with those from the combined SSEs in order to justify that the combined SSEs work properly. Then the SSEs are applied to a ribbed plate which has periodically repeated non-uniformities along its length. For the ribbed plate, the propagation characteristics are investigated in terms of the propagation constant.

The Production of Adventitious Sprouts by Water-soak and Vegetative Propagation of Plus tree of Ash Species Through Cuttings of Their Sprouts (물푸레나무속(屬) 수형목(秀型木)의 수심(水沈)에 의(依)한 지조맹아(枝條萌芽) 발생력(發生力)과 이를 이용(利用)한 녹지삽목(綠枝揷木) 증식시험(增殖試驗))

  • Han, Sang Don;Hong, Sung Ho;Min, Young Taek;Kim, Young Mo;Kim, Hong Eun
    • Journal of Korean Society of Forest Science
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    • v.83 no.2
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    • pp.148-154
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    • 1994
  • As a vegetative propagation method for ash species, which is a dioecism and a long cycle of fructification, cut-stem was soaked in water to induce adventitious sprouts, and 2-year-old ash seedling was cut in a nursery to induce adventitious sprouts. We obtained the 1,019 adventitious sprouts from branches of 101 plus trees througout the country. The mean ortet-age is 48. There is not a correlation between ortet ages and production of adventitious sprouts. These sprouts were placed in a cutting bed for rooting. Root ability varied with environmental factors of cuttings. The best rooting(87%) resulted from cutting performed in a vinyl-plastic greenhouse. Rooting was better on perlite+peat moss(2 : 1) medium than other media tested. The rooting ability was generally higher in 2-year-old ortet than plus tree ortet. In the root development of cuttings the non-container cuttings was better than container cuttings.

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Patient's Selection for Extracorporeal Shock Wave Lithotripsy for Treatment of Common Bile Duct Stones Resistant to Endoscopic Extraction (체외충격파쇄석술 적용을 위한 총담관결석의 선택)

  • Lee, Won-Hong;Son, Soon-Yong;Kim, Chang-Bok;Park, Cheon-Kyoo;Kang, Seong-Ho;Ryu, Meung-Sun;Lee, Yong-Moon
    • Journal of radiological science and technology
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    • v.28 no.2
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    • pp.105-110
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    • 2005
  • Background/Aim : Common bile duct (CBD) stones may cause jaundice, cholangitis, or pancreatitis. Extracorporeal shock wave lithotripsy (ESWL) may be needed whenever endoscopic procedure are failed to extract common bile duct stones. The aim of this study is to provide the standard for patient's best choice on ESWL for treatment of CBD stones resistant to endoscopic extraction. Materials and Methods : Fourty-six patients failed in endoscopic stone extraction including mechanical lithotripsy were treated by ESWL. In all patients, endoscopic sphincterotomy and nasobiliary drainage tube was done before ESWL using the ultrasonography for stone localization with a spark-gap type lithotriptor. Patients were sedated with an intravenous injection of 50 mg of Demerol. None were treated under general anesthesia. Results : Overall complete clearance rate of CBD stone was 89.1% (41/46). In 82.6% of the patients, the stones were extracted endoscopically after ESWL, and spontaneous passage was observed in 6.5%. In the clearance rate after ESWL, there were no noticeable differences with regard to number (single: 82.8%, two or three: 100%, more than three: 100%) and size of the stone (less than 33mm: 92.9%, 33 mm or larger: 83.3%), whereas there were significant differences with regard to the ratio of sum of long-axis length of the all stones to sum of long-axis length of the CBD excluding stone (1:2.4, 1:2.1) and diameter of the largest stone to diameter of CBD excluding stone (1:0.9, 1:0.4) for patients with complete clearance compared with those without. Conclusion : We propose that stones without the fragments are travelable sufficient space in CBD or extractable sufficient diameter of CBD regardless of stone size and number should be treated by other technique to prevent time and cost consuming, such as percutaneous transhepatic cholangioscopylithotomy.

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A Case Study on Introducing Vita Parcours as Forest Leisure Sports Facility in Saneum Healing Forest (산음 치유의 숲 Vita Parcours 도입 사례 연구 - Vita Parcours 도입을 사례로 -)

  • Lee, Jin-Kyu;Kim, Ki Weon
    • The Journal of the Korean Institute of Forest Recreation
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    • v.22 no.4
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    • pp.71-81
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    • 2018
  • It is necessary to build a quality-enhancing forest leisure sports facility according to values that value life quality, national forest policy. Vita Parcours (fitness trails) is found to be the activities highly convenient, so their introduction and promotion in Korea should be highly considered. field survey was necessary to explore the possibility of installing Vita Parcours. Several sites were selected, such as Asean recreational forest, Unaksan recreational forest, Yumyeongsan recreational forest, Saneum recreational forest, Jungmisan recreational forest and National center for forest therapy. At these locations, we explored the current status of forest facilities and forest trails. A total number of 31 exercise facilities has been identified and surveyed, some of which are located on the trails (2), alongside the trail (9), alongside trail boundaries (2) or represent facilities suitable for both outdoor and indoor exercise within the forest (18), all of whom provide location for 44 different exercise routines (flexibility exercises (23), endurance (12) and strength exercises (9)). Field work also included identification of forests paths, the total number of whom was 34 paths - 30 identified as trails, 2 as hiking trails, 1 as a forest path for relaxation and healing and 1 as an exploratory path. Regarding the structure and shape of these trails, 32 was straight in shape and only 2 designed as a circular forest trails. Average length of these trails was 652.2m with the highest and the lowest point altitude difference of 60m, on average. Saneum recreational forest provide the most suitable site/environment for Vita Parcours and as a result of this, Saneum recreational forest is proposed as a location to support the endeavors in promotion of these valuable forest fitness trails. Among the forest paths at this site, a forest path which has a length of 1.84km and 73.0m the highest and the lowest point altitude difference was selected as the most suitable, and may be equipped with necessary stations for exercise or obstacles. In addition, if these trails are to be introduced and welcomed by its users, we must assure that they are properly maintained.

A historical study on the flexibility square-format typeface and the prospects - Focused on the three-pairs fonts of hangeul - (탈네모글꼴에 관한 역사적 연구와 전망 - 세벌식 한글 글꼴을 중심으로 -)

  • Yu, Jeong-Mi
    • Archives of design research
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    • v.19 no.2 s.64
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    • pp.241-250
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    • 2006
  • Hangeul as the Korean unique characters were invented according to some character-making principles and based on scholars' exhaustive researches. While most of the characters in the world evolved naturally, Hangeul was invented based on a precise linguistic analysis of the time, and therefore, it is most scientific and reasonable among various characters throughout the world. Nevertheless, Hangeul typeface designs do not seem to inherit the ideology of scientific and reasonable Hangeul correctly. For the square forms have been used intact due to the influences from the Chinese characters which prevailed during the time. If a single set of square characters should be designed, as much as 11,172 fonts should be designed, which suggests that advantages of Mangeul may not well be used fully; Hangeul was invented to visualize every sound with the combinations of 28 vowels and consonants. Problems of such square fonts began to be identified since 1900's when typewriters were introduced first from the West. Since a typewriter is designed with 28 characters laid out on its keyboard by using such combinations, the letters may be easily combined on it. The so-called the flexibility square-format typeface was born as such. Specially, the three-pairs fonts of these can be combined up to 67 letters including vowels and consonants. The three-pairs fonts system can help to solve the problems arising form the conventional square fonts and inherit the original ideology of Hangeul invention. This study aims to review the history of the three-pairs fonts designs facilitated by mechanic encoding of Hangeul and thereupon, suggest some desirable directions for future Hangeul fonts. Since the flexibility square-format typeface is expected to evolve more and more owing to development of the digital technology, they would serve our age of information in terms of both functions and convenience. Just as Hunminjongum tried to be literally independent from the Chinese characters, so the flexibility square-format typeface designs would serve to recover identity of our Hangeul font designs.

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Establishment of an Ice Core Processing Method and Analytical Procedures for Fundamental Proxies (빙하코어의 전처리 방법 및 기초 프록시 분석법 확립)

  • Jun, Seong Joon;Hong, Sang Bum;Hur, Soon Do;Lee, Jeonghoon;Kang, Jung-Ho;Hwang, Hee Jin;Chung, Ji Woong;Jung, Hye Jin;Han, Changhee;Hong, Sungmin
    • Ocean and Polar Research
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    • v.36 no.1
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    • pp.13-24
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    • 2014
  • We established the first complete ice core processing method and analytical procedures for fundamental proxies, using a 40.2 m long ice core drilled on the Mt. Tsambagarav glacier in the Mongolian Altai mountains in July 2008. The whole core was first divided into two sub ice core sections and the measurements of the visual stratigraphy and electrical conductivity were performed on the surface of these sub core sections. A continuous sequence of samples was then prepared for chemical analyses (stable isotope ratios of oxygen ($^{18}O/^{16}O$) and hydrogen ($^2H/^1H$), soluble ions and trace elements). A total of 29 insoluble dust layers were identified from the measurement of visual stratigraphy. The electrical conductivity measurement (ECM) shows 11 peaks with the current more than 0.8 ${\mu}A$ Comparing the profiles of $SO_4{^{2-}}$ and $Cl^-$ concentrations to correlate with known volcanic eruptions, the first two ECM peaks appear to be linked to the eruptions (January and June 2007) of Kliuchevskoi volcano on the Kamchatka Peninsula of Russia, which supports the reliability of our ECM data. Finally, the composition of stable isotopes (${\delta}^{18}O$ and ${\delta}D$) shows a well-defined seasonal variation, suggesting that various chemical proxies may have been well preserved in the successive ice layers of Tsambagarav ice core. Our ice core processing method and analytical procedures for fundamental proxies are expected to be used for paleoclimate and paleoenvironmental studies from polar and alpine ice cores.

Growth of $LiTaO_3$ and Fe doped-LiTaO3 single crystal as holographic storage material (홀로그래피 소자재료 $LiTaO_3$단결정 성장)

  • 김병국;윤종규
    • Journal of the Korean Crystal Growth and Crystal Technology
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    • v.8 no.2
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    • pp.193-204
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    • 1998
  • The single crystal of the $LiTaO_3$has large electro-optic effects, so it is applied to optical switch, acousto-optic deflector, and optical memory device as hologram using photorefractive effect. In this study, optic-grade undoped $LiTaO_3$and Fe:LiTaO$LiTaO_3$single crystals were grown by the Czochralski method and optical transmission and absorption spectrums were measured in the wavelength of UV-VIS range. The curie temperature was determined with DSC and by measuring capacitance for the grown undoped crystal and ceramic powder samples of various Li/Ta ratio. In case of having a 48.6 mol% $Li_2O$ as a starting Li/Ta ratio, the results of concentration variations were below 0.01 mol% $Li_2O$ all over the crystal, so it was confirmed that $LiTaO_3$single crystals were grown under congruent melting composition having optical homogeneity. The curie temperature of the Fe:$LiTaO_3$crystal was increased with increased with increased doped Fe concentrations;by the ratio of $7.5^{\circ}C$ increase per Fe 0.1 wt%. Also, the optical transmittance was about 78 %, which was sufficient for optical device.

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