• Proceedings of the Korean Institute of Surface Engineering Conference
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• 2003.05a
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• pp.14-14
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• 2003

Silicon carbide (SiC)는 높은 power 영역과 높은 온도영역에서도 작동 가능한 우수한 반도체 물질이다. 또한 우수한 열적 화학적, 안정성을 가지고 있어 가흑한 조건에서의 소자로써도 사용 가능하다. 현재 SiC 적용분야로는 우수한 전기적, 기계적 성질을 이용한 미세소자(MEMS)와 GaN 와 거의 유사한 격자상수를 가지는 것을 이용한 GaN epitaxial 성장의 기판으로도 사용되어진다. 그러나 SiC 는 기존의 습식식각 용매에 대해 화학적 안정성을 가지고 있기 때문에 전자소자의 제작에 있어서 플라즈마를 이용한 건식식각의 중요성이 대두되어지고 있다. 소자제작에 있어 이러한 건식식각시 식각 단면의 제어, 이온에 의한 낮은 손상 정도, 매끄러운 식각 표면, 그리고 고속의 식각 속도둥이 요구되어진다. 본 실험에서는 식각 속도의 증가와 수직한 식각 단면둥을 획득하기 위하여 SF6 플라즈마에서 Source power, dc bias voltage, 그리고 외부에서 인가되는 자속의 세기를 변화시쳐가며 식각 속도, 식각 마스크와의 식각 션택비, 식각 단면둥과 같은 SiC 의 식각 특성을 관찰하였다. 식각 후 식각 단면은 주사전자 현미경(SEM)을 통해 관찰하였다. 본 실험에서의 가장 높은 식각 속도는 분당 1850n 로써 이때의 공정조건은 1400W 의 inductive power, -600V 의 dc bias voltage, 20G 의 외부자속 세기이었다. 또한, 높은 inductive power 조건과 낮은 dc bias voltage 조건에서 Cu는 $SF_6$ 플라즈마 내에서 식각부산물의 증착으로 인해 SiC 와 무한대의 식각선택비를 보였다. 이러한 Cu 마스크를 사용한 SiC 의 식각에서는 식각 후 수직한 식각 단변을 관찰할 수 있었다. 것올 알 수 있다. 따라서, 기존의 pve 보다 세라믹 기판의 경우가 수분 흡수율이 높아 더 오랫동안 전류를 흐르게 하여 방식성이 개선된 것으로 판단된다.을 통해 경도가 증가한 시편의 경우 석출상의 크기가 5nm 이하로 매우 작고 대체로 기지와 연속적인 계면을 형성하나, 열처리가 진행될수록 석 출상의 크기가 커지고 임계크기 이상에 이르면 연속적인 계면은 거의 발견되지 않고, 대부 분 불연속적이고 확연한 계면을 형성함을 관찰 할 수 있었다. 알루미나(${\alpha}-Al_2O_3$) 기판 위에 증착한 $(Ti_{1-x}AI_{x})N$ 피막은 마찬가지로 (200) 우선 방위를 나타내었으나, 그 입자의 크기가 수십 nm로 고속도강위에 증착한 피막에 비해 상당히 크게 형성되었다. 또한 열처리 후에 AIN의 석출이 진행됨에도 불구하고 경도 증가는 나타나지 않고, 열처리가 진행됨에 따라 경도가 감소하는 양상만을 나타내었다. 결국 $(Ti_{1-x}AI_{x})N$ 피막이 열처리 전후에 보아는 기계적 특성의 변화 양상은 열역학적으로 안정한 Wurzite-AlN의 석출에 따른 것으로 AlN 석출상의 크기에 의존하며, 또한 이러한 영향은 $(Ti_{1-x}AI_{x})N$ 피막에 존재하는 AI의 함량이 높고, 초기에 증착된 막의 업자 크기가 작을 수록 클 것으로 여겨진다. 그리고 환경의 의미의 차이에 따라 경관의 미학적 평가가 달라진 것으로 나타났다.corner$적 의도에 의한 경관구성의 일면을 확인할수 있지만 엄밀히 생각하여 보면 이러한 예의 경우도 최락의 총체적인 외형은 마찬가지로 $\ulcorner$순응$\lrcorner$의 범위를 벗어나지 않는다. 그렇기 때문에

• Food Engineering Progress
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• v.14 no.3
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• pp.235-242
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• 2010

This study was to investigate the combined effect of enzyme and trehalose addition on the retrogradation rate and quality changes in a Korean traditional rice cake, Backsulgi. As for the enzyme, a commercial maltogenic amylase, Novamyl, was used. From texture profile analysis and sensory tests, the optimum enzyme content for the preparation of Backsulgi was determined to be 0.1%. Backsulgi was prepared with the fixed content of Novamyl (0.1%) and different ratios (5, 10, 15%) of trehalose, and physicochemical and sensory properties were examined for 3 days of storage at ${25^{\circ}C}$. As trehalose content increased, the water activity of Backsulgi decreased. In Hunter's color value, L- and a-values of trehalose-added samples were significantly lower than those of control. In texture profile analysis, hardness of Backsulgi decreased with trehalose content. During storage, a increase in hardness and a decrease in cohesiveness were typically observed for all samples. However, those changes were significantly reduced with trehalose content. The retardation of retrogradation with the enzyme and trehalose addition was confirmed using calculated Avrami rate and time constants. These results revealed that combined treatments of 0.1% Novamyl and 10% trehalose could produce Backsulgi of better sensory quality with retarded retrogradation compared to separated treatment.

• Journal of Internet Computing and Services
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• v.22 no.4
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• pp.1-11
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• 2021

As the Internet developed, various and complex cyber attacks began to emerge. Various detection systems were used outside the network to defend against attacks, but systems and studies to detect attackers inside were remarkably rare, causing great problems because they could not detect attackers inside. To solve this problem, studies on the lateral movement detection system that tracks and detects the attacker's movements have begun to emerge. Especially, the method of using the Remote Desktop Protocol (RDP) is simple but shows very good results. Nevertheless, previous studies did not consider the effects and relationships of each logon host itself, and the features presented also provided very low results in some models. There was also a problem that the model could not explain why it predicts that way, which resulted in reliability and robustness problems of the model. To address this problem, this study proposes an interpretable RDP-based lateral movement detection system using page rank algorithm and SHAP(Shapley Additive Explanations). Using page rank algorithms and various statistical techniques, we create features that can be used in various models and we provide explanations for model prediction using SHAP. In this study, we generated features that show higher performance in most models than previous studies and explained them using SHAP.

• Journal of the Microelectronics and Packaging Society
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• v.27 no.4
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• pp.91-96
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• 2020

The 33-mode dielectric and piezoelectric properties of Pb(In1/2Nb1/2)O3-Pb(Mg1/3Nb2/3)O3-PbTiO3 piezoelectric single crystals were measured under large electric field and compressive stress. The phase transition from the low temperature rhombohedral to the high temperature tetragonal structure was observed in the range of 110~140℃, and the Curie temperature changing to the cubic structure was about 165℃. The polarization change according to the compressive stress and electric field was measured. Relative dielectric constant was calculated from the slope of the polarization curve applied to the electric field, and the calculated relative dielectric constant increased as the applied stress increased, and the relative dielectric constant decreased as the applied electric field increased. The strain according to the compressive stress and electric field change was measured, the piezoelectric constant was calculated from the slope of the curve, and the phase transition according to the application of pressure was confirmed. In the case of practical application as an underwater or medical ultrasonic actuator, it is necessary to properly design the magnitude of the compressive stress applied to the device and the DC bias in order to maintain linear driving.

• Journal of the Korean Society of Marine Environment & Safety
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• v.28 no.spc
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• pp.23-29
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• 2022

To detect harmful chemical substances in seawater, we fabricated a prototype sensor and evaluated its performance. The prototype sensor consisted of a detector, housing, and driving circuit. We built the detector by printing an Indium-Tin-Oxide (ITO) nanoparticle film on a flexible substrate, and it had two detection parts for simultaneous detection of temperature and HNS concentration. The housing connected the detector and the driving circuit and was made of Teflon material to prevent chemical reactions that may affect sensor performance. The driving circuit supplied electric power, and display measured data using a bridge circuit and an Arduino board. We evaluated the sensor performances such as response (ΔR), the limit of detection (LOD), response time, and errors to confirm the specification.

• KOREAN JOURNAL OF CROP SCIENCE
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• v.30 no.4
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• pp.359-367
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• 1985

This experiment was conducted to study effect of cold water damage on some growth characters related to source and sink at reproductive growth stage in Jinan (sea level 303m). The cold water irrigation duration had irrigated 4, 8 and 12 days at panicle formation stage and reproduction division stage compared to perennial water irrigation. Cold water irrigation shortened culm length and panicle length and degree of panicle exsertion. The shortening effect appeared great at lower internodes when treated at panicle formation stage but at higher internodes when treated at reduction division stage. Cold water irrigation decreased the number of secondary branches and spikelets per panicle, and increased the number of degenerated spikelets being high degeneration when treated at panicle formation stage. Spikelet sterility and impediment of grain filling were affected by duration of cold water irrigation being great when treated at spikelet primodium differentiation stage and reduction division stage in particular. Grain weight was also reduced. Significant relationship existed between spikelets sterility, grain filling and yield. The degeneration of secondary branches and spikelets correlated with leaf area but spikelet sterility and yield with culm length, panicle length and panicle exsertion.

• Clean Technology
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• v.16 no.3
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• pp.191-197
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• 2010

Repair reaction of plasma damaged porous methyl doped SiOCH films was carried out with silylation agents dissolved in supercritical carbon dioxide ($scCO_2$) at various reaction time, pressure, and temperature. While a decrease in the characteristic bands at $3150{\sim}3560cm^{-1}$ was detectable, the difference of methyl peaks was not identified apparently in the FT-IR spectra. The surface hydrophobicity was rapidly recovered by the silylation. In order to induce effective repair in bulk phase, the wafer was heat treated before reaction under vacuum or ambient condition. The contact angle was slightly increased after the treatment and completely recovered after the subsequent silylation. Methyl groups were decreased after the plasma damage, but their recovery was not identified apparently from the FT-IR, spectroscopic ellipsometry, and secondary ion mass spectroscopy analyses. Furthermore, Ti evaporator was performed in a vacuum chamber to evaluate the pore sealing effect. The GDS analysis revealed that the open pores in the plasma damaged films were efficiently sealed with the silylation in $scCO_2$.

• Korean Chemical Engineering Research
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• v.61 no.3
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• pp.394-400
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• 2023

In this study, the tuning phenomena, gas storage capacity, and thermal expansion behaviors of binary (cyclopentylamine + CH₄) and (cyclopropylamine + CH₄) clathrate hydrates were investigated for the potential applications of clathrate hydrates to gas storage. To understand the tuning behaviors of binary (cyclopentylamine + CH₄) and (cyclopropylamine + CH₄) clathrate hydrates, ¹³C solid-state NMR spectroscopy was used, and the results confirmed that maximum tuning factors for the binary (cyclopentylamine + CH₄) and (cyclopropylamine + CH₄) clathrate hydrates were achieved at 0.5 mol% and 1.0 mol% of guest concentration, respectively. The gas storage capacity of binary (cyclopentylamine + CH₄) and (cyclopropylamine + CH₄) clathrate hydrates were also checked, and the results showed the CH₄ capacity of our hydrate systems was superior to that of binary (tetrahydrofuran + CH₄) and (cyclopentane + CH₄) clathrate hydrates. The synchrotron diffraction patterns of these hydrates collected at 100, 150, 200, and 250 K confirmed the formation of a cubic Fd-3m hydrate. In addition, the lattice constant of clathrate hydrates with cyclopentylamine and methane were larger than that with cyclopropylamine and methane due to the effects of molecular size and shape.

• Journal of Preventive Medicine and Public Health
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• v.21 no.1 s.23
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• pp.183-194
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• 1988

This study was carried out to investigate for resistance of V. parahaemolyticus that isolated from patients of food poisoning and fish and shellfish, captured in east coast of Kyungpook province of Korea from 1985 to 1986. VP ATCC 17802 and NAG V. ATCC 6538 were used as control. In fish, shellfish and seaweed, the more temperature increased, the shorter survival time was. In case of sea-water, the more temperature rose up, the longer survival time was, particularly in $37^{\circ}C$ and $25^{\circ}C$, the strains had survived after 6 months. And in tapwater, it was sterilized in 150 mins. and survived for 11.5 days on maximum in ground water. In kimchi, at room temperature, germicidal time was shorter more than 6 times compared with that which had been kept in refrigerator. It survived for 57.1 days in milk, 49.2 mins. in yougurt. Strains had been surviving in frozen condition at $-70^{\circ}C$ even after 6 months, present study time. In resistance test in water bath at several degrees of temperature, all the strains were sterilized in 20 mins. with $60^{\circ}C$. In resistance test to driness, number of surviving strains dropped rapidly in 10-11%) water contents. In UV $2538{\AA}$, strains were sterilized in 20 mins. In resistance test to alcohol, strains had survived for 0.1-4 mins. in fermentative wine of below than 25% and distilled wine of over than 25% in alcohol concentration. The bactericidal concentration of disinfectant was 1% in phenol and 3% in cresol. In 0.1M acetic acid and 0.1M lactic acid, number of surviving colonies decreased rapidly but not in citric acid. The more NaCl concentration rose up, the lower decreasing rate of number of surviving colonies was. The strains had showed sensitive response to vancomycin, chloramphenicol, gentamicin, and resisted to carbenicillin, ampicillin and kanamycin. When one day culture strain was cultured till 25th day, resistant strains to tetracycline and cephalothin were changed to sensitive.

• Journal of the Korean Magnetics Society
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• v.14 no.1
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• pp.46-50
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• 2004

Compounds of $Y_{3-x}Ce_{x}Fe{5}O_{12}$(x=0.0, 0.1, 0.2, and 0.3) were prepared using the sol-gel method. The XRD measurements show that these samples have only a single phase of the garnet structure regardless of the amount of Ce substitution. The lattice constants of x = 0.0 and x = 0.3 were found to be a$_0$ = 12.3758 ${\pm}$0.0005 ${\AA}$ and 12.4062 ${\pm}$0.0005 ${\AA}$, respectively. The lattice constant increases linearly with increasing Ce concentration. The saturation magnetization was not changed flirty, with increasing Ce concentration, but coercivity decreased form 18.3 Oe to 5.8 Oe as x increased form x = 0.0 to x = 0.1. Mossbauer spectra of $Y_{3-x}Ce_{x}Fe{5}O_{12}$ were measured at various absorber temperatures from 13 K to Neel temperature. The Mossbauer spectra were fitted by least-squares technique with two subpatterns of Fe sites in the structure and corresponding to the 16a and 24d site. The temperature dependence of the magnetic hyperfine field in $^{57}$/Fe nuclei at the tetrahedral 240 and octahedral 16a sites were analyzed based on the Neel theory of ferrirnagnetism. The result of the Debye temperatures indicated that the inter-atomic binding force for the 24d site was larger than that for the 16a site.