• The Journal of Korea Institute of Information, Electronics, and Communication Technology
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• v.12 no.4
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• pp.366-372
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• 2019

In this paper, we fabricated a capacitive humidity sensor with an IDT(Interdigitated) electrode using commercial polyimide containing fluorine, and its properties were measured and analyzed. First, in order to analyze the composition of commercial polyimide, EDS analysis was performed after patterning process on a silicon wafer. The area of the humidity sensor was $1.56{\times}1.66mm^2$, and the width of the electrode and the gap between the electrodes were $3{\mu}m$ each. The number of electrodes was 166 and the length of the electrode was 1.294mm for the sensitivity of the sensor. The fabricated sensor showed that the sensitivity was 24 fF/%RH, linearity <${\pm}2.5%RH$ and hysteresis <${\pm}4%RH$. As a result of measuring the capacitance value according to the frequency change, the capacitance vlaue decreased with increasing frequency. Capacitance deviations with 10kHz and 100kHz were measured as 0.3pF on average.

• Journal of the Korean Crystal Growth and Crystal Technology
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• v.31 no.2
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• pp.73-77
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• 2021

Ga-doped ZnO thin films by RF magnetron sputtering process were synthesized according to the deposition conditions of O2 and Ar atmosphere gases, and rapid heat treatment (RTA) was performed at 600℃ in an N2 atmosphere. The thickness of the deposited ZnO : Ga thin film was measured, the crystal phase was investigated by XRD pattern analysis, and the microstructure of the thin film was observed by FE-SEM and AFM images. The intensity of the (002) plane of the X-ray diffraction pattern showed a significant difference depending on the deposition conditions of the thin films formed by O2 and Ar atmosphere gas types. In the case of a single thin f ilm doped with Ga under O2 conditions, a strong diffraction peak was observed. Under O2 and Ar conditions, in the case of a multilayer thin film with Ga doping, only a peak on the (002) plane with a somewhat weak intensity was shown. In the FE-SEM image, it was observed that the grain size of the surface of the thin film slightly increased as the thickness increased. In the case of a multilayer thin film with Ga doping under O2 and Ar atmosphere conditions, the specific resistance was 6.4 × 10-4 Ω·cm. In the case of a single thin film with Ga doping under O2 atmosphere conditions, the resistance of the thin film decreased. The resistance decreased as the thickness of the Ga-doped ZnO thin film increased to 2 ㎛, showing relatively a low specific resistance of 1.0 × 10-3 Ω·cm.

• Journal of the Microelectronics and Packaging Society
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• v.28 no.3
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• pp.9-15
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• 2021

Miniaturization of semiconductor devices has recently faced a physical limitation. To overcome this, 3D packaging in which semiconductor devices are vertically stacked has been actively developed. 3D packaging requires three unit processes of TSV, wafer grinding, and bonding, and among these, copper bonding is becoming very important for high performance and fine-pitch in 3D packaging. In this study, the effects of Ti nanolayer on the antioxidation of copper surface and low-temperature Cu bonding was investigated. The diffusion rate of Ti into Cu is faster than Cu into Ti in the temperature ranging from room temperature to 200℃, which shows that the titanium nanolayer can be effective for low-temperature copper bonding. The 12nm-thick titanium layer was uniformly deposited on the copper surface, and the surface roughness (R_q) was lowered from 4.1 nm to 3.2 nm. Cu bonding using Ti nanolayer was carried out at 200℃ for 1 hour, and then annealing at the same temperature and time. The average shear strength measured after bonding was 13.2 MPa.

• Journal of Korea Foundry Society
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• v.41 no.6
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• pp.505-515
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• 2021

Creep properties of directionally solidified Ni-based superalloy CM247LC under various temperature and stress conditions have been investigated. In the heat-treated specimen, some portion of eutectic γ-γ' remained, and uniform cubic γ' was observed in the dendrites. At low temperature (750℃) and high stress condition, a large amount of deformation occurred during the primary creep, while the tertiary creep region accounted for most of the creep deformation under high temperature and low stress condition. γ' particles are sheared by dislocation dissociated into super lattice partial dislocations separated by stacking faults at 750℃. No stacking faults in γ' were found at and above 850℃ due to the temperature dependence of the stacking fault energy. Raft structure of γ' was found after creep test at high temperature of 950℃ and 1000℃. At 850℃, the deformation mechanism was shown to be dependent on the stress condition, and so rafting was observed only under low stress condition.

• Resources Recycling
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• v.31 no.2
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• pp.40-48
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• 2022

In this study, the effects of solution components were investigated in the recovery of vanadium as ammonium metavanadate from vanadium-ore-salt roasting-water leaching solution. The vanadium-containing solution is strongly alkaline (pH 13), so the pH must be lowered to 9 or less to increase the ammonium metavanadate precipitation efficiency. However, in the process of adjusting the solution pH using sulfuric acid, aluminum ions are co-precipitated, which must be removed first. In this study, aluminum was precipitated in the form of an aluminum-silicate compound using sodium silicate, and the conditions for minimizing vanadium loss in this process were investigated. After aluminum removal, the silicate was precipitated and removed by adjusting the solution pH to 9 or less using sulfuric acid. In this process, the concentration and addition rate of sulfuric acid have a significant influence on the loss of vanadium, and vanadium loss was minimized as much as possible by slowly adding dilute sulfuric acid. Ammonium metavanadate was precipitated using three equivalents of ammonium chloride at room temperature from the aluminum-free, aqueous solution of vanadium following the pH adjustment process. The recovery yield of vanadium in the form of ammonium metavanadate exceeded 81%. After washing the product, vanadium pentoxide with 98.6% purity was obtained following heat treatment at 550 ℃ for 2 hours.

• Clean Technology
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• v.29 no.3
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• pp.178-184
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• 2023

Transition metal chalcogenides have garnered significant attention as anode materials for sodium-ion batteries due to their high theoretical capacity. Nevertheless, their practical application is impeded by their limited lifespan resulting from substantial volume expansion during cycling and their low electrical conductivity. To tackle these issues, this study devised a solution by synthesizing a nanostructured anode material composed of porous CNT (carbon nanotube) spheres and (Ni,Co)Se₂ nanocrystals. By employing spray pyrolysis and subsequent heat treatments, a porous-structured (Ni,Co)Se₂-CNT composite microsphere was successfully synthesized, and its electrochemical properties as an anode for sodium-ion batteries were evaluated. The synthesized (Ni,Co)Se₂-CNT microsphere possesses a porous structure due to the nanovoids that formed as a result of the decomposition of the polystyrene (PS) nanobeads during spray pyrolysis. This porous structure can effectively accommodate the volume expansion that occurs during repeated cycling, while the CNT scaffold enhances electronic conductivity. Consequently, the (Ni,Co)Se₂-CNT anode exhibited an initial discharge capacity of 698 mA h g^-1 and maintained a high discharge capacity of 400 mA h g^-1 after 100 cycles at a current density of 0.2 A g^-1.

• Journal of Korea Water Resources Association
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• v.40 no.10
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• pp.769-781
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• 2007

Factor analysis has been usually employed in reducing quantity of data and summarizing information on a system or phenomenon. In this analysis methodology, variables are grouped into several factors by consideration of statistic characteristics, and the results are used for dropping variables which have lower weight than others. In this study, factor analysis was applied for extracting primary factors influencing multi-dam system operation in the Han River basin, where there are two multi-purpose dams such as Soyanggang Dam and Chungju Dam, and water has been supplied by integrating two dams in water use season. In order to fulfill factor analysis, first the variables related to two dams operation were gathered and divided into five groups (Soyanggang Dam: inflow, hydropower product, storage management, storage, and operation results of the past; Chungju Dam: inflow, hydropower product, water demand, storage, and operation results of the past). And then, considering statistic properties, in the gathered variables, some variables were chosen and grouped into five factors; hydrological condition, dam operation of the past, dam operation at normal season, water demand, and downstream dam operation. In order to check the appropriateness and applicability of factors, a multiple regression equation was newly constructed using factors as description variables, and those factors were compared with terms of objective function used in operation water resources optimally in a river basin. Reviewing the results through two check processes, it was revealed that the suggested approach provided satisfactory results. And, it was expected for extracted primary factors to be useful for making dam operation schedule considering the future situation and previous results.

• Journal of Food Hygiene and Safety
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• v.35 no.4
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• pp.375-381
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• 2020

This study assessed the contamination levels of total aerobic bacteria, fungi, coliforms, Escherichia coli, Bacillus cereus, and Staphylococcus aureus and qualitative analysis of Salmonella spp. and Listeria monocytogens in six raw materials (beef, bean sprout, Chinese cabbage, king oyster mushroom, Korean cabbage, and sweet pumpkin) of home meal replacement (HMR) Shabu-Shabu meal kit distributed in markets. The total aerobic bacteria, fungi, and coliforms were detected as 3.98-6.50, 2.78-3.52, and 2.02-3.28 log CFU/g, respectively. Especially, beef was highly contaminated with total aerobic bacteria (6.50 log CFU/g) and coliforms (3.28 log CFU/g). Over 5 log CFU/g of total aerobic bacteria were also detected in bean sprout, Chinese cabbage, and sweet pumpkin. Less than < 2 log CFU/g of coliforms were detected in all vegetables. E. coli was not detected in any of the six samples (ND: < 1 log CFU/g). S. aureus was detected as 1.33-1.71 log CFU/g in most samples but it was not detected in beef and Korean cabbage. B. cereus was assessed as 1.15-2.01 log CFU/g in most samples but it was not detected in Korean cabbage. L. monocytogenes was qualitatively detected as 25-50% in most samples except for king oyster mushroom. Salmonella spp. were not qualitatively detected in any of the six samples. The microbial contamination levels determined in the current study may be potentially used as the basic data to execute microbial risk assessments of HMR foods such as Shabu-Shabu meal kit.

• Journal of the Institute of Electronics Engineers of Korea SD
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• v.48 no.6
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• pp.1-6
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• 2011

A transparent oxide thin film transistors (Transparent Oxide-TFT) have been fabricated by RF magnetron sputtering at room temperature using amorphous indium zinc oxide (a-IZO) as both of active channel and source/drain, gate electrodes and co-sputtered $HfO_2-Al_2O_3$ (HfAIO) as gate dielectric. In spite of its high dielectric constant > 20), $HfO_2$ has some drawbacks including high leakage current and rough surface morphologies originated from small energy band gap (5.31eV) and microcrystalline structure. In this work, the incorporation of $Al_2O_3$ into $HfO_2$ was obtained by co-sputtering of $HfO_2$ and $Al_2O_3$ without any intentional substrate heating and its structural and electrical properties were investigated by x-ray diffraction (XRD), atomic force microscopy (AFM) and spectroscopic ellipsometer (SE) analyses. The XRD studies confirmed that the microcrystalline structures of $HfO_2$ were transformed to amorphous structures of HfAIO. By AFM analysis, HfAIO films (0.490nm) were considerably smoother than $HfO_2$ films (2.979nm) due to their amorphous structure. The energy band gap ($E_g$) deduced by spectroscopic ellipsometer was increased from 5.17eV ($HfO_2$) to 5.42eV (HfAIO). The electrical performances of TFTs which are made of well-controlled active/electrode IZO materials and co-sputtered HfAIO dielectric material, exhibited a field effect mobility of more than $10cm^2/V{\cdot}s$, a threshold voltage of ~2 V, an $I_{on/off}$ ratio of > $10^5$, and a max on-current of > 2 mA.

• Proceedings of the Korea Association of Crystal Growth Conference
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• 1996.06b
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• pp.219-222
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• 1996

수열법은 밀폐용기중에서 10$0^{\circ}C$이상의 가열, 가압된 수용액이 반응에 관여하는 것으로써, 수정, CaCO3, AlPO4, GaPO4 등과 같은 단결정의 육성 뿐만 아니라 균일분산계로부터 균일한 결정성의 미립자 합성에도 폭넓게 이용되고 있다. 세라믹분말의 합성에 있어서, 이 방법은 특히 형상, 입자크기의 제어가 용이할 뿐만 아니라 고상법, 졸-겔법, 공침법에서와 같은 열처리, 분쇄과정이 필요없기 때문에 고순도의 초미립자를 얻을 수 있는 장점이 있다. 근년 미국, 일본에서는 수열법을 이용한 유전, 압전체 등 세라믹분말의 일부가 공업적인 규모로 대량 생산되고 있다. 그러나 이에 대한 국내 기술은 아직 초기단계에 이르고 있는 실정이다. 따라서 본 연구실에서는 수열법에 의한 단결정 육성 (예; 자수정, CaCO3, AlPO4, GaPO4, KTP, Emerald 등), 박막제조 (예; GaP, PbTiO3, BaTiO3 등), 정제 (고령토, 장석, 도석 등), 원석처리 (진주, 인공 emerald, 비취 등) 그리고 각종 세라믹분말의 합성 등과 같은 다양한 기반기술의 축적과 동시에 공업화에 대응한 수열장치를 위하여 반응용기의 대형화, 엄밀한 밀폐방식, 실용적인 수열조건 등을 개발해 오고 있다. 본 발표에서는 현재까지의 연구개발 내용 중에서 결정성 미립자에 관련한 세라믹분말의 합성에 대한 일부의 결과들을 보고한다. 일반적으로 수열장치는 전기로, 반응용기, 온도 및 압력제어계 등을 기본으로 하고 있으며 시판용의 대부분이 교반기가 부착된 수직형 (vertical type)이다. 이와 같은 방식에 있어서는 엄밀한 밀폐가 곤란, 반응온도의 한계성 (25$0^{\circ}C$ 이하), 증진율의 한계성 (소량생산) 등과 같은 점이 있기 때문에 본 연구실에서는 개폐식 전기로내에 엄밀한 밀폐가 가능한 수평식(horizontal type)의 반응용기를 채택한 뒤 이를 회전 또는 시이소(seesaw)식으로 움직일 수 있도록 하여 연속공정화, 온도구배의 자율조절 그리고 보다 저온에서도 인위적인 이온의 확산을 효율적으로 유도할 수 있도록 하였다. 이와 같은 방식은 기존의 방식과 비교하여 반응용기 내에 응집현상과 미반응물이 존재하지 않으며 또한 단분산으로 결정성 미립자를 대량적으로 얻을 수 있는 장점이 있었다. 다음은 이상과 같이 본 연구실에서 자체 개발한 수열장치를 이용하여 PbTiO3, (Pb,La)TiO3Mn, BaTiO3, ZnSiO4:Mn, CaWO4 등과 같은 세라믹분말에 대한 합성 실험의 결과이다. 압전성, 초전성이 우수한 PbTiO3 및 (Pb,La)TiO3:Mn 분말의 수열합성은 PbO, TiO2, La2O3 등의 분말을 출발원료로 하여 합성도도 25$0^{\circ}C$부근의 알카리성 용액중에서 결정성 PbTiO3 및 (Pb,La)TiO3:Mn 미립자를 단상으로 얻었으며 입자의 형상 및 크기는 합성온도와 수열용매의 종류에 의존하였다. 유전체로서 폭넓게 응용되고 있는 BaTiO3 분말은 Ba(OH)2.8H2O, TiO2와 같은 최적의 출발원료를 선택함으로써 15$0^{\circ}C$ 부근의 저온영역에서도 용이하게 합성할 수 있었다. 특히 본 연구에서는 수용성인 Ba(OH)2.8H2O를 사용함으로써 host-guest적인 반응을 유도시키는데 있어 물의 가장 실용적이고 효과적인 수열용매임도 알았다. ZnSiO4:Mn, CaWO4, MgWO4와 같은 형광체 분말은 공업적으로 고상반응 또는 습식법에 의해 얻어지고 있으나 이들 방법에 있어서는 분쇄공정으로 인한 형광특성의 저하와 같은 문제점이 있다. 따라서 본 연구에서는 수열법을 이용하여 이들 화합물의 합성을 시도하였으며 그 결과 합성온도 30$0^{\circ}C$ 부근의 알칼리성 용액중에서 수열적으로 얻어짐을 알았다. 여기서의 합성분말을 이용하여 실제 조명램프로 제조한 결과 녹색, 청색 발광용 형광체로서 우수한 형광특성을 나타내었다. 천연에서 소량 산출되고 있는 고가의 (Li,Al)MnO2(OH)2:Co 분말은 도자기의 전사지용 청색안료로써 이용되고 있다. 본 연구실에서는 LiOH.H2O, Al(OH)3, MnO2 등의 분말을 출발원료로 하고 24$0^{\circ}C$ 온도 부근 그리고 물을 수열용매로 하여 천연산에 필적하는 (Li,Al)MnO2(OH)2:Co 분말을 인공적으로 합성하였다.