• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
• /
• 2003.07a
• /
• pp.54-57
• /
• 2003

[ $HfO_xN_y$ ] films using a hafnium tertiary-butoxide $(Hf[OC(CH_3)_3]_4)$ in plasma and $N_2$ ambient were prepared to improve the thermal stability of hafnium-based gate dielectrics. A 10% nitrogen incorporation into $HfO_2$ films showed a smooth surface morphology and a crystallization temperature as high as $200^{\circ}C$ compared with pure $HfO_2$ films. The $TaN/HfO_xN_y/Si$ capacitors showed a stable capacitance-voltage characteristics even at post-metal annealing temperature of $1000^{\circ}C$ in $N_2$ ambient and a constant value of 1.6 nm EOT (equivalent oxide thickness) irrespective of an increase of PDA and PMA temperature. Leakage current densities of $HfO_xN_y$ capacitors annealed at PDA temperature of 800 and $900^{\circ}C$, respectively were approximately one order of magnitude lower than that of $HfO_2$ capacitors.

• Transactions of the Korean hydrogen and new energy society
• /
• v.22 no.1
• /
• pp.21-28
• /
• 2011

Fe, Ni and Co, typical active components, were dispersed on $Al_2O_3$ and $TiO_2$ for $SO_3$ decomposition. $SO_3$ decomposition was conducted at the temperature ranges from $750^{\circ}C$ to $950^{\circ}C$ using the prepared catalysts. Alumina based catalysts showed the surface areas higher than Titania based catalysts, which resulted from spinel structure formation of alumina based catalysts. Catalytic $SO_3$ decomposition reaction rates were in the order of Fe>Co${\gg}$Ni. The metal sulfate decomposition temperature were in the order of Ni>Co>Fe from TGA/DTA analysis of metal sulfate. During $SO_3$ decomposition, metal sulfate can form on the catalysts. $SO_2$ and $O_2$ can be produced from the decomposition of metal sulfate. In that point of view, the less is the metal sulfate deomposition temperature, the higher can be the $SO_3$ decomposition activity of the metal component. Therefore, it can be concluded that metal component with the low metal sulfate decomposition temperature is the pre-requisite condition of the catalysts for $SO_3$ decomposition reaction.

• Journal of the Korean Society of Propulsion Engineers
• /
• v.22 no.3
• /
• pp.90-96
• /
• 2018

This study investigated the manufacturing process and characteristics of $BKNO_3$ (Boron Potassium Nitrate) as a pyrotechnic propellant that is commonly used in the aerospace, defense, and automobile industries. The solid mixture was composed of oxidizing agent, fuel, and binder. Evaporation process was used to uniformly mix the raw materials. The optimal ratio of composition was designed through the CEA program analysis of the material characteristics and thermal responses. Further the size, shape, sensitivity, and calorimetry characteristics were studied.

• Korean Journal of Materials Research
• /
• v.9 no.11
• /
• pp.1117-1122
• /
• 1999

Amorphous Si and Co/Ti bilayers were sequentially evaporated onto 5- 10nm thick $\textrm{CoSi}_{2}$ and rapidly thermal-annealed(RTA) to form Co-polycide electrodes. Then, MOS capacitors were fabricated by doping poly-Si using SADS method. The C-V and leakage-current characteristics of the capacitors depending upon the RTA conditions were measured to study the effects of thermal stability of $\textrm{CoSi}_{2}$ and dopant redistribution on electrical properties of Co -polycide gates. Capacitors RTAed at $700^{\circ}C$ for 60-80 sec., showed excellent C-V and leakage-current characteristics due to degenate doping of poly-Si layers. But for longer time or at higher temperature, their electrical properties were degraeded due to $\textrm{CoSi}_{2}$ decomposition and subsequent Co diffusion. When making Co-polycide gate electrodes by SADS, not only degenerate doping of poly-Si layer. but also suppression of have been shown to be very critical.

• Polymer(Korea)
• /
• v.33 no.3
• /
• pp.203-206
• /
• 2009

Polyaniline Emeraldine salt (PANI-salt) prepared by the common chemical oxidative polymerization caused the corrosion of the metallic injection mold by protonic acid such as HCl which used as a dopant. PANI-salt, polyaniline doped with dodecylbenzenesulfonic acid (DBSA), was obtained by the emulsion polymerization in nonpolar organic solvent, toluene. In this study DBSA was used as a dopant along with a surfactant. PANI-salt and high impact polystyrene (HIPS) have a good solubility in toluene. Blends with different ratio of PANI and HIPS were prepared through a solution-cast blending. The structure of PANI-salt was characterized by FT-IR and UV-Vis. The morphology, thermal, and electrical properties for PANI-HIPS blends were investigated. Injection molded under $103^{\circ}C$, 120 psi, PANI-HIPS showed the highest electrical conductivity ($6.02{\times}10^{-5}\;S/cm$) after blending PANI (50 mL) and HIPS (1 g).

• Proceedings of the Korean Vacuum Society Conference
• /
• 2013.02a
• /
• pp.403-404
• /
• 2013

최근 scaling down의 한계에 부딪힌 DRAM과 Flash Memory를 대체하기 위한 차세대 메모리(Next Generation Memory)에 대한 연구가 활발히 진행되고 있다. ITRS (international technology roadmap for semiconductors)에 따르면 PRAM (phase change RAM), RRAM (resistive RAM), STT-MRAM (spin transfer torque magnetic RAM) 등이 차세대 메모리로써 부상하고 있다. 그 중 RRAM은 간단한 구조로 인한 고집적화, 빠른 program/erase 속도 (100~10 ns), 낮은 동작 전압 등의 장점을 갖고 있어 다른 차세대 메모리 중에서도 높은 평가를 받고 있다 [1]. 현재 RRAM은 주로 금속-산화물계(Metal-Oxide) 저항 변화 물질을 기반으로 연구가 활발하게 진행되고 있다. 하지만 근본적으로 공정 과정에서 산소에 의한 오염으로 인해 수율이 낮은 문제를 갖고 있으며, Endurance 및 Retention 등의 신뢰성이 떨어지는 단점이 있다. 따라서, 본 연구진은 산소 오염에 의한 신뢰성 문제를 근본적으로 해결할 수 있는 다양한 금속-질화물(Metal-Nitride) 기반의 저항 변화 물질을 제안해 연구를 진행하고 있으며, 우수한 열적 안정성($>450^{\circ}C$, 높은 종횡비, Cu 확산 방지 역할, 높은 공정 호환성 [2] 등의 장점을 가진 WN 박막을 저항 변화 물질로 사용하여 저항 변화 메모리를 구현하기 위한 연구를 진행하였다. WN 박막은 RF magnetron sputtering 방법을 사용하여 Ar/$N_2$ 가스를 20/30 sccm, 동작 압력 20 mTorr 조건에서 120 nm 의 두께로 증착하였고, E-beam Evaporation 방법을 통하여 Ti 상부 전극을 100 nm 증착하였다. I-V 실험결과, WN 기반의 RRAM은 양전압에서 SET 동작이 일어나며, 음전압에서 RESET 동작을 하는 bipolar 스위칭 특성을 보였으며, 읽기 전압 0.1 V에서 ~1 order의 저항비를 확보하였다. 신뢰성 분석 결과, $10^3$번의 Endurance 특성 및 $10^5$초의 긴 Retention time을 확보할 수 있었다. 또한, 고저항 상태에서는 Space-charge-limited Conduction, 저저항 상태에서는 Ohmic Conduction의 전도 특성을 보임에 따라 저항 변화 메카니즘이 filamentary conduction model로 확인되었다 [3]. 본 연구에서 개발한 WN 기반의 RRAM은 우수한 저항 변화 특성과 함께 높은 재료적 안정성, 그리고 기존 반도체 공정 호환성이 매우 높은 강점을 갖고 있어 핵심적인 차세대 메모리가 될 것으로 기대된다.

• Journal of Adhesion and Interface
• /
• v.9 no.4
• /
• pp.17-23
• /
• 2008

In this study, waterborne polyurethane (WPU)/nano ZnO was synthesized from various polyester polyols, 4,4-dicyclohexylmethane diisocyanate ($H_{12}MDI$), dimethylolpropionic acid (DMPA), triethylamine (TEA) and ethylenediamine (EDA), nano ZnO. The contents of metal oxide were varied from 0 to 1.0 wt% of total solid. The effects of nano ZnO contents and ionic contents in the WPU/nano ZnO on thermal, mechanical properties were studied. The glass transition temperature ($T_g$) of WPU/nano ZnO do not show a distinct tendency with incorporation of nano ZnO and the $T_g$ of WPU/nano ZnO a little increased with increase of DMPA contents. The tensile strength and 100% modulus increase and elongation at break decreases with increase of nano ZnO contents and DMPA contents.

• Journal of the Korean Crystal Growth and Crystal Technology
• /
• v.26 no.3
• /
• pp.109-114
• /
• 2016

Monodispersed $ZnGa_2O_4$ microspheres were synthesized by a facile two-step process consisting of a solvothermal method and calcination process. The prepared monodispersed $ZnGa_2O_4$ microspheres were aggregated into 3D microstructures by self-assembly with a large number of small $ZnGa_2O_4$ particles generated in nucleation. This nucleation and self-assembly making hierarchical microstructures were depended on the concentration of PEG (polyethylene glycol) due to CAC (critical aggregation concentration) theory. And also we controlled the amount of zinc acetate to make pure $ZnGa_2O_4$ phase. Additionally, to fix the optimized calcination condition, sample was characterized by TG-DTA to prove the thermal property in the calcination process and by FT-IR to identify the changes of functional group bonding between each element of the $ZnGa_2O_4$ precursor and oxide calcined at $900^{\circ}C$ for 1 h.

• Journal of the Institute of Electronics Engineers of Korea SD
• /
• v.40 no.1
• /
• pp.11-19
• /
• 2003

A micro sensor array with 4 discrete sensors integrated on a microhotplate was developed for identifying the kinds and quantities of explosive gases. The sensor array consisited of four tin oxide-based thin films with the high and broad sensitivity to the tested explosive gases and uniform thermal distribution on the plate. The microhotplate, using silicon substrate with N/O/N membrane, dangling in air by Al bonding wires, and controlling the thickness by chemical mechanical process (CMP), has been designed and fabricated. By employing the sensitivity signal of the sensor array at 40$0^{\circ}C$, we could reliably classily the kinds and quantities of the explosive gases like butan, propane, LPG, and carbon monoxide within the range of threshold limit values (TLVs), employing principal component analysis (PCA).

• Proceedings of the Korean Society of Propulsion Engineers Conference
• /
• 2017.05a
• /
• pp.433-439
• /
• 2017

This research investigates the manufacturing process and characteristics analysis of $BKNO_3$ (Boron Potassium Nitrate) as pyrotechnic are commonly found in the aerospace, defense, and automotive industries. A solid pyrotechnic mixture is composed of an oxidizing agent, fuel, and binder. Precipitation process was used to uniformly mix the raw material. Through the analysis of the material characteristics and thermal response is designed optimum ratio by NASA CEA program. It was compared by performing the evaluation of these size/shape/sensitivity/calorimetry characteristics.