• Title/Summary/Keyword: 열역학적 특성

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Study of etching properties of the $HfAlO_3$ thin film using the inductively coupled plasma (유도결합 플라즈마를 이용한 $HfAlO_3$ 박막의 식각특성 연구)

  • Ha, Tae-Kyung;Kim, Dong-Pyo;Woo, Jong-Chang;Um, Doo-Seung;Yang, Xue;Joo, Young-Hee;Kim, Chang-Il
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2009.06a
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    • pp.73-73
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    • 2009
  • 트렌지스터의 채널 길이가 줄어듦에 따라 절연층으로 쓰이는 $SiO_2$의 두께는 얇아져야 한다. 이에 따라 얇아진 절연층에서 터널링이 발생하여 누설전류가 증가하게 되어 소자의 오동작을 유발한다. 절연층에서의 터널링을 줄여주기 위해서는 High-K와 같은 유전율이 높은 물질을 이용하여 절연층의 두께를 높여주어야 한다. 최근에 각광 받고 있는 High-K의 대표적인 물질은 $HfO_2$, $ZrO_2$$Al_2O_3$등이 있다. $HfO_2$, $ZrO_2$$Al_2O_3$$SiO_2$보다 유전상 수는 높지만 밴드갭 에너지, 열역학적 안정성, 재결정 온도와 같은 특성 면에서 $SiO_2$를 완전히 대체하기는 어려운 실정이다. 최근 연구에 따르면 기존의 High-K물질에 금속을 첨가한 금속산화물의 경우 밴드갭 에너지, 열역학적 안정성, 재결정 온도의 특성이 향상되었다는 결과가 있다. 이 금속 산화물 중 $HfAlO_3$가 대표적이다. $HfAlO_3$는 유전상수 18.2, 밴드캡 에너지 6.5 eV, 재결정 온도 $900\;^{\circ}C$이고 열역학적 안전성이 개선되었다. 게이트 절연층으로 사용될 수 있는 $HfAlO_3$는 전극과 기판사이에 적층구조를 이루고 있어, 이방성 식각인 건식 식각에 대한 연구가 필요하다. 본 연구는 $BCl_3$/Ar 유도결합 플라즈마를 이용하여 $HfAlO_3$ 박막의 식각 특성을 알아보았다. RF Power 700 W, DC-bias -150 V, 공정압력 15 mTorr, 기판온도 $40\;^{\circ}C$를 기본 조건으로 하여, $BCl_3$/Ar 가스비율, RF Power, DC-bias 전압, 공정압력에 의한 식각율 조건과 마스크물질과의 선택비를 알아보았다. 플라즈마 분석은 Optical 이용하여 진행하였고, 식각 후 표면의 화학적 구조는 X-ray Photoelectron Spectroscoopy(XPS) 분석을 통하여 알아보았다.

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Function Approximation for Refrigerant Using the Neural Networks (신경회로망을 사용한 냉매의 함수근사)

  • Park, Jin-Hyun;Lee, Tae-Hwan
    • Proceedings of the Korean Institute of Information and Commucation Sciences Conference
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    • v.9 no.2
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    • pp.677-680
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    • 2005
  • In numerical analysis on the thermal performance of the heat exchanger with phase change fluids, the numerical values of thermodynamic properties are needed. But the steam table should be modeled properly as the direct use of thermodynamic properties of the steam table is impossible. In this study the function approximation characteristics of neural networks was used in modeling the saturated vapor region of refrigerant R12. The neural network consists of one input layer with one node, two hidden layers with 10 and 20 nodes each and one output layer with 7 nodes. Input can be both saturation temperature and saturation pressure and two cases were examined. The proposed model gives percentage error of ${\pm}$0.005% for enthalpy and entropy, ${\pm}$0.02% for specific volume and ${\pm}$0.02% for saturation pressure and saturation temperature except several points. From this results neural network could be a powerful method in function approximation of saturated vapor region of R12.

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Thermodynamic Characteristics of PMMA/PVME Blends Containing Compatibilizer and Their Gas Transport Properties (상용화제를 포함한 PMMA/PVME 블렌드의 열역학적 특성과 기체 투과 특성)

  • 최해욱;문유진;정병조;김창근
    • Polymer(Korea)
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    • v.26 no.2
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    • pp.245-252
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    • 2002
  • Thermodynamics and gas transport properties of polymethylmethacrylate (PMMA) blends with polyvinylmethylether (PVME) containing various amount of poly (styrene-b-methylmethacrylate) copolymer (P(S-b-MMA)) as a compatibilizer were studied. To extract interaction energies of binary pairs involved in the blends from the phase separation temperatures using an equation-of-state theory, PVME blends with methylmethacrylate copolymers containing various amount of styrene (SMMA) were prepared. PVME formed miscible blends with methylmethacrylate copolymers containing more than 70 wt% styrene and these miscible blonds showed a LCST-type phase separation behavior. Based on the interaction information obtained here, P(S-b-MMA) copolymer was added to the PMMA/PVME blends to enhance their compatibility. The average diameter of the dispersed rubber particles was gradually decreased for the blends of containing P(S-b-MMA) from 0 to 5 phr and then leveled off at a fixed size. At a fixed bland composition, the gas permeation was also increased as the P(S-b-MMA) content increased from 0 to 5 phr and then leveled off when the P(S-b-MMA) content was higher than 5 phr.

Thermodynamic Analysis of the Mixed TBAF Mixed Semi-Clathrate (TBAF 혼합 Semi-Clathrate의 열역학적 특성분석)

  • Lee, Youngjun;Lee, Seungmin;Park, Sungmin;Lee, Jongwoon;Seo, Yongwon
    • 한국신재생에너지학회:학술대회논문집
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    • 2010.06a
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    • pp.216.1-216.1
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    • 2010
  • 본 연구는 최근 하이드레이트와 유사한 형태인 semi-clathrate 형성을 통해 열역학적 촉진제로서 주목받고 있는 TBAF(Tetra-n-butyl ammonium fluoride)의 가스 하이드레이트 형성에 작용하는 영향을 알아보았다. TBAF를 10, 33.8, 45 wt%의 농도로 $CH_4+H_2O$, $CO_2+H_2O$, $N_2+H_2O$계에 첨가하여 가스 하이드레이트 3상 평형점(하이드레이트(H) - 물(Lw) - 기상(V)) 측정을 하였다. TBAF가 첨가된 경우 순수한 $CH_4$, $CO_2$, $N_2$ 가스 하이드레이트보다 평형조건이 더 높은 온도와 더 낮은 압력 영역에서 나타났으며 기체의 종류와 무관하게 TBAF의 농도가 33.8 wt%일 때 10, 45 wt%보다 뛰어난 촉진효과를 갖고 있음을 확인할 수 있었다. 이를 통해 양론비인 TBAF의 농도 33.8 wt% 이상에서는 반응을 하지 않고 남아있는 TBAF가 하이드레이트 생성반응에 방해요소로 작용하는 것을 알 수 있었다. 본 실험에서 얻어진 결과 TBAF를 촉진제로서 사용하는 가스 하이드레이트 공정이라면 33.8 wt% 농도의 사용이 가장 효과적일 것으로 사료된다.

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Thermodynamic Performance Analysis of a Cogeneration System in Series Circuit Using Regenerative ORC (재생 유기랭킨사이클을 이용한 직렬 열병합 발전 시스템의 열역학적 성능 특성)

  • KIM, KYOUNG HOON;PARK, BAE DUCK;KIM, MAN-HOE
    • Transactions of the Korean hydrogen and new energy society
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    • v.26 no.3
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    • pp.278-286
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    • 2015
  • This paper presents the analytical results of the thermodynamic performance characteristics for a cogeneration system using regenerative organic Rankine cycle (ORC) driven by low-grade heat source. The combined heat and power cogeneration system consists of a regenerative superheated ORC and an additional process heater in a series circuit. Eight working fluids of R134a, R152a, propane, isobutane, butane, R245fa, R123, and isopentane are considered for the analysis. Special attention is paid to the effect of turbine inlet pressure on the system performance such as thermal input, net power and useful heat productions, electrical, thermal, and system efficiencies. The results show a significant effect of the turbine inlet pressure and selection of working fluid on the thermodynamic performance of the system.

Thermodynamic Performance Characteristics of Organic Rankine Cycle (ORC) using LNG Cold Energy (LNG 냉열을 이용하는 유기랭킨사이클(ORC)의 열역학적 성능 특성)

  • Kim, Kyoung Hoon;Ha, Jong Man;Kim, Kyung Chun
    • Journal of the Korean Institute of Gas
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    • v.18 no.2
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    • pp.41-47
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    • 2014
  • In this work a thermodynamic performance analysis is carried out for a combined cycle consisted of an organic Rankine cycle (ORC) and a LNG cycle. The combined system uses a low grade waste heat in the form of sensible energy and the LNG cold energy is used for power generation as well as for heat sink. The effects of the key parameters of th system such as turbine inlet pressure, condensation temperature and source temperature on the characteristics of system are throughly investigated. The simulation results show that the thermodynamic performance of the combined system can be significantly improved compared to the normal ORC which is not using the LNG cold energy.

Thermodynamic Analysis of the Diabatic Efficiency of Turbines and Compressors (터빈과 압축기의 비단열 효율에 대한 열역학적 해석)

  • Park, Kyoung Kuhn
    • Transactions of the Korean Society of Mechanical Engineers B
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    • v.40 no.3
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    • pp.139-148
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    • 2016
  • Thermodynamic analysis is conducted on the first-order approximation model for turbines and compressors. It is shown that the adiabatic efficiency could be greater than unity, depending on the entropic mean temperature, entropy generation, thermal reservoir temperature, and heat transfer. Therefore, adiabatic efficiency applied to a diabatic control volume results in an error overestimating its performance. To resolve this overestimation, it is suggested that a reversible diabatic process be referred to as an ideal process to evaluate diabatic efficiency. The diabatic efficiency suggested in this work is proven to always be less than unity and it is smaller than the exergy efficiency in most cases. The diabatic efficiency could be used as a more general definition of efficiency, which would include adiabatic efficiency.

The thermodynamic efficiency characteristics of combined cogeneration system of 120MW (120MW급 열병합 복합발전시스템의 열역학적 효율 특성)

  • Choi, Myoungjin;Kim, Hongjoo;Kim, Byeongheon
    • Journal of the Korea Academia-Industrial cooperation Society
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    • v.18 no.6
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    • pp.29-36
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    • 2017
  • In this study, acombined cogeneration power plant produced two types of thermal energy and electric or mechanical power in a single process. The performance of each component of the gas turbine-combined cogeneration system was expressed as a function of the fuel consumption of the entire system, and the heat and electricity performance of each component. The entire system consisted of two gas turbines in the upper system, and two heat recovery steam generators (HRSG), a steam turbine, and two district heat exchangers in the lower system. In the gas turbine combined cogeneration system, the performance test after 10,000 hours of operation time, which is subject to an ASME PTC 46 performance test, was carried out by the installation of various experimental facilities. The performance of the overall output and power plant efficiency was also analyzed. Based on the performance test data, the test results were compared to confirm the change in performance. This study performed thermodynamic system analysis of gas turbines, heat recovery steam generators, and steam turbines to obtain the theoretical results. A comparison was made between the theoretical and actual values of the total heat generation value of the entire system and the heat released to the atmosphere, as well as the theoretical and actual efficiencies of the electrical output and thermal output. The test results for the performance characteristics of the gas turbine combined cogeneration power plant were compared with the thermodynamic efficiency characteristics and an error of 0.3% was found.

Thermodynamic Evaluations of Cesium Capturing Reaction in Ceramic Microcell UO2 Pellet for Accident-tolerant Fuel (사고저항성 핵연료용 세라믹 미소셀 UO2 소결체의 Cs 포집반응에 대한 열역학적 평가)

  • Jeon, Sang-Chae;Kim, Keon Sik;Kim, Dong-Joo;Kim, Dong Seok;Kim, Jong Hun;Yoon, Jihae;Yang, Jae Ho
    • Journal of Nuclear Fuel Cycle and Waste Technology(JNFCWT)
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    • v.17 no.1
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    • pp.37-46
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    • 2019
  • As candidates for accident-tolerant fuels, ceramic microcell fuels, which are distinguished by their peculiar microstructures, are being developed; these fuels have $UO_2$ grains surrounded by cell walls. They contribute to nuclear fuel safety by retention of fission products within the $UO_2$ pellet, reducing rod pressure and incidence of SCC failure. Cesium, a hazardous fission product in terms of amount and radioactivity, can be captured by chemical reactions with ceramic cell materials. The capture-ability of cesium therefore depends on the thermodynamics of the capturing reaction. Conversely, compositional design of cell materials should be based on thermodynamic predictions. This study proposes thermodynamic calculations to evaluate the cesium capture-ability of three ceramic microcell compositions: Si-Ti-O, Si-Cr-O and Si-Al-O. Prior to the calculations, the chemical and physical states of the cesium and the cell materials were defined. Then, the reactivity was evaluated by calculating the cesium potential (${\Delta}G_{Cs}$) and oxygen potential (${\Delta}G_{O_2}$) under simulated LWR circumstances of normal operation. Based on the results, cesium capture is expected to be spontaneous in all cell compositions, providing a basis for the compositional design of ceramic microcell fuels as well as a facile way for evaluating cesium capture.

Study on the safety analysis method based on thermodynamic characteristics analysis for high capacity and high power lithium battery (고용량/고출력 리튬 이차 전지의 열역학적 특성 분석 기반의 안전성 분석 방법에 대한 연구)

  • Kang, Deokhun;Kim, Kyungjin;Kim, Sungkeun;Kim, Jonghoon
    • Proceedings of the KIPE Conference
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    • 2020.08a
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    • pp.37-39
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    • 2020
  • 리튬이온 배터리는 동작하는 과정에서 필연적으로 열이 발생하기 때문에 적절한 열 관리에 대한 전략이 필요하다. 배터리에서의 발열은 가역적인 발열과 비가역적인 발열로 분류될 수 있으며 배터리의 용도별, 동작 조건 별 발열 특성이 상이하기 때문에, 배터리의 열적 안전성 확보를 위해서는 열적 특성에 대한 분석이 필수적이다. 본 연구에서는 고용량/고출력 리튬이온 배터리의 전기적 특성 실험을 수행하고 열적 안전성 분석을 위하여 발열 특성 분석을 수행하였다. 고용량/고출력 배터리 특성에 따라 가역적 발열과 비가역적 발열이 나타나는 특성이 상이한 것으로 확인되었으며, 또한 온도 측정 정보로부터 배터리의 내부 상태 특성을 추정하고 고장 진단 및 수명 특성에 활용될 수 있음을 확인하였다.

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