• Title/Summary/Keyword: 연마모

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CMP Properties of TCO Film by kind of Slurry (슬러리 종류에 따른 투명전도박막의 연마특성)

  • Park, Ju-Sun;Choi, Gwon-Woo;Lee, Woo-Sun;Na, Han-Yong;Ko, Pil-Ju;Seo, Yong-Jin
    • Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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    • 2008.06a
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    • pp.539-539
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    • 2008
  • 본 논문에서는 투명전도박막의 균일한 표면특성을 확보하기 위해 광역평탄화 공정을 적용하여 투명전도 박막의 표면 거칠기를 연구하였으며 슬러리의 종류에 따른 박막의 연마특성을 연구하였다. 본 실험에서 사용된 ITO 박막은 RF Sputtering에 의해 제작되었고 하부 기판은 석영 Glass가 사용되었다. 광역평탄화를 위한 CMP 공정은 고분자 물질계열의 패드위에 슬러리입자를 공급하고 웨이퍼 캐리어에 하중을 가하며 웨이퍼의 표면을 연마하는 방법으로 가공물을 탄성패드에 누르면서 상대 운동시켜 가공물과 친화력이 우수한 부식액으로 화학적 제거를 함과 동시에 초미립자로 기계적 제거를 하는 것이다. ITO 박막의 평탄화를 위한 공정조건은 Polisher pressure 300 g/$cm^2$, 슬러리 유속 80 ml/min, 플레이튼속도 60 rpm으로 하였다. 위의 조건에 따라 공정을 진행 후 연마특성을 측정하였으며 이때 사용된 슬러리는 산화막에 사용되는 실리카슬러리와 금속연마용 슬러리인 EPL을 사용하였다. 연마율은 실리카 슬러리가 EPL슬러리에 비해 높음을 확인 하였다. CMP 공정에 의해 평탄화를 수행 할 경우 실리카슬러리와 EPL슬러리 모두 CMP전에 비해 돌출된 힐록들이 감소되었음을 알 수 있었다. 비균일도 특성은 모든 슬러리가 양호한 특성을 나타내었다. 평탄화된 박막의 표면과 거칠기 특성은 AFM(XE-200, PSIA Company) 을 이용하여 분석을 하였다.

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SURFACE ROUGHNESS OF ESTHETIC RESTORATIVE MATERIALS BY POLISHING SYSTEMS (연마기구에 따른 심미 치아 수복재료의 표면 거칠기에 관한 비교 연구)

  • Park, Eun-Hae;Yang, Ku-Ho;Choi, Nam-Ki
    • Journal of the korean academy of Pediatric Dentistry
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    • v.30 no.3
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    • pp.520-529
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    • 2003
  • Proper finishing and polishing of tooth restorations enhance the esthetics and the longevity of the restored tooth. The aims of this study were to identify an appropriate polishing system for each esthetic restorative material(Z250, Heliomolar, Dyract AP, Fuji II LC), and to compare the efficiency of polishing systems(Enhance, Sof-Lex, Composite). The control group remains untouched. The results were as follows: 1. There was no significant difference of surface roughness among the materials, while a roughness value of Z250 was the lowest of all. 2. The smoothest surface was produced by Mylar sheet on all materials. The polishing procedures, however, increased a roughness value. 3. The smoothest surfaces were produced by Sof-Lex, and there was significant difference of surface roughness between Sof-Lex and Enhance systems. 4. The smoother surfaces on the control group showed many scratches after the polishing procedures in the SEM findings.

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제12회 전국 기능 경기대회 성료

  • Korean Federation of Science and Technology Societies
    • The Science & Technology
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    • v.10 no.9 s.100
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    • pp.17-17
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    • 1977
  • 기능한국을 이끌어갈 청소년 기능인들이 한자리에 모여 그동안 연마한 기량을 겨룬 제12회 전국기능경기대회 국제기능올림픽 한국위원회 (회장 이낙선)주최로 지난9월2일 부터 5일까지 4일간에 걸쳐 구미공단안에 있는 금오공업고등하교에서 실시되었다.

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Effect of polishing methods on color change by water absorption in several composite resins (여러 복합레진에서 수분 흡수에 의한 색변화에 연마가 미치는 영향)

  • Kim, Hye Jin;Kim, Mi-yeon;Song, Byung-chul;Kim, Sun-ho;Kim, Jeong-hee
    • Journal of Dental Rehabilitation and Applied Science
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    • v.35 no.1
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    • pp.1-10
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    • 2019
  • Purpose: The aim of this study was to evaluate the influence of polishing methods on the color stability of composite resins. Materials and Methods: Two bulk-fill and four conventional resin composites were filled in cylindrical molds (6 mm diameter, 4 mm height) and light-cured. The specimens were stored in $34^{\circ}C$ distilled water for 24 h. Spectrophotometer was used to determine the color value according to the CIE $L^*a^*b^*$ color space. Each group was divided into three groups according to polishing methods (n = 5). Group 1 was control group (Mylar strip group), group 2 was polished with PoGo, and group 3 was polished with Sof-Lex Spiral wheels. Color evaluation was performed weekly for 4 weeks after immersion in $34^{\circ}C$ distilled water. The results were analyzed by generalized least squares method (P < 0.05). Results: Generalized least squares analysis revealed that Sof-Lex Spiral wheels group showed the significantly lower ${\Delta}E$ values compared to PoGo and control group (P < 0.05). The ${\Delta}E$ values of polished group showed the significantly lower than the ${\Delta}E$ values of unpolished group (P < 0.05). Regarding color changes of composite resins, there was no significant difference between the ${\Delta}E$ values of Filtek Z250 and Filtek Z350 XT Universal restorative in all time intervals (P < 0.05). Tetric N-Ceram Bulk Fill showed the significantly lower ${\Delta}E$ values compared to other composite resins in 1, 2, 3 weeks (P < 0.05). Conclusion: Within the limitations of this study, polishing methods influence the color stabilities of composite resins. The group polished with Sof-Lex Spiral Wheels showed more resistance to discoloration than group polished with PoGo.

Tool-Path Optimization of Magnetic Abrasive Polishing Using Heuristic Algorithm (휴리스틱 알고리즘을 이용한 평면 자기연마 공구경로 최적화)

  • Kim, Sang-Oh;You, Man-Hee;Kwak, Jae-Seob
    • Journal of the Korean Society of Manufacturing Technology Engineers
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    • v.20 no.2
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    • pp.174-179
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    • 2011
  • This paper focuses on the optimal step-over value for magnetic tool path. Since magnetic flux density is changed according to distance from center of magnetic tool. Enhanced surface roughness is also different according to change of radius. Therefore, to get a identical surface roughness on workpiece, it is necessary to find optimal tool path including step-over. In this study, response surface models for surface roughness according to change of radiuses were developed, and then optimal enhanced surface roughness for each radius was selected using genetic algorithm and simulated annealing to investigate relation between radius and surface roughness. As a result, it found that step-over value of 6.6mm is suitable for MAP of magnesium alloy.

A Study on the Influence of Finishing and Polishing Methods on the Gap between Denture Base Resin and Soft Liner (의치의 마무리와 연마법이 의치상 레진과 연성 이장재 간의 공극에 미치는 영향에 관한 연구)

  • Jung, Seung-Hwan;Lee, Joon-Seok
    • Journal of Dental Rehabilitation and Applied Science
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    • v.24 no.4
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    • pp.325-335
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    • 2008
  • The junction between resilient denture liner and the denture base is difficult to finish and polish due to difference of the physical property of the materials. Gaps tend to be formed during finishing and polishing procedures. The purpose of this study was measuring the width of junctional gap between $Molloplast-B^{(R)}$ and denture base material after finishing and polishing procedure, and evaluating the effect of method and direction on gap width. $Molloplast-B^{(R)}$ was processed (according to the manufacturer's instruction) against Lucitone $199^{(R)}$ acrylic resin. 50 specimens were fabricated with a raised center section. All of specimens were examined and photographed with a stereoscopic microscope(x120), and the largest gap along the junction of $Molloplast-B^{(R)}$ and acrylic resin on each specimen was measured. One-way analysis of variance(ANOVA) and independent t-test at 95% confidence level were used to analyze the data and to compare groups. The results of this study were as follows. In comparison with finishing tools, the gap width was the largest in $Molloplast^{(R)}$-Cutter and the smallest in FSQ-cross cut bur. There was statistically significant difference between FSQ-cross cut bur and $Molloplast^{(R)}$-Cutter(p<0.05). There was no significant difference in gap width between the direction of polishing. The mean value of gap width was the smallest in case of no polishing, and the largest in case of polishing with pumice & tin oxide. There was statistically significant difference between pumice and pumice & tin oxide. From the results, it is concluded that the use of $Molloplast^{(R)}$-Cutter in clinic need serious consideration even though it has good cutting ability. Further careful study is needed for finishing and polishing methods for decreasing gap width in junction of two materials.

Evaluation of Industrial Byproduct for the Adsorption of Arsenic (V) (재이용한 산업부산물에 의한 비소(V) 이온 흡착능 평가)

  • Park, Youn-Jong;Yang, Jae-Kyu;Choi, Sang-Il
    • Journal of Soil and Groundwater Environment
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    • v.12 no.4
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    • pp.78-85
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    • 2007
  • This study provides an attempt to evaluate sanding wastes, generated from a chemical company as a reused adsorbent. Organic impurities in the raw sanding wastes were removed by calcination at $550^{\circ}C$. Aluminum was a major inorganic composition in the raw sanding wastes and increased from 29.09% to 52.73% after calcination. Dissolved concentrations of heavy metals from the calcined sample were below 0.3 mg/L in a stability test at pH 2. From the pH-edge adsorption experiments with the calcined sanding wastes, As (V) was found to follow an anionic-type adsorption. Adsorption isotherm obtained with variation of the dosage of the calcined sanding wastes was better described by Freundlich equation than Langmuir one. Freundlich constants of K and 1/n were 4.244 and 0.316, respectively. The As (V) adsorption capacity of calcined sanding wastes estimated from Langmuir isotherm was 13.25 mg/g. From this study, the calcined sample was identified as a good reusable adsorbent in the view point of stability and adsorption capacity on As (V).

Comparing the efficiency of periodontal instrument sharpening using aluminum oxide stones with different levels of roughness (다양한 거칠기의 알루미늄 옥사이드(Al2O3) 연마석을 이용한 치주기구 날 세우기의 효율성 비교)

  • Kim, Yong-Gun
    • Journal of Dental Rehabilitation and Applied Science
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    • v.30 no.2
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    • pp.131-137
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    • 2014
  • Purpose: This study examined the efficiency and wear of periodontal instrument sharpening using aluminum oxide stones with different levels of roughness. Materials and Methods: Thirty new No. 9-10 Gracey curets were used in this study. All curets had become dull after scaling and root planing. After similar blunting, the instruments were divided randomly into three groups (240, 600, 800 grit) containing 10 curets each. The stones were applied correctly to the lateral surface of each curet to maintain the $70-80^{\circ}$ angle. After resharpening, sharpness of the curets was examined by an optical microscope. After 20, 40, 60, and 80 strokes, the wear was measured at 1 mm and 2 mm from the tip of the cutting edge using a digital caliper. The data was analyzed statistically using analysis of variance (ANOVA) with repeated measures, 2-way ANOVA, and a Fisher's exact test. Results: The degree of sharpness increased significantly (P < 0.001) as the number of sharpening strokes grew for all stones. A comparison of the degree of sharpness on the same number of strokes showed that the 240 grit group significantly excelled the other groups on 5 and 10 strokes, respectively (P < 0.001). The mean wear showed no statistically significant difference among the groups (P > 0.05). Conclusion: The efficiency of Gracey curet resharpening was enhanced with more coarse stones, though we should consider the wear of the instrument during resharpening.

A Study on Color Differences Between Composite Resins and Shade Guides (복합레진과 shade guide의 색차에 관한 연구)

  • Kim, Hee-Sun;Um, Chung-Moon;Kahng, Myong-Whai
    • Restorative Dentistry and Endodontics
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    • v.21 no.1
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    • pp.107-120
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    • 1996
  • 복합레진은 조작이 용이하고 강도가 우수하며 중합시간이 짧고 법랑질과 상아질에 접착이 가능하며 연마성이 뛰어나고 자연스러운 색상을 나타내므로 심미적 수복에 가장 일반적으로 선택되는 재료의 하나이다. 대부분의 복합레진 kit에는 shade guide가 포함되어 있어 이를 기준으로 중합된 후의 복합레진 색조를 예상하여 선택하게 된다. 그러나 이러한 shade guide들은 대개 복합레진이 아닌 plastic으로 제조된 것으로 중합된 복합레진의 실제 색조와는 차이가 생기게 되며 결국 shade guide 자체의 문제점으로 인해 이상적인 색조선택이 어려워진다. 이에 본 연구에서는 국내에 시판되고 있는 5종의 복합레진 제품을 선정하여 분광 광도계를 이용해서 shade guide와 중합된 복합레진 사이의 색조차이를 측정, 비교 연구하였다. 직경 16mm. 두께 1.6mm의 plastic mold에 5종의 광중합형 복합레진(Z100, Prisma TPH, Tetric, Silux Plus, Herculite XR)을 충전하고 응축기에 넣어 압축한 후 제조사의 지시에 따라 광중합기로 중합시킨 후 mold에서 시편을 제거하여 보관했다가 젖은 sandpaper 상에서 순차적으로 연마하였다. shade guide는 step부분을 갈아내어 복합레진 시편과 동일한 두께로 만든후 연마하였다. 분광광도계에 shade guide를 넣고 CIE illuminant D65 하에서 spectral reflectance를 측정하고 해당 색조의 복합레진 시편도 통일한 방법으로 측정하고 $L^*$, $a^*$, $b^*$값과 ${\Delta}E^*$값을 얻은후 분석하여 다음과 같은 결과를 얻었다. 1. Z100의 D3, A3, B2 shade와 Prisma TPH의 B2 shade를 제외한 모든 시편에서 shade guide와 복합레진간에 육안으로 인지할 수 있는 색차(${\Delta}E^*$ > 1.0)가 관찰되었다. 2. 평균적으로 Z100이 가장 적은 색차를 나타내었고 Prisma TPH, Tetric, Silux Plus, Herculite XR 순으로 색차가 증가하였다. 3. Prisma TPH의 A2 shade. Tetric의 W shade. Silux Plus의 YB, U shade, Herculite XR의 L, LY shade는 ${\Delta}E^*$값이 3.3 이상으로 나타났다. 4. Z100, Prisma TPH, Tetric, Silux Plus에서는 복합레진보다 shade guide가 더 높은 $L^*$값을 보이는 경향이 나타났으며, Herculite XR에서만 복합레진이 더 높은 $L^*$값을 나타냈다. 5. 모든 시편에서 $b^*$ 값은 (+)로 관찰되었고, Z100, Prisma TPH, Tetric, Silux Plus의 shade guide는 복합레진에 비해 높은 $b^*$값을 보였다. 6. 모든 시편에서 $a^*$값은 (-)로 관찰되었고. Herculite XR 및 Silux Plus에서는 복합레진이 shade guide 에 비 해 낮은 $a^*$값을 나타냈다.

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