• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.13 no.1
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• pp.33-38
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• 2000

In this study, multilayer piezoelectric actuators were fabricated with 75 layers by a conventional multi-layer capacitor (MLC) techniques, using 70Ag/30Pd paste as an internal electrode which can be sintered at low temperature and have cost down effect in mass productions. The multilayer piezoelectric actua-tors had no defects such as diffusions of internal electrode to ceramic bodies and shortages of internal electrodes. The multilayer piezoelectric actuators did not show the crack in the ceramics parts and the gapping phenomena in the external eletrodes when Ag paste was used as external electrodes. The multilayer piezoelectric actuators showed a maximum displacement of 4${\mu}{\textrm}{m}$ at 100V dc voltage and kept the maximum displacement constant for 300 seconds. The multilayer piezoelectric actuators showed good matching properties between ceramic bodies and AgPd internal electrodes. We confirmed the possibility of large-scaled production of the multilayer piezoelectric actuators with superior electrical properties and cost down effect using 70Ag/30Pd paste as an internal electrodes.

• Electrical & Electronic Materials
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• v.10 no.9
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• pp.909-915
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• 1997

To improve the electro-induced strain and to decease the hysteresis of that W $O_3$dopant of which amount is 0~0.8wt% was added to (P $b_{0.73}$/B $a_{0.27}$)(Z $r_{0.75}$/ $Ti_{0.25}$) $O_3$+0.1wt% $Y_{2}$/ $O_3$ceramics. At the specimen with 0.4 wt% W $O_3$the electromechanical coupling coefficient( $K_{31}$ ) showed the maximum value of 23.6% at D.C 10 kV/cm electric field. At the same W $O_3$addition amount the piezoelectric constant( $d_{31}$ ) and the electro-induced strain($\Delta$$\ell$/$\ell$)showed the highest values of 182$\times$10$^{-12}$ [C/N] 210$\times$10$^{-6}$ $\Delta$$\ell$/$\ell$at D.C. 10 kV/cm electric field. respectively0 kV/cm electric field. respectivelyvely.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2004.10a
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• pp.304-307
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2000.06a
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• pp.1627-1632
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• 2000

Recently, piezoelectric materials have attracted considerable attention because of its self-sensing and actuating properties. To model smart structures, numerical modeling of structures with piezoelectric devices is essential. As many factors affect the performance of smart structures, optimization of these parameters is necessary. In this paper, the shape design sensitivity analysis of the 3D piezoelectric and structural elements is developed and shape optimization is performed. For the evaluation of the sensitivity, the finite element method is used. For the shape sensitivity, the domain velocity field is calculated. An acoustic cavity model is presented as a numerical example to study the feasibility of the formulation. The continuum sensitivity is compared with the results of the finite difference method by ANSYS. And the sequential linear programming (SLP) algorithm is used as the optimization algorithm.

• Proceedings of the Korean Society of Machine Tool Engineers Conference
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• 2004.10a
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• pp.213-218
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• 2004

As optical fiber communication grows, the fiber alignment become the focus of industrial attention. This greatly influence the overall production rates for the opto-electric products. We proposed multi-axis nano positioning stage for optical fiber alignment. This device has 3 DOF translation and sub nanometer resolution. This nano stage consist of 3 PZT-driven flexure stages which are stacked parallel. The displacement of it is measured with capacitance gauge and is controlled by computer-embedded main controller. The design process of flexure stage using FEM is proposed and the performance evaluation of this system is verified with experiments.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.10a
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• pp.283-286
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• 2002

This paper presents the straightness compensation system which is a device for improving the machining accuracy of ultra-precision machines by synchronizing the position of diamond tool tip with machine error motion. Sine it is actuated by piezoelectric actuator with highly nonlinear hysteresis characteristics, the feedback control schemes such as Proportional Integral(PI), are required and realized by measuring the displacements of diamond tool tip. for the better tracking performance, the controller was implemented using TMS320C32 32bit floating-point DSP which is fast so that the real-time control is possible. In addition, stand alone type DSP board was chosen fur the easy assembly into the ultra-precision machines. The experimental results show good command tracking performance and the motion error of the machine is satisfactorily compensated during the machining process.

• Proceedings of the Korean Society for Noise and Vibration Engineering Conference
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• 2004.11a
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• pp.407-412
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• 2004

본 연구에서는 PMN-PT bimorph actuator를 이용하여 초소형 광디스크 드라이브용 광픽업 구동기를 제작하였다. 최근에 휴대용 기기에서의 고용량 정보 저장기기에 대한 필요성이 대두됨에 따라 착탈식이 가능한 수 기가급 초소형 광디스크 드라이브가 개발중에 있다. PMN-PT는 약 1.5kV/cm 이하의 전기장에서는 PZT같은 압전 소자와 마찬가지로 입력 전압에 대한 변형률이 선형성을 나타내는데, 사용된 PMN-PT는 PZT의 약 3배 가까운 압전 상수값을 나타내었다. 보 끝단에 외부 힘이 작용할 때 PMN-PT bimorph 구동기가 낼 수 있는 수직 방향의 힘과 변위에 대해서 일반적인 적층 형태로 이론적인 해석을 수행 하였다. 그리고 이 bimorph로 구동될 Cymbal 형태의 변위 확대 기구의 변위에 대한 이론적인 모델을 제시하고, 이를 이용하여 2개의 bimorph로 2축을 동시에 구동하는 픽업 구동기를 제작하였다. 3개의 제작된 prototype으로 실험을 수행하여 예상 변위량과 잘 일치함을 보였다. 또한, 상용 해석 프로그램인 Matlab과 Ansys를 이용하여 Cymbal 확대 기구의 여러 파라미터에 따른 구동 성능의 민감도를 확인해 보았다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2008.06a
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• pp.48-48
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• 2008

현재 압전재료로써 사용되고 있는 PZT계 세라믹스는 우수한 압전 및 유전특성으로 초음파 센서, 압전변압기, 액츄에이터, 필터, 레조네이터와 같은 여러 응용분야에 널리 사용되어지고 있다. 그러나 납을 60%이상 포함하므로 환경오염에 의하여 그 사용에 대한 규제가 강화되고 있어 최근에는 납을 함유하지 않은 무연 환경친화형 압전세라믹스가 주목받고 있다. 현재 무연 조성 세라믹스에는 텅스텐-브론즈 형, 비스머스 레이어형, 페로브스카이트 형 등이 이으며, 그 중 페로보스카이트 혈을 제외하고는 보통 소성법 조제시 낮은 압전특성을 갖는다. 그러므로 압전특성을 증가시키기 위하여 Hot pressing, Hot forging, RTGG(Reactive Template Grain Growth), SPS(Spark Plasma Sintering), 그러나 이는 무연 세라믹스의 대량생산 과정에서 어려운 문제를 가지고 있고, 저가격 관점에서 볼 때 보통소성법이 보다 바람직하다. 그래서 보통소성법으로 NKN세라믹스의 소결성을 향상 시키고 비교적 높은 압전특성을 얻기 위해서 $LiSbO_3$, $LiNbO_3$, $LiTaO_3$, alkaline-earth(Mg, Ca, Sr, Ba) 등을 첨가한 논문들이 보고되고 있으며, 이러한 재료들의 kp는 대략 0.3-0.4를 나타내고 있다. 따라서, 본 연구에서는 소결온도를 낮추고자 $Ag_2O$를 소결조제로 사용하였고 유전 및 압전특성을 높이고자 소결시간 변화시켜 시편을 제작하여 NKN 세라믹스의 유전 및 압전특성을 조사하였다.

• Proceedings of the KSME Conference
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• 2004.11a
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• pp.777-781
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• 2004

This paper presents a force/displacement sensing system to measure penetration depths and machining forces during pattering operation. This sensing system consists of a leaf spring mechanism and a capacitive sensor, which is mounted on a PZT driven in-feed motion stage with 1nm resolution. The sample is moved by a xy scanning motion stage with 5nm resolution. The constructed system was applied to nano indentation experiments, and the load-displacement curves of silicon(111) and aluminum were obtained. Then, the indentation samples were measured by AFM. Experimental results demonstrated that the developed system has the ability of preforming force/depth sensing indentations

• Journal of the Korean Society for Precision Engineering
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• v.22 no.12 s.177
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• pp.175-183
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• 2005

In recent years, as the demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this Paper, the optical alignment characteristic of multi-axis ultra precision stage is studied. The alignment algorithms are studied for applying to the ultra precision multi-axis stage. The alignment algorithm is comprised of field search and peak search algorithms. The contour of optical power signals can be obtained by field search and the precise coordinate can be found out by peak search. Three kinds of alignments, such as 1 ch. input vs. 1 ch. output optical stack, 1 ch. input vs. 8 ch. output PLC stacks, and ferrule vs. ferrule, are performed for investigating the alignment characteristics.