• Proceedings of the KIEE Conference
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• 2004.07c
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• pp.1612-1614
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• 2004

The piezoelectric ceramics for AE-sensor are desired large electromechanical coupling factor, high mechanical quality factor and good characteristic resonance frequency. In this study, the empirical formula of specimens is used 0.9Pb$(Zr_xTi_{1-x})O_3-0.1Pb(Mn_{1/3}Nb_{1/3}Sb_{1/3})O_3$ (PZT-PMNS). The piezoelectric and dielectric characteristic are investigated by sintering temperature and value of x as functions of $Ti^{2+},\;Zi^{2+}$ moi rate. MPB(morphotropic phase boundary) is defned in the x=0.522. Because it is appeared to the best piezoelectric and dielectric characteristic in the x=0.522, it can be application of AE sensor. PZT-PMNS ceramics without pre-amplifier and filter are tested for AE-signal of PD and arc detecting. The detection characteristic is evaluated wave form, frequency distribution.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2009.11a
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• pp.118-118
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• 2009

Low temperature co-fired ceramic (LTCC) is one of promising materials for MEMS structures because it has very good electrical and mechanical properties as well as possibility of making various three dimensional (3D) structures. In this work, piezoelectric pressure sensors based on hybrid LTCC technology were presented. The LTCC diaphragms with thickness of 400 um were fabricated by laminating 12 green tapes which consist of alumina and glass particle in an organic binder. The piezoelectric sensing layer consists of $Pb(ZrTi)O_3$ (PZT) thin film deposited by RF magnetron sputtering method on between top and bottom Au electrodes. The results showed that the fabrication method is very suitable for pressure sensor applications. The PZT films deposited on LTCC diaphragms were successfully grown and were analyzed by using X-ray diffraction method (XRD) and field emission scanning electron microscope (FESEM).

• Transactions of the Korean Society of Machine Tool Engineers
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• v.15 no.1
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• pp.8-16
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• 2006

The communication through optical fiber is taking an important role of the expansion of communication network with excellent transmitting rate and quality. As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement of the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• Journal of the Korean Society for Precision Engineering
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• v.26 no.2
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• pp.35-44
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• 2009

Long stroke Fast Tool Servo (LFTS) with maximum stroke of $432{\mu}m$ is designed, manufactured and tested for fabrication of optical free-form surfaces. The large amount of stroke in LFTS has been realized by utilizing the hinge and lever mechanisms which enable the displacement amplification ratio of 4.3. In this mechanism the peculiar shape was devised for maximizing the displacement of end tip in LFTS and special mechanical spring has been mounted to provide the sufficient preload to the piezoelectric actuator. Also, its longitudinal motion of tool tip can be measured by capacitive type displacement sensor and closed-loop controlled to overcome the nonlinear hysteresis. In order to verify the static and dynamic characteristics of designed LFTS, several features including step response, frequency response and cut-off frequency in closed-loop mode were experimentally examined. Also, basic machining result shows that the proposed LFTS is capable of generating the optical free-form surface as an additional axis in diamond turning machine.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1219-1222
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• 2005

As the optical communication is introduced to the backbone network at first and becomes a general communication method of network, the demand of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM(Wavelength Division Multiplexing) element increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the driving mechanism of ultra precision stage is studied with the aim of optimal design of stage. The travel and the resolution of stage are investigated. The hysteresis of the stage is generated because of PZT actuator. The hysteresis and the inverse hysteresis are modeled in X, Y, and Z-axis motion. The input data of desired displacement to the stage according to input voltage is obtained from the inverse hysteresis equation. In the result of experiments with the input data, the errors due to hysteresis are well compensated.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2005.06a
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• pp.1190-1193
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• 2005

In recent years, as the demands of VBNS and VDSL increase, the development of kernel parts of optical communication such as PLC(Planar Light Circuit), Coupler, and WDM elements increases. The alignment and the attachment technology are very important in the fabrication of optical elements. In this paper, the optical alignment characteristics of multi-axis ultra precision stage were studied. The alignment algorithms were studied for applying to the ultra precision multi-axis stage. The alignment algorithm is comprised of field search and peak search algorithms. The contour of optical power signals can be obtained by field search and the precise coordinate can be found out by peak search. Two kinds of alignments, such as 1 ch. input vs. 1 ch. output optical stack, and 1 ch. input vs. 8 ch. output PLC stacks were performed for investigating the alignment characteristics.

• Proceedings of the Korean Society of Precision Engineering Conference
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• 2002.05a
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• pp.244-247
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• 2002

The performance of the precision micro-positioning 4-dof stage is presented. The compact design utilizes the monolithic mechanism to achieve the translation in the Z axis and rotation in the $\theta$ z, $\theta$ x and $\theta$ y axes with high stiffness and high damping. Hysteresis, nonlinearity, and drift of the piezoelectric effects are improved by incorporating the sensors in a feedback control. Experiments demonstrate that the micro-positioning stage is capable of 2nm resolution over the travel range of 25$\mu\textrm$ m in the Z axis, 0.0l7 $\mu\textrm$ rad resolution over the 170$\mu\textrm$ rad in the $\theta$ z and 0.011 $\mu\textrm$ rad resolution over the $\mu\textrm$ rad in the $\theta$ x and $\theta$ y axes. The cross-axis interferences among the axes are at a noise range. This stage is available for positioning error compensation of the XY stage with large stroke.

• Journal of the Korean Society for Precision Engineering
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• v.23 no.6 s.183
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• pp.119-127
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• 2006

A non-destructive time domain approach to examine structural damage using parameterized partial differential equations and Galerkin approximation techniques is presented. The time domain analysis for damage detection is independent of modal parameters and analytical models unlike frequency domain methods which generally rely on analytical models. The time history of the vibration response of the structure was used to identify the presence of damage. Damage in a structure causes changes in the physical coefficients of mass density, elastic modulus and damping coefficients. This is a part of our ongoing effort on the general problem of modeling and parameter estimation for internal damping mechanisms in a composite beam. Namely, in detecting damage through time-domain or frequency-domain data from smart sensors, the common damages are changed in modal properties such as natural frequencies, mode shapes, and mode shape curvature. This paper examines the use of beam-like structures with piezoceramic sensors and actuators to perform identification of those physical parameters, and detect the damage. Experimental results are presented from tests on cantilevered composite beams damaged at different locations and different dimensions. It is demonstrated that the method can sense the presence of damage and obtain the position of a damage.

• Journal of the Korean Institute of Electrical and Electronic Material Engineers
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• v.25 no.5
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• pp.361-365
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• 2012

A bolt-clamped ultrasonic viscometer was designed and fabricated using a pair of ring-shaped piezoelectric ceramic resonators. For its compactness and low operation frequencies, simulation of piezoelectric resonators was carried out using an ATILA program. Ring-shaped resonators using $0.05Pb(Mn_{1/3}Sb_{2/3})O_3-0.95Pb(Zr_{0.475}Ti_{0.525})O_3$ ceramics were prepared by a conventional ceramic processing, which were then clamped with a pair of metal caps. The fabricated sensor module with a small volume of less than 1 $cm^3$ and an operation frequency as low as 26.5 kHz showed a good relationship between its quality factor and the viscosity of oil.

• Journal of the Korean Society for Precision Engineering
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• v.14 no.3
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• pp.107-113
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• 1997

This paper presents the active control of a flexible cantilever beam vibration. The cantilever beam was excitied by a steady-state harmonic and white noise point force and the control was performed by one piezo ceramic actuator bonded to the surface of the beam. An adaptive controller based on filtered-x LMS algorithm was used and the controller was defined by minimizing the square of the response of error sensor. In the experiment, gap sensor was used as an error sensor while the sinusoidal or white noise was applied as a disturbance. In the case of sinusoidal input, more than 20 dB of vibration reduction was achieved over all range of the natural frequencies and it takes 5 seconds to control the vibration at first natural frequency and 1 second at other natural frequencies. In the case of white noise input, 7 dB of vibration reduction was achieved at the first natural frequency and good control performance was achieved in the considered whole frequency range. Results indicate that the vibration of a flexible cantilever beam could be controlled effectively when the piezo ceramic actuator was used with filtered-x LMS algorithm.