• 한국전기전자재료학회논문지
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• 제29권10호
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• pp.601-607
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• 2016

Piezoelectric thick films of soft $Pb(Zr,Ti)O_3$ (PZT) based commercial material (S55) were fabricated using a conventional tape casting method. Ag-Pd electrodes were printed on the piezoelectric film at room temperature and all 5 layered films with a dimension of $12mm{\times}16mm$ were successfully laminated for a multi-layered piezoelectric ceramic actuator. The laminated specimens were co-fired at $1,100^{\circ}C$ for 1 h. A flat layered and dense microstructure was obtained for the $112{\mu}m$ thick piezoelectric actuator after sintering process. Thereafter, a prototype piezoelectric speaker was fabricated using the multi-layered piezoelectric ceramic actuator which can operate as a bimorph. Its SPL (sound pressure level) characteristic was also evaluated for speaker application. Frequency response revealed that the output SPL with a root mean square voltage of 10 V increased gradually to the highest peak of 87.5 dB for 1.5 kHz and exhibited a relatively stable behavior over the measured frequency range (${\leq}20kHz$) at a distance of 10 cm, implying that the fabricated piezoelectric speaker is potential for speaker applications.

• 한국재료학회지
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• 제13권6호
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• pp.360-364
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• 2003

$Sr_{l}$ $\pm$x/$Bi_{2}$ $\pm$y/$Ta_2$ $O_{9}$ and $Sr_{l}$ $\pm$$Bi_{x}$ $2\pm$y$Nb_2$$O_{9}$ ceramics were prepared by a solid state reaction method. X-ray diffraction analysis indicated that single-phase of Bi-layered perovskite was obtained. According to Sr/Bi content ratio, Curie temperature( $T_{c}$), electromechanical factor($K_{p}$ ) and mechanical quality factor($Q_{m}$ ) were measured. The Curie temperature of SBN(SBT) rose from $414^{\circ}C$(314$^{\circ}C$) to $494^{\circ}C$(426$^{\circ}C$) when Sr/Bi content ratio was increased. In the case of Sr/Bi content ratio = 0.55/2.3, the maximum value of the mechanical quality factor $Q_{m}$ of SBT and SBN were obtained 3320 and 1010, respectively.

• 한국재료학회지
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• 제17권2호
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• pp.68-72
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• 2007

Optimum compositions for piezoelectric properties of $(Bi_{0.5}Na_{0.5})_{(1-x)}Ba_xTiO_3$ ceramics were investigated in the range of $x=0{\sim}0.1$ covering rhombohedral to tetragonal phase regions. No impurity phases other than a perovskite phase were found and the grain size decreased with increasing x. A two-phase coexisting morphotropic phase area rather than boundary dividing rhombohedral and tetragonal phase regions appeared to exist at $x=0.05{\sim}0.08$. As for piezoelectric properties within morphotropic phase compositions, the piezoelectric constant ($d_{33}$) and the electromechanical coupling factor ($K_p$) showed peak values at x=0.065, 192 pC/N and 34%, respectively, indicating x=0.065 as an optimum composition for piezoelectric $(Bi_{0.5}Na_{0.5})_{(1-x)}Ba_xTiO_3$ ceramics.

• 한국인터넷방송통신학회논문지
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• 제12권1호
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• pp.245-248
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• 2012

본 논문에서는 실리콘 기반의 기술과 차별화하여 저온동시소성세라믹 (LTCC) 기판을 이용하여 대표적 압전물질인 PZT 박막의 최적의 증착조건을 연구하였다. LTCC 기술은 실리콘 기반의 기술에 비하여 낮은 생산 단가, 높은 수율, 3차원 구조물의 용이한 제작성 등으로 인하여 센서 및 액추에이터와 같은 10 um ~ 수백 um 정도의 중규모 디바이스를 제작하는데 있어서 중요한 역할을 담당하고 있다. LTCC 기판은 NEG사의 MLS 22C 상용 파우더를 이용하여 100 um 두께의 그린쉬트를 적층하고 동시소결하여 400 um 두께로 제작하였다. 제작한 기판위에 Pt/Ti 하부전극을 증착하고 RF 마그네트론 스퍼터링 방법을 이용하여 PZT 박막의 증착조건을 연구하였다. 증착조건으로는 RF 전력과 아르곤과 산소 가스비를 가변하여 실시하였으며, XRD와 EDS를 사용하여 박막의 결정성 및 성분을 분석하였다. 실험을 통하여 얻어진 최적의 증착조건은 RF 전력 125W, 아르곤과 산소비 15:5에서 가장 우수한 특성을 나타내는 것을 확인하였다.

• 한국전기전자재료학회논문지
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• 제22권9호
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• pp.766-771
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• 2009

Lead-free $0.94(Na_{0.5}K_{0.5})NbO_3$-0.06Ba$(Ti_{0.9}Sn_{0.1})O_3$ [0.94NKN-0.06BTS] ceramics doped with 1 mol% $MnO_2$ were synthesized by a conventional solid state method. The phase transitional behavior and piezoelectric properties of the ceramics sintered at various temperatures were investigated. The 0.94NKN-0.06BTS ceramics sintered at $1050^{\circ}C$, having morphotropic phase boundary of orthorhombic and tetragonal phases, exhibited a microstructure with abnormal grain growth. A diffused phase transition behavior for all the specimens was verified as high degree of diffuseness (${\gamma}$) values from 1.45 to 1.79. A high piezoelectric constant of $d_{33}=256$ pC/N and a satisfactory electromechanical coupling factor of $k_p=42%$ were obtained for the relatively dense 0.94NKN-0.06BTS ceramics sintered at $1050^{\circ}C$.

• 한국산학기술학회논문지
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• 제12권4호
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• pp.1509-1514
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• 2011

IT 제품의 핵심 전자부품에는 MLCC, chip inductors, chip Varistors 등이 있다. chip의 전기적 특성을 검사하기 위해 리노핀을 이용한 접촉검사 방식이 사용되고 있다. 리노핀을 이용한 칩 검사에 고속으로 구동할 수 있는 Actuator가 필요하다. 그 중 PZT Actuator는 압전소자를 이용한 마이크로 Actuator의 하나로 높은 분해능 및 좋은 응답성 그리고 큰 힘을 낼 수 있는 장점을 가지고 있다. 하지만 진동변위가 매우 작다는 단점이 있다. 그래서 이러한 단점을 극복하기 위하여 변위 증폭구조를 설계하는 연구가 활발히 진행되고 있다. 따라서 본 논문에서는 유연힌지를 이용한 지레구조 증폭기구를 설계하였으며, 반도체칩 검사장비 산업분야에서 성능검사 및 전기적 특성을 측정할 수 있는 리노핀용 고속구동 Actuator 시스템을 개발하였다.

• 한국재료학회지
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• 제15권11호
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• pp.683-689
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• 2005

The structural, piezoelectric and ferroelectric properties of $(1-x)(Bi_{0.5}Na_{0.5})TiO_3$ x=0.00, 0.02, 0.04, 0.06, 0.08, and 0.10) ceramics were investigated. A gradual change in the crystal and microstructures with tile increase of $BaTiO_3$ (BT) concentration was observed. The $(Bi_{0.5}Na_{0.5})TiO_3$ (BNT) samples show unusual properties as ferroelectric relaxer materials. We observed a phase transition in BNT solid solutions with BT having normal ferroelectric phase transition. At room temperature, BNT presents a single phase without the morphotropic phase boundary (MPB). In the case of samples doped with $4\~8 mol\%$ BT, rhombohedral-tetragonal MPB was formed and the piezoelectric properties were improved.

• 한국재료학회지
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• 제21권11호
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• pp.628-633
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• 2011

Studies on lead-free piezoelectrics have been attractive as means of meeting environmental requirements. We synthesized lead-free piezoelectric $(Bi_{1/2}Na_{1/2})TiO_3-Ba(Cu_{1/3}Nb_{2/3})O_3$ (BNT-BCN) ceramics, and their dielectric, piezoelectric, and strain behavior were characterized. As BCN with a tetragonal phase was incorporated into the rhombohedral BNT lattice, the lattice constant increased. A small amount of BCN increased the density and dielectric constant forming the complete solid solution with BNT. However, BCN above 10 mol% was precipitated into a separate phase, and which was detected with XRD. In addition, EDX measurement revealed that Cu in BCN was not distributed homogeneously but was accumulated in a certain area. A lower density with a large amount of BCN was attributed to the nonsinterable property of BCN with large tetragonaliy. The dielectric constant vs the temperature change and the strain vs the electric field indicated that the ferroelectric property of BNT was diminished and paraelectric behavior was enhanced with the BCN addition. BNT-7.5BCN showed a 0.11% unimorph strain with a 9.0 kV/mm electric field with little hysteresis.

• 한국전기전자재료학회논문지
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• 제34권6호
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• pp.480-486
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• 2021

Magnetoelectric (ME) composite is composed of a piezoelectric material and a magnetostrictive material. Among various ME structures, 2-2 type layered ME composites are anticipated to be used as high-sensitivity magnetic field sensors and energy harvesting devices especially operating at its resonance modes. Rosen type piezoelectric transducer using piezoelectric material is known to amplify a small electrical input voltage to a large electrical output voltage. The output voltage of these Rosen type piezoelectric transducers can be further enhanced by modifying them into ME composite structures. Herein, we fabricated Rosen type ME composites by sandwiching Rosen type PMN-PZT single crystal between two Ni layers and studied their ME coupling. However, the voltage step-up ratio at the resonance frequency was found to be smaller than the value calculated with α_ME value. The ATILA FEA (Finite Elements Analysis) simulation results showed that the position of the nodal point was changed with the presence of a magnetostrictive layer. Thus, while designing a Rosen type ME composite with high performance in a resonant driving situation, it is necessary to optimize the position of the nodal point by optimizing the thickness or length of the magnetostrictive layer.

• 한국전기전자재료학회논문지
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• 제35권5호
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• pp.431-438
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• 2022

기능성 소재연구에서 in situ 분석 기법은 외부 자극 (전기장, 자기장, 빛, 등) 또는 주변 환경 (온도, 습도, 압력, 등)과 같이 주어진 자극에 의해 소재의 물리적 특성이 어떻게 활성화/진화되는지 분석하는데 있어서 매우 중요하다. 특히, 전기장 인가에 따른 in situ X-선 회절(XRD) 실험은 다양한 강유전체, 압전체, 전왜 재료의 외부 전기장 인가에 따른 전기-기계적 반응의 기본 원리를 이해하기 위해 광범위하게 활용되었다. 본 튜토리얼 논문에서는 일반 실험실 규모의 XRD 장비를 이용하여 전기장 인가에 따른 in situ XRD 분석의 기본 원리/핵심 개념을 간략하게 소개한다. In situ XRD 측정법은 외부 전기장을 인가하여 구동되는 다양한 전기-기계 재료의 구조적 변형을 체계적으로 식별/모니터링하는 데 매우 유용할 것으로 기대한다.