• Journal of the Korean institute of surface engineering
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• v.26 no.2
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• pp.45-54
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• 1993

In this study, magnetic properties of anodized Al film deposited with ferro-magnetic metals in the capacity of perpendicular magnetic recording media were measured and evaluated to find out the role of structure and morphology of the oxide films on magnetic characteristics. The object of this work was to present the conditions of magnetic thin film formation with more superior magnetic property. Anodizing was carried out under various conditions, and then the anodized film were electro-deposited with Co, Ni, Fe and their alloys. Coercive force and residual magnetization in perpendicular direction increased as the pore length of anodized film increased. It was attributed to the increase of the amount of depoisted metals and the ratio of length/diameter of pores. Morphology of anodized films in phosperic acid was not similar to that of sulfuric acid, and thin films in the former solution had perpendcular magnetic anisostropy because of large diameter, irregular length and distribution of the pores. It was found that magnetic properties of the thin films, which had doubled layer of two metals, were dominated by the metal electrodeposited on the surface of the anodized oxide films.

• Journal of the Korean institute of surface engineering
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• v.23 no.3
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• pp.150-159
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• 1990

The magnetic properties of electrodeposited iron and cobalt films on porous aluminum oxide film were examined. There exists perpendicular magnetic anisotropy due to the shape anisotropy. The coercivity and squareness ratio of films were strongly dependent on deposited particle diameter. The effect of packing fraction on squareness ratio was also apprecible. Unlike the iron-deposited films, the magnetic properties of cobalt films were changed by preferred orientation because of it's large crystal ansotropy constant.(about 10 times of Fe) The Fe deposited films were found to be more suitable for perpendicular magenetic recording media bacause perpendicular coercivity, squareness ratio and the ratio of perpendicular coercivity to horizontal ones of iron films are greater than those of cobalt films.

• Transactions of Materials Processing
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• v.19 no.2
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• pp.73-78
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• 2010

Recently, many researches on the development of super-hydrophobic surface have been concentrated on the fabrication of nano-patterned products. Nano-patterned mold is a key to replicate nano-patterned products by mass production process such as injection molding and UV molding. The present paper proposes the new fabricating method of nano-patterned mold at low cost. The nano-patterned mold was fabricated by electroforming the anodic aluminum oxide membrane filled with UV curable resin in nano-hole by capillary phenomenon. As a result, the final mold with nano-patterns which have the holes with the diameter of 100~200 nm was fabricated. Furthermore, the UV-molded products with clear nano- patterns which have the pillars with the diameter of 100~200nm were achieved.

• Journal of the Korean institute of surface engineering
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• v.33 no.5
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• pp.309-318
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• 2000

The 6063 Aluminium alloy were electrocolored and anodized at the same time in addition of $CoSO_4$, $FeSO_4$, in the electrolyte and investigated by AES/SAM. It was found that the thickness of anodic oxide film is increased linearly in DC type, and DC combined AC type, the more ratio of anodic Portion in AC, the more increased of anodic film thickness. The color of anodic film was changed from silver to yellow when the increase of the ratio of cathodic portion in AC. Also the increase of $CoSO_4$, $FeSO_4$ in the electrolyte, the coloring time is decreased. From the AES/SAM results, the element of anodic oxide film are Al,O and S. The result of depth profile, the most of the S distributed on the surface and the more S is in DC combined AC type than only DC type.

• Transactions of the Society of Information Storage Systems
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• v.9 no.2
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• pp.67-71
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• 2013

The fabrication method of plasmonic nanodots on silicon substrate has been developed to improve the efficiency of thin film solar cells. Nanoscale metallic nanodots arrays are fabricated by anodic aluminum oxide (AAO) template mask which can have different structural parameters by varying anodization conditions. In this paper, the structural parameters of gold nanodots, which can be controlled by the diverse structures of AAO template mask, are investigated to enhance the optical properties of a-Si thin film solar cells. It is found that optical properties of the thin film solar cells are improved by finding optimization values of the structural parameters of the gold nanodot array.

• Journal of the Korean institute of surface engineering
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• v.55 no.6
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• pp.417-424
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• 2022

This research develops an easy-to-use, environmentally friendly method for fabricating functional 1050 aluminum alloy surfaces with excellent corrosion resistance. Functional aluminum surfaces with various nanostructures are fabricated by controlling the experimental conditions of anodizing process. The experiment used a multi-step anodizing process that alternates between two different anodizing modes, mild anodizing (MA) and hard anodizing (HA), together with a pore-widening (PW) process. Among them, the nanostructured surface with a small solid fraction shows superhydrophobicity with a contact angle of more than 170° after water-repellent coating. In addition, the surface with superhydrophobicity is difficult for corrosive substances to penetrate, so the corrosion resistance is greatly improved.

• Corrosion Science and Technology
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• v.21 no.6
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• pp.495-502
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• 2022

Anodization is a representative electrochemical surface treatment method that can improve both heat resistance and corrosion resistance by forming an anodization film on the surface of the aluminum. However, these properties can be changed after an additional heat treatment process. In this study, Al 6061 was subjected to an anodization process at 60 V for 1 hour, 5 hours, or 9 hours. An additional heat treatment process was performed at 500 ℃ for 30 minutes. Field emission scanning electron microscopy (FE-SEM) analysis revealed that the thickness of the anodized film was increased in proportion to the anodization time. Both pore size and pore diameter of the anodized film was also increased after anodization. After an additional heat treatment process, there were no significant changes in the thickness, pore size, or pore diameter of the anodized film. Heat resistance was confirmed through thermal analysis and chemical resistance was evaluated with a potentiodynamic polarization test.

• Proceedings of the Korean Vacuum Society Conference
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• 2010.08a
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• pp.43-43
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• 2010

반도체 및 디스플레이의 진공부품은 알루미늄 모제에 전해연마법(electrolytic polishing), 양극산화피막법(anodizing), 플라즈마 용사법(plasma spray) 등을 사용하여 $Al_2O_3$ 피막을 성장시켜 사용되고 있다. 반도체 제조공정 중 30~40% 이상의 비중을 차지하는 식각(etching) 및 증착(deposition) 공정의 대부분 은 플라즈마에 의해 화학적, 물리적 침식이 발생하여 피막에 손상을 일으켜 피막이 깨지거나 박리되면서 다량의 particle을 생성함으로써 생산수율에도 문제를 야기 시킨다. 본 연구에서는 이러한 진공부품의 하나인 etcher용 상부전극을 양극산화피막법(Anodizing)으로 $Al_2O_3$ 피막을 성장시킨 샘플을 제작하여 플라즈마 처리에 따른 내전압, 식각율, 표면 미세구조의 변화를 관찰하였고 이를 종합적으로 고려하여 etcher용 상부전극의 Life Time 평가 방법을 연구하였다. 이러한 실험을 통해 플라즈마 처리 후 피막에 크랙이 발생되는 것을 확인할 수 있었고 피막의 손상으로 전기적 특성이 감소되는 것을 확인할 수 있었다. 또한 플라즈마 처리 중 ISPM 장비를 이용하여 플라즈마 공정에서 발생하는 오염입자를 실시간으로 측정할 수 있는 방법을 연구하였다. 이러한 결과를 이용하여 진공공정에서 사용되는 코팅부품이 플라즈마에 의한 손상정도를 정량화 하고 etcher용 상부전극의 Life Time 평가 방법을 개발하여 부품 양산업체의 진공장비용 코팅부품의 개발 신뢰성 향상이 가능할 것으로 기대된다.

• Proceedings of the Korean Institute of Electrical and Electronic Material Engineers Conference
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• 2005.07a
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• pp.87-88
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• 2005

AAO(Anodic Aluminum Oxide)는 양극산화 방법을 이용하여 얻을 수 있는 알루미늄의 다공성 산화막이다. 기존의 방법에서는 DC전압을 이용하여 AAO를 성장시켰는데 본 연구에서는 AC전압을 이용하여 AAO의 성장 특성을 제어하였다. 전압원으로 DAQ를 사용하였는데 출력전압을 증폭하기 위하여 2 단 차동증폭기를 제작하였다. 실험 결과는 AAO 기판의 SEM 사진을 촬영, 분석함으로써 얻을 수 있었다. SEM 시진을 분석한 결과 pore size는 전압의 변화에 큰 영향을 받지 않음을 알 수 있었던 반면 성장 길이는 AC전압의 주기가 증가함에 따라 길어지는 성향을 확인할 수 있었다. 또한 주기와 AAO 성장 길이와의 관계를 로그스케일 그래프로 나타내보면 선형적인 특성을 나타내었다. 이를 통해 인가한 전압의 주파수에 따라 AAO의 성장 길이를 예측할 수 있었다.

• Corrosion Science and Technology
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• v.21 no.4
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• pp.282-289
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• 2022

Aluminum 1000 series alloy, a pure aluminum with excellent workability and weldability, is mainly used in the ship field. Aluminum alloy can combine with oxygen in the atmosphere and form a natural oxide film with high corrosion resistance. However, its corrosion resistance and durability are decreased when it is exposed to a harsh environment for a long period of time. For solving this problem, a porous oxide film can be formed on the surface using an anodizing treatment method, a typical surface technique among various methods. In this study, aluminum 1050 alloy was anodized for 2 minutes, 6 minutes, and 10 minutes. The structure and shape of the oxide film were then analyzed to determine the corrosion resistance according to the thickness of the oxide film that changed depending on working condition using 15 wt% NaCl. After it was immersed in NaCl solution for 1, 5, and 10 days, corrosion damage was observed. Results confirmed that the thickness of the oxide film increased as the anodization time became longer. The depth of surface damage due to corrosion became deeper when the film was immersed in the 15 wt% NaCl solution for a longer period of time.