• Journal of Sensor Science and Technology
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• 제5권1호
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• pp.30-36
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• 1996

ZnO thin-film sensors were fabricated by RF magnetron sputtering method. The composition of the device material was 4 wt. % $Al_{2}O_{3}$, 1 wt. % $TiO_{2}$ and 0.2 wt. % $V_{2}O_{5}$ on the basis of ZnO material for developing the high sensitive TMA gas sensor which have an appropriate resistivity and the stability for practical use. They were also grown on the $SiO_{2}/Si$ substrates heated at $250^{\circ}C$ under a pure oxygen pressure of about 10 mTorr with a power of about 80 watts for 10 minutes. So as to enhance the stability of the resistivity, the thin films were annealed from $400^{\circ}C$ to $800^{\circ}C$. The sensors made with the thin film which were annealed at $700^{\circ}C$ for 60 minutes in pure oxygen gas exhibited a good sensing properties for TMA gas. The thin film grown at this condition showed the maximum sensitivity of 550 in TMA gas concentration of 160 ppm, and exhibited a good stability and excellent linearity.

• Proceedings of the Korean Vacuum Society Conference
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• 한국진공학회 1999년도 제17회 학술발표회 논문개요집
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• pp.224-224
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• 1999

KSTAR 토카막의 플라즈마 가열을 위한 NBI 장치의 대전류 이온원 방전 특성을 수소와 헬륨 개스를 사용하여 조사하였다. NBI 이온원은 빔 방향과 반대로 가속되는 전자들을 저지하는 전자덤프(electron dump), 병렬로 연결된 32개의 텅스텐 필라멘트(직경 1.5nn0, 영구자석(Nd-Fe)에 의해 만들어지는 강한 cusp 자장으로 둘러싸인 플라즈마 방전실 및 120kV의 에너지를 인가하는 가속부로 이루어지는데, 최대 빔 전류 65A에서 300초의 장시간 운전을 목표로 하고 있다. 수소와 헬륨 개스 분위기에서 안정된 플라즈마를 얻을 수 있는 필라멘트 전류의 파형을 각각 구하고, 기체압력(0.01~0.4 mbar) 및 아크 전류(100~1200A에)에 따른 플라즈마 파라메타 값들을 직경 1mm의 Langmuir probe를 이용하여 측정하였다. 또한 이온원 운전에 중요한 파라메타인 방전실 내의 플라즈마 밀도 분포와 장시간 운전 가능성에 대한 조사도 수행하였다.

• Proceedings of the Korean Nuclear Society Conference
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• 한국원자력학회 1997년도 춘계학술발표회논문집(2)
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• pp.324-328
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• 1997

이트리아와 RuO$_2$의 반응특성 및 반응생성물의 고온안정성 등을 DTA(Differential Thermal Analysis), TGA(Thermo-Gravimetric Analysis)를 이용하여 분석하였고 반응생성물은 XRD(X-ray diffractometry)와 XPS(K-ray photoelectron Spectroscopy), 주사 전자현미경를 이용하여 분석하였다. 이트리아와 RuO$_2$의 혼합물은 약 95$0^{\circ}C$ 이상에서 표면이 거친 $Y_2$Ru$_2$O$_{7}$를 형성하였고 생성된 $Y_2$Ru$_2$O$_{7}$은 공기분위기하에서 140$0^{\circ}C$까지 가열하여도 무게변화가 없는 안정한 물질이었다.이었다.

• Journal of the Korean Institute of Telematics and Electronics A
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• 제30A권7호
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• pp.47-59
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• 1993

The thermal stability of "stuffed" TiN/Ti barrier matals with different annealing history has been studied to improve the contact reliability of Al/Si contacts in 16M DRAM. The annealing conditions before the Al deposition such as film thickness, the annealing temperature and the annealing ambient have been varied. For TiN(900A)/Ti(300A) annealed at 450 in nitrogen ambient to form a "stuffed barrier" by inducing oxygen atoms into grain boundaries, there is no observation of Al penetrations into Si substrates after the post heat treatment of up to 700 even though there are massive amounts of Al found in TiN film after the post heat treatment of 600 indicating that TiN has a "sponge-like" function due to its ability to absorb several amounts of aluminum at elevated temperature. The TiN/Ti diffusion barrier annealed at 550 has, however, failed after the post heat treatment at 600. The thinner diffusion barriers with TiN(300A)/Ti(100A) failed after the post heat treatment at 600.he post heat treatment at 600.

• The Journal of the Korea institute of electronic communication sciences
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• 제8권4호
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• pp.549-554
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• 2013

With the synthesis of graphene on Cu using CVD, it was tried to show the behavior of graphene growth depending on the size and orientation of Cu grain. It was found out that even under the same temperature and pressure the use of different gases influences on the diffusion rate of Cu. As compared to Ar gas, Cu grain growing bigger under $H_2$ and $CH_4$ was resulted in bigger graphene grain. Corrosion resistance was evaluated by potentiodynamic polarization test in room temperature and found out that the graphene on Cu was more stable in order of 10 than pure Cu due to the chemical stability of graphene. The future work of this research will focus on the synthesis of graphene having no defects including grain boundaries, and its engineering use.

• 한국신재생에너지학회:학술대회논문집
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• 한국신재생에너지학회 2009년도 춘계학술대회 논문집
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• pp.159-159
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• 2009

RF 스퍼터링법을 이용하여 유리기판위에 ZnO:Al 박막을 증착하고 다양한 조건 하에서 후 열처리를 실시하여 이에 따른 박막의 구조적, 전기적 및 광학적 특성과 HCl 습식 식각 후의 표면형상 변화를 조사하였다. ZnO:Al 투명전도막은 우수한 전기적, 광학적 특성, 수소 플라즈마 안정성 및 저 비용 등으로 실리콘 박막 태양전지 전면 전극용으로 많은 관심을 받고 있다. 기존의 비정질 실리콘 박막 태양전지용으로 많이 사용되고 있는 상용 Asahi-U형 ($SnO_2:F$) 투명전도막의 경우는 수소 플라즈마에 대한 안정성이 낮고 입사광의 장파장 대역에서의 낮은 산란특성으로 인하여 실리콘 박막 태양전지의 고효율화를 위한 적용에 한계를 나타내고 있다. 이를 개선하기 위하여 스퍼터링법으로 우수한 전기적 특성을 갖는 ZnO:Al 박막을 제조한 후 습식 식각을 통한 표면형상 변화를 통하여 입사광의 산란특성을 향상시키는 방법이 개발되어 많은 연구가 이루어지고 있다. 본 연구에서는 2.5 wt%의 $Al_2O_3$가 함유된 ZnO 타겟을 이용하여 ZnO:Al 박막을 RF 스퍼터링으로 증착한 후 $N_2$ 분위기와 진공 분위기 하에서 다양한 시간과 온도에 따라 후열처리를 하여 열처리 전 박막과의 물질 특성을 상호 비교하고 1%로 희석된 HCl로 습식 식각하여 열처리 전 박막의 구조적 특성이 습식 식각 후의 박막 표면형상 변화에 미치는 영향을 조사하였다. 이로부터 후열처리를 통한 ZnO:Al 투명전도막의 특성을 최적화하고 Asahi-U형 투명전도막과의 특성 비교를 통하여 실리콘 박막 태양전지용 전면전극으로의 적용 가능성을 조사하였다.

• Korean Journal of Materials Research
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• 제9권7호
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• pp.657-662
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• 1999

Mn-Ni oxide thin films for NTC thermistor application were sputtered on alumina substrates at $320^{\circ}C$ Effects of various oxygen partial pressures and annealing temperatures on the microstructure, crystal phase, resistivity and B constant were investigated. In general, microstructure of the films deposited was columnar grain structure. After annealing at $700^{\circ}C$, the microstructure was begun to transform to equiaxed grain structure. Most of the phases were mixture of cubic spinel and $Mn_2$$O_3$. As the oxygen concentration increased, the resistivity and B constant were greatly decreased, and these values become low and stable after annealing between $600^{\circ}C$ and $700^{\circ}C$.

• Journal of the Korean Electrochemical Society
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• 제5권2호
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• pp.62-67
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• 2002

The corrosion of the metallic cell components is blown to be one of the major reason f3r the performance degradation and subsequently the life-time limitation of the MCFC. To elucidate the corrosion phenomena, a corrosion study with the AISI-type 316L stainless steel, the most widely used separator material, in 621Li/38K carbonate eutectic melt was carried out. Corrosion phenomena in an MCFC were observed to differ from one location to another due to different environmental condition. The stability of passive film was found to be responsible fur the variations in corrosion phenomena. According to the potentiodynamic analysis, the passive film formed in anode-gas environment was less stable than in cathode-gas environment. The potentiostatic method combined with XRD analysis in addition to the cyclicvoltammetry was conducted to get an insight on variety corrosion reaction of AISI-type 316L stainless steel in a carbonate melt.

• Korean Chemical Engineering Research
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• 제53권3호
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• pp.276-281
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• 2015

Nanostructured $TiO_2-SiO_2$ materials have widely been used as anti-reflecting coating, optical-chemical sensors and catalysts because of their superior optical and thermal properties as well as chemical durability. Web type $SiO_2$ microfibers with nano-crystalline $TiO_2$ were prepared by electrospinning of Ti-PCS mixed solution and oxidation controlled heat-treatment, rather simple than sol-gel process. Nano-crystalline anatase phase were formed for the heat-treatment up to $1200^{\circ}C$ and they were finely dispersed in the amorphous $SiO_2$ matrix.

• Journal of the Korean Electrochemical Society
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• 제2권2호
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• pp.81-87
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• 1999

Poly-acrylonitrile (PAN) based carbon fibers were stabilized under various tensions in the presence of air at about $200^{\circ}C$ and sequentially carbonized under some different gas environments in the range of 700 to $1500^{\circ}C$. The prepared carbon fibers were used for rechargeable lithium ion battery anode to investigate preparation parameters effects on electrochemical characteristics. It was found that the tension during stabilization, carbonization temperature and gas atmospheres affect the carbon fiber properties such as conductivity, mechanical strength, surface morphology and diffusion coefficient of lithium ion, which are closely related to the on electrolchemical properties as well as the charge/discharge characteristics.