Journal of Sensor Science and Technology (센서학회지)
- Volume 5 Issue 1
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- Pages.30-36
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- 1996
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- 1225-5475(pISSN)
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- 2093-7563(eISSN)
Characteristics of TMA Gas Detection of a ZnO Thin Films by Annealing
열처리에 따른 ZnO 박막의 TMA 가스 검지 특성
- Ryu, Jee-Youl (Department of Electronics, National Fisheries University of Pusan) ;
- Park, Sung-Hyun (Department of Electronics, National Fisheries University of Pusan) ;
- Choi, Hyek-Hwan (Department of Electronics, National Fisheries University of Pusan) ;
- Kwon, Tae-Ha (Department of Electronics, National Fisheries University of Pusan)
- Published : 1996.01.31
Abstract
ZnO thin-film sensors were fabricated by RF magnetron sputtering method. The composition of the device material was 4 wt. %
적당한 크기의 저항률을 가지며 안정된 고감도 가스 센서 개발을 위해 ZnO를 기본물질로 하여
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