• 한국표면공학회지
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• 제28권6호
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• pp.343-351
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• 1995

Titanium nitride films have been prepared on various substrates (silicon wafer, HSS) by cathode arc ion plating process to measure microhardness, adhesion and wear-resistant behaviors by changing the substrate bias voltages (0∼-300V), thickness and roughness. Microhardnesses were measured by micro vickers hardness tester, the adhesion strengths were evaluated by acoustic signals through the scratch test with incremental applied load. As the substrate bias voltages were increased, the ｛111｝ orientation was predominant, the microhardnesses and adhesion strengths of tool steel were observed to be stronger than those of without subatrate bias voltage. Adhesion strengths of the substrate bias were 4-7 times higher than those of without the substrate bias, confirmed by SEM with EDX. Wear resistances were used pin-on-disk tribotester and TiN costing reduced the abrasive wear. As the substrate bias was increased, the weight loss and the friction coefficient was decreased.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 춘계학술대회 논문집
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• pp.104-104
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• 2009

최근 국내외 휴대용 IT 관련 산업에서는 제품의 소형화에 경량화에 따른 기술 개발과 더불어 다양한 색상의 구현을 위한 연구가 활발히 진행되고 있다. 휴대용 전자 부품에 있어서 PVD 코팅은 고경도 박막을 금속 판재 및 플라스틱 기판 상에 증착하여 표면경도를 증대시켜 내구성 향상에 활용되고 있으며, 질화물 계열을 통하여 Yellow, Blue, Black, Red계 등의 색상 구현이 가능하여 현재 가장 큰 구매력의 원천으로 평가되고 있는 제품 디자인 분야에 응용이 되고 있다. 본 연구에서는 아크이온 플레이팅법과 스퍼터링법을 이용하여 고경질, 고내식 표면층 형성방법 및 다양한 칼라를 구현하는 방법에대한 연구를 수행하였다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2009년도 춘계학술대회 논문집
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• pp.155-157
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• 2009

3성분계 Ti-Si-N코팅은 $N_2$와 Ar 혼합가스 분위기하에서 Ti 소스는 아크 이온 플레이팅, Si 소스는 직류 마그네트론 스퍼터링 증착기법을 이용해 스테인리스 스틸 기판위에 합성되었다. Ti-Si-N 코팅에서 Si 함유량이 증가함에 따라 주상정 구조가 TiN 나노결정질을 $SiN_x$ 비정질이 둘러싸고 있는 독특한 나노복합체구조로 변화되었다. 상온 NaCl 3wt% 용액에서 Anodic Polarization measurement 법으로 측정된 결과에서 Si 함유량이 높아짐에 따라 나노복합체 구조로 인하여 더 우수한 내식성을 나타내었다.

• 한국정밀공학회지
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• 제15권8호
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• pp.33-38
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• 1998

TiYN coated high speed steel tools have been developed and their tool lifes were assessed. First yttrium alloyed titanium target was manufactured, then using the arc ion plating(AIP) technique TiYN coating was deposited onto high speed steel substrate. Three kinds of varying thickness of TiYN coated tools were prepared. Cutting tests were carried out with theses tools and for comparison with the commercially available uncoated, TiN, TiCN and TiAlN coated tools. During the cutting tests flank wear width vs. cutting time was measured. It has been revealed that the newly developed TiYN coated tools show superior tool life characteristics to others.

• 한국정밀공학회지
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• 제23권2호
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• pp.97-103
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• 2006

In this paper, effect of temperature in TiN-coating by arc ion plating on surface characteristics of a TiN coated high speed steel is investigated by experiments. Hardness, surface roughness, TiN-coating thickness and adsorption force are measured in order to evaluate the effects. For evaluation of the experimental data, one-way ANOVA method is used. It is concluded that the furnace temperature in the range $400^[\circ}C\~500^{\circ}C$ in AIP processing has a little influence on the TiN coating of the SKH51 steels.

• 한국정밀공학회지
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• 제25권7호
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• pp.124-130
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• 2008

The effect of nitrogen gas pressure in arc ion plating on surface properties of the TiN-coated high speed steel(SKH51) is presented in this paper. The surface roughness, micro-particle, micro-hardness, coated thickness, atomic distribution of TiN, and adhesion strength are measured fur various nitrogen gas pressures. It has been shown that the nitrogen gas pressure has a considerable effect on the surface roughness, adhesion strength, atomic distribution of TiN, and surface deposition of TiN of the high speed steels but that it has little influence on the micro-hardness and coated thickness.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2007년도 추계학술대회 논문집
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• pp.125-127
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• 2007

MoN 코팅막은 Ar과 $N_2$가 섞인 가스 상태 안에서 몰리브덴(Mo) 타겟을 사용해서 아크 이온 플레이팅법을 사용하여 stainless steel 표면 위에 증착을 시켰다. MoN 코팅막의 미세 결정 구조의 특징은 X-선 회절 분석(X-ray Diffractormeter, Phillips co. X'pert)과 XPS를 사용해서 측정하였다. MoN 코팅막은 순수 Mo 코팅막의 13GPa 보다 높은 25 GPa의 미세경도값을 나타냈으며, 또한 Mo 코팅막에 N의 함량이 증가할수록 마찰계수가 낮아지는 것을 알 수 있었다. 이번 연구에서는 MoN 코팅막에서 질소 함량을 변화 시켜 MoN 코팅막의 미세구조와 그 특성에 대하여 연구하였다.

• 한국표면공학회:학술대회논문집
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• 한국표면공학회 2007년도 추계학술대회 논문집
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• pp.120-122
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• 2007

3성분계 $Ti-C_x-N_{1-x}$ 코팅막은 AIP(Arc Ion Plating)법에 의해 -25V의 바이어스와 $300^{\circ}C$의 분위기에서 스테인리스 스틸 기판 위에 증착시켰다. $Ti-C_x-N_{1-x}$ 코팅막 안의 탄소(carbon)는 유입가스 비 $CH_4/(CH_4+N_2)$를 변화시키며 합성하였다. 탄소(carbon)가 증가함으로써, $Ti-C_x-N_{1-x}$ 코팅막의 미세경도는 TiN 코팅막의 20 GPa로부터 x=0.52에서 최대 약 32 GPa로 측정되었다. 또한, 미세구조는 잔류응력과 관련 있으며 탄소 함량에 따라 평균마찰계수가 크게 감소하였다.

• 대한기계학회논문집A
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• 제21권10호
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• pp.1674-1682
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• 1997

Fatigue tests were performed to investigate the effect of ceramic coatings as in TiN and TiCN on fatigue crack growth properties of ceramic coated 1Cr-1Mo-0.25V steel with different coating thickness in laboratory air conditions. The experimental results are described with respect to a Paris equation, da/dN=C(.DELTA.K)$^{m}$ , where the crack growth rate of coated specimens provided as similar growth rate as that of the uncoated specimen regardless of coating thickness. Furthermore, it was observed that the type of coating layer had virtually no effect on crack growth rate in the full region of stress intensity factor range. And it was also appeared that the final crack length of TiCN coated specimens was short compared to that of TiN coated, and the substrate specimens, in which it was inferred due to lowering the toughness of coated material from high hardness of TiCN coating layer itself.

• 열처리공학회지
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• 제20권2호
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• pp.78-83
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• 2007

CrN coatings were deposited by cathodic arc ion plating method on the SKD11 steel substrates. Atmosphere temperature of $350^{\circ}C$, arc current of 90 A, nitrogen partial pressure of 1.0-5.3 Pa, and negative bias voltage of 30-135 V were selected. The characteristics of microstructure were investigated with XRD. Hardness, adhesion and friction coefficient measured by microhardness tester, scratch tester, and ball on disk tribometer. Microstructures depended on nitrogen partial pressure and bias voltage. The preferred orientation of the films was changed from (200) to (111) with decreasing pressure and increasing bias voltage. Adhesion properties related with microstructure, but microstructure changes slightly influenced on hardness and friction properties. The critical load.($Lc_1$) and hardness of CrN films deposited at 5.3 Pa, -30 V condition were 55 N(HF1), $2157{\pm}47\;Hk_{0.025}$. The friction coefficient were about 0.5 under dry condition.