• Title/Summary/Keyword: 실리카졸

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A Study on CMP Characteristics According to Shape of Colloidal Silica Particles (콜로이달 실리카 입자 형상에 따른 CMP 특성에 관한 연구)

  • Kim, Moonsung;Jeong, Haedo
    • Transactions of the Korean Society of Mechanical Engineers A
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    • v.38 no.9
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    • pp.1037-1041
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    • 2014
  • Slurry used for polishing semiconductors processed by exchange, pressurization, and multi-step feeding has been studied to investigate the effect of the size and shape of slurry particles on the oxide CMP removal rate. First, spherical silica sol was prepared by the ion exchange method. The spherical silica particle was used as a seed to grow non-spherical silica sol in accordance with the multi-step feeding of silicic acid by the ion exchange and pressurization methods. The oxide removal rate of both non-spherical silica sol and commercially available slurry were compared with increasing average particle size in the oxide CMP. The more alkaline the pH level of the non-spherical silica sol, the higher was the removal rate and non-uniformity.

A Study on Hardening Behavior of Colloidal Silica-Cement Grout (실리카졸-시멘트 그라우트의 고결특성에 대한 연구)

  • Kim, Young-Hun;Kim, Hae-Yang;Hyun, Ho-Gyu;Chun, Byung-Sik
    • Proceedings of the Korean Geotechical Society Conference
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    • 2009.09a
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    • pp.529-534
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    • 2009
  • This study had propose that a characteristic of recently developed Silicasol to make a close in this study, grouting material usually used portland cement and a characteristic is compared between Silicasol and sodium silicate in this study, examined strength and environmentally friendly for compare characteristics of sodium silicate and Silicasol through unconfined compressive strength, SEM analysis, Permeability test, Chemical Resistance test, leaching test etc. In the test, I gained that unconfined compressive strength of Silicasol three times promoted than sodium silicate Within 72 hours and I gined through analysis of SEM that Silicasol is more compactivetive than sodium silicate. In the result of test, it was found to be a environmentally friendly material as the toatal amount of eluviated elementary had small quantity.

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Synthesis of Hollow Carbon Microspheres with Mesoporous Shell and Vacant Core Structure and Their Electrochemical Properties (중간세공을 갖는 껍질로 구성된 속이 빈 마이크로 탄소입자의 합성 및 이들의 전기화학적 특성)

  • Lee, Yae Won;Yang, Hee Chun;Kim, Geon-Joong
    • Applied Chemistry for Engineering
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    • v.27 no.4
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    • pp.449-454
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    • 2016
  • In this study, highly monodispersed porous carbon microcapsules with a hollow core were synthesized using polystyrene (PS) beads as a hard template. The surface of PS was first modified with polyvinylpyrollidone (PVP) for the easy attachment of inorganic silica sol. After coating the surface of PVP modified PS microspheres with SBA-16 sol, the carbon microcapsules with a hollow macroporous core were fabricated through reverse replication method by filling carbon sources in the mesopores of silica mold. The hollow carbons having a mesoporous shell structure and narrow particle size distribution could be obtained after the carbonization of carbon source and the dissolution of silica mold by HF solution. The mesoporous characteristics and electrochemical properties of hollow carbon microcapsules were characterized by XRD, SEM, TEM, $N_2$ adsorption/desorption analysis and cyclic voltammetry. They showed the high electric conductivity and capability for use as efficient electro-materials such as a supercapacitor.

메탄생성에 따른 수소 생성 억제 현상

  • Kim, Jeong-Ok;Kim, Yong-Hwan;Ryu, Jeong-Yong;Song, Bong-Geun;Kim, In-Ho
    • 한국생물공학회:학술대회논문집
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    • 2003.10a
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    • pp.404-408
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    • 2003
  • In this study, hydrogen gas produced by anaerobic mocrobial at anaerobic condition. To maintain the high MLSS concentration, anaerobic sludge was transformed to granular sluge by adding both high molecular cationic polymer(M.W>5,000,000) and silica sol. Hydrogen production was easily distributed, which seemed caused by methane producing microbial. Even low pH control(pH<5.5) was not the effective mean to block methane producing microbial. To decrease of $H_2$ production was closely related with the inclose of $CH_4$ production. Other mean expect for pH control must be devised for the efficient $H_2$ production.

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메탄생성에 따른 수소 생성 억제 현상

  • Kim, Jeong-Ok;Kim, Yong-Hwan;Ryu, Jeong-Yong;Song, Bong-Geun;Kim, In-Ho
    • 한국생물공학회:학술대회논문집
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    • 2003.04a
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    • pp.339-342
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    • 2003
  • In this study , hydrogen gas produced by anaerobic mocrobial at anaerobic condition. To maintain the high MLSS concentration, anaerobic sludge was transformed to granular sluge by adding both high molecular cationic polymer(M.W.>5,000,000) and silica sol. Hydrogen production was easily distributed, which seemed caused by methane producing microbial. Even low pH control(pH<5.5) was not the effective mean to block methane producing microbial. To decrease of $H_2$ production was closely related with the inclose of $CH_4$ production. Other mean expect for pH control must be devised for the efficient $H_2$ production.

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Engineering Properties of Composite Silicate Grout Materials (합성실리카 그라우트재의 공학적 특성)

  • 천병식;양형칠
    • Journal of the Korean Geotechnical Society
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    • v.19 no.1
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    • pp.163-172
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    • 2003
  • The engineering properties of composite silicate grout materials that were developed recently were analyzed. In this laboratory tests, OPC (Ordinary Portland Cement) was mainly used as grout materials. Moreover, the properties of composite silica, silica sol and sodium silicate (No.3) acting as coagulating agent were analyzed and compared with each other. For the purpose of finding the engineering properties of composite silicate grout materials, various physical and chemical tests were performed : naked eye measurement, photographing by using SEM, uniaxial compression test and in-situ application test. A series of test results showed that the strength of composite silicate grout materials was about 3~6 times that of ordinary sodium silicate grout materials in 6~24hr. Especially, based on the evaluation of the application of JS-CGM grout to the construction fields, composite silicate grout would be very effective in reducing the coefficient of permeability.

Structural behavior of polyphenylcarbosilane through pyrolysis process

  • Lee, Yun-Ju;Kim, Yeong-Hui;Kim, Jong-Il;Kim, Su-Ryong;Gwon, U-Taek
    • Proceedings of the Materials Research Society of Korea Conference
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    • 2012.05a
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    • pp.94.1-94.1
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    • 2012
  • 폴리페닐카보실란은 페닐그룹을 포함하고 있는 카보실란계 고분자로서 열분해 후 과량의 탄소를 함유할 수 있는 세라믹 전구체이다. 카보실란계열의 고분자는 산화특성이 있어 SiOC 코팅 용도에도 사용되고 있는데, 폴리페닐카보실란은 free 탄소를 함유하는 SiOC:C 필름을 형성할 수 있다. SiOC 코팅 전구체로는 일반적으로 실리카졸, 실라잔 계열의 고분자, 실록산 계열의 고분자가 사용되고 있으나, 폴리페닐카보실란의 경우 상기 전구체에 비하여 보관 안정성 및 뛰어난 부착특성을 나타낸다. 기존 연구에서는 폴리페닐카보실란으로부터 형성된 SiOC:C 필름의 저유전막, 산화방지막, 분진방지막 등의 응용성에 대하여 고찰한 바 있다. 폴리페닐카보실란은 열처리 온도 영역에 따라 응용 분야가 달라질 수 있는데, 이에 본 연구에서는 각 열처리 온도 영역에 따라 형성되는 SiOC:C 필름의 구조적 변화를 고찰하였다. 필름 형성은 20 % 폴리카보실란 용액을 스핀코팅하고 대기상에서 경화를 실시하였으며, 질소 분위기에서 400 ~ 1200 도 범위에서 열처리하였다. 이렇게 얻어진 300 nm 두께의 필름은 XPS 표면분석과 FT-IR, Solid-NMR을 이용하여 C-Si-O 네트워크 형성의 거동을 확인하였으며, 800 도 이상에서 나타나는 특징적인 free 탄소는 Raman을 이용하여 확인하였다.

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Fouling of Ion Exchange Membranes and Their Fouling Mitigation (이온교환막의 막오염 및 오염저감)

  • 문승현;이홍주
    • Membrane Journal
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    • v.12 no.2
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    • pp.55-66
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    • 2002
  • fouling phenomena of ion exchange membranes were reviewed for improved design and operation of electodialysis. The membrane fouling index for electrodialysis (EDMFI) was defined for the quantitative analysis of fouling potential as an analogy to the pressure-driven membrane process. fouling phenomena were compared in the electrodialysis experiments with inorganic foulant (silica sol) and organic foulants (humate and bovine serum albumin (BSA)), and their fouling potentials were analyzed using the fouling index. The comparison showed that the EDMFI could be used as a quantitative measure of the fouling tendency in electrodialysis processes. As a novel fouling mitigation method, square wave power was reported to be effective in electrodialysis with organic foulants. The square wave powers having the pulsed electric field enabled to reduce the membrane fouling significantly at an optimal frequency.

규산나트륨을 이용한 졸-겔 구형 $SiO_2$ 나노졸 합성 연구

  • Gwon, Il-Jun;Park, Seong-Min;Kim, Myeong-Sun;Sim, Ji-Hyeon;Yeom, Jeong-Hyeon
    • Proceedings of the Korean Society of Dyers and Finishers Conference
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    • 2012.03a
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    • pp.111-111
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    • 2012
  • 나노테크놀로지는 종래의 가공으로는 얻기 힘들었던 섬유가공 효과를 간단하게 할 수 있는 기술이다. 현재 각국의 기능성 나노 가공제를 섬유에 응용하는 나노 테크놀로지는 현재 공업 생산되고 있는 면, 모, 견 등의 천연섬유 및 polyester, Nylon 등의 합성섬유의 원단에 적용하는 데서 출발하고 있다. 이러한 나노기술은 기존의 설비와 물을 사용하는 것이 큰 특징이고, 특별한 기계장치가 필요하지 않으며, 소규모의 실험장비만 있어도 현장투입이 가능한 나노입자의 제조가 가능하기 때문에 대량생산이 용이하고 설비투자는 원칙적으로 필요하지 않는다. 또한, 나노입자의 분산을 제대로 시키면 그 사이즈가 빛의 가시광선 영역의 파장(400~800nm)에 비해 절반 수준이하 크기의 입자가 대부분을 차지하기 때문에 염색성, 태의 변화가 적어 앞으로 더욱더 나노테크놀로지에 의한 가공이 확대될 것이 예상된다. 특히 유 무기 하이브리드 재료는 용액상태에서 제조되기 때문에 용액 코팅공정의 적용이 가능하여 다양한 코팅에 적극적으로 활용되고 있다. 또한 코팅공정 온도가 상대적으로 낮아서, 유기물의 기능성 발현이 용이하며, 섬유가공에 그대로 적용이 가능하고, 섬유고분자와 내구성 있게 직접 결합이 되어 실용성이 높다 할 수 있다. 또한 나노졸의 형성 시, 혹은 나노졸에 기능성 물질을 첨가함으로서 나노졸과 기능성 물질을 복합화하여 섬유상에 부여하는 것도 가능하다. 최근에 실리카졸의 형성과 성장에 관한 연구는 졸-겔 기술의 발전과 해석 및 상용화에 집중되어 있다. 규산나트륨과 황산 또는 염산을 사용하여 실리카를 생성하는 공정은 tetraethoxysilane (($Si(OC_2H_5)_4$, (TEOS))를 이용하여 합성하는 방법과 달리 대량의 실리카를 경제적으로 생산하는데 방법으로 널리 연구되고 있지만, 많은 연구가 수행되었음에도 불구하고 실리카 졸의 특성, 성장, 제조에 대한 충분한 이해가 이루어 지지 않고 있어, 아직까지 나노크기의 입자를 제조하는 공정에 대해서는 경제성, 효율성, 품질의 균일성이 떨어지는 것이 현실이다. 따라서 본 연구에서는 앞서 연구된 졸-겔 합성기술과 저렴한 원료인 규산나트륨을 이용하여 보다 간단하고 경제적인 방법으로 고부가가치의 다양한 실리카 나노졸을 제조할 수 있는 연구를 하고자 하였다. 이를 위해 규산나트륨 수용액의 특성, 핵 생성에 필요한 규산나트륨 수용액의 산화반응 특성, 그리고 출발용액의 졸겔 반응을 기초로 하여 실리카 졸 형성에 대한 반응물질의 혼합방법, 반응온도, 반응물의 농도, pH등이 최종 실리카 나노졸 제품의 입자 크기와 모양 등에 미치는 영향을 조사하려고 하며 이를 토대로 다양한 크기와 특성을 가진 실리카 나노졸을 제조하였다.

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Correlation Research of Dispersion Factors on the Silica Sol Prepared from Fumed Silica (흄드실리카로부터 제조된 실리카졸의 분산인자 상관성 연구)

  • Park, Min-Gyeong;Kim, Hun;Lim, Hyung Mi;Choi, Jinsub;Kim, Dae Sung
    • Korean Journal of Materials Research
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    • v.26 no.3
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    • pp.136-142
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    • 2016
  • To study the dispersion factors of silica sol prepared from fumed silica powder, we prepared silica sol under an aqueous system using a batch type bead mill. The dispersion properties of silica sol have a close relationship to dispersion factors such as pH, milling time and speed, the size and amount of zirconia beads, the solid content of fumed silica, and the shape and diameter of the milling impellers. Especially, the silica particles in silica sol were found to show dispersion stability on a pH value above 7, due to the electrostatic repulsion between the particles having a high zeta potential value. The shape and diameter of the impellers installed in the bead mill for the dispersion of fumed silica was very important in reducing the particle size of the aggregated silica. The median particle size ($D_{50}$) of silica sol obtained after milling was also optimized according to the variation of the size and amount of the zirconia beads that were used as the grinding medium, and according to the solid content of fumed silica. The dispersion properties of silica sol were investigated using zeta potential, turbiscan, particle size analyzer, and transmission electron microscopy.