• Journal of the Korea Institute of Information and Communication Engineering
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• v.21 no.10
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• pp.1957-1963
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• 2017

This paper has proposed a new-type groundwater auto-monitoring system based on Multi-Sensor Device. The system adopted Multi-Sensor Device as host computer of data acquisition, used Windows Mobile which was prevalent operation system of Multi-Sensor Device. It adopted serial port CAN and RS485 as the communication interface between goundwater sensor Device and monitor host machine and utilized serial-linked multi-sensor design to measure effectively according to the depth of groundwater. We present a design for a groundwater monitoring system based on a network of wirelessly linked sensors. The proposed solution will enable groundwater researchers and decision makers to have quick access to the groundwater data with less effort and cost. Though our design is initially meant for groundwater monitoring, it can be easily adapted to other fields of environmental monitoring.

• Proceedings of the Korean Vacuum Society Conference
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• 2012.02a
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• pp.447-447
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• 2012

최근 생물전자공학에서 의료 산업 환경 등 많은 분야에 응용 가능한 바이오센서의 연구가 활발해지고 있다. 그 중 의료 분야에서, 수소이온 ($H^+$)의 농도 감지는 인간의 질병을 예측하는데 중요한 지표가 되며 이러한 수소이온 ($H^+$) 농도의 변화를 실시간으로 감지하기 위해 반도체를 기반으로 한 다양한 pH 센서가 제안되었다. Ion sensitive field effect transistor (ISFET), electrolyte-insulator-semiconductor (EIS)는 대표적인 반도체 pH센서로, 작은 소자 크기, 견고한 구조, 빠른 응답속도와 CMOS 공정과의 호환성이 좋다는 장점이 있다. 특히, EIS는 제조공정이 간단하고 감지막의 감지 특성 평가가 용이하기 때문에 지속적으로 연구되고 있는 pH 센서이다. 센서의 감지 특성을 평가함에 있어 감지막의 감지감도와 안정성이 우수해야 하며 이를 위해 high-k 물질이 감지막으로 사용되고 있다. 추가적으로 high-k 물질은 기존의 $SiO_2$와 $Si_3N_4$를 대신하여 높은 유전상수로 인한 고성능, 고감도 센서제작을 가능케 한다. 본 연구에서는, high-k 물질인 $HfO_2$, $Ta_2O_5$, $ZrO_2$, $Al_2O_3$를 각각 $SiO_2$ 완충막에 적층한 이단 감지막을 제작하였고, 그 특성을 기존의 $SiO_2$, $Si_3N_4$ 감지막의 감지특성과 비교하였다. pH 감지 특성을 평가해 본 결과, 기존의 $SiO_2$, $Si_3N_4$ 감지막과 비교했을 때 high-k 물질의 감지막을 갖는 EIS pH 센서에서 감지감도와 안정성 모두 우수하게 나타났다. 특히, high-k 물질 중 $HfO_2$에서 감지감도가 다소 크게 평가되었으나, 화학적 용액에 대한 안정성은 떨어졌다. 반면에 $Al_2O_3$과 $Ta_2O_5$은 화학용액에 대한 안정성 측면에서 최적의 특성을 보임을 확인하였다. 결론적으로, high-k 물질에 대한 전반적인 평가를 통하여 높은 pH 감지감도뿐만 아니라 우수한 안정성의 EIS pH 센서를 제작 할 수 있었다.

• Transactions of the Korean hydrogen and new energy society
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• v.16 no.2
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• pp.136-141
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• 2005

Li-doped NiO was synthesized by molten salt method. $LiNO_3$-LiOH flux was used as a source for Li doping. $NiCl_2$ was added to the molten Li flux and then processed to make the Li-doped NiO material. Li:Ni ratios were maintained from 5:1 to 30:1 during the synthetic procedure and the Li doping amount of synthesized materials were found between 0.086-0.190 as a Li ion to Ni ion ratio. Li doping did not change the basic cubic structural characteristics of NiO as evidenced by XRD studies, however the lattice parameter decreased from 0.41769nm in pure NiO to 0.41271nm as Li doping amount increased. Hydrogen gas sensors were fabricated using these materials as thick films on alumina substrates. The half surface of each sensor was coated with the Pt catalyst. The sensor when exposed to the hydrogen gas blended in air, heated up the catalytic surface leaving rest half surface (without catalyst) cold. The thermoelectric voltage thus built up along the hot and cold surface of the Li-doped NiO made the basis for detecting hydrogen gas. The linearity of the voltage signal vs $H_2$ concentration was checked up to 4% of $H_2$ in air (as higher concentrations above 4.65% are explosive in air) using Li doped NiO of Li ion/Ni ion=0.111 as the sensor material. The response time T90 and the recovery time RT90 were less than 25 sec. There was minimum interference of other gases and hence $H_2$ gas can easily be detected.

• The Magazine of the Society of Air-Conditioning and Refrigerating Engineers of Korea
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• v.36 no.9
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• pp.23-28
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• 2007

• 한국전기화학회:학술대회논문집
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• 2004.06a
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• pp.149-160
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• 2004

• Korean Journal of Optics and Photonics
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• v.18 no.6
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• pp.389-394
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• 2007

The characteristics of the single mode fiber hydrogen sensor have been investigated theoretically and experimentally. Palladium is adopted as a material for the transducer and a thin Ni film is used for the adhesion between the fiber end and the Pd film. It is shown that sensitivity and response time strongly depend on the thickness of Pd film. The single mode fiber sensor coated with 5 nm thick Ni adhesion layer and 10 nm thick Pd transducer layer showed 0.6 dB change of reflectivity and $3{\sim}5$ sec of response time as it absorbed 4% hydrogen gas.

• 전기의세계
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• v.41 no.2
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• pp.12-21
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• 1992

현재 습도측정분야는 측정의 정화도 향상 및 저온, 저습, 고온 등 특수 환경에서 측정을 위한 연구와 응답속도가 빠르고 정확도가 높으며 신뢰성 있는 습도센서 및 측정기기 개발연구가 진행되고 있다. 습도센서의 개발연구는 감습물질, 제조기술, 성능평가 연구를 포함하고 있으며, 물질 연구에서 고분자 감습재료에 대해 연구한 결과에 의하면, 고분자 감습물질에서 -OH기나 C=O기와 같은 친수성기와 탄화수소계열의 소수성기의 적절한 조합을 통하여 감습특성을 개선할 수 있으며 그한가지 방법으로 플라즈마중합이 시도되었다.

• Proceedings of the KIEE Conference
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• 2003.07c
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• pp.1475-1477
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• 2003

본 논문에서는 LNG/LPG 센서와 솔벤트 센서를 국산화한 결과를 보고한다. LNG/LPG 센서는 $SnO_{2-}\;WO_3$ 모물질에 Pd, Pt 촉매를 첨가하여 제작하였다. 센서를 $400^{\circ}C$ 이상에서 동작시키면 CO가 촉매층에서 거의 $CO_2$로 산화되어 감지막의 저항변화에 아무런 기여도 못하기 때문에 팔라듐 촉매 센서부와 백금촉매 센서부의 신호로부터 탄화수소와 CO를 구별할 수 있다. 또한 촉매층 위에 다공성 보호층를 형성하여 촉매층과 감지막을 보호함으로써 장기 안정성이 크게 향상 되었다. 한편, 감지물질로 $BaSnO_3$를 사용해 제작된 솔벤트 센서는 에탄올에 매우 우수한 감도와 선택성을 나타내었다.

• Journal of Sensor Science and Technology
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• v.12 no.5
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• pp.218-224
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• 2003

The devices of n-channel poly silicon thin film transistors(TFTs) hydrogenated by plasma, $H_2$ and $H_2$/plasma processes are fabricated. The carriers sensitivity characteristics are analyzed with voltage bias stress at the gate oxide. The parametric sensitivity characteristics caused by electrical stress conditions in hydrogenated devices are investigated by measuring the drain current, threshold voltage($V_{th}$), subthreshold slope(S) and maximum transconductance($G_m$) values. As a analyzed results, the degradation characteristics in hydrogenated n-channel polysilicon thin film transistors are mainly caused by the enhancement of dangling bonds at the poly-Si/$SiO_2$ interface and the poly-Si grain boundary due to dissolution of Si-H bonds. The generation of traps in gate oxide are mainly dued to hot electrons injection into the gate oxide from the channel region.

• Transactions of the Korean Society of Mechanical Engineers B
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• v.27 no.9
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• pp.1229-1237
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• 2003

The production of hydrogen fuel depends basically on the water electrolysis. The ultrasonic effects the decrease of the overpotential in a water electrolysis. A study on the overpotential which activates the hydrogen production is the core to elevate the hydrogen production efficiency on the principle. A pressure sensor system by a new idea is developed and applied. Solutions are 4 kinds of KOH concentration such as 0%, 10%, 20%, and 30%. Two frequency bands of the ultrasonic transducer are 28kHz and 2MHz. The directions of ultrasonic forcing are the vertical direction and the horizontal direction. The temperatures are two states, i.e., no constant and constant. Experiments are carried out sequentially in order in three cases of no ultrasonic forcing, ultrasonic forcing, and ultrasonic discontinution. In results, it is clarified that the ultrasonic effects the decrease of overpotential to elevate the efficiency of hydrogen production.