• Proceedings of the Korean Vacuum Society Conference
• /
• 2010.08a
• /
• pp.45-45
• /
• 2010

반도체 및 디스플레이 산업에 사용되는 진공펌프의 효율이 증대됨에 따른 성능 평가 기술의 향상 과 미세 유량을 조절 및 측정할 수 있는 시스템의 개발이 요구되고 있다. 유량 시스템 중 소닉노즐은 기체 유량 측정 표준기로 사용되고 있다. 또한 유량 측정에 있어서 사용상의 편리성, 이동성, 재현성 등 여러 가지의 장점을 가지고 있어 산업 현장에서 많이 사용되고 있다. 본 연구는 소닉노즐을 넓은 유량 범위에서 사용할 수 있도록 소닉노즐의 유출계수 교정을 목적으로 한다. ISO 9300에서 제시한 사양에 맞추어 목 직경 0.03 mm와 0.2 mm 그리고 1.6 mm의 소닉노즐을 제작하였다. 한국표준과학연구원에서 진공용 유량측정 장치로 개발된 정적형 유량계를 이용하여 제작된 3 종의 소닉노즐 유출계수를 확장불확도 3% 이내로 교정하였다. 교정된 소닉노즐의 유량 측정범위는 약 0.6~90, 000 cc/min 범위를 갖는 것으로 나타났으며, 사용유동 조건에 해당되는 레이놀드 수(Reynolds number) 범위는 26~75, 700 으로 확인되었다. 이러한 결과는 교정된 소닉노즐을 이용하여 진공공정에서 필요한 극 미세 유량의 정밀측정을 가능하게한 새로운 연구결과로 판단된다. 교정된 소닉노즐을 이용하여 진공펌프의 배기속도 측정결과는 기 구축된 정적법을 이용한 배기속도 측정결과와 3% 이내의 오차범위내로 매우 잘 일치함을 보였다. 교정된 소닉노즐은 향후 반도체 및 디스플레이 공정에 사용되는 다양한 진공펌프들의 배기속도를 현장에서 간단하게 평가할 수 있는 '현장 성능평가 장치'에 활용할 예정이며, 현재 공정현장에서 배기속도 측정에 널리 사용 중인 MFC를 대체할 수 있을 것으로 예상된다.

• Journal of the Korean Vacuum Society
• /
• v.19 no.4
• /
• pp.243-248
• /
• 2010

Sonic nozzles have been a standard device for measurement of steady state gas flow, as recommended in ISO 9300. This paper introduces two sonic nozzles of diameter ${\Phi}$ 0.03 mm and ${\Phi}$ 0.2 mm precisely machined according to ISO 9300. The constant volume flow meter(CVFM), readily set up in the Vacuum center of KRISS. was used to calibrate the discharge coefficients of both nozzles. The calibration results were shown to determine them within the 3% expanded measurement uncertainty. Calibrated sonic nozzles were found to be applicable for precision measurement of steady state gas flow in the vacuum process in the ranges of 0.6~1,800 cc/min. Those flow conditions are equivalent to the fine gas flow with Reynolds numbers of 26~12,100. Those encouraging results confirm that calibrated sonic nozzles enable precision measurement of extremely low gas flow encountered very often in th vacuum processes. Both calibrated sonic nozzles are proven to provide the precision measurement of the volume flow rate of the dry vacuum pump within one percent difference in reference to CVFM. Calibrated sonic nozzles are applied to a new 'in-situ and in-field' equipment designed to measure the volume flow rate of vacuum pumps in the semiconductor and flat display processes. Furthermore, they can provide other applications to flow control devices in vacuum, such as MFC, etc.

• Proceedings of the KSME Conference
• /
• 2001.06e
• /
• pp.601-606
• /
• 2001

Measurement uncertainty should be evaluated according to ISO/IEC 17025. In Flow measurement area, uncertainty evaluation scheme was applied to the reference flow meter, sonic nozzle. Uncertainty was calculated by evaluating various uncertainty factors affected in flow measurement. The expanded uncertainty of the sonic nozzle was 0.21 % (confidence level of 95 %). This evaluation example will be useful in flow measurement uncertainty determination of other flow meters.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.37 no.12
• /
• pp.1167-1173
• /
• 2013

This study aimed to calculate the CFFs (critical flow functions) of a sonic nozzle bank with a 12-nozzle package within 1 s. Toward this end, the Helmholtz free energy of natural gas was formulated by using the AGA8-dc equation of state in a form without integral terms, and thereafter, thermodynamic properties such as the enthalpy, entropy, speed of sound, and heat capacity, which are used in CFF calculation, were derived in analytical form. As a result, the calculation time of CFFs was improved from 6.7 s in a previous study to 0.6 s per 12-nozzle package and kept almost constant regardless of the number of components in natural gas. Furthermore, it was confirmed that the calculated CFF values were in agreement with the results of a CFF international comparison test carried out under ISO management in 1998-1999.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.25 no.12
• /
• pp.1898-1904
• /
• 2001

Measurement uncertainty should be evaluated according to ISO/IEC 17025. In Flow measurement area, uncertainty evaluation scheme was applied to the reference flow meter, sonic nozzle. Uncertainty was calculated by evaluating various uncertainty factors affected in flow measurement. The expanded uncertainty(U) of the sonic nozzle was 2.1$\times$ 10$^{-3}$ (confidence level of 95 %). This evaluation example will be useful in flow measurement uncertainty determination of other flow meters.

• The KSFM Journal of Fluid Machinery
• /
• v.7 no.1 s.22
• /
• pp.24-29
• /
• 2004

The inter-comparison of standards is required to be recognized the calibration results. The sonic nozzle package is developed to do inter-comparison of the bell preyer used to calibrate many gas flow meters for industries. Four national metrology institutes (KRISS, CMS, CENAM, NEL) were participated in this inter-comparison. The deviation of calibration data from the average value was small at the low flow rate and large at the high flow rate, respectively At the high flow rate, the deviation was larger than the expected value from uncertainties asserted by NMIs. This means there are some problems in the uncertainty evaluation and experiment procedures in some of the participated NMIs.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.20 no.12
• /
• pp.4027-4035
• /
• 1996

Accuracy of gas flow measurements using sonic nozzle and factors which influence on the discharge coefficients of sonic nozzle are investigated with high pressure gas flow standard measurement system. The gas flow measurement system comprises two compressors, storage tank, temperature control loop, sonic nozzle test section, weighing tank, gyroscopic scale and data acquisition system. The experiments are performed at various nozzle throat diameter and inlet pressure. Overall uncertainty of discharge coefficients is estimated to less than .+-.0.2% and most of experimental data fall into this range. Dependence of discharge coefficients on the Reynolds number is good agreement with those suggested in ISO document. The influence of swirl on the discharge coefficients becomes greater as the nozzle throat diameter is enlarged. The discharge coefficient of conical nozzle shows about 4.5% lower discharge coefficients than those of toroidal nozzle, but variation trend with Reynolds number is very similar each other and reproducibility of data is very good.

• Journal of the KSME
• /
• v.31 no.6
• /
• pp.519-526
• /
• 1991

유량측정 정확도를 1-2% 정도 원하는 경우 ISO, AGA 등 규격서에 제시한 직관부 길이나 flow strainer를 설치하면 얻을 수 있으나 측정 정확도를 더욱 향상시키기 위해서 최소 직관부길이, straightener의 설계 개선과 최적설치 위치에 관한 연구와 규격보완을 위한 연구가 진행중이다. 현장에서 유량계를 교정할 수 있는 검증시스템으로 석유특유의 경우에 푸루버가 사용되고 있으나 현장 검증시스템의 용량과 측정 정확도의 향상을 위한 연구가 진행중이고, 천연가스의 경우에는 EC에서 소닉노즐 뱅크를 제작하여 시험중에 있다.

• The KSFM Journal of Fluid Machinery
• /
• v.3 no.2 s.7
• /
• pp.44-49
• /
• 2000

Small sonic nozzles (throat diameter $0.28{\~}4.48mm$) were tested in the gas flow standard system. This standard system is composed of two bell provers and 5 column piston provers, compressor, filters, and dehumidifier. The discharge coefficients of small some nozzles are obtained and correlated as a function of throat Reynolds numbers with $0.316\%$ uncertainty at a confidence level $95\%$. The tested high Reynolds number was the lower limit of ISO 9300 specifications. The data are useful as data base for revision of ISO 9300.

• Transactions of the Korean Society of Mechanical Engineers B
• /
• v.23 no.7
• /
• pp.911-917
• /
• 1999

The sonic nozzle is widely used as reference device for calibrating flowmeters In gas flow measurement and its use requires the Critical Flow Factor(CFF) based on the thermodynamic properties of the gas at the nozzle throat. ISO-9300 provides the calculating method of the factor. But since the CFF from this method show an error over ${\pm}0.5%$ In specific conditions and of ${\pm}0.1{\sim}{\pm}0.2%$ in common Natural Gas(NG) custody transfer condition. this method cannot be applied for gas flow measurement with sonic nozzle. Each research bodies or organizations of the world have joined in order to calculate the CFF more accurately. They have performed these works using their own method and compared the results with each other under the management of ISO. KOGAS have joined those works, because the high-pressure natural gas flow calibration facility of KOGAS will be constructed in late 1999, and then had necessities to calculate a CFF accurately. The calculation method of KOGAS was using the equation of state from AGA-8('94), high accuracy model of ideal gas properties and the solutions of thermodynamic equations. The evaluation results have had a very good consistency within ${\pm}0.05%$ in most NO custody transfer conditions compared to the speed of sound for methane and also shown that the CFF was within ${\pm}0.1%$ compared to the results of other works of the world.