• The Proceeding of the Korean Institute of Electromagnetic Engineering and Science
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• v.12 no.4
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• pp.13-23
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• 2001

Recently, the demands on the short range radio device has been highly increasing, with the advantage of its mobility and improvement of its reliability which has been ensured by development of digital communication techniques. This study suggests the direction for the improvement of the national regulations in the technical, administrative and regulatory aspects, discussing the present situation of the regulations. While suggesting to launch the study on spectrum source and RE environments, we expect that several proposals in this paper will give a satisfaction on the development of strategy for spectrum management, development of radio technology and booming the short range radio communication.

• Journal of Family Resource Management and Policy Review
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• v.10 no.4
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• pp.1-26
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• 2006

The study was the second part of the research on development of consumer education program as social education program. The purpose of this study was to analyze needs fur program contents. Program contents had two parts: educational program contents and program managements. The data used contained 617 married women living in Seoul, Korea. Using SAS-PC program, Chi-square and Anova Analyses were executed. The results showed that married women had higher educational needs on housing purchase, tax avoidance, cancellation of contracts after purchase, consumer redress, etc. The differences in age, education, householder's occupation, and household income level resulted in the differences in educational needs for some specific educational items. They were likely to be educated at the highly accessible place such as women's center, community center, University extension service center, and consumer organization, etc. Also they preferred to be educated once a week fur a short time period like one to three months, and to have the lectures with discussion in the class. Some implications were mentioned for developing consumer education program as social education.

• Journal of the Semiconductor & Display Technology
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• v.13 no.1
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• pp.1-6
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• 2014

In this study, to analyze characteristics of acoustic pressure for spot spray type megasonic, FEM analysis was performed for variable parameters based on the structure of commercial one. and 2 models of transmitter were designed and fabricated, and then acoustic pressure distribution(APD) of the transmitter was measured and compared to the commercial. The results of this experiment show that maximum acoustic pressure of model 1 was higher to 1.6 times compared to the commercial, and model 2 was higher to 1.23 times. Through the course of this study, design technology of transmitter has been developed by means of FEM analysis and experiment for characteristics of acoustic pressure. Also, it is expected to be useful in the development of high power spray type megasonic that is necessary with advance in semiconductor technology.

• The Journal of the Korea institute of electronic communication sciences
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• v.2 no.2
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• pp.123-128
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• 2007

HL7 is well-Known standard protocol for text data generated in hospital information systems. Vital sign information web viewer systems is also the standard protocol for medical image and transfer. In order to embrace new technologies as telemedicine service, it is important to develope the standard protocol between different systems in the hospital, as well as the communication with external hospital systems. In this paper, we proposed integration method between vital sign web viewr systems and hospital information systems. Through the proper data exchange and modification of information management, HIS will offer better workflow to all hospital employee.

• Proceedings of the KAIS Fall Conference
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• 2001.05a
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• pp.124-128
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• 2001

A present semiconductor cleaning technology is based upon RCA cleaning technology which consumes vast amounts of chemicals and ultra pure water(UPW) and is the high temperature Process. Therefore, this technology gives rise to the many environmental issues, and some alternatives such as functional water cleaning are being studied. The electrolyzed water was generated by an electrolysis system which consists of anode, cathode, and middle chambers. Oxidative water and reductive water were obtained in anode and cathode chambers, respectively. In case of NH$_4$Cl electrolyte, the oxidation-reduction potential and pH for anode water(AW) and cathode water(CW) were measured to be +1050mV and 4.8, and -750mV and 10.0, respectively. AW and CW were deteriorated after electrolyzed, but maintained their characteristics for more than 40 minutes sufficiently enough for cleaning. Their deterioration was correlated with CO$_2$ concentration changes dissolved from air. It was known that AW was effective for Cu removal, while CW was more effective for Fe removal. The particle distributions after various particle removal processes maintained the same pattern. In this work, RCA consumed about 9$\ell$chemicals, while EW did only 400$m\ell$ HCI electrolyte or 600$m\ell$ NH$_4$Cl electrolyte. It was hence concluded that EW cleaning technology would be very effective for eliminating environment, safety, and health(ESH) issues in the next generation semiconductor manufacturing.

• Proceedings of the Korean Vacuum Society Conference
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• 2013.08a
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• pp.169.2-169.2
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• 2013

본 연구에서는 gas를 이용한 PECVD 공법중 이온화 에너지가 높고 대면적 코팅이 용이한 Hybrid 코팅 장비에서 Linear Ion-Gun 이용하여 탄화수소 계열의 gas인 $C_2H_2$ 와 Si을 함유한 TMS (tetramethylsilane, $Si(CH_3)_4)$ gas를 이용하여 저마찰, 고경도 특성을 갖는 Si-DLC 코팅에 대한 연구를 수행하였다. Si-DLC 코팅에 앞서 전처리 공정으로 Linear Ion-Gun에 Ar gas를 주입하고 고전압의 DC 전원을 인가하여 제품 표면의 건식세정 및 표면 활성화를 진행 후, $C_2H_2$ 와 TMS gas를 Linear Ion-Gun에 주입하여 Si-DLC 코팅 공정을 진행하였다. Si-DLC 코팅시 $C_2H_2$ gas 주입량을 고정하고 TMS 가스 유량을 5~20sccm으로 조절하여 Si 함유량에 따른 Si-DLC 코팅막의 특성을 분석하였다. 이렇게 코팅된 Si-DLC의 박막 특성 분석으로 마찰계수 측정을 위해 ball-on-disk 타입의 tribometer를 사용하였으며, 박막 경도 측정은 Nano-indenter를 이용하여 분석을 진행하였다. 그 결과 Si을 포함하지 않는 DLC의 경우 마찰계수가 ~0.2를 가지는 반면, Si-DLC의 경우 Si 함유량이 약 1.5at%일 때, 마찰계수 ~0.04 저마찰의 우수한 특성을 지니며, 박막의 경도는 22[Gpa]로 고경도의 Si-DLC 코팅을 확인할 수 있었다.

• Clean Technology
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• v.15 no.2
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• pp.75-80
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• 2009

In order to separate oxygen from air, the effects of feed gas flow rate and rinse gas flow rate on the product purity and flow were examined using 2 bed PSA with 4 step cycle. The addition of product pressurization step increased the product purity and flow rate. The addition of pressure equalization increased the product flow rate. The test product was manufactured and the purity and flow rate of product oxygen was examined. The results were compared with the commercial medical oxygen generator of 5 ${\ell}/min$ and 90% oxygen purity.

• Journal of the Semiconductor & Display Technology
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• v.21 no.4
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• pp.6-13
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• 2022

The electrostatic phenomenon seriously issued in extreme ultraviolet semiconductor cleaning was studied in junction with molecular dynamic aspect. It was understood that two lone pairs of electrons in water molecule were subtly different each other in molecular orbital symmetry, existed as two states of large energy difference, and became basis for water clustering through hydron bonds. It was deduced that when hydrogen bond formed by lone pair of higher energy state was broken, two types of [H₂O]⁺ and [H₂O]^- ions would be instantaneously generated, or that lone pair of higher energy state experiencing reactions such as friction with Teflon surface could cause electrostatic generation. It was specifically observed that, in case of electrolyzed cathode water, negative electrostatic charges by electrons were overlapped with negative oxidation reduction potentials without mutual reaction. Therefore, it seemed that negative electrostatic development could be minimized in cathode water by mutual repulsion of electrons and [OH]^- ions, which would be providing excellences on extreme ultraviolet cleaning and electrostatic control as well.

• Proceedings of the Korea Information Processing Society Conference
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• 2020.05a
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• pp.314-317
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• 2020

환자의 생체신호 측정 및 관찰, 영상 위생 등을 포함하는 직접간호는 간호사들의 총 간호활동 시간 중 내과는 48%, 외과는 40% 로 간호사들의 업무 부담이 되고 있다. 또한 의료기관에서 사용되는 의료기기들은 여러 회사에서 구매하여 사용되기 때문에 각 회사마다 상이한 프로토콜을 가지고 있어 하나의 시스템으로 생체신호를 모으기가 쉽지 않다. 따라서 여러 장비에서 생체신호를 실시간으로 취득하여 통합 관리할 수 있는 시스템 개발을 통해 간호사의 직접간호 업무량을 줄여 간호사의 근무환경 개선뿐만 아니라 중증환자의 경우 환자 생체신호에 대한 실시간 원격감시가 가능하고 환자에게서 발생된 모든 생체신호가 데이터베이스 시스템으로 기록관리 됨으로 인해 환자의 생체 신호에 대한 이력 추적관리가 가능함으로써, 양질의 의료 서비스가 가능한 환자케어시스템을 개발하고자 한다.

• Journal of the Semiconductor & Display Technology
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• v.22 no.2
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• pp.17-23
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• 2023

In semiconductor manufacturing processes, a cleaning process is important that can remove sub-micron particles. Conventional wet cleaning methods using chemical have limits in removing nano-particles. Thus, physical forces of a mechanical vibration up to 1 MHz frequency, was tried to aid in detaching them from the substrates. In this article, we developed a 1 MHz quartz megasonic for a bare wafer cleaning using finite element analysis. At first, a 1 MHz megasonic prototype was manufactured. Using the results, a main product which can improve a particle removal performance, was analyzed and designed. The maximum impedance frequency was 992 kHz, which agreed well with the experimental value of 986 kHz (0.6% error). Acoustic pressure distributions were measured, and the result showed that maximum / average was 400.0~432.4%, and standard deviation / average was 46.4~47.3%. Finally, submicron particles were deposited and cleaned for the assessment of the system performance. As a result, the particle removal efficiency (PRE) was proved to be 92% with 11 W power. Reflecting these results, the developed product might be used in the semiconductor cleaning process.