A Study on Acoustic Pressure Characteristics of Spot Spray Type Megasonic for Semiconductor Cleaning |
Lee, Yanglae
(Korea Institute of Machinery & Materials)
Kim, Hyunse (Korea Institute of Machinery & Materials) Lim, Euisu (Korea Institute of Machinery & Materials) Woo, Jeong-Ju (Department of Physics, Chonnam National University) Kim, Chang-Dae (Department of Physics, Mokpo National University) |
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