Journal of the Semiconductor & Display Technology (반도체디스플레이기술학회지)

The Korean Society Of Semiconductor & Display Technology (한국반도체디스플레이기술학회)
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A Study on Acoustic Pressure Characteristics of Spot Spray Type Megasonic for Semiconductor Cleaning

반도체 세정용 Spot Spray Type 메가소닉의 음압특성에 관한 연구

  • Received : 2013.09.23
  • Accepted : 2014.02.28
  • Published : 2014.03.31
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Abstract

In this study, to analyze characteristics of acoustic pressure for spot spray type megasonic, FEM analysis was performed for variable parameters based on the structure of commercial one. and 2 models of transmitter were designed and fabricated, and then acoustic pressure distribution(APD) of the transmitter was measured and compared to the commercial. The results of this experiment show that maximum acoustic pressure of model 1 was higher to 1.6 times compared to the commercial, and model 2 was higher to 1.23 times. Through the course of this study, design technology of transmitter has been developed by means of FEM analysis and experiment for characteristics of acoustic pressure. Also, it is expected to be useful in the development of high power spray type megasonic that is necessary with advance in semiconductor technology.

Keywords

References

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