• 한국신재생에너지학회:학술대회논문집
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• 2008.05a
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• pp.378-381
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• 2008

고효율 a-Si:H/c-Si 이종접합 태양전지를 얻기 위해서는 우수한 c-Si wafer 위에 고품질의 비정질 실리콘박막을 통한 heterointerface를 형성하는 것이 매우 중요하다. 이를 달성하기 위해서는 공정중에 오염되기 쉬운 Si wafer 표면 상태를 정확히 검사하고 잘 관리하여야 한다. 본 연구에서는 세정 및 표면산화에 따른 Si wafer 상태를 Spectroscopic Ellipsometry 및 u-PCD를 이용하여 분석하였으며, <$\varepsilon$2> @4.25eV 값이 Si wafer 상태를 잘 나타내고 있음을 확인하였고 세정 최적화 할 경우 그 값이 43.02에 도달하였다. 또한 RF-PECVD로 증착된a-Si:H 박막을 EMA 모델링을 통해 분석한 결과 낮은 결정성과 높은 밀도를 가지는 a-Si:H를 얻을 수 있었으며, 이를 이종접합 태양전지에 적용한 결과 Flat wafer상에서 10.88%, textured wafer 적용하여 13.23%의 변환효율을 얻었다. 결론적으로 Spectroscopic Ellipsometry가 매우 얇고 고품질의 다층 박막이 필요한 이종접합 태양전지 분석에 있어 매우 유용한 방법임이 확인되었다.

• Journal of the Korean Society for Precision Engineering
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• v.31 no.12
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• pp.1107-1113
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• 2014

In this article, the megasonic cleaning system for cleaning micro/nano particles from flat panel display (FPD) surfaces was developed. A piezoelectric actuator and a waveguide were designed by finite element method (FEM) analysis. The calculated peak frequency value of the quartz waveguide was 1002 kHz, which agreed well with the measured value of 1003 kHz. The average acoustic pressure of the megasonic cleaning system was 43.1 kPa, which is three times greater than that of the conventional type of 13.9 kPa. Particle removal efficiency (PRE) tests were performed, and the cleaning efficiency of the developed system was proven to be 99%. The power consumption of the developed system was 64% lower than that of the commercial system. These results show that the developed megasonic cleaning system can be an effective solution in particle removing from FPD substrate with higher energy efficiency and lower chemical and ultra pure water (UPW) consumption.

• Journal of Korean Society of Water and Wastewater
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• v.25 no.6
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• pp.981-987
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• 2011

Biologically treated water contains a large quantity of organic matters and microorganisms which can cause various problems to membrane. The membrane fouling occurred by these reasons is hard to control by single physical cleaning. This study analyzes the efficiency of aeration with chemical backwashing and foulants removal during chemical backwashing. The cleaning efficiency improves when the chemical concentration is high and the contact time of chemical is long. Chemical backwashing with aeration shows exceptional cleaning efficiency which leads the physical cleaning is required during chemical backwashing since it forms flow inside the membrane submerged tank. From the foulants removal analysis, the particles such as turbidity and TOC removal rate increase when the aeration is applied. Dissolved matter of DOC and UV254 removal is dependent on higher chemical concentration. According to FTIR analysis, one of major foulants, the polysaccharide is controlled by the chemical backwashing with aeration condition.

• Journal of the Korean Society for Precision Engineering
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• v.28 no.10
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• pp.1217-1223
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• 2011

In this paper, the dielectric barrier discharge plasma generator has been studied for producing of the high concentration ozone gas. Proposed plasma generator has the structure of extremely narrow discharge air gap(0.15mm) in order to realize the high electric field discharge. We investigate the performance of the dielectric barrier discharge plasma generator experimentally and the results show that the generator has very high ozone concentration characteristics of 13.7[wt%/$O_2$] at the oxygen flow rate of 1[${\ell}$/min] of each discharge cell. So, we confirmed that the proposed plasma generator is suitable for the high concentration ozone production facility of the eco-friendly ozone functional water cleaning system in the electronic components cleaning process.

• Proceedings of the Korean Vacuum Society Conference
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• 2011.08a
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• pp.190-190
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• 2011

일반적으로 TiO2와 WO3는 광촉매 작용으로 인하여 살균력을 보이며, 친수성으로 인해 자가 세정 능력을 가져 유리 및 건축자재의 표면처리, 전자제품의 마감처리 용도로 많이 사용하고 있다. 현재 Sol-gel, CVD, Sputter, Spin-coating 방법 등으로 많은 연구가 진행되어 오고 있다. 이에 본 실험에서는 박막의 두께를 균일하게 만들 수 있는 RF-magnetron sputtering 방법을 이용하여 표면 경도와 부착력이 우수한 TiO2에 열적 특성과 화학적 특성이 안정한 WO3를 Double Layer 방식으로 증착하여 박막을 제작하였다. 광학적 특성을 알아 본 결과 가시광 영역에서 TiO2 / WO3 Double Layer 박막이 80% 이상의 높은 투과율을 나타내었으며, 박막의 표면을 확인 한 결과 TiO2 / WO3 Double Layer 박막이 더 조밀한 표면을 보였다. 또한 접촉각을 측정을 통하여 TiO2박막보다 TiO2 / WO3 double layer박막이 낮은 접촉각을 나타내었다. 이는 TiO2 표면은 소수성이나 WO3로 인해 광촉매 기능이 향상되어 공기 중의 물 분자가 해리 흡착되면서 친수성이 향상되는 것으로 사료된다. 이러한 박막은 건물의 외벽이나 자동차의 내 외장재 전자기기용 광학 필름에 자가세정, 내반사 코팅소재로 활용 가치가 높을 것으로 예상된다.

• Proceedings of the KSME Conference
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• 2008.11b
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• pp.2511-2514
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• 2008

As the minimum feature size decreases, techniques to avoid contamination and processes to maintain clean wafer surfaces have become very important. The deposition and detachment of nanoparticles from surfaces are major problem to integrated circuit fabrication. Therefore, cleaning technology which reduces nanoparticles is essential to increase yield. Previous megasonic cleaning technology has reached the limits to reduce nanoparticles. Megasonic cleaning is one of the efficiency method to reduce contamination nanoparticle. Two major mechanisms are active in a megasonic cleaning, namely, acoustic streaming and cavitation. Acoustic streaming does not lead to sufficiently strong force to cause damage to the substrates or patterns. Sonoluminescence is a phenomenon of light emission associated with the cavitation of a bubble under ultrasound. We studied a correlation between sonoluminescence and sound pressure distribution for the minimum of pattern damage in megasonic cleaning.

• Journal of Soil and Groundwater Environment
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• v.6 no.4
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• pp.51-59
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• 2001

Column and box tests were performed to investigate the removal efficiency of NAPL using the surfactant enhanced flushing In heterogeneous medium. Homogeneous Ottawa sand and heterogeneous soil were used to verify the increase of remediation efficiency for the surfactant enhanced flushing in column test. Box tests with two different heterogeneous sub-structure were performed to quantify the capability of the surfactant enhanced flushing as a remediation method to remove NAPL from the heterogeneous medium. Two different grain size sand layers were repeated in the box to simulate the heterogeneous layer formation and the modified fault structure was built to simulate the fault system in the box. O-xylene as a LNAPL and PCE as a DNAPL were used and oleamide as a non-ionic surfactant. The maximum NAPL effluent concentration with 1% oleamide flushing in the homogeneous column test increased about 460 times compared to that with only water flushing and about 250 times increased in the real soil column test. In heterogeneous medium, the maximum effluent concentration increased about 150 times in 1% oleamide flushing and most of NAPL were removed from the box within 8 pore volume flushing, suggesting that the removal efficiency increased very much compared to in only water flushing. Results investigated the capability of the surfactant enhanced remediation method to remove NAPL even in heterogeneous medium.

• Applied Chemistry for Engineering
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• v.16 no.5
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• pp.677-683
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• 2005

In this work, the effect of additives such as solvent, sodium dodecyl sulfate and NaCl on microemulsion phase behavior and flux removal efficiency in systems containing commercial alkyl ethoxylates nonionic surfactant was investigated. The addition of a n-hydrocarbon as a solvent produced on O/W (Oil/Water) microemulsion phase over a wider range of temperature and cosurfactant to surfactant ratios. Especially, the addition of n-hexadecane to the surfactant system, which was the most hydrophobic solvent among the solvents used in this study, produced a microemulsion phase over a wide range of temperatures and promoted formation of a microemulsion phase at lower temperatures. The candidate for cleaner samples, prepared from phase behavior experiments, showed excellent removal efficiency for abietic acid at $40^{\circ}C$. These data suggested the potential applicability of hydrocarbons to actual cleaner formulations.

• Environmental Analysis Health and Toxicology
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• v.15 no.4
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• pp.123-130
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• 2000

2-Bromopropane, important industrial chemical, specially in electronic industry at Yangsan in Korea has been reported to cause amenorrhea for female and azoospermia, oligozoospermia or reduced sperm motility for male. 2-BP was investigated through 21 days of repeated dose in male Sprague-Dawley rats. The dose levels per body weight were 0 (control), 250,500 and 1,000 mg/kg. 2-BP dissolved in vehicle olive oil was injected into the intraperitoneum 6 times per week for 3 weeks, but 1,000 mg/kg dose group was 2 weeks because of serious illness. Male rats showed significant decreases in body weight and right and left testis showed typical weight losses depending on the 2-BP. The number of white blood cell and red blood cell , percentage of monocytes, and hemoglobin decreased significantly in high dose (P< 0.05). Red cell volume distribution width increased significantly in the high dose (P< 0.05). Histopathological findings of testes showed a decrease of spermatogenic cells, exfoliation of spermatid and spermatocyte, vacuolization of Sertoli cells and hyperplasia of Leydig cells. Protein band density between 113,000 dalton ($\beta$-galactosidase) and 53,900 dalton (ovalbumin) has decreased in 250 mg/kg dose group, but it has gradually increased to the higher density in 1,000 mg/kg dose group than in control group.

• Journal of the Korean Applied Science and Technology
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• v.31 no.4
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• pp.584-594
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• 2014

To increase of surface hydrophilicity of polymeric thin films is an important approaching technique for introduction of self-cleaning and/or antifogging properties on the surfaces of those films. In general, hydrophilic surface can be produced by coating non ionic surfactants or by increasing surface energy. Various non-ionic surfactants, such as Tween, Span, and PEG-PPG block copolymers were selected for our experiments, because they are cheap and well soluble in toluene system as well as they contain several reactive hydroxy fuctional groups with coupling agents. Blending conditions influence the PET film surface hydrophilicities. However, the introduction of only these surfactants on the surface of PET films did not show the high durability of hydrophilic properties after washing with water. To improve the durability two types of coupling agents such as epoxide and diisocyanate were adopted. Contact angle of water on hydrophilically coated PET film surface with 6 wt% of isophrone diisocyanate(IPDI) containing coating solution was reached to $8.7^{\circ}$, which was an indirect evidence for very high surface hydrophilicity. A light(500 nm of wavelength) transmittance value of coated PET film was changed only from 87% to 85% with keeping a good transparent property. This film can be usable for self-cleaning film industries.